BRIDGE CIRCUITED MAGNETIC SENSOR HAVING MAGNETO-RESISTIVE ELEMENT AND FIXED RESISTOR WITH THE SAME LAYER CONFIGURATION

Abstract

The application provides a magnetic sensor which can suppress an irregularity of a central potential due to a change in a temperature, decrease size of the sensor, and lower the manufacturing cost of the sensor. A magneto-resistive element and fixed resister are provided on an element base and have the same configuration elements. A second magnetic layer and non-magnetic layer in the fixed resistor are reversely laminated on each other in a manner different from the magneto-resistive element, and the second magnetic layer is formed in contact with the first magnetic layer, thereby fixing the magnetization directions of the first magnetic layer and the second magnetic layer in the same direction. In this manner, the irregularity of the temperature coefficient between the magneto-resistive element and the fixed resistor is suppressed, and the irregularity of the central potential due to the change in the temperature is suppressed.

Description

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 is a partially schematic diagram showing a foldable cellular phone with a built-in magnetic sensor according to an embodiment of the application (closed state).

FIG. 2 is a partially schematic diagram showing a foldable cellular phone with a built-in magnetic sensor according to the embodiment of the application (open state).

FIG. 3 is a partial top plan view of the magnetic sensor according to an embodiment of the application.

FIG. 4 is a partial top plan view of the magnetic sensor taken along a line A-A of FIG. 3.

FIG. 5 is a partial top plan view of the magnetic sensor with a structure different from that shown in FIG. 3 according to an embodiment of the application.

FIG. 6 is a diagram illustrating a circuit configuration of the magnetic sensor shown in FIG. 3.

FIG. 7 is a diagram illustrating a circuit configuration of the magnetic sensor shown in FIG. 5.

FIG. 8 is a process diagram illustrating a method of manufacturing the magnetic sensor according to an embodiment of the application.

FIG. 9 is a process diagram illustrating processes performed after the processes illustrated in FIG. 5.

FIG. 10 is a process diagram illustrating processes performed after the processes illustrated in FIG. 9.

FIG. 11 is a process diagram illustrating processes performed after the processes illustrated in FIG. 10.

FIG. 12 is a process diagram illustrating processes performed after the processes illustrated in FIG. 11.

FIG. 13 is a process diagram illustrating processes performed after the processes illustrated in FIG. 12.

FIG. 14 is a partially top plan view of a magnetic sensor known in the art.

Claims

1. A magnetic sensor comprising; at least one magneto-resistive element; andat least one fixed resistor,wherein the magneto-resistive element and the fixed resistor all have an antiferromagnetic layer, a plurality of magnetic layers, a non-magnetic layer, and a protection layer serving as the uppermost layer;wherein the magneto-resistive element is provided with a fixed layer that has at least one magnetic layer and a magnetization direction thereof is fixed in one direction, and a magneto-sensitive layer which has the remaining magnetic layers and the magnetization direction thereof varies in accordance with an exterior magnetic field, the non-magnetic layer being interposed between the fixed layer and the magneto-sensitive layer, and the antiferromagnetic layer being formed in contact with a surface opposite to the surface where the non-magnetic of the fixed layer is formed; andwherein in the fixed resistor, at least one magnetic layer is formed in contact with the antiferromagnetic layer, and the magnetization directions of all the magnetic layers are fixed in one direction.

2. The magnetic sensor according to claim 1, wherein a first magnetic layer corresponding to the fixed layer and a second magnetic layer corresponding to a free layer are laminated on the fixed resistor, and the antiferromagnetic layer is formed in contact with the laminated magnetic layers to fix the magnetization directions of the laminated magnetic layers in one direction.

3. The magnetic sensor according to claim 2, wherein the first magnetic layer is formed in contact with the antiferromagnetic layer, and the second magnetic layer and the non-magnetic layer are reversely laminated on each other in a manner different from the magneto-resistive element, and the second magnetic layer is formed in contact with a surface opposite to the surface where the antiferromagnetic layer of the first magnetic layer is formed, thereby fixing the magnetization direction of the second magnetic layer to the same direction as the first magnetic layer.

4. The magnetic sensor according to claim 1, wherein the magneto-resistive element and the fixed resistor are formed on the same element base.

5. The magnetic sensor according to claim 1, wherein the magneto-resistive element and the fixed resistor have the same layer configuration.