Claims
- 1. A method of producing an improved cathode substrate for a field emission display comprising the steps of:
providing a substrate; depositing a cap layer on said substrate; and forming an array of emitter tips on said substrate.
- 2. The method according to claim 1 wherein said substrate comprises soda-lime glass.
- 3. The method according to claim 1 wherein said cap layer is deposited on said substrate by plasma enhanced, chemical vapor deposition.
- 4. The method according to claim 1 wherein said cap layer has a thickness in the range of 0.1 to 0.5 microns.
- 5. The method according to claim 1 wherein said cap layer is selected from the group consisting of silicon dioxides silicon nitride, silicon carbide, and diamond-like carbon.
- 6. The method according to claim 1 wherein said substrate is a plastics material.
- 7. The method according to claim 1 wherein said substrate is a non-conductive material.
- 8. The method according to claim 1 further comprising the step of leaching the substrate prior to deposition of said cap layer.
- 9. The method according to claim 1 further comprising to step of including a light blocking layer within said cap layer.
- 10. The method according to claim 1 further comprising to step of including an anti-reflective coating within said cap layer.
- 11. An improved cathode substrate for a field emission display comprising:
a substrate; a cap layer deposited on said substrate; and an array of emitter tips formed on said substrate.
- 12. An improved cathode substrate according to claim 11 wherein said substrate is a soda-lime glass.
- 13. An improved cathode substrate according to claim 11 wherein said cap layer is deposited on said substrate by plasma enhanced, chemical vapor deposition.
- 14. An improved cathode substrate according to claim 11 wherein said cap layer has a thickness in the range of 0.1 to 0.5 microns.
- 15. An improved cathode substrate according to claim 11 wherein said cap layer is selected from the group consisting of silicon dioxide, silicon nitride, silicon carbide, and diamond-like carbon.
- 16. An improved cathode substrate according to claim 11 wherein said substrate is plastics material.
- 17. An improved cathode substrate according to claim 11 wherein said substrate is a non-conductive material.
- 18. An improved cathode substrate according to claim 11 wherein said substrate is leached prior to deposition of said cap layer.
- 19. An improved cathode substrate according to claim 11 wherein said cap layer includes a light blocking layer.
- 20. An improved cathode substrate according to claim 11 wherein said cap layer includes an anti-reflective coating.
- 21. An improved cathode substrate for a field emission display formed by the steps of:
providing a substrate; depositing a cap layer on said substrate; and forming an array of emitter tips on said substrate.
- 22. An improved cathode substrate according to claim 21 wherein said substrate is a soda-lime glass.
- 23. An improved cathode substrate according to claim 21 wherein said cap layer is deposited on said substrate by plasma enhanced, chemical vapor deposition.
- 24. An improved cathode substrate according to claim 21 wherein said cap layer has a thickness in the range of 0.1 to 0.5 microns.
- 25. An improved cathode substrate according to claim 21 wherein said cap layer is selected from the group consisting of silicon dioxide, silicon nitride, silicon carbide, and diamond-like carbon.
- 26. An improved cathode substrate according to claim 21 wherein said substrate is formed of a plastics material.
- 27. An improved cathode substrate according to claim 21 wherein said substrate is formed of a non-conductive material.
- 28. An improved cathode substrate according to claim 21 wherein said substrate is leached prior to deposition of said cap layer.
- 29. An improved cathode substrate according to claim 21 wherein said cap layer includes a light blocking layer.
- 30. An improved cathode substrate according to claim 21 wherein said cap layer includes an anti-reflective coating.
GOVERNMENT RIGHTS
[0001] This invention was made with Government support under Contract No. DABT63-93-C-0025 awarded by the Advanced Research Projects Agency (ARPA). The Government has certain rights in this invention.
Continuations (1)
|
Number |
Date |
Country |
Parent |
08589040 |
Jan 1996 |
US |
Child |
09910542 |
Jul 2001 |
US |