Boat for substrate processing apparatus

Abstract

Description

FIG. 1 is a perspective view of a boat for substrate processing apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged rear view thereof taken along line 8-8 in FIG. 3;

FIG. 9 is a cross-sectional view thereof taken along line 9-9 in FIG. 8; and,

FIG. 10 is a cross-sectional view thereof taken along line 10-10 in FIG. 8.

Claims

The ornamental design for a boat for substrate processing apparatus, as shown and described.