Boat for wafer processing apparatus

Information

  • Patent Grant
  • D939459
  • Patent Number
    D939,459
  • Date Filed
    Tuesday, December 10, 2019
    5 years ago
  • Date Issued
    Tuesday, December 28, 2021
    3 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D15 144
    • D15 1441
    • D15 199
    • 118 715000
    • 118 500000
    • 118 728000
    • 118 729000
    • 211 041180
    • 432 253000
    • 432 258000
    • 156 345510
    • 156 345520
    • 156 345530
    • 156 345550
    • 414 217000
    • 414 220010
    • 414 935-941
    • CPC
    • C23C16/458
    • C23C16/4581
    • C23C16/4582
    • C23C16/4583
    • C23C16/4584
    • C23C16/4587
    • C23C16/4588
    • H01L21/673
    • H01L21/67303
    • H01L21/67306
    • H01L21/67309
    • H01L21/67313
    • H01L21/67316
    • H01L21/67323
    • H01L21/67326
    • H01L21/6733
    • C30B3/14
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top and right side perspective view of a boat for wafer processing apparatus showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a right side elevational view thereof;



FIG. 4 is a left side elevational view thereof;



FIG. 5 is a rear elevational view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof;



FIG. 8 is an enlarged portion view taken from the portion labeled FIG. 8 in FIG. 2;



FIG. 9 is a cross-sectional view in the direction of the arrows along line 9-9 in FIG. 2;



FIG. 10 is a cross-sectional view in the direction of the arrows along line 10-10 in FIG. 2;



FIG. 11 is a perspective view of FIG. 8 with the cylindrical device shown in broken lines removed for ease of illustration;



FIG. 12 is a front elevational view of FIG. 11;



FIG. 13 is a right side elevational view of FIG. 11;



FIG. 14 is a left side elevational view of FIG. 11;



FIG. 15 is a rear elevational view of FIG. 11;



FIG. 16 is a top plan view of FIG. 11; and,



FIG. 17 is a bottom plan view of FIG. 11.


For clarity, due to the nature and size of the portions of the article that form no part of the claimed design in FIGS. 9 and 10, hatching to indicate the cut sections is not shown in FIGS. 9 and 10.


The dashed-dot-dashed lines represent the boundary lines of the claimed design in FIGS. 1-5 and 8. The even dashed broken lines showing a full or portions of a cylindrical device in FIGS. 1-10 are included for the purpose of illustrating environment and form no part of the claimed design. The dot-dash broken line of the box showing the enlarged portion view of FIG. 8 in FIG.2 shows the bounds of the enlarged portion view and forms no part of the claimed design.


Claims
  • The ornamental design for a boat for wafer processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2019-017637 Aug 2019 JP national
US Referenced Citations (37)
Number Name Date Kind
D366868 Ohsawa Feb 1996 S
D378675 Iwai Apr 1997 S
D378823 Watanabe Apr 1997 S
D380454 Iwai Jul 1997 S
5752609 Kato May 1998 A
D404015 Honma Jan 1999 S
D404371 Shimazu Jan 1999 S
D409158 Shimazu May 1999 S
D411176 Shimazu Jun 1999 S
6062853 Shimazu May 2000 A
6065615 Uchiyama May 2000 A
6099302 Hong Aug 2000 A
6287112 Van Voorst Vader Sep 2001 B1
6341935 Tseng Jan 2002 B1
6966771 Irie Nov 2005 B2
7033168 Gupta Apr 2006 B1
D570308 Sato Jun 2008 S
D570309 Sato Jun 2008 S
D580894 Sato Nov 2008 S
7484958 Kobayashi Feb 2009 B2
D600221 Sato Sep 2009 S
D600222 Sato Sep 2009 S
D616396 Sato May 2010 S
7857140 Shinjo Dec 2010 B2
D655255 Takebayashi Mar 2012 S
D655682 Takebayashi Mar 2012 S
D734730 Yoshida Jul 2015 S
D737785 Yoshida Sep 2015 S
D738329 Yoshida Sep 2015 S
D739831 Takagi Sep 2015 S
D740769 Takagi Oct 2015 S
D747279 Yoshida Jan 2016 S
D839219 Yoshida Jan 2019 S
D846514 Yoshida Apr 2019 S
D847105 Okajima Apr 2019 S
20020092815 Kim Jul 2002 A1
20020113027 Minami Aug 2002 A1