The drawings are lined for the color gray with long, horizontal dashed lines. The short, even dashed broken lines shown in the drawings represent portions of the ceramic heater that form no part of the claimed design.
The drawings are lined for the color gray with long, horizontal dashed lines. The short, even dashed broken lines shown in the drawings represent portions of the ceramic heater that form no part of the claimed design.
Number | Date | Country | Kind |
---|---|---|---|
D2021-026490 | Dec 2021 | JP | national |
Number | Name | Date | Kind |
---|---|---|---|
D376935 | Nourse | Dec 1996 | S |
D645889 | Nakamura | Sep 2011 | S |
D810924 | Emmenegger | Feb 2018 | S |
D814018 | Emmenegger | Mar 2018 | S |
D815272 | Emmenegger | Apr 2018 | S |
D849810 | Kim | May 2019 | S |
D884855 | Ramakrishna et al. | May 2020 | S |
D980947 | Kim | Mar 2023 | S |
D998112 | Smith | Sep 2023 | S |
D1012997 | Kim | Jan 2024 | S |
D1012998 | Kim | Jan 2024 | S |
D1013750 | Kim | Feb 2024 | S |
20030062359 | Ho | Apr 2003 | A1 |
20070151517 | Baik | Jul 2007 | A1 |
20070157466 | Kida | Jul 2007 | A1 |
20070221648 | Unno | Sep 2007 | A1 |
20130136878 | Elliot | May 2013 | A1 |
20140014642 | Elliot | Jan 2014 | A1 |
20160002779 | Lin | Jan 2016 | A1 |
Number | Date | Country |
---|---|---|
003136647-0001 | May 2016 | EM |
2000-021957 | Jan 2000 | JP |
2004-247210 | Sep 2004 | JP |
D214069 | Sep 2021 | TW |
Entry |
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Semiconductor and Wafer Processing Solutions,https://www.castaluminumsolutions.com/semiconductor-wafer-heaters/,2024. (Year: 2024). |
Ceramic heaters,https://www.ngk-insulators.com/en/product/sc-aln.html, 2024. (Year: 2024). |
Japanese Office Action dated Jun. 28, 2022 (Application No. 2021-026490). |
Chinese Office Action (Application No. 202230331503.2) dated Oct. 18, 2023 (1 page). |
Taiwanese Office Action (Application No. 111302616) dated Mar. 16, 2023. |
U.S. Appl. No. 29/864,503, filed Jun. 1, 2022, Yamana et al. |
Japanese Office Action (Application No. 2021-026490) dated Oct. 18, 2022. |