Claims
- 1. A method for bonding an oxide component to an area on a silicon substrate including a cavity formed in a major surface comprising the steps of:
- depositing a first layer comprising a material selected from the group consisting of Titanium, Zirconium, Hafnium, Vanadium, Niobium, Tantalum, Chromium, Molybdenum and Tungsten over a portion of the silicon substrate including the cavity;
- depositing a second layer comprising aluminum over the first layer; and
- bonding an oxide component to the aluminum layer.
- 2. The method according to claim 1 wherein the first and second layers are formed by electron beam evaporation.
- 3. The method according to claim 1 wherein the first and second layers are deposited through an opening in a photoresist mask.
- 4. The method according to claim 1 wherein the first and second layers are deposited through an opening in a shadow mask.
- 5. The method according to claim 1 wherein the first layer consists essentially of titanium and the second layer consists essentially of aluminum.
- 6. The method according to claim 1 further comprising annealing of the structure after deposition of the first and second layers.
- 7. The method according to claim 6 wherein annealing is done at a peak temperature within the range 200-400 degrees C. for a period in the range 15 min -4 hours.
- 8. The method according to claim 1 wherein the component is bonded to the aluminum layer by heating within the range 250 to 450 degrees C. while applying a force within the range 200 to 4000 grams.
- 9. The method according to claim 1 wherein the first layer is formed to a thickness within the range 100 to 2000 angstroms and the second layer is formed to a thickness within the range 2 to 10 microns.
- 10. The method according to claim 7 wherein the first layer forms a silicide with the substrate during the annealing.
- 11. The method according to claim 5 wherein the structure is annealed after deposition of the titanium and aluminum layers, and these layers form an interface layer comprising titanium and aluminum.
Parent Case Info
This is a divisional of Application Ser. No. 08/899,291 filed on Jul. 22, 1997, now U.S. Pat. No. 6,034,405.
US Referenced Citations (12)
Divisions (1)
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Number |
Date |
Country |
Parent |
899291 |
Jul 1997 |
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