Chamber wall liner for a semiconductor manufacturing apparatus

Information

  • Patent Grant
  • D1034493
  • Patent Number
    D1,034,493
  • Date Filed
    Thursday, May 11, 2023
    a year ago
  • Date Issued
    Tuesday, July 9, 2024
    5 months ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 184
    • D13 199
    • D15 144
    • D15 1441
    • D15 1442
    • 118 715000
    • 156 345430
    • 156 345280
    • 216 058000
    • 216 063000
    • 216 067000
    • CPC
    • H01J37/32623
    • H01J37/32633
    • H01J37/32642
    • H01J37/32715
    • H01J37/32733
    • H01J37/32743
    • H01J37/32897
    • H01J37/32082
    • H01J37/32091
    • C23F1/00
    • C23F1/10
    • C23F1/12
    • C23F1/14
    • H01L21/00
    • H01L21/67
    • H01L21/67005
    • H01L21/67011
    • H01L21/67017
    • H01L21/67063
    • H01L21/67069
    • H01L21/67075
    • H01L21/67098
    • H01L21/67115
    • C23C16/00
    • C23C16/458
    • C23C16/44
    • C23C16/04
    • C23C16/4582
    • C23C16/4583
    • C23C16/4585
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a perspective view of a chamber wall liner for a semiconductor manufacturing apparatus, showing our new design;



FIG. 2 is a front view thereof;



FIG. 3 is a rear view thereof;



FIG. 4 is a left side view thereof;



FIG. 5 is a right side view thereof;



FIG. 6 is a top plan view thereof; and,



FIG. 7 is a bottom plan view thereof.


Claims
  • The ornamental design for a chamber wall liner for a semiconductor manufacturing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
30-2022-0049283 Nov 2022 KR national
US Referenced Citations (22)
Number Name Date Kind
D491963 Doba Jun 2004 S
D665491 Goel Aug 2012 S
D711331 Lau Aug 2014 S
D716239 Lau Oct 2014 S
D716240 Lau Oct 2014 S
D717746 Lau Nov 2014 S
D802545 Tauchi Nov 2017 S
D876504 Lee Feb 2020 S
D888903 Gunther Jun 2020 S
D891382 Koppa Jul 2020 S
D895076 Kuroda Sep 2020 S
D933725 Koppa Oct 2021 S
D933726 Savandaiah Oct 2021 S
D934315 Lavitsky Oct 2021 S
D941371 Lavitsky Jan 2022 S
D941372 Lavitsky Jan 2022 S
D942516 Koppa Feb 2022 S
D979524 Perry Feb 2023 S
20070113783 Lee May 2007 A1
20080041820 Tong Feb 2008 A1
20150190835 Hawrylchak Jul 2015 A1
20200090915 Kerschbaumer Mar 2020 A1
Foreign Referenced Citations (1)
Number Date Country
D215697 Dec 2021 TW
Non-Patent Literature Citations (1)
Entry
Lam Research 715-030860-002 Chamber Liner,https://www.google.com/shopping/product/1?q=chamber+wall+liner+for+semiconductor+manufacturing&prds=epd:18238509179217739273,eto:18238509179217739273_0,pid:18238509179217739273&sa=X&ved=0ahUKEwjY38GBssyFAxVK6ckDHfOfBKkQ9pwGCAc, 2024. (Year: 2024).