Patent Application
20240188457
This application claims foreign priority to European Patent Application No. EP 22211147.8, filed Dec. 2, 2022, the content of which is incorporated by reference herein in its entirety.
The present disclosure generally relates to the field of threshold switches and more particularly to chalcogen-containing threshold switches.
Resistive memory devices, such as resistive random-access memory (RRAM), magnetoresistive random-access memory (MRAM), or phase-change memory (PCM) devices, can combine the high speed of dynamic random-access memory (DRAM) with the non-volatility and the low cost of flash memory as a so-called storage-class memory (SCM). However, to limit the costs of manufacturing such memory devices, large arrays are preferred. For such an array to function properly, a selector, which is typically a highly nonlinear selector element, in series with resistive memory element (sometimes called an “1S1R cell”) may be used. Such a selector may suppress the sneak-path leakage current through half-selected cells.
Amorphous, typically chalcogenide-based, Ovonic threshold switches (OTS) may be used as the selector. OTSs typically switch from a resistive state to a conductive state (ON state) when a threshold voltage is applied, and returns to the resistive state (OFF state) when the applied voltage drops below a holding voltage, or, equivalently, when a current through the selector drops below a holding current or holding current density. Typically, the holding voltage is lower than the threshold voltage, due to the OTS exhibiting a negative differential resistance resulting in a hysteresis effect for the conductivity of the OTS. Different from phase-change materials for PCM devices, which also exhibit a switching behavior by switching between, e.g., a crystalline and an amorphous state, the OTS typically remains in the same amorphous glass state while switching. Although the mechanism behind this reversible switching of OTSs is still under debate, an explanation may be found in the metastable formation of newly introduced metavalent bonds under the application of the applied voltage above the threshold voltage, and the termination of these newly introduced metavalent bonds when the applied voltage is below the holding voltage (see, e.g., Noé et al., Toward ultimate nonvolatile resistive memories: The Mechanism Behind Ovonic Threshold Switching Revealed, Science Advances 6 (2020) eaay2830).
The application of OTSs is not limited to selectors. Indeed, instead of being used as a selector, the OTS may itself be used as 2-terminal self-rectifying memory device as well (sometimes called an “1S cell”), e.g., as a memory element itself, which may not require a resistive memory element in series therewith.
Furthermore, apart from applications of OTSs in memory applications, OTSs may be used as electro-static discharge (ESD) devices at the back-end-of-line (BEOL) stage of the manufacturing of a semiconductor device. The ESD device may prevent damage occurring due to, for example, a discharge from an electrostatically charged person or machine to the semiconductor device. When ESD occurs, a large amount of electric charge may flow into the semiconductor device. Thereby, a voltage may be generated inside the semiconductor device, which may cause a dielectric breakdown of the internal circuits of the semiconductor device. A first terminal of the OTS may be connected to the earth and a second terminal of the OTS may be connected to the semiconductor device, so as to provide a conductive path for releasing the generated voltage to prevent dielectric breakdown.
A wide range of materials for OTSs are available. However, they usually contain the chemical elements arsenic or selenium, which may be toxic. Furthermore, materials for OTSs are often chemically complex.
There is thus still a need in the art for devices and methods that address at least some of the above problems.
It is an object of the disclosed technology to provide a semiconductor-based device comprising a threshold switch, e.g., an Ovonic threshold switch. It is a further object of the disclosed technology to provide a method of forming the threshold switch such as an Ovonic threshold switch.
The above objectives are accomplished by embodiments of a method and apparatus according to the disclosed technology.
It is an advantage of embodiments of the disclosed technology that the Ovonic threshold switch may have a strongly nonlinear resistance. It is a further advantage of embodiments of the disclosed technology that the Ovonic threshold switch may have a good stability. It is still a further advantage of embodiments of the disclosed technology that the Ovonic threshold switch may be straightforwardly manufactured.
It is an advantage of embodiments of the disclosed technology that the Ovonic threshold switch may not require the toxic chemical elements such as selenium (Se) and arsenic (As) generally used in Ovonic threshold switches.
In a first aspect, the disclosed technology relates to a device comprising an Ovonic threshold switch formed of a mixture comprising or consisting of:
In a second aspect, the disclosed technology relates to a method of forming the device according to embodiments of the first aspect of the disclosed technology, wherein forming the Ovonic threshold switch comprises depositing a mixture on a substrate so as to form the mixture comprising or consisting of:
Particular and preferred aspects of the disclosed technology are set out in the accompanying independent and dependent claims. Features from the dependent claims may be combined with features of the independent claims and with features of other dependent claims as appropriate and not merely as explicitly set out in the claims.
Although there has been constant improvement, change and evolution of devices in this field, the present concepts are believed to represent substantial new and novel improvements, including departures from prior practices, resulting in the provision of more efficient, stable and reliable devices of this nature.
The above and other characteristics, features and advantages of the disclosed technology will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, which illustrate, by way of example, the principles of the disclosed technology. This description is given for the sake of example only, without limiting the scope of the disclosed technology. The reference figures quoted below refer to the attached drawings.
The disclosed technology will be described with respect to particular embodiments and with reference to certain drawings, but the disclosed technology is not limited thereto but only by the claims. The drawings described are only schematic and are non-limiting. In the drawings, the size of some of the elements may be exaggerated and not drawn on scale for illustrative purposes. The dimensions and the relative dimensions do not correspond to actual reductions to practice of the disclosed technology.
Furthermore, the terms first, second, third and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a sequence, either temporally, spatially, in ranking or in any other manner. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the disclosed technology described herein are capable of operation in other sequences than described or illustrated herein.
Moreover, the terms top, bottom, over, under and the like in the description and the claims are used for descriptive purposes and not necessarily for describing relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the disclosed technology described herein are capable of operation in other orientations than described or illustrated herein.
It is to be noticed that the term “comprising”, used in the claims, should not be interpreted as being restricted to the features listed thereafter; it does not exclude other elements or steps. It is thus to be interpreted as specifying the presence of the stated features, integers, steps or components as referred to, but does not preclude the presence or addition of one or more other features, integers, steps or components, or groups thereof. The term “comprising” therefore covers the situation where only the stated features are present and the situation where these features and one or more other features are present. The word “comprising” according to the disclosed technology therefore also includes as one embodiment that no further components are present. Thus, the scope of the expression “a device comprising A and B” should not be interpreted as being limited to devices consisting only of components A and B. It can mean that with respect to the disclosed technology, the only relevant components of the device are A and B.
Similarly, it is to be noticed that the term “coupled”, also used in the claims, should not be interpreted as being restricted to direct connections only. The terms “coupled” and “connected”, along with their derivatives, may be used. It should be understood that these terms are not intended as synonyms for each other. Thus, the scope of the expression “a device A coupled to a device B” should not be limited to devices or systems wherein an output of device A is directly connected to an input of device B. It can mean that there exists a path between an output of A and an input of B which may be a path including other devices or means. “Coupled” may mean that two or more elements are either in direct physical or electrical contact, or that two or more elements are not in direct contact with each other but yet still co-operate or interact with each other.
Reference throughout this specification to “one embodiment” or “an embodiment” can mean that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the disclosed technology. Thus, appearances of the phrases “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily all referring to the same embodiment, but may. Furthermore, the particular features, structures or characteristics may be combined in any suitable manner, as would be apparent to one of ordinary skill in the art from this disclosure, in one or more embodiments.
Similarly, it should be appreciated that in the description of example embodiments of the disclosed technology, various features of the disclosed technology are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various aspects of the disclosed technology. This method of disclosure, however, is not to be interpreted as reflecting an intention that the disclosed technology requires more features than are expressly recited in each claim. Rather, as the following claims reflect, aspects of the disclosed technology lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of the disclosed technology.
Furthermore, while some embodiments described herein include some, but not other features included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the disclosed technology, and form different embodiments, as would be understood by those in the art. For example, in the following claims, any of the claimed embodiments can be used in any combination.
Furthermore, some of the embodiments are described herein as a method or combination of elements of a method that can be implemented by a processor of a computer system or by other means of carrying out the function. Thus, a processor with the necessary instructions for carrying out such a method or element of a method forms a means for carrying out the method or element of a method. Furthermore, an element described herein of an apparatus embodiment is an example of a means for carrying out the function performed by the element for the purpose of carrying out the disclosed technology.
In the description provided herein, numerous specific details are set forth. However, it is understood that embodiments of the disclosed technology may be practiced without these specific details. In other instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
The disclosed technology will now be described by a detailed description of several embodiments of the disclosed technology. It is clear that other embodiments of the disclosed technology can be configured according to the knowledge of persons skilled in the art without departing from the technical teaching of the disclosed technology, the disclosed technology being limited only by the terms of the appended claims.
As described herein, a threshold switch refers to a switch device configured to switch from a high resistance state to a low resistance state when a voltage or current applied thereto reaches or exceeds a threshold value, e.g., a threshold voltage or threshold current. The threshold switch can return to the high resistance state when the voltage or current falls below the threshold value. The threshold switch can be configured as a two terminal device or a three terminal device.
In a first aspect, the disclosed technology relates to a device comprising an Ovonic threshold switch, the Ovonic threshold switch being formed of a mixture comprising or consisting of:
In embodiments, the at least 0.90 parts by mole of the composition of three or four chemical elements is at least 0.90 parts by mole of a composition of only three elements comprising or consisting of:
In some embodiments, the other chemical elements different from the three chemical elements may not include Si or Te, but may include S (if S is not one of the three chemical element) or P (if P is not one of the three chemical element). In some embodiments, they may not include S and P together.
In embodiments, each of the three (or four) chemical elements is present in an amount of at least 0.07, for example, at least 0.10, parts by mole.
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In different embodiments, the mixture comprises or consists of:
In embodiments, the mixture comprises or consists of:
In embodiments, the mixture contains at most 0.07, at most 0.05, at most 0.01, at most 0.001, or no parts by mole of the optional other chemical elements different from the three chemical elements or of the optional other chemical elements different from S, P, Si, and Te. In embodiments, the optional other chemical elements different from the three chemical elements (or the optional other chemical elements different from S, P, Si, and Te) comprise at most one element present in an amount of from 0.05 parts by mole. In embodiments, the optional other elements different from the three chemical elements (or the optional other chemical elements different from S, P, Si, and Te) contain at most 0.02, at most 0.01, at most 0.005, or at most 0.001 parts by mole of non-metallic and non-metalloid elements. For example, the mixture contains at most 0.02, at most 0.01, at most 0.001, at most 0.0001 parts by mole of arsenic and selenium, combined, among the optional other chemical elements different from the three chemical elements (or among the optional other chemical elements different from S, P, Si, and Te). It is an advantage of embodiments of the disclosed technology that good Ovonic threshold switches may be obtained without these toxic chemical elements, which are widely used for Ovonic threshold switches. The optional other chemical elements different from the three chemical elements may be present as contaminants or may be present intentionally as their negative impact on the performances is typically acceptable. However, the amount of the optional other chemical elements different from the three chemical elements is, preferably, as low as possible, such as being not present at all, in which case a simple ternary mixture may be obtained with good properties for Ovonic threshold switches.
In embodiments, the mixture is in a glass state, e.g., has a glass structure. In some instances, the mixture is in a glass state at a temperature of 25° C. and a pressure of 1 atm. In some instances, the mixture has a glass transition temperature of at least 200° C., at least 400° C., or at least 600° C. In embodiments, the mixture is uniformly mixed. In embodiments, the mixture has an amorphous structure, e.g., at a temperature of 25° C. and a pressure of 1 atm. In embodiments, the three chemical elements of the mixture, and, if present, the optional other chemical elements different from the three chemical elements are uniformly mixed throughout the mixture. In some embodiments, a temperature below which spinodal decomposition may occur for the mixture is at most 20° C., at most 10° C., or at most 0° C., at a pressure of 1 atm. These embodiments may enable deposition of the Ovonic threshold switch at a temperature of from room temperature, e.g., 25° C., to about 100° C., while reducing and/or limiting a risk of obtaining a non-uniform mixture.
In embodiments, the mixture contains an amount of Si in parts by mole, that is within 0.30, or within 0.20, parts by mole of an amount of Te or, when S is among the three chemical elements, a combined amount of Te and S, in parts by mole. These mixtures may have good properties for Ovonic threshold switches.
In embodiments, the composition of three chemical elements comprises or consists of from 0.30 to 0.60 parts by mole Si, from 0.10 to 0.50 parts by mole S, and from 0.05 to 0.40 parts by mole Te. In embodiments, the composition of three chemical elements comprises or consists of from 0.20 to 0.40 parts by mole Si, from 0.30 to 0.50 parts by mole Te, and from 0.20 to 0.40 parts by mole P. It is an advantage of these embodiments that good compositions may be obtained for Ovonic threshold switches for memory elements and selector applications.
In embodiments, the composition of three chemical elements comprises or consists of from 0.30 to 0.60 parts by mole Si, from 0.20 to 0.50 parts by mole S, and from 0.05 to 0.40 parts by mole Te. It is an advantage of these embodiments that good compositions may be obtained for Ovonic threshold switches for selector applications.
In embodiments, the device is a memory device. In embodiments, the memory device may comprise at least one electrically conductive row line, for example, a plurality of electrically conductive row lines. The conductive row line may comprise any conductive material, such as a metal or silicon. In embodiments, the memory device may comprise at least one electrically conductive column line, for example, a plurality of electrically conductive column lines. The conductive column line may comprise any conductive material, such as a metal or silicon. In embodiments, at least one row line and the at least one column line, e.g., each combination of a row line among the plurality of electrically conductive row lines and a column line among the plurality of electrically conductive row lines, may be electrically coupled to each other by a memory section, e.g., a stack, comprising the Ovonic threshold switch.
In embodiments, the memory device, e.g., the memory section, e.g., the stack, further comprises a memory element electrically coupled in series with the Ovonic threshold switch. The electrical coupling may mean that the Ovonic threshold switch physically contacts the memory element, or that the Ovonic threshold switch is separated from the memory element by an electrically conductive material. In these embodiments, the Ovonic threshold switch may function as a selector. In embodiments, the memory element may be switchable between a state with a high resistance and a state with a low resistance. For example, the memory element may be a resistive random-access memory element, a conductive random-access memory element or a phase-change memory element, or a phase-change memory element.
In embodiments, the memory device comprises a controller, e.g., a processor, connected to the row lines and the column lines. The controller may be configured to apply a writing voltage so as to switch a memory element from a first state to a second state, e.g., to write data to the memory sections. In embodiments, the writing voltage is larger than a threshold voltage of the Ovonic threshold switch, and smaller than twice a holding voltage of the Ovonic threshold switch. The controller may further comprise a current detector, and the controller may be configured to apply a reading voltage so as to detect the current through the memory element. In embodiments, the reading voltage is larger than a threshold voltage of the Ovonic threshold switch, and smaller than twice a holding voltage of the Ovonic threshold switch.
In embodiments, the memory section comprises, or consists of, a memory element comprising the Ovonic threshold switch. In these embodiments, information may be stored in the Ovonic threshold switch itself. As a first example, the threshold voltage of an Ovonic threshold switch has been found to be slightly dependent on a polarity of a last applied pulse. Therefore, writing binary data into the Ovonic threshold switch may be performed by applying one of two different pulses with different polarity. Herein, a first threshold voltage, resulting from a pulse having a first polarity, may be representative of binary 0, and a second threshold voltage, resulting from a pulse having a second polarity, opposite to the first polarity, may be representative of binary 1. To determine whether the Ovonic threshold exhibits the first threshold voltage or the second threshold voltage, an intermediate voltage may be applied that is in between the first threshold voltage and the second threshold voltage, and a current through the Ovonic threshold switch may be determined. In these embodiments, the controller may be configured to apply, when writing a first binary data bit, e.g., “1”, to the Ovonic threshold switch, a first voltage having a first polarity so as to set the Ovonic threshold switch in a state having a first threshold voltage, and, when writing a second binary data bit different from the first binary data bit, e.g., “0”, to the Ovonic threshold switch, a voltage having a second polarity, different from, e.g., opposite to, the first polarity, so as to set the Ovonic threshold switch in a state having a second threshold voltage. The controller may be further configured to, when reading data from the Ovonic threshold switch, apply an intermediate voltage, in between the first and second threshold voltage, and detect a current through the Ovonic threshold switch. As a second example, use may be made of the bistability, due to hysteresis in the current-voltage curve, of the Ovonic threshold switch. When a voltage is applied that is larger than the threshold voltage, the Ovonic threshold switch is in a conductive state. When a voltage is applied that is below a holding voltage, the Ovonic threshold switch is in a resistive state. When an intermediate voltage is applied that is between the holding voltage and the threshold voltage, the Ovonic threshold switch is either in a conductive state or in a resistive state, depending on whether the voltage applied before the intermediate voltage was above the threshold voltage or below the holding voltage. Thus, binary data may be stored by first applying a voltage either above the threshold voltage or below the holding voltage, then applying the intermediate voltage. By detecting a current when the intermediate voltage is applied, the state of the Ovonic threshold switch may be detected. In these embodiments, the controller may be configured to apply, when writing a first binary data bit, e.g., “1”, to the Ovonic threshold switch, a first voltage having a first voltage that is at most the holding voltage so as to set the Ovonic threshold switch in a resistive state, and, when writing a second binary data bit different from the first binary data bit, e.g., “0”, to the Ovonic threshold switch, a second voltage that is at least the threshold voltage so as to set the Ovonic threshold switch in a conductive state. The controller may be further configured to, when reading data from the Ovonic threshold switch, apply an intermediate voltage and detect a current through the Ovonic threshold switch. It is an advantage of these embodiments that switching may be fast and energy consumption may be low.
In embodiments, the memory device may comprise at least one set, e.g., a plurality of sets, of a plurality of row lines, and a plurality of sets of a plurality of column lines. The at least one set, e.g., the plurality of sets, of a plurality of row lines and the plurality of sets of a plurality of column lines may be ordered alternatingly. Each combination of a row line from a set of a plurality of row lines and a column line from adjacent sets of a plurality of column lines may be electrically coupled to each other by a memory section comprising the Ovonic threshold switch. As an example, a set of a plurality of column lines may be located between two sets of the plurality of row lines. In embodiments, each combination of a column line from the set of the plurality of column lines and a row line from a first set of the two sets of the plurality of row lines may be electrically coupled to each other by a memory section, e.g., a stack, comprising the Ovonic threshold switch, and each combination of a column line from the set of the plurality of column lines and a row line from a second set, different from the first set, of the two sets of the plurality of row lines may be electrically coupled to each other by a memory section, e.g., a stack, comprising the Ovonic threshold switch. It is an advantage of these embodiments that a dense memory device, sometimes called a three-dimensional cross-point memory device, may be obtained.
In embodiments, the device comprises an electrostatic discharge device comprising the Ovonic threshold switch. In embodiments, the device comprises a semiconductor device. A first terminal of the electrostatic discharge device may be connected to the semiconductor device. A second terminal of the electrostatic discharge device may be connected to a voltage source or ground. In case of a build-up of a voltage in the semiconductor device, e.g., due to the semiconductor device being electrically contacted by an electrostatically charged person, the Ovonic threshold switch of the electrostatic discharge device may switch from a resistive state to a conductive state, thereby providing a conduction path from the semiconductor device to the voltage source or the ground for release of the built-up voltage.
Any features of any embodiment of the first aspect may be independently as correspondingly described for any embodiment of the second aspect of the disclosed technology.
In a second aspect, the disclosed technology relates to a method of forming the device according to embodiments of the first aspect of the disclosed technology, wherein forming the Ovonic threshold switch comprises depositing a mixture on a substrate so as to form the mixture comprising or consisting of:
In embodiments, the depositing is performed by sputtering or atomic layer deposition. In embodiments, sputtering may be performed using AC sputtering or DC sputtering. In embodiments, three different sputtering targets may be used when sputtering, each target containing, e.g., formed of, a different element among the three or four chemical elements. In embodiments, the depositing is performed at a temperature of at most 200° C., for example, at most 100° C. In embodiments, the depositing is performed at a temperature of at least 10° C., for example, at least 20° C.
Any features of any embodiment of the second aspect may be independently as correspondingly described for any embodiment of the first aspect of the disclosed technology.
Reference is made to
In the phase-change memory element 3, data may be stored in a binary system. For example, the phase-change memory element 3 may be reversibly switchable between a low-resistance crystalline state, e.g., representing binary “1”, and a high-resistance amorphous state, e.g., representing binary “0”. Switching between the low-resistance crystalline state and the high-resistance amorphous state may be performed by applying a writing voltage, which may (possibly in combination with a resistive element in series with and contacting the phase-change memory element—not shown) heat the phase-change memory element 3. Fast quenching of the heat may result in the phase-change memory element 3 ending up in the amorphous state, whereas a longer heating time and slow cooling down may result in the phase-change memory element 3 ending up in the crystalline state.
For example, for sensing a specific phase-change memory element 31, a first voltage V1 (e.g., of +1.5V, see below) may be applied to the specific column line 121. A second voltage V2 (e.g., of −1.5V, see below) may be applied to the specific row line 111. By sensing the current, the resistance, and thus the state, of the specific phase-change memory element 31 may be determined. In absence of the Ovonic threshold switches 2, reading may result in leakage of the current via different phase-change memory elements 3 than the phase- change memory element 31 to be sensed, thereby complicating interpretation of the sensed current.
Reference is made to
Thus, referring back to
Although, in this example, the function of the Ovonic threshold switch 2 has been explained for reading of the memory element 3, the Ovonic threshold switch 2 has a similar function, hence similar advantages, for writing of the memory element 3.
Furthermore, although a specific memory device 1 has been described, different architectures may be envisaged.
Instead of using a separate memory element 3 different from the Ovonic threshold switch 2, the Ovonic threshold switch 2 could be used itself as a memory element. In Example 1 above, the Ovonic threshold switch is used as a selector, and the stack connecting each combination of a row line 11 and a column line 12 comprises both an Ovonic threshold switch 21 and a memory element 31, e.g., a phase-change memory element 31 (cfr.
Reference is made to
When the Ovonic threshold switch 21 is used as the memory element, as indicated above in the description, the Ovonic threshold switch 21 can have a threshold voltage that is dependent on a polarity of a last applied pulse. This polarity dependent threshold voltage may be used to store data in the Ovonic threshold switch 21. Alternatively, as indicated above in the description, bistability typically exhibited by Ovonic threshold switches 21 that is due to the hysteresis in the current-voltage curve (cfr.
The following approach was used for searching for new, simple (e.g., ternary), compositions for Ovonic threshold switches at the theoretical level. For this, ab initio calculations were performed on a range of ternary compositions, that are combinations of three chemical elements selected from the following chemical elements: B, C, N, Al, Si, P, S, Zn, Ga, Ge, In, Sn, Sb, and Te. Herein, for each combination of three chemical elements X, Y, and Z, calculations were performed on all compositions having the formula: XxYyZz, with values for subscripts x, y, and z each ranging from 0.1 to 0.8 in steps of 0.1 and with x+y+z=1.
In a first step, among all assessed compositions, those compositions were retained that were calculated to:
In a second step, for the compositions retained after the first step, an Ovonic threshold switch (OTS) gauge was determined as an indicator of OTS behaviour, e.g., exhibiting a strong nonlinear resistance. The OTS gauge can be based on Born charges.
Reference is made to
Compositions retained after the first step having an OTS gauge of at least 18 were retained in the second step.
Additionally, for the retained compositions, the spinodal temperature Tspinodal was determined, based on a machine learning model. Since typical deposition temperatures of OTS materials are from room temperature (e.g., 25° C. to 100° C.), a Tspinodal, below which the composition is in a spinodal state, of at most 0° C. was imposed as a further screening condition. Hence, in the second step, compositions having a Tspinodal<0° C. were retained.
Table A summarizes three of the promising materials retained after the second step.
Table A: For each composition retained for compositions for OTS for selector applications, this table summarizes: the OTS gauge; the spinodal temperature Tspinodal; the mobility gap Emobility; the trap gap ΔEtrap; the energy of formation Eform; the number of valence electrons per atom Nve; and the glass transition temperature Tg.
Above, the mobility gap and the trap gap were specifically selected for selector applications of the Ovonic threshold switches. If, instead, the composition is to be used for Ovonic threshold switches functioning as (stand-alone) memory elements, other values could be selected so as to obtain a lower or higher threshold voltage, as dependent on the specific memory specifications that is sought. In that case, the list of compositions of interest for the Ovonic threshold switches may become longer. (For applications of compositions as Ovonic threshold switches for electro-static discharge devices, where the windows for the mobility gap and the trap gap become even larger, the list may become even longer.)
For determining good compositions for Ovonic threshold switches functioning as memory elements, in the first step described above, instead, a target window was set for the mobility gap of from 0.6 eV to 1.8 eV, and for the trap gap of from 0.1 eV to 0.6 eV. Again, in the second step, compositions having a Tspinodal<0° C., and an OTS gauge of at least 18, were retained.
Table B summarizes two of the compositions with respective ranges that were retained.
Table B: Summary of compositions retained for OTS for use as a memory element. The subscripts of the compositions indicate the range (with “x-y” referring to “from x to y”) of the amount of each element in the composition, wherein the subscripts for each composition add up to 10.
It is to be understood that although preferred embodiments, specific constructions and configurations, as well as materials, have been discussed herein for devices according to the disclosed technology, various changes or modifications in form and detail may be made without departing from the scope of the disclosed technology. Steps may be added or deleted to methods described within the scope of the disclosed technology.
| Number | Date | Country | Kind |
|---|---|---|---|
| 22211147.8 | Dec 2022 | EP | regional |
