Number | Name | Date | Kind |
---|---|---|---|
4343768 | Kimura | Aug 1982 | A |
4379402 | Harman, III | Apr 1983 | A |
4478077 | Bohrer et al. | Oct 1984 | A |
4501144 | Higashi et al. | Feb 1985 | A |
4624137 | Johnson et al. | Nov 1986 | A |
4651564 | Johnson et al. | Mar 1987 | A |
4683159 | Bohrer et al. | Jul 1987 | A |
4696188 | Higashi | Sep 1987 | A |
4914742 | Higashi et al. | Apr 1990 | A |
4944035 | Aagardl et al. | Jul 1990 | A |
4956793 | Bonne et al. | Sep 1990 | A |
5038304 | Bonne | Aug 1991 | A |
5177696 | Bonne | Jan 1993 | A |
5235844 | Bonne et al. | Aug 1993 | A |
5252949 | Kirby et al. | Oct 1993 | A |
5351029 | Huth et al. | Sep 1994 | A |
5515714 | Sultan et al. | May 1996 | A |
5535135 | Bush et al. | Jul 1996 | A |
5629474 | Williams | May 1997 | A |
5670949 | Kirby et al. | Sep 1997 | A |
5813764 | Visseret et al. | Sep 1998 | A |
5852308 | Wood | Dec 1998 | A |
5861545 | Wood | Jan 1999 | A |
5869749 | Bonne et al. | Feb 1999 | A |
5892140 | Wood | Apr 1999 | A |
5925476 | Kawatsu | Jul 1999 | A |
5948965 | Upchurch et al. | Sep 1999 | A |
6001499 | Grot et al. | Dec 1999 | A |
6071476 | Young et al. | Jun 2000 | A |
6090268 | Kunimatsu et al. | Jul 2000 | A |
6240371 | Azar | May 2001 | B1 |
6318150 | Temple | Nov 2001 | B1 |
Number | Date | Country |
---|---|---|
2103806 | Feb 1983 | GB |
63-169547 | Jul 1988 | JP |
404047228 | Feb 1992 | JP |
Entry |
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Article entitled: “Motorola's MEMS-Based High Performance Carbon-Monoxide Sensor”, Jan. 28, 1997. |
Article entitled: “New Method for Gas Identification Using a Single Semiconductor Sensor”, Takada et al., Sensors and Actuators B, 66 (2000) 22-24. |
Article entitled: “Fabrication and Properties of a Si-Based High-Sensitivity Microcalorimetric Gas Sensor”, Zanini et al., Sensors and Actuators A, 48 (1995) 187-192. |
Article entitled: “Temperature Drop of Semiconductor Gas Sensor When Exposed to Reducing Gases—Simultaneous Measurement of Changes in Sensor Temperature and in Resistance”, Tadashi Takada, Sensors and Actuators B, 66 (2000) 1-3. |
Article entitled: “Catalytic Calorimetric Gas Sensors”, Visser et al., 5th Int'l. Mtg. on Chemical Sensors, Rome Italy, Jul. 11-14, 1994 Proceedings, p. 468. |
Article entitled: “Design of a Low Power SnO2 Gas Sensor Integrated on Silicon Oxynitride Membrane”, Astié et al., Sensors and Actuators B, 67 (2000) 84-88. |