Carbon friction materials

Abstract
Sintered, carbon friction materials are made from fibrous materials that are impregnated with resins prior to sintering. Preferably, non-woven fibrous materials are impregnated with phenolic resin and sintered at 400 to 8000 C. The resulting material has an open porosity above 50 percent by volume.
Description
TECHNICAL FIELD

The present invention relates to carbon friction material made by sintering. More specifically, the sintered, carbon friction material are made by sintering resin impregnated fibrous materials.


BACKGROUND OF THE INVENTION

New and advanced continuous torque transmission systems, having continuous slip torque converters and shifting clutch systems are being developed by the automotive industry. These new systems often involve high energy requirements. Therefore, the friction materials technology must be also developed to meet the increasing energy requirements of these advanced systems.


In particular, a new high performance, durable friction material is needed. The new friction material must be able to withstand high speeds wherein surface speeds are up to about 65 m/seconds. Also the friction material must be able to withstand high facing lining pressures up to about 1500 psi. it is also important that the friction material be useful under limited lubrication conditions.


The friction material must be durable and have high heat resistance in order to be useful in the advanced systems. Not only must the friction material remain stable at high temperatures, it must also be able to rapidly dissipate the high heat that is being generated during operating conditions.


The high speeds generated during engagement and disengagement of the new systems mean that a friction material must be able to maintain a relatively constant friction throughout the engagement. It is important that the frictional engagement be relatively constant over a wide range of speeds and temperatures in order to minimize “shuddering” of materials during braking or the transmission system during power shift from one gear to another. It is also important that the friction material have a desired toque curve shape so that during frictional engagement the friction materials is noise or “squawk” free.


While phenolic resins are conventionally used as an impregnant in wet friction materials for wet clutch applications, the phenolic resins have various limitations. The phenolic resin friction materials do not have the high heat resistance necessary for use with the new high energy transmission systems. In particular, the phenolic resins decompose at a temperature of about 300° C. which is too low to be useful in high energy applications. In addition, phenolic resins are rigid materials and when the phenolic resins are used in a friction material, uneven lining wear, and separator plate “hot spots” are more likely result if uniform contact is not obtained.


As a result of extensive research in view of the need for a better friction material, a friction material with improved characteristics has been developed by the invention. The present wet friction material is useful in “wet” applications where the friction material is “wetted” or impregnated with a liquid such as brake fluid or automatic transmission fluid during use. During use of the “wet” friction material, the fluid is ultimately squeezed from or is impregnating the friction material. Wet friction materials differ greatly, both in their compositions and physical characteristics from “dry” friction materials.


A need exists to continue the search for increased porosity of “wet” friction material. The open pores of existing “wet” friction material made by the paper making process is about 50 percent by volume. The porosity of other “wet” friction materials such as those made with compression molding is below 50 percent by volume.


SUMMARY OF THE INVENTION

Unique carbon friction materials are made from sintering of fibrous materials at a temperature range of 400 C to 800 C. These fibrous materials can comprise of various fibers with or without fillers and particles. The materials are impregnated with resins first before sintering. The resulting material is a sintered, porous carbon body. Preferably the fibrous materials are paper and non-woven fibrous materials and preferably the resin is a phenolic resin.


The sintered, carbon friction materials of this invention have an open porosity substantially above 50 percent by volume. When fiber/filler type friction materials were treated below 550 C, the material retain enough flexibility and strength. The pore size increases as the treatment temperature increases; surfaces also becomes more open. Friction coefficient increases as the treatment temperature increases; friction-speed curves becomes more positive/desirable.


Other objects and advantages of the present invention will become apparent to those skilled in the art upon a review of the following detailed description of the preferred embodiments and the accompanying drawings.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a side view of carbonized samples according to this invention.



FIG. 2 is a is a graph showing that the carbonization of this invention enhanced compressibility.



FIG. 3 is a graph showing the enhanced carbonization effect on pore size.



FIG. 4 is a graph showing the improved carbonization effect on thermal resistance.





DETAILED DESCRIPTION OF THE INVENTION

Various resins useful with the present invention include phenolic resins and phenolic-based resins. It is to be understood that various phenolic-based resins which include in the resin blend other modifying ingredients, such as epoxy, butadiene, silicone, tung oil, benzene, cashew nut oil and the like, are contemplated as being useful with the present invention. In the phenolic-modified resins, the phenolic resin is generally present at about 50% or greater by weight (excluding any solvents present) of the resin blend. However, it has been found that friction materials, in certain embodiments, can be improved when the impregnant resin blend contains about 5 to about 80%, by weight, and for certain purposes, about 15 to about 55%, and in certain embodiments about 15 to about 25%, by weight, of silicone resin based on the weight of the silicone-phenolic mixture (excluding solvents and other processing acids).


Generally, the sintered, porous body has a substantial specific surface area. Further, the sintered, porous body has pore voids and has a substantial volume of pore voids. This provides a unique sintered, porous body having an open pore structure.


According to the present invention, a friction material has a uniform dispersion of the resin throughout a base material. In certain embodiments, the resin material comprises about 45 to about 65 parts, by weight, per 100 parts, by weight, of the friction material.


In certain embodiments, after the resin material has been applied to the base material and the base material has been impregnated with the resin mixture, the impregnated base material is heated to a desired temperature for a predetermined length of time to form a friction material. Thereafter, the cured friction material is adhered to a desired substrate by suitable means.



FIG. 1 is a side view of carbonized samples according to this invention. The views show samples before and after carbonization.



FIG. 2 is a graph showing that the carbonization of this invention enhanced compressibility. The carbonized fibrous base materials had an increased compressibility, which improve hot spot resistance and friction character tics.



FIG. 3 is a graph showing the enhanced carbonization effect on pore size. The graph shows that carbonization increases pore size. The graph also shows that the higher the carbonization temperature, the more open the structure.



FIG. 4 is a graph showing the improved carbonization effect on thermal resistance. The carbonized materials have higher energy capacity than the original uncarbonized materials.


In certain embodiments, it is preferred that the target pick up of resin by the base material ranges from about 25 to about 120%, in other embodiments, from about 40 to about 100%, and, in certain embodiments, about 60 to at least 80%, by weight, total phenolic resin material. After the base material is saturated with the resin, the base material is cured for a period of time (in certain embodiments for about ½ hour) at temperatures ranging between 160-250° C. to cure the resin material and form the friction material. The final thickness of the friction material depends on the initial thickness of the base material.


It further contemplated that other ingredients and processing aids known to be useful in both preparing resin blends and in preparing fibrous base materials can be included, and are within the contemplated scope of the present invention.


Sintering typically is performed under an inert or reducing atmosphere such as a mixture of nitrogen and hydrogen or a gas mixture containing carbon monoxide (CO) as well. The sintered parts are then subjected to a heating phase, during which transformation of the microstructure may occur. Sintering may be carried out under a reducing gas which does not itself contain a carbon compound, such as a mixture of nitrogen with 10% by volume of hydrogen.


The process of the invention may be used in the production of self-supporting sintered bodies, e.g. sintered bodies having a self-supporting skeleton.


Base Materials


Various base materials are useful in the friction material of the present invention, including, for example, non-asbestos fibrous base materials comprising, for example, fabric materials, woven and/or nonwoven materials. Suitable fibrous base materials include, for example, fibers and fillers. The fibers can be organic fibers, inorganic fibers and carbon fibers. The organic fibers can be aramid fibers, polyester fibers, nylon fibers, polyamide fibers, cotton/cellulose fibers and the like. The fillers can be, for example, silica, diatomaceous earth, graphite, alumina, cashew dust and the like.


In other embodiments, the base material can comprise fibrous woven materials, fibrous non-woven materials and paper materials. Further, examples of the various types of fibrous base materials useful in the present invention are disclosed in many BorgWarner U.S. patents. It should be understood however, that other embodiments of the present invention can include yet different fibrous base materials.


For example, in certain embodiments, the fibrous base material comprises a fibrous base material where less fibrillated fibers and carbon fibers are used in the fibrous base material to provide a desirable pore structure to the friction material. The fiber geometry not only provides increased thermal resistance, but also provides delamination resistance and squeal or noise resistance. Also, in certain embodiments, the presence of the carbon fibers and carbon particles aids in the fibrous base material in increasing the thermal resistance, maintaining a steady coefficient of friction and increasing the squeal resistance. A relatively low amount of cotton fibers in the fibrous base material can be included to improve the friction material's clutch “break-in” characteristics.


Various fillers are also useful in the primary layer of the fibrous base material of the present invention. In particular, silica fillers, such as diatomoaceous earth, are useful. However, it is contemplated that other types of fillers are suitable for use in the present invention and that the choice of filler depends on the particular requirements of the friction material.


In the preferred embodiment, the sintered friction material is made from aramid fibers. Also, however, the sintered fibers may be acrylic fibers alone or in combination with aramid fibers.


In certain embodiments, cotton fiber is added to the fibrous base material of the present invention to give the fibrous material higher coefficients of friction. In certain embodiments, about 5 to about 20%, and, in certain embodiments, about 10% cotton can also be added to the fibrous base material.


One example of a formulation for the primary layer of a fibrous base material comprises about 75% to about 85%, by weight, of a less fibrillated aramid fiber; and, about 15% to about 25%, by weight of a filler material.


In certain other embodiments, one particular formulation has found to be useful comprises about 35 to about 45%, by weight, less fibrillated aramid fibers; about 5 to about 15% cotton fibers; about 2 to about 20%, by weight, carbon fibers; and, about 25 to about 35%, by weight, filler.


In still other embodiments, the base material comprises from about 15 to about 25% cotton, about 40 to about 50% aramid fibers, about 10 to about 20% carbon fibers; and, friction modifying particles comprising about 5 to about 15% celite, and, optionally about 1 to about 3% latex add-on.


When the fibrous base material has a higher mean pore diameter and fluid permeability, the friction material is more likely to run cooler or with less heat generated in a transmission due to better automatic transmission fluid flow throughout the porous structure of the friction material. During operation of a transmission system, the fluid tends, over time, to breakdown and form “oil deposits”, especially at higher temperatures. These “oil deposits” decrease the pore openings. Therefore, when the friction material initially starts with lager pores, there are more open pores remaining during the useful life of the friction material.


The friction modifying particles on the top surface of the fibrous base material provides an improved three-dimensional structure to the resulting friction material.


The layer of oil or fluid on the top friction modifying particle layer keeps the oil film on the surface, thus making it more difficult for the oil or fluid to initially penetrate into the friction material. The top friction modifying material layer holds the fluid lubricant on the surface and increases the oil retaining capacity of the friction material. The friction material of the present invention thus allows an oil film to remain on its surface. This also provides good coefficient of friction characteristics and good slip durability characteristics.


In certain embodiments, the average area of coverage of friction modifying particles forming the top layer is in the range of about 80 to about 100% of the surface area. In certain other embodiments, the average area of coverage ranges from about 90 to about 100%. The friction modifying particle substantially remain on the top surface of the base material at a preferred average thickness of about 35 to 200 μm. In certain embodiments, the top layer has a preferred average thickness of about 60 to about 100 microns.


The uniformity of the deposited layer of the friction modifying particles on the surface of the fibrous base material is achieved by using a size of the particles that can range from about 1 to about 80 microns in diameter, and in certain embodiments from about 1 to about 50 microns, and in other certain embodiments from about 1 to about 20 microns. In certain embodiments, the particles have an average particle diameter of about 12 μm. In certain embodiments, it has been discovered that if the friction modifying particle size is too large or too small, a desired optimum three-dimensional structure not achieved and, consequently, the heat dissipation and anti-shudder characteristics are not as optimum.


The amount of coverage of friction modifying particles on the fibrous base material is sufficiently thick such that the layer of friction modifying particles has a three dimensional structure comprised of individual particles of the friction modifying material and voids or interstices between the individual particles. In certain embodiments, the top layer (of friction modifying particles) is less porous than the lower layer (of the fibrous base material).


Various types of friction modifying particle are useful in the friction material. In one embodiment, useful friction modifying particles include silica particles. Other embodiments can have friction modifying particles such as resin powders such as phenolic resins, silicone resins epoxy resins and mixtures thereof. Still other embodiments can include partial and/or fully carbonized carbon powders and/or particles and mixtures thereof; and mixtures of such friction modifying particles. In certain embodiments, silica particle such as diatomaceous earth, Celite®, Celatom®, and/or silicon dioxide are especially useful. The silica particles are inexpensive inorganic materials which bond to the base material. The silica particles provide high coefficients of friction to the friction material. The silica particles also provide the base material with a smooth friction surface and provides a good “shift feel” and friction characteristics to the friction material such that any “shudder” is minimized.


In certain embodiments, the friction modifying materials comprising the top layer of the friction material in the friction of the present invention can have an irregular shape. The irregular shaped friction modifying particles act to hold a desired quantity of lubricant at the surface of the fibrous base material due to the capillary action of many invaginations on the surface of the irregularly shaped friction modifying particle. In certain embodiments, a silica material such as celite is useful as a friction modifying material since celite has an irregular or rough surface.


In certain embodiments, the friction material comprises a fibrous base material which has a plurality of voids or interstices therein. The size of the voids in the fibrous bas material can range from about 0.5μ to about 20 μm.


In certain embodiments, the fibrous base material preferably has a void volume of about 50 to about 60% such that the fibrous base material is considered “dense” as compared to a “porous” woven material. In certain embodiments, the resin material at least partially fills the voids in the fibrous base material. The resin material is substantially uniformly dispersed throughout the thickness of the base material.


EXAMPLES

The following examples provide further evidence that the friction material of the present invention provides an improvement over conventional friction materials.


The sintered, porous carbon having an open, three dimensional structure with voids therein is produced as follows. The method of manufacturing the sintered, carbon friction material includes the steps of impregnating fibrous material with a resin before sintering; sintering the resin impregnated fibrous material; and producing a sintered, carbon friction material. The impregnating is carried out with a phenolic resin and the sintering is carried out at a temperature of 600° C. The fibrous materials were non-woven aramid fibers.


The sintered, porous carbon then is used with a base material. Typically, base material comprises about 5 to about 75%, by weight, of an aramid fiber; about 5 to about 75%, by weight, cotton fibers, about 5 to about 75%, by weight, carbon fibers; and, about 5 to about 75%, by weight of a filler material.


The sintering process includes the steps of compressing the raw paper sheet to form a dense sheet for better strength, compressing the paper during or after cure fore better strength and using high resin pickup (60-150%) for better strength. The resin includes phenolic, modified phenolic, epoxy, other type of organic resins, ceramic resins, and the like. Preferably, we sinter the material in nitrogen gas, argon, water vapor, ammonia, amine and the like at temperatures from 400 to 800 C.


Applications for the carbon friction materials of this invention include high pressure (up to 20 MPa) and high energy systems. Other applications include low and limited oil flow, or dry condition systems.


Table I shows the material processing for the carbonized samples.












TABLE I









pilot trial ID











A
B















calipher (actual)
0.031″
0.031″



Process one
sized to 0.025″
sized to 0.025″



Process two
60% PU
60% PU



caliper after sintering
0.0245″
0.0285″



weight loss after
12%
9%



sintering (%)



tested plate thickness
0.023″
0.023″



(measured)



Tested plate density
0.73
0.77



(g/cm3)










Table II shows the results of the sintered materials in wet oil, semi dry durability test.











TABLE II









Sample










Control (C)
C after sintering,













Lining thickness
0.001 mm (0.2%)
0.000 mm (0.7% gain)


change & lining
OK
OK


condition


Separator condition
dark stain
heat stain


Friction level change
0.143-0.106 --> 26%
0.121-0.139 --> +13%


Total cycles
1377
2226









The results show that


1. Sintered C has better descending curves than the non-sintered one.


2. The mu level of sintered C increased with the test cycles.


3. Virgin C has more friction fade than other materials.


As can be seen, the sintered, carbon friction material of the present invention performs consistently better than the comparative material. Thus, the fibrous base material of the present invention performs much better at higher speed than the comparative material.


4. Sintered C has better durability than control C sample.


INDUSTRIAL APPLICABILITY

The present invention is useful as a high energy friction material for use with clutch plates, transmission bands, brake shoes, synchronizer rings, friction disks or system plates. The above descriptions of the preferred and alternative embodiments of the present invention are intended to be illustrative and are not intended to be limiting upon the scope and content of the following claims.


The above detailed description of the present invention is given for explanatory purposes. It will be apparent to those skilled in the art that numerous changes and modifications can be made without departing from the scope of the invention. Accordingly, the whole of the foregoing description is to be construed in an illustrative and not a limitative sense, the scope of the invention being defined solely by the appended claims.

Claims
  • 1. A method of manufacturing sintered, carbon friction material including the steps of: impregnating fibrous material with a resin; and sintering the resin impregnated fibrous material at a temperature ranging from 400 to 800° C. to produce a sintered, carbon friction material, wherein the sintered, carbon friction material has an open porosity above 50 percent by volume.
  • 2. A method according to claim 1 wherein the sintered, carbon friction material is a sintered, porous carbon body.
  • 3. A method according to claim 1 wherein the resin comprises a phenolic resin.
  • 4. A method according to claim 1 wherein the sintering is carried out at a temperature ranging from 400° C. to 600° C.
  • 5. A method according to claim 1 wherein the fibrous materials are non-woven, woven or paper fibrous materials.
  • 6. A method according to claim 1 wherein the sintered, porous carbon friction material is an open, three dimensional structure having voids therein.
  • 7. A method according to claim 1 wherein the sintered, porous carbon friction material is a self-supporting skeleton.
  • 8. A method according to claim 1 wherein the sintering is carried out at a temperature ranging from 400° C. to 550° C.
CROSS REFERENCE

This application claims the benefit of provisional U.S. patent application Ser. No. 60/732,765 filed 2 Nov. 2005.

PCT Information
Filing Document Filing Date Country Kind 371c Date
PCT/US2006/042342 10/31/2006 WO 00 8/11/2010
Publishing Document Publishing Date Country Kind
WO2007/055951 5/18/2007 WO A
US Referenced Citations (278)
Number Name Date Kind
1039168 Melton Sep 1912 A
1682198 Sitton Aug 1928 A
1860147 Hadley May 1932 A
2100347 Nanfeldt Nov 1937 A
2182208 Nason Dec 1939 A
2221893 White Nov 1940 A
2307814 Walters Jan 1943 A
2316874 Kraft Apr 1943 A
2354526 Lapsley et al. Jul 1944 A
2516544 Breeze Jul 1950 A
2555261 Walters May 1951 A
2702770 Steck Feb 1955 A
2749264 Emrick Jun 1956 A
2779668 Daniels Jan 1957 A
3020139 Camp et al. Feb 1962 A
3080028 Kennedy Mar 1963 A
3215648 Duffy Nov 1965 A
3270846 Arledter et al. Sep 1966 A
3429766 Stormfeltz Feb 1969 A
3520390 Bentz Jul 1970 A
3526306 Bentz Sep 1970 A
3578122 Magnier May 1971 A
3654777 Grundman Apr 1972 A
3746669 Dunnom Jul 1973 A
3871934 Marin Mar 1975 A
3885006 Hatch et al. May 1975 A
3899050 Savary et al. Aug 1975 A
3911045 Hartmann et al. Oct 1975 A
3927241 Augustin Dec 1975 A
3944686 Froberg Mar 1976 A
3950047 Capelli Apr 1976 A
3980729 Yokokawa et al. Sep 1976 A
4002225 Marin Jan 1977 A
4020226 Andrianov et al. Apr 1977 A
4033437 Labat Jul 1977 A
4045608 Todd Aug 1977 A
4051097 Aldrich Sep 1977 A
4084863 Capelli Apr 1978 A
4098630 Morse Jul 1978 A
4113894 Koch, II Sep 1978 A
4150188 Brulet Apr 1979 A
4197223 Bartram Apr 1980 A
4209086 Friedrich Jun 1980 A
4226906 Jacob Oct 1980 A
4239666 Jacko et al. Dec 1980 A
4256801 Chuluda Mar 1981 A
4259397 Saito et al. Mar 1981 A
4260047 Nels Apr 1981 A
4267912 Bauer et al. May 1981 A
4291794 Bauer Sep 1981 A
4320823 Covaleski Mar 1982 A
4324706 Tabe et al. Apr 1982 A
4352750 Eschen Oct 1982 A
4373038 Moraw et al. Feb 1983 A
4374211 Gallagher et al. Feb 1983 A
4396100 Eltze Aug 1983 A
4444574 Tradwell et al. Apr 1984 A
4451590 Fujimaki et al. May 1984 A
4453106 La Fiandra Jun 1984 A
4456650 Melotik et al. Jun 1984 A
4457967 Chareire et al. Jul 1984 A
4490432 Jordan Dec 1984 A
4514541 Frances Apr 1985 A
4522290 Klink Jun 1985 A
4524169 Wolff et al. Jun 1985 A
4543106 Parekh Sep 1985 A
4563386 Schwartz Jan 1986 A
4593802 Danko, Jr. Jun 1986 A
4628001 Sasaki et al. Dec 1986 A
4639392 Nels et al. Jan 1987 A
4646900 Crawford et al. Mar 1987 A
4656203 Parker Apr 1987 A
4657951 Takarada et al. Apr 1987 A
4663230 Tennent May 1987 A
4663368 Harding et al. May 1987 A
4672082 Nakagawa et al. Jun 1987 A
4674616 Mannino, Jr. Jun 1987 A
4694937 Jonas Sep 1987 A
4698889 Patzer et al. Oct 1987 A
4700823 Winckler Oct 1987 A
4726455 East Feb 1988 A
4732247 Frost Mar 1988 A
4742723 Lanzerath et al. May 1988 A
4743634 Royer May 1988 A
4770283 Putz et al. Sep 1988 A
4772508 Brassell Sep 1988 A
4792361 Double et al. Dec 1988 A
4861809 Ogawa et al. Aug 1989 A
4878282 Bauer Nov 1989 A
4913267 Campbell et al. Apr 1990 A
4915856 Jamison Apr 1990 A
4917743 Gramberger et al. Apr 1990 A
4918116 Gardziella et al. Apr 1990 A
4927431 Buchanan et al. May 1990 A
4950530 Shibatani Aug 1990 A
4951798 Knoess Aug 1990 A
4983457 Hino et al. Jan 1991 A
4986397 Vierk Jan 1991 A
4995500 Payvar Feb 1991 A
4997067 Watts Mar 1991 A
5004497 Shibata et al. Apr 1991 A
5017268 Clitherow et al. May 1991 A
5033596 Genise Jul 1991 A
5038628 Kayama Aug 1991 A
5076882 Oyanagi et al. Dec 1991 A
5077130 Okuyama et al. Dec 1991 A
5080969 Tokumura Jan 1992 A
5083650 Seiz et al. Jan 1992 A
5093388 Siemon, Jr. et al. Mar 1992 A
5094331 Fujimoto et al. Mar 1992 A
5101953 Payvar Apr 1992 A
5105522 Gramberger et al. Apr 1992 A
5143192 Vojacek et al. Sep 1992 A
5164256 Sato et al. Nov 1992 A
5211068 Spitale et al. May 1993 A
5221401 Genise Jun 1993 A
5233736 Hill Aug 1993 A
5259947 Kalback et al. Nov 1993 A
5266395 Yamashita et al. Nov 1993 A
5269400 Fogelberg Dec 1993 A
5290627 Ikuta Mar 1994 A
5313793 Kirkwood et al. May 1994 A
5332075 Quigley et al. Jul 1994 A
5335765 Takakura et al. Aug 1994 A
5354603 Errede et al. Oct 1994 A
5376425 Asano et al. Dec 1994 A
5395864 Miyoshi et al. Mar 1995 A
5396552 Jahn et al. Mar 1995 A
5437780 Southard et al. Aug 1995 A
5439087 Umezawa Aug 1995 A
5445060 Randall et al. Aug 1995 A
5453317 Yesnik Sep 1995 A
5460255 Quigley et al. Oct 1995 A
5472995 Kaminski et al. Dec 1995 A
5474159 Soennecken et al. Dec 1995 A
5478642 McCord Dec 1995 A
5501788 Romine et al. Mar 1996 A
5520866 Kaminski et al. May 1996 A
5529666 Yesnik Jun 1996 A
5540621 Keester et al. Jul 1996 A
5540832 Romino Jul 1996 A
5540903 Romine Jul 1996 A
5571372 Miyaishi et al. Nov 1996 A
5585166 Kearsey Dec 1996 A
5615758 Nels Apr 1997 A
5620075 Larsen et al. Apr 1997 A
5639804 Yesnik Jun 1997 A
5643663 Bommier et al. Jul 1997 A
5646076 Bortz Jul 1997 A
5648041 Rodgers et al. Jul 1997 A
5662993 Winckler Sep 1997 A
5670231 Ohya et al. Sep 1997 A
5671835 Tanaka et al. Sep 1997 A
5674947 Oishi et al. Oct 1997 A
5676577 Lam et al. Oct 1997 A
5705120 Ueno et al. Jan 1998 A
5707905 Lam et al. Jan 1998 A
5718855 Akahori et al. Feb 1998 A
5733176 Robinson et al. Mar 1998 A
5753018 Lamport et al. May 1998 A
5753356 Lam et al. May 1998 A
5766523 Rodgers et al. Jun 1998 A
5771691 Kirkwood et al. Jun 1998 A
5775468 Lam et al. Jul 1998 A
5776288 Stefanutti et al. Jul 1998 A
5777791 Hedblom Jul 1998 A
5792544 Klein Aug 1998 A
5803210 Kohno et al. Sep 1998 A
5816901 Sirany Oct 1998 A
5827610 Ramachandran Oct 1998 A
5834551 Haraguchi et al. Nov 1998 A
5842551 Nels Dec 1998 A
5845754 Weilant Dec 1998 A
5851588 Uthoff, Jr. Dec 1998 A
5856244 Lam et al. Jan 1999 A
5858166 James et al. Jan 1999 A
5858883 Lam et al. Jan 1999 A
5889082 Kaminski et al. Mar 1999 A
5895716 Fiala et al. Apr 1999 A
5897737 Quigley Apr 1999 A
5919528 Huijs et al. Jul 1999 A
5919837 Kaminski et al. Jul 1999 A
5952249 Gibson et al. Sep 1999 A
5958507 Lam et al. Sep 1999 A
5965658 Smith et al. Oct 1999 A
5975270 Tokune et al. Nov 1999 A
5975988 Christianson Nov 1999 A
5989375 Bortz Nov 1999 A
5989390 Lee Nov 1999 A
5998307 Lam et al. Dec 1999 A
5998311 Nels Dec 1999 A
6000510 Kirkwood et al. Dec 1999 A
6001750 Lam Dec 1999 A
6019205 Willworth Feb 2000 A
6042935 Krenkel et al. Mar 2000 A
6060536 Matsumoto et al. May 2000 A
6065579 Nels May 2000 A
6074950 Wei Jun 2000 A
6121168 Irifune et al. Sep 2000 A
6123829 Zommerman et al. Sep 2000 A
6130176 Lam Oct 2000 A
6132877 Winckler et al. Oct 2000 A
6140388 Nass et al. Oct 2000 A
6163636 Stentz et al. Dec 2000 A
6182804 Lam Feb 2001 B1
6194059 Yesnik Feb 2001 B1
6217413 Christianson Apr 2001 B1
6231977 Suzuki et al. May 2001 B1
6265066 Suzuki et al. Jul 2001 B1
6284815 Sasahara et al. Sep 2001 B1
6291040 Moriwaki et al. Sep 2001 B1
6315974 Murdie et al. Nov 2001 B1
6316086 Beier et al. Nov 2001 B1
6323160 Murdie et al. Nov 2001 B1
6352758 Huang et al. Mar 2002 B1
6383605 Ejiri May 2002 B1
6387531 Bi et al. May 2002 B1
6423668 Nakanishi et al. Jul 2002 B1
6432151 So et al. Aug 2002 B1
6432187 Ogawa et al. Aug 2002 B1
6524681 Seitz et al. Feb 2003 B1
6569816 Oohira et al. May 2003 B2
6586373 Suzuki et al. Jul 2003 B2
6601321 Kendall Aug 2003 B1
6630416 Lam et al. Oct 2003 B1
6638883 Gaffney et al. Oct 2003 B2
6652363 Kramer et al. Nov 2003 B2
6668891 Collis Dec 2003 B2
6703117 Gruber et al. Mar 2004 B2
6808225 Moriyama Oct 2004 B2
6831146 Aiba et al. Dec 2004 B2
6855410 Buckley Feb 2005 B2
6875711 Chen et al. Apr 2005 B2
6951504 Adefris et al. Oct 2005 B2
7014027 Adair et al. Mar 2006 B2
7160913 Schneider Jan 2007 B2
7208432 Beier et al. Apr 2007 B1
7294388 Lam et al. Nov 2007 B2
7332240 O'Hara et al. Feb 2008 B2
7429418 Lam et al. Sep 2008 B2
20020068164 Martin Jun 2002 A1
20020164473 Buckley Nov 2002 A1
20030050831 Klayh Mar 2003 A1
20030053735 Vernooy Mar 2003 A1
20030134098 Bauer et al. Jul 2003 A1
20030154882 Nagata et al. Aug 2003 A1
20040006192 Aiba et al. Jan 2004 A1
20040033341 Lam et al. Feb 2004 A1
20040043193 Chen et al. Mar 2004 A1
20040043243 Chen et al. Mar 2004 A1
20040081795 Wang et al. Apr 2004 A1
20040081813 Dong Apr 2004 A1
20040192534 Nixon et al. Sep 2004 A1
20040198866 Sasaki Oct 2004 A1
20040224864 Patterson et al. Nov 2004 A1
20050004258 Yamamoto et al. Jan 2005 A1
20050025967 Lawton et al. Feb 2005 A1
20050039872 Kimura et al. Feb 2005 A1
20050064778 Lam et al. Mar 2005 A1
20050074595 Lam Apr 2005 A1
20050075019 Lam et al. Apr 2005 A1
20050075021 Lam et al. Apr 2005 A1
20050075022 Lam Apr 2005 A1
20050075413 Lam Apr 2005 A1
20050075414 Lam et al. Apr 2005 A1
20050191477 Dong Sep 2005 A1
20050271876 Walker et al. Dec 2005 A1
20050281971 Lam et al. Dec 2005 A1
20060008635 Dong et al. Jan 2006 A1
20060019085 Lam et al. Jan 2006 A1
20060062987 Niewohner et al. Mar 2006 A1
20060121263 Komori et al. Jun 2006 A1
20060151912 Bauer Jul 2006 A1
20060241207 Lam et al. Oct 2006 A1
20070011951 Gaeta et al. Jan 2007 A1
20070062777 Zagrodzki et al. Mar 2007 A1
20070117881 Watanabe et al. May 2007 A1
20070205076 Takahashi et al. Sep 2007 A1
Foreign Referenced Citations (2)
Number Date Country
1679337 Jul 2006 EP
11005850 Jan 1999 JP
Related Publications (1)
Number Date Country
20100304631 A1 Dec 2010 US
Provisional Applications (1)
Number Date Country
60732765 Nov 2005 US