Claims
- 1. A method of measuring changes in thickness of a dielectric film comprising:a) sensing the thickness of a dielectric film by contacting the film with a film contact sensor, b) providing reference film thickness information relating to the thickness of the dielectic film sensed by contacting the film with the film contact sensor, c) sensing the changes in the thickness of the dielectic film without contacting the film with a non-contact film sensor after the sensing of the thickness of the dielectric film with the film contact sensor, d) providing dielectric film thickness data as to the sensed changes in the thickness of the dielectric film by the non-contact film sensor relative to the reference film thickness information as sensed by the film contact sensor.
- 2. The method of claim 1 wherein: the method is embodied in a film contact sensor and a film non-contact sensor comprising: moving the film from the film contact sensor after sensing the thickness of the film by contacting the film with the film contact sensor to the non-contact sensor, said non-contact sensor sensing changes in thickness of the film relative to the reference film thickness information.
- 3. The method of claim 2 wherein: the film is continuously moved relative to the film contact sensor and the film non-contact sensor.
- 4. The method of claim 2 wherein: the film is sequentially moved relative to the film contact sensor and the film non-contact sensor.
- 5. A method of measuring changes in thickness of a dielectric film comprising:a) sensing the thickness of a dielectric film by contacting the film with a film contact sensor, b) providing continuous reference film thickness information relating to the thickness of the dielectric film sensed by contacting the film with the film contact sensor, c) continuously sensing the changes in the thickness of the dielectric film without contacting the film with non-contact film sensor, d) continuously providing dielectric film thickness data as to the sensed changes in the thickness of the dielectric film by the non-contact film sensor relative to the reference film thickness information as sensed by the film contact sensor.
- 6. The method of claim 5 wherein: the method is embodied in a film contact sensor and a film non-contact sensor comprising: moving the film from the film contact sensor after sensing the thickness of the film by contacting the film with the film contact sensor to the non-contact sensor, said non-contact sensor sensing changes in thickness of the film relative to the reference film thickness information.
- 7. The method of claim 6 wherein: the film is continuously moved relative to the film contact sensor and the film non-contact sensor.
- 8. A method of measuring changes in thickness of a dielectric film comprising:a) sensing the thickness of a dielectric film with a first film thickness sensor, b) providing reference film thickness information relating to the thickness of the dielectric film sensed by the first film thickness sensor, c) sensing the changes in the thickness of the dielectric film with a second film thickness sensor, d) providing dielectric film thickness data as to the sensed changes in the thickness of the dielectric film relative to the reference film thickness information.
- 9. The method of claim 8 wherein: the method includes moving the film from the first film thickness sensor after sensing the thickness of the film by the first film sensor to the second film thickness sensor, said second sensor sensing changes in thickness of the film relative to the reference film thickness information.
- 10. The method of claim 9 wherein: the film is continuously moved relative to the first and second film thickness sensors.
- 11. The method of claim 9 wherein: the film is sequentially moved relative to the first and second film thickness sensors.
CROSS REFERENCE TO RELATED APPLICATIONS
This application is a continuation of U.S. patent application Ser. No. 09/203,238 now U.S. Pat. No. 6,201,339 filed Dec. 1, 1998. application Ser. No. 09/203,238 now U.S. Pat. No. 6,201,339 claims the benefit of U.S. Provisional Application Ser. No. 60/067,171 Provisional application expired filed Dec. 1, 1997.
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Provisional Applications (1)
|
Number |
Date |
Country |
|
60/067171 |
Dec 1997 |
US |
Continuations (1)
|
Number |
Date |
Country |
Parent |
09/203238 |
Dec 1998 |
US |
Child |
09/804416 |
|
US |