Claims
- 1. A droplet ejector comprising:
- a body having a top surface and a bottom surface;
- a transducer for emitting acoustic energy to pass through said body from said bottom surface to said top surface;
- means for focusing said acoustic energy into a focal area at a predetermined position above said body;
- an upper substrate having an aperture, said upper substrate joined to said body such that said aperture forms a cavity and such that said acoustic energy focused by said focusing means passes through said aperture;
- a volume of material filling said cavity;
- a capping structure contacting said volume of material, the capping structure comprising a wafer that transmits at least 50% of incident acoustic energy, said wafer having an inner surface and an outer surface, said inner surface joined to said upper substrate such that said capping structure seals said cavity; and
- a fluid container comprised of a top wall, a bottom wall, an interior wall that defines an opening, and an interior chamber for holding fluid, said bottom wall joined to said outer surface of said wafer so the said opening axially aligns with said cavity, said interior wall containing a plurality of pores for enabling fluid in said chamber to pass into said opening to form a pool of fluid having a free surface on said outer surface of the wafer.
- 2. The apparatus according to claim 1 wherein said capping structure is silicon.
- 3. The apparatus according to claim 2 wherein said pores are formed by etching.
- 4. A capping structure for an acoustic droplet ejector having a fluid well and an acoustic transducer for generating acoustic energy having a wavelength through said fluid well, said capping structure comprised of a wafer having a thickness which is less than 10% of said wavelength and which is dimensioned to cover the fluid well so as to retard fluid from spilling from said fluid well.
- 5. The capping structure according to claim 4 wherein said wafer is silicon.
- 6. The capping structure according to claim 5 wherein said wafer includes a plurality of pores through a thickness of said wafer so as to enable fluid to pass though said wafer.
- 7. A droplet ejector for ejecting a fluid, comprising:
- a transducer for emitting acoustic energy having a wavelength in the fluid;
- means for focusing said acoustic energy acoustically coupled to the transducer, with said acoustic energy being focused into a focal area;
- a fluid well acoustically coupled to the focusing means, the fluid well having an opening, with said fluid well holding fluid so that said acoustic energy passes through said fluid and out of said opening; and
- a capping structure comprised of a wafer which has a thickness which is less than 10% of said wavelength and which has a plurality of pores that enable fluid in said fluid well to pass through said capping structure, said capping structure attached to the fluid well to cover said opening so that fluid that passes through said pores forms a pool having a free surface over said opening.
- 8. A droplet ejector for ejecting a fluid, comprising:
- a body having a top surface and a bottom surface;
- a transducer for emitting acoustic energy to pass through said body from said bottom surface of the body to said top surface of the body;
- means for focusing said acoustic energy into a focal area at a predetermined position above said body;
- a fluid container comprised of a top wall, a bottom wall, an interior wall that defines an aperture through said fluid container, and an interior chamber for holding fluid, said top wall containing a plurality of pores adjacent to said aperture, said pores for enabling fluid in said chamber to pass through said top wall, said bottom wall of said fluid container joined to said top surface of said body such that said acoustic energy having a wavelength in said fluid is focused by said focusing means to pass through said aperture; and
- a capping structure joined to said top wall of said fluid container and overlaying said aperture, said capping structure comprised of a wafer which has a thickness which is less than 10% of said wavelength and which has a plurality of pores adjacent said aperture for enabling fluid to pass from said pores of said fluid container through said capping structure to form a pool of fluid having a free surface over said capping structure so that said free surface is over said aperture.
- 9. The droplet ejector according to claim 8 wherein said wafer is silicon.
- 10. A droplet ejector for ejecting a fluid, comprising:
- a body having a top surface and a bottom surface;
- a transducer for emitting acoustic energy having a wavelength in said fluid to pass through said body from said bottom surface of the body to said top surface of the body;
- means for focusing said acoustic energy into a focal area at a predetermined position above said body;
- an upper substrate having an aperture, said upper substrate joined to said body such that said aperture forms a cavity and such that said acoustic energy having a wavelength in a volume of material filling said cavity is focused by said focusing means to pass through said aperture;
- a capping structure comprised of a wafer which has a thickness which is less than 10% of said wavelength and which has an inner surface and an outer surface, said inner surface joined to said upper substrate such that said capping structure seals said cavity; and
- a fluid container comprised of a top wall, a bottom wall, an interior wall that defines an opening, and an interior chamber for holding fluid, said bottom wall joined to said outer surface of said wafer so the said opening axially aligns with said cavity, said interior wall containing a plurality of pores for enabling fluid in said chamber to pass into said opening to form a pool of fluid having a free surface on said outer surface of the wafer.
- 11. The droplet ejector according to claim 9 wherein said wafer is silicon.
Parent Case Info
This is a continuation-in-part of application Ser. No. 07/890,211 which was filed on 29 May 1992, abandoned.
US Referenced Citations (6)
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
890211 |
May 1992 |
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