Claims
- 1. A compact integrated circuit transient voltage multiplier for increasing the voltage of input pulses, comprising:a plurality of switching transistors; at least one capacitor comprising a silicon dioxide dielectric layer less than about 200 Angstroms in thickness sandwiched between a conductive polysilicon layer and an n-type doped surface region disposed in a conductive p-substrate region; and electrical connections between said transistors and said capacitors; wherein said switching transistors charge said capacitors to a voltage value substantially below the tunneling voltage of said dielectric layer and said capacitors are biased so that said n-type doped surface region forms a reverse-biased varactor diode with the p-substrate, said switching transistors acting so that the voltage of the input pulses is increased by a voltage contribution from each said capacitor.
- 2. The voltage multiplier of claim 1, wherein the dielectric region of said capacitor is less than about one-hundred Angstroms in thickness.
- 3. The voltage multiplier of claim 1, wherein said capacitor further comprises alternating layers of silicon dioxide and conductive polysilicon layers disposed on said polysilicon layer, said conductive layers interconnected with said n-type doped region and said polysilicon layer so that a single capacitor is formed.
- 4. The voltage multiplier of claim 1, wherein the doping profile of said n-type surface region varies with distance from the surface of the substrate so that a n+/n−/p− varactor diode is formed with said substrate.
Parent Case Info
This application is a divisional of Application No. 09/149,927, filed Sep. 9, 1998.
US Referenced Citations (3)