This invention provides a flat panel source of radiation which uses cathode arrays to emit electron beam current over a wide area to excite cathodoluminescent phosphors emitting in the ultraviolet (UV) portion of the electromagnetic spectrum (100 to 400 nanometers in wavelength). The phosphors can be selected to emit in any part or parts of the UV bands. UV-A and UV-B phosphors can be used for applications such as curing adhesives, powder coatings, medical phototherapy, blood pathogen inactivation, joining of composite materials, or epoxy curing. UV-C phosphors can be incorporated in the panel source of this invention for applications such as water or air purification, through either direct or photocatalytic sterilization of contaminants. UV phosphors emitting in lower wavelength UV bands can be used in panels for photolithography and other applications. In certain aspects of this invention, the ultraviolet phosphors can be mixed together to provide a desired multi-spectral output. In other aspects, different wavelength phosphors can be deposited on different parts of the phosphor plate, so that the different spectra can be selectively addressed for light emission.
Most UV sources now used are fluorescent gas discharge tubes or lamps, most commonly with a low or medium pressure mercury vapor medium for the gas discharge. These sources have a number of limitations, including the hazard of the mercury in the tubes, risks of breakage, narrow spectral range, low power efficiency, especially in the case of medium pressure mercury vapor tubes, sensitivity to temperature variations, heat generation, and difficulties in cleaning and maintenance in some applications. UV light emitting diodes (LEDs) have been developed more recently. These have low power efficiency below about 365 nm in wavelength and also suffer from “droop”, a phenomenon in which power efficiency drops further as power output is increased. LEDs are made on compound semiconductor wafers such as AlGaN, so they are expensive to begin with and then have to be diced and assembled for larger area applications, which adds further to the cost of a wide area UV source.
U.S. Pat. Nos. 4,274,028 and 7,300,634 disclose flat panel sources of cathodoluminescent UV flux in which the phosphors are excited by electron beam current emitted from cold cathode films or cold cathode arrays. Cold cathodes are expensive to make and in practice have had limited lifetimes and stability, particularly in high voltage environments. Cold cathode arrays also block UV radiation and have to fill much of an area to provide broad distribution of electrons over a corresponding anode surface. Vacuum fluorescent displays (VFDs) have also been made for some time, mainly for segmented character displays. These have been limited to the visible light bands, do not have separate cathode frames inside the vacuum package so as to enable scaling to large sizes, and use phosphors which are excited at low electron beam energies, as these are meant to be low power, portable displays. A number of UV phosphors have also been developed for various purposes. UV-C phosphors were originally developed not for sterilization applications but for testing cathode ray tubes.
It is an object of this invention to provide an inexpensive, power-efficient source of UV flux in a convenient flat panel format which can easily be scaled both in terms of physical size and power output. The ability to make these panels inexpensively in large sizes means they can be used in applications such as the sterilization of air and other gas flows, or water and other fluid flows. An important advantage of this invention is its ability to dissipate the heat created during impact of the UV phosphors by electron beams during operation, thereby mitigating the coulombic aging of the phosphors and prolonging the lifetime of the panel. Other objects of the invention are to provide variation of the ultraviolet emission bands both between different panels and in other cases within the same panel by the use of different phosphor materials. Further objects of the invention are to provide a flat panel UV source which emits from both sides of the panel and to provide a UV source in which the light is collimated. Yet another object of the invention is to provide a flat panel UV source in which powder laser phosphors are used instead of cathodoluminescent phosphors to further increase the power efficiency of the source.
The invention disclosed herein provides a flat panel UV source in which the UV flux is emitted by one or more phosphor materials disposed on an anode plate made of and excited by electron beam current accelerated in vacuum toward the anode from one or more arrays of thermionic filament cathodes. The filament cathode arrays may be constructed and held in one or more cathode frames attached to or near a cathode plate. Increasing the number of these frames allows scaling of the areal size of the source, since the frames are constructed so as to allow for sag of the filaments as they are heated and cooled during operation. A grid electrode may be used to more uniformly spread the current from cathode arrays. The anode plate and cathode plate are parallel to each other and form the major members of the vacuum enclosure of the source. In reflective mode panels, the cathode array and grid are made with substantial open area, and the cathode plate is made of UV transparent material, so as to allow UV light reflected from the anode plate to pass through the cathode plate. In transmissive mode panels, the anode plate is made of UV transmissive material to that UV light is emitted away from the cathode side. In transmissive mode panels, a layer of material with a high coefficient of secondary electron emission may also be used in conjunction with the cathodes, so that electron emission is first from the cathode arrays to this layer, and then from this layer, with the current amplified, to the anode.
Although the following detailed description delineates specific attributes of the invention and describes specific designs and fabrication procedures, those skilled in the arts of electronics or radiation source production will realize that many variations and alterations in the fabrication details and the basic structures are possible without departing from the generality of the processes and structures. The most general attributes of the invention relate to the generation of UV flux from phosphors coated on wide, transmissive anode plate and excited by electron beam current(s) from one or more thermionic cathode filament arrays mounted in frames on or near a cathode plate opposite the anode plate and separated by vacuum.
The basic construction of the flat panel UV source of the present invention is shown in
UV phosphor layer 33 is deposited on anode plate 31 and emits UV flux 60 when struck by accelerating electron beam current 50. The phosphor layer itself may provide the electrical connection for the anode bias. A thin-film conductive layer 32 may also be disposed between the phosphor layer and the anode plate to provide this electrical connection. This conductive layer may be formed by sputtering, thermal evaporation, electroplating or other methods known in the art of thin film deposition. Conductive layer 32 may be made of a UV reflective metal, such as aluminum, or anode plate 31 may be made of such UV reflective metal, and cathode plate 11 made of UV transmissive material, such as quartz, to provide the reflective mode source of this invention, in which the UV light is reflected from anode 30 back through filament array 140 and optional grid 40 and out cathode plate 11. By making anode plate 31 out of a metal or other material with high thermal conductivity, heat created by electron impact on the phosphors is more efficiently removed from the phosphor layer, reducing coulombic aging and prolonging the life of the panel.
Alternatively, anode plate 31 may be made of a UV transparent material such as quartz and metal layer 32 either eliminated or made of a UV transparent material or made very thin so as to allow the transmission of UV light. In this embodiment, the source will emit UV light out of both sides of the panel.
A transmissive source embodiment of the UV source is shown in
In an transmissive embodiment of the source, shown in
In the transmissive embodiments of the source, the thickness of anode plate 31 is chosen to allow as much of the UV flux out of the source as possible while at the same time providing sufficient mechanical strength to withstand atmospheric load. An exemplary thickness of a quartz sheet used as the anode plate is between 1 mm and 5 mm. Cathode plate 11 should be of similar composition and thickness if UV flux is desired to emit out the cathode plate as well, for a double-sided source. Otherwise, in a one-sided transmissive source, cathode plate 11 can be of any thickness needed for mechanical strength under atmospheric load. The cathode plate may also be made of metals or other materials with high thermal conductivity so as to allow cooling of the source from the outer surface of the cathode plate. External cooling structures such as heat sinking materials, air cooling fins or fluid cooling structures may be added to the external side of the cathode plate to allow the source to operate at high power levels.
In all embodiments of the source, the side walls 20 form the other parts of the vacuum envelope of the source. These are preferably made of an insulating material such as glass or ceramic and may be made of the same material, such as quartz or borosilicate glass, as the anode plate. Internal support bars, walls or spacers 21 may be added between the cathode and anode plates to provide separation between the two plates and mechanical strength under vacuum load for wide panels. The support structures and walls are preferably coated with a charge bleed layer made of a very thin film of metal or semiconductor material so as to drain any charge built up from stray electrons or ions produced in operation and prevent electrical flashover inside the vacuum package. These structural components—anode plate, cathode plate, side walls and internal support bars—are chosen to have similar coefficients of thermal expansion so as to reduce thermal stresses in the vacuum envelope as the source is being operated.
The accelerating voltage in the source of the present invention is provided by an external power supply connected to the ground plane, filaments or grid on one side and the phosphor layer, transparent conductive layer or metal covering layer on the anode side through electrical connections running through the vacuum package of the source. The accelerating voltage is chosen to fit the electron energy level needed for efficient excitation of the phosphors. With some exemplary UV-C phosphors this is between 5 kV and 20 kV. For other phosphors much lower voltages, for example under 1 kV, are most sufficient. The source may be operated in DC mode, with a constant stream of electron beam current supplied to the anode, or it may be pulsed so as to prolong phosphor life or increase the intensity of the UV flux.
The power level of the source is chosen based on the efficiency of the phosphor and flux intensity needed for the application. In an exemplary application of UV-C panels such as sterilization of air or water, the desired flux is about 15 mW/cm2. Some available UV-C phosphors operate at peak conversion efficiency of about 10% at a voltage of about 8 kV. In this case, about 0.02 mA/cm2 is required from the cathode arrays, to deliver about 6 W of UV-C flux from the panel with 60 W of input power. The size of the panel may be made as wide as needed to accommodate the thermal load generated by this power level, and panels may be tiled side by side if needed.
Numerous types of cathode arrays can be used to supply the electron beam current in the disclosed flat panel UV source, including thermal filament arrays, thin film thermal filament cathodes, photocathodes and cold cathode arrays. A preferred cathode array, shown in
Filament sagging is to be avoided since too much of the current will be provided from the middle of the filament, which will make the UV flux uneven and shorten cathode lifetime. When a grid is used, the filament can short to the grid if it sags too much. An exemplary length of the filaments in the disclosed source is from 10 mm to 200 mm. The diameter can be of any width desired, but will generally be under 200 microns. By holding the filaments in frames, the areal size of the source can be scaled to as large as desired simply by adding more frames. The frames are mechanically attached to the cathode plate, side walls or support bars by clips, welding, frit adhesion, connecting rods or any other suitable mechanical means. The filaments may be made of any thermionic emitting material. Exemplary materials include W wires, thoriated (2.5%) W (Th—W) wires, low temperature Barium-coated W (Ba-coated W), and Triple Carbonate (Ba—Sr—Ca)CO3 coated W wires. It will be noted from
Any cathodoluminescent or powder laser phosphor, including nanoparticle phosphors, can be used in the disclosed source, which can therefore emit light in a number of spectral regions. A number of phosphors exist in the prior art which emit UV-C in response to cathodoluminescent excitation. U.S. Pat. No. 3,941,715 discloses a zirconium pyrophosphate phosphor, while U.S. Pat. No. 4,014,813 discloses a hafnium pyrophosphate phosphor and U.S. Pat. No. 4,024,069 discloses a yttrium tantalate phosphor, all of which emit UV-C radiation in response to excitation by an electron beam. In addition, lanthanum pyrophosphates are also known to emit UV-C in response to cathodoluminescent excitation. More recently, powder laser phosphors have been developed which emit in the UV-C region (Williams et al, “Laser action in strongly scattering rare-earth-metal-doped dielectric nanophosphors,” Phys. Rev. A65, 013807(2001); and Li, et al, “Continuous-wave ultraviolet laser action in strongly scattering Nd-doped alumina,” Opt. Lett. 27, 394(2002)). Other phosphors can be used for UV-A and UV-B emission. These include phosphors, typically based upon borate, fluoroborate and silicate compounds, for UV-A lamp applications such as tanning beds, black lights and medical procedures. These are generally now excited by gas discharge but may also perform under accelerated electron impact. Other phosphors may be chosen for high cathodoluminescent efficiency, such as sulfur-containing phosphors. These include ZnS based phosphors developed for CRT applications, and Pb activated CaS. Other S containing phosphors, such as the Ca/Ba sulfates activated with Eu or Ce may also be used. For example, CaSO4:Eu has a relatively narrow emission peaking at 388 nm while CaSO4:Ce has a broad emission peak extending from 300 to 345 nm.
Powder phosphors may be deposited on the anode plate by settling with or without phosphor particle binders, by electrophoretic methods, screen printing, pressing, or by ink jet methods. In the case of powder laser phosphors, with the electron beam current is pulsed to pump the laser materials. Thin-film phosphors may also be used, in which case subsequent doping of the layer may be used to tune the spectral distribution of the flux. Scintillating ceramic phosphor layers are another exemplary material for the phosphor layer.
A current gating grid may be provided between the cathode array and anode, but closer to the cathode array to modulate the electron beam current and to provide more even distribution of the beam current over the anode plate. The grid is preferably made from a thin metal foil 40 etched to provide substantial open area, as shown in
The disclosed source may be evacuated and sealed by a number of methods known in the art. The distance between the cathode plate and the anode plate may be set according to the electrical potential used between cathode and anode. The distance should be sufficiently large to prevent arcing or other vacuum breakdown between cathode at anode at the chosen voltage. It should also be large enough to prevent external breakdown between conductive components such as feedthroughs on the external side of the source. An exemplary distance for a 10 keV potential between the cathode and anode is 2-10 millimeters. The cathode plate, anode plate and side walls may be joined with frit glass sealing techniques common in the vacuum tube and flat panel display industries. Quartz plates and walls may be sealed through frit seals in some cases, or they may be flame sealed. Another method for sealing is to provide a compressible solder outside of the side walls, in place of the side walls or between the side walls and the cathode and anode plates. The source is then pressed together so as to press the solder into place as a hermetic or near hermetic seal. Epoxy may be applied outside this solder seal, or mechanical clips may be applied, to hold the assembly together. Alternative sealing methods include O-ring seals of high-temperature materials such as Viton™ and mechanical clamping supports, vacuum-compatible epoxies or silica-based sealants. Electrical connection and getter activation feedthroughs may be provided through side walls, cathode plate and anode plate. Vacuum evacuation of the source may be accomplished through vacuum pumping through a pinch-off tube or valve attached to the source, or the assembly may be sealed in vacuum. The assembly is preferably heated during assembly to drive off residual gasses before being sealed to external atmosphere. This heating may be provided by a conventional or vacuum oven, or by the use of hot plates outside of the cathode and anode plates.
The support structures which maintain the vertical spacing between the cathode and anode plates and provide mechanical support under atmospheric load may be made of glass, quartz, ceramic or other insulating materials, coated with a charge bleed layer. They are spaced depending on the thickness of the thinnest of the cathode or anode plates. With a 2 mm thickness of borosilicate glass or quartz, for example, support structures should be provided at least every 50 mm. These support structures may be made in any suitable shape, for example rods, bars, walls, crosses or square pillars. They may be attached to the anode or cathode plates with frit material, or they may be attached to or through the cathode frames. One method for holding the support members in place is to make separate frames for the cathodes and grid, and provide holes in the frames that can accept the support members. Internal walls may also be formed of glass or ceramic to provide such spacer support. These internal walls may be arranged as a grid so as to allow the attachment of smaller anode plates in each grid opening, thereby creating a tiled anode structure.
The phosphors on anode plate 31 may also be formed in discrete, electrically addressable sections, as shown in
In applications, such as lithography, requiring a collimated source of UV flux, collimating or focusing grids of UV absorptive or reflective material may be placed outside the anode plate.
The present invention is well adapted to carry out the objects and attain the ends and advantages described as well as others inherent therein. While the present embodiments of the invention have been given for the purpose of disclosure numerous changes or alterations in the details of construction and steps of the method will be apparent to those skilled in the art and which are encompassed within the spirit and scope of the invention.
Continuation in part of application Ser. No. 12/692,472, filed on Jan. 22, 2010, which is a continuation in part of application Ser. No. 12/201,741, filed on Aug. 29, 2008, which is a continuation in part of application Ser. No. 11/355,692, filed on Feb. 16, 2006, now abandoned, all of which are incorporated herein in their entirety. Provisional application No. 61/784,326, filed on Mar. 14, 2013. Provisional application No. 71/478,682, filed on Apr. 25, 2011.
Parts of this invention were made with U.S. Government support under Contract No. FA9451-04-M-0075 awarded by the U.S. Air Force and National Science Foundation Grant No. 1013887. The Government has certain rights in the invention.