Claims
- 1. A capacitive structure on a microelectronic device, said capacitive structure comprising:
- (a) first and second conductive electrodes;
- (b) a dielectric laminate dispersed between said first and second electrodes, said dielectric laminate comprising two or mote grains having a perovskite crystal structure, each grain comprising titanium, oxygen, and at least one of barium and strontium, said grains having a median size of between 10 nm and 50 nm; and
- (c) said dielectric laminate further comprising B.sub.2 O.sub.3 in boundary regions between said grains in at least a sublayer of said dielectric laminate, said sublayer having a ratio of boron to titanium of between 0.001 and 0.1, whereby said B.sub.2 O.sub.3 reduces leakage current through said dielectric laminate.
- 2. The structure of claim 1, wherein said grains further comprise dopant material replacing at least 200 ppm of at least one of said barium, said strontium, and said titanium in said perovskite crystal structure.
- 3. The structure of claim 1, further comprising oxidized titanium in said boundary regions between said grains in at least a portion of said dielectric laminate, said titanium in said oxidized titanium comprising between 0.1% and 7% of the total amount of titanium contained in said dielectric laminate.
- 4. The structure of claim 1, wherein said grains are arranged roughly in two or more sublayers between said first and second electrodes, said sublayers which are adjacent having different relative concentrations of barium to strontium.
- 5. The structure of claim 1, wherein said grains are arranged roughly in at least two sublayers between said first and second electrodes, and wherein at least two of said sublayers which are adjacent have different relative concentrations of boron to titanium.
- 6. The structure of claim 5, wherein at least one of said sublayers comprises essentially no boron oxide.
Parent Case Info
This is a division of application Ser. No. 08/315,454, filed Sep. 30, 1994.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
4988650 |
Takagi et al. |
Jan 1991 |
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Divisions (1)
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Number |
Date |
Country |
Parent |
315454 |
Sep 1994 |
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