The present invention relates to methods for fabricating thin film IIB-VIA compound solar cells, more specifically CdTe solar cells.
Solar cells and modules are photovoltaic (PV) devices that convert sunlight energy into electrical energy. The most common solar cell material is silicon (Si). However, lower cost PV cells may be fabricated using thin film growth techniques that can deposit solar-cell-quality polycrystalline compound absorber materials on large area substrates using low-cost methods.
Group IIB-VIA compound semiconductors comprising some of the Group IIB (Zn, Cd, Hg) and Group VIA (O, S, Se, Te, Po) materials of the periodic table are excellent absorber materials for thin film solar cell structures. Especially CdTe has proved to be a material that can be used in manufacturing high efficiency solar panels at a manufacturing cost of below $1/W.
In high efficiency CdTe solar cells it is common to also employ a buffer layer (not shown in
Referring back to
The junction partner film 21 is typically a CdS layer, but may alternately be a compound layer such as a layer of CdZnS, ZnS, ZnSe, ZnSSe, CdZnSe, etc. The transparent conductive film 23 is usually a transparent conductive oxide (TCO) layer comprising any one of; tin-oxide, cadmium-tin-oxide, indium-tin-oxide, and zinc-oxide which are doped to increase their conductivity. It should be noted that the cadmium-tin-oxide material used as a TCO layer has the chemical formula of Cd2SnO4 and the indium-tin-oxide typically consists of 90% indium oxide and about 10% tin oxide. The resistivity of these transparent conductive oxides with the above given compositions are much lower than 0.001 ohm-cm, preferably lower than 0.0005 ohm-cm. Multi layers of these TCO materials as well as their alloys or mixtures may also be utilized in the transparent conductive film 23.
The buffer film 22 comprises at least one of cadmium doped tin oxide, indium sulfide, gallium sulfide, indium tin sulfide (or tin doped indium sulfide) and gallium tin sulfide (or tin doped gallium sulfide). The amount of cadmium doping in tin oxide may be less than about 10 mole-percent, preferably less than about 5 mole-percent. In other words, the cadmium doped tin oxide comprises at most 10 moles of CdO and at least 90 moles of SnO2. For indium tin sulfide and gallium tin sulfide, the tin to indium (Sn/In) and tin to gallium (Sn/Ga) molar ratios may be 0.2 or less. The doping of the indium sulfide (In2S3) and gallium sulfide (Ga2S3) materials with tin (Sn) opens up the optical bandgap of these materials to above 2.5 eV, which is wider than the bandgap of the junction partner layer (CdS) and also keeps the resistivity values in the desired range of 0.1-100 ohm-cm, which is especially preferred for the fabrication of solar cells by electrodepositing the CdTe layer.
The thickness of the buffer film 22 is in the range of 0.01-0.15 um (10-150 nm). Its resistivity is in the range of 0.1-100 ohm-cm, preferably in the range of 0.5-50 ohm-cm, most preferably in the range of 1-20 ohm-cm. The buffer film 22 may be deposited by various techniques such as physical vapor deposition, chemical vapor deposition, liquid spraying, etc. One preferred method is sputtering. The sputtering process may be carried out using compound targets; i.e. for cadmium doped tin oxide targets comprising (CdO+SnO2) with relative amounts of oxides cited above may be used, for sulfides targets comprising gallium sulfide, indium sulfide and tin sulfide with the above cited amounts may be utilized. Alternately metallic targets comprising Cd and Sn, i.e. cadmium-tin alloy, may be used and the sputtering process may be performed in oxygen containing chambers in a reactive sputtering mode for the cadmium doped tin oxide deposition. For the deposition of sulfides in a reactive mode, a reactive gas comprising sulfur, such as H2S, may be utilized.
Although the present invention is described with respect to certain preferred embodiments, modifications thereto will be apparent to those skilled in the art.
Number | Date | Country | |
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61458594 | Nov 2010 | US |