| Number | Name | Date | Kind |
|---|---|---|---|
| 3909103 | Graves | Sep 1975 | |
| 4503468 | Serinken | Mar 1985 |
| Entry |
|---|
| Higgins, Laser Processing of Semiconductors & Hybrids, vol. 611 of SPIE, Jan. 21, 1986, pp. 40-47. |
| Scaroni, Yag Laser: Making Its Mark on Metals, Jul. 1985, Design News. |
| Scaroni, Wafer Identification Marking, Nov. 1985, Microelectronic Manufacturing & Testing. |