The present disclosure relates to sensors for chemical analysis, and to methods for manufacturing such sensors.
A variety of types of chemical sensors have been used in the detection of chemical processes. One type is a chemically-sensitive field effect transistor (chemFET). A chemFET includes a source and a drain separated by a channel region, and a chemically sensitive area coupled to the channel region. The operation of the chemFET is based on the modulation of channel conductance, caused by changes in charge at the sensitive area due to a chemical reaction occurring nearby. The modulation of the channel conductance changes the threshold voltage of the chemFET, which can be measured to detect and/or determine characteristics of the chemical reaction. The threshold voltage may for example be measured by applying appropriate bias voltages to the source and drain, and measuring a resulting current flowing through the chemFET. As another example, the threshold voltage may be measured by driving a known current through the chemFET, and measuring a resulting voltage at the source or drain.
An ion-sensitive field effect transistor (ISFET) is a type of chemFET that includes an ion-sensitive layer at the sensitive area. The presence of ions in an analyte solution alters the surface potential at the interface between the ion-sensitive layer and the analyte solution, due to the protonation or deprotonation of surface charge groups caused by the ions present in the analyte solution. The change in surface potential at the sensitive area of the ISFET affects the threshold voltage of the device, which can be measured to indicate the presence and/or concentration of ions within the solution.
Arrays of ISFETs may be used for monitoring chemical reactions, such as DNA sequencing reactions, based on the detection of ions present, generated, or used during the reactions. See, for example, U.S. Pat. No. 7,948,015 to Rothberg et al., which is incorporated by reference herein. More generally, large arrays of chemFETs or other types of chemical sensors may be employed to detect and measure static and/or dynamic amounts or concentrations of a variety of analytes (e.g. hydrogen ions, other ions, compounds, etc.) in a variety of processes. The processes may for example be biological or chemical reactions, cell or tissue cultures or monitoring neural activity, nucleic acid sequencing, etc.
An issue that arises in the operation of large scale chemical sensor arrays is the susceptibility of the sensor output signals to noise. Specifically, the noise affects the accuracy of the downstream signal processing used to determine the characteristics of the chemical and/or biological process being detected by the sensors.
It is therefore desirable to provide devices including low noise chemical sensors, and methods for manufacturing such devices.
In one embodiment, a device is described. The device includes a material defining a reaction region. The device also includes a plurality of chemically-sensitive field effect transistors have a common floating gate in communication with the reaction region. The device also includes a circuit to obtain individual output signals from the chemically-sensitive field effect transistors indicating an analyte within the reaction region.
In another embodiment, a method for manufacturing a device is described. The method includes forming a material defining a reaction region. The method further includes forming a plurality of chemically-sensitive field effect transistors having a common floating gate in communication with the reaction region. The method further includes forming a circuit to obtain individual output signals from the chemically-sensitive field effect transistors indicating an analyte within the reaction region.
Particular aspects of one more implementations of the subject matter described in this specification are set forth in the drawings and the description below. Other features, aspects, and advantages of the subject matter will become apparent from the description, the drawings, and the claims.
A chemical detection device is described that includes multiple chemical sensors for concurrently detecting a chemical reaction within the same, operationally associated reaction region. The multiple sensors can provide redundancy, as well as improved accuracy in detecting characteristics of the chemical reaction.
By utilizing multiple chemical sensors to separately detect the same chemical reaction, the individual output signals can be combined or otherwise processed to produce a resultant, low noise output signal. For example, the individual output signals can be averaged, such that the signal-to-noise ratio (SNR) of the resultant output signal is increased by as much as the square root of the number of individual output signals. In addition, the resultant output signal can compensate for differences among the values of the individual output signals, caused by variations in chemical sensor performance which could otherwise complicate the downstream signal processing. As a result of the techniques described herein, low-noise chemical sensor output signals can be provided, such that the characteristics of reactions can be accurately detected.
The reference electrode 108 may be of any suitable type or shape, including a concentric cylinder with a fluid passage or a wire inserted into a lumen of passage 111. The reagents 114 may be driven through the fluid pathways, valves, and flow cell 101 by pumps, gas pressure, or other suitable methods, and may be discarded into the waste container 106 after exiting the outlet 103 of the flow cell 101. The fluidics controller 118 may control driving forces for the reagents 114 and the operation of valve 112 and valve block 116 with suitable software.
The microwell array 107 includes reaction regions, also referred to herein as microwells, which are operationally associated with chemical sensors of the sensor array. As described in more detail below, each reaction region is operationally associated with multiple chemical sensors suitable for detecting an analyte or reaction of interest within that reaction region. These multiple chemical sensors can provide redundancy, as well as improved detection accuracy. The microwell array 107 may be integrated in the integrated circuit device 100, so that the microwell array 107 and the sensor array are part of a single device or chip.
In exemplary embodiments described below, groups of four chemical sensors are coupled to each of the reaction regions. Alternatively, the number of chemical sensors operationally associated with a single reaction region may be different than four. More generally, two or more chemical sensors may be operationally associated with a single reaction region.
The flow cell 101 may have a variety of configurations for controlling the path and flow rate of reagents 114 over the microwell array 107. The array controller 124 provides bias voltages and timing and control signals to the integrated circuit device 100 for reading the chemical sensors of the sensor array as described herein. The array controller 124 also provides a reference bias voltage to the reference electrode 108 to bias the reagents 114 flowing over the microwell array 107.
During an experiment, the array controller 124 collects and processes individual output signals from the chemical sensors of the sensor array through output ports on the integrated circuit device 100 via bus 127. As described in more detail below, this processing can include calculating a resultant output signal for a group of sensors as a function of the individual output signals from the chemical sensors in the group. The array controller 124 may be a computer or other computing means. The array controller 124 may include memory for storage of data and software applications, a processor for accessing data and executing applications, and components that facilitate communication with the various components of the system in
In the illustrated embodiment, the array controller 124 is external to the integrated circuit device 100. In some alternative embodiments, some or all of the functions performed by the array controller 124 are carried out by a controller or other data processor on the integrated circuit device 100. In yet other embodiments, a combination of resources internal and external to the integrated circuit device 100 is used to obtain the individual output signals and calculate the resultant output signal for a group of sensors using the techniques described herein.
The value of a resultant output signal for a group of chemical sensors indicates physical and/or chemical characteristics of one or more reactions taking place in the corresponding reaction region. For example, in an exemplary embodiment, the values of the resultant output signals may be further processed using the techniques disclosed in Rearick et al., U.S. patent application Ser. No. 13/339,846, filed Dec. 29, 2011, based on U.S. Prov. Pat. Appl. Nos. 61/428,743, filed Dec. 30, 2010, and 61/429,328, filed Jan. 3, 2011, and in Hubbell, U.S. patent application Ser. No. 13/339,753, filed Dec. 29, 2011, based on U.S. Prov. Pat. Appl. No 61/428,097, filed Dec. 29, 2010, each of which are incorporated by reference herein.
The user interface 128 may display information about the flow cell 101 and the output signals received from chemical sensors of the sensor array on the integrated circuit device 100. The user interface 128 may also display instrument settings and controls, and allow a user to enter or set instrument settings and controls.
The fluidics controller 118 may control delivery of the individual reagents 114 to the flow cell 101 and integrated circuit device 100 in a predetermined sequence, for predetermined durations, at predetermined flow rates. The array controller 124 can then collect and analyze the output signals of the chemical sensors indicating chemical reactions occurring in response to the delivery of the reagents 114.
During the experiment, the system may also monitor and control the temperature of the integrated circuit device 100, so that reactions take place and measurements are made at a known predetermined temperature.
The system may be configured to let a single fluid or reagent contact the reference electrode 108 throughout an entire multi-step reaction during operation. The valve 112 may be shut to prevent any wash solution 110 from flowing into passage 109 as the reagents 114 are flowing. Although the flow of wash solution may be stopped, there may still be uninterrupted fluid and electrical communication between the reference electrode 108, passage 109, and the microwell array 107. The distance between the reference electrode 108 and the junction between passages 109 and 111 may be selected so that little or no amount of the reagents flowing in passage 109 and possibly diffusing into passage 111 reach the reference electrode 108. In an exemplary embodiment, the wash solution 110 may be selected as being in continuous contact with the reference electrode 108, which may be especially useful for multi-step reactions using frequent wash steps.
The chemical sensors of the sensor array 205 are responsive to (and generate output signals related to) chemical reactions within associated reaction regions in the microwell array 107 to detect an analyte of interest. The chemical sensors of the sensor array 205 may for example be chemically sensitive field-effect transistors (chemFETs), such as ion-sensitive field effect transistors (ISFETs). Examples of chemical sensors and array configurations that may be used in embodiments are described in U.S. Patent Application Publication No. 2010/0300559, No. 2010/0197507, No. 2010/0301398, No. 2010/0300895, No. 2010/0137143, and No. 2009/0026082, and U.S. Pat. No. 7,575,865, each which are incorporated by reference herein.
The integrated circuit device 100 includes an access circuit for accessing the chemical sensors of the sensor array 205. In the illustrated example, the access circuit includes a row select circuit 310 coupled to the sensor array 205 via row lines 311-314. The access circuit also includes column output circuit 320 coupled to the sensor array 205 via column lines 321-328.
The row select circuit 310 and the column output circuit 320 are responsive to timing and control signals provided by the array controller 124 in
In the illustrated embodiment, groups of four chemical sensors are operationally associated with each of the reaction regions 380, 382, 384, 386. Alternatively, the number of chemical sensors operationally associated with a single reaction region may be different than four. More generally, two or more chemical sensors may be operationally associated with a single reaction region. In some embodiments, the number of chemical sensors operationally associated with a single reaction region may be greater than four, such as sixteen or more.
The group containing chemical sensors 331.1-331.4 is representative of the groups of sensors of the sensor array 205. In the illustrated embodiment, each chemical sensor 331.1-331.4 includes a chemically-sensitive field effect transistor 341.1-341.5 and a row select switch 351.1-351.4.
The chemically-sensitive field effect transistors 341.1-341.4 have a common floating gate 370 in communication with the reaction region 380. That is, the common floating gate 370 is coupled to channels of each of the chemically-sensitive field effect transistors 341.1-341.5. The chemically-sensitive field effect transistors 341.1-341.5 may each include multiple patterned layers of conductive elements within layers of dielectric material.
The common floating gate 370 may for example include an uppermost conductive element (referred to herein as a sensor plate) that defines a surface (e.g. a bottom surface) of the reaction region 380. That is, there is no intervening deposited material layer between the uppermost electrical conductor and the surface of the reaction region 380. In some alternative embodiments, the uppermost conductive element of the common floating gate 370 is separated from the reaction region 380 by a deposited sensing material (discussed in more detail below).
In operation, reactants, wash solutions, and other reagents may move in and out of the reaction region 380 by a diffusion mechanism. The chemical sensors 331.1-331.4 are each responsive to (and generate individual output signals related to) chemical reactions within the reaction region 380 to detect an analyte or reaction property of interest. Changes in the charge within the reaction region 380 cause changes in the voltage on the common floating gate 370, which in turn changes the individual threshold voltages of each of the chemically-sensitive field effect transistors 341.1-341.4 of the sensors 331.1-331.4.
In a read operation of a selected chemical sensor 331.1, the row select circuit 310 facilitates providing a bias voltage to row line 311 sufficient to turn on row select transistor 351.1. Turning on the row select transistor 351.1 couples the drain terminal of the chemically-sensitive transistor 341.1 to the column line 321. The column output circuit 320 facilitates providing a bias voltage to the column line 321, and providing a bias current on the column line 321 that flows through the chemically-sensitive transistor 341.1. This in turn establishes a voltage at the source terminal of the chemically-sensitive transistor 341.1, which is coupled to the column line 322. In doing so, the voltage on the column line 322 is based on the threshold voltage of the chemically-sensitive transistor 341.1, and thus based on the amount of charge within the reaction region 380. Alternatively, other techniques may be used to read the selected chemical sensor 331.1.
The column output circuit 320 produces an individual output signal for the chemically-sensitive transistor 341.1 based on the voltage on the column line 322. The column output circuit 320 may include switches, sample and hold capacitors, current sources, buffers, and other circuitry used to operate and read the chemical sensors, depending upon the array configuration and read out technique. In some embodiments, the column output circuit 320 may include circuits such as those described in U.S. Patent Application Publication No. 2010/0300559, No. 2010/0197507, No. 2010/0301398, No. 2010/0300895, No. 2010/0137143, and No. 2009/0026082, and U.S. Pat. No. 7,575,865, which were incorporated by reference above.
The individual output signals of the other chemical sensors 331.2-331.4 coupled to the reaction region 380 can be read out in a similar fashion. In doing so, the column output circuit 320 produces individual output signals for each of the chemical sensors 331.1-331.4.
The individual output signals for each of the chemical sensors 331.1-331.4 can then be combined or otherwise processed by the array controller 124 (or other data processor) to calculate a resultant, low noise output signal for the group of chemical sensors 331.1-331.4. For example, the resultant output signal may be an average of the individual output signals. In such a case, the SNR of the resultant output signal can be increased by as much as the square root of the number of individual output signals. In addition, the resultant output signal can compensate for differences among the values of the individual output signals, caused by variations in performance of the chemical sensors 331.1-331.4 which could otherwise complicate the downstream signal processing.
At step 400, a chemical reaction is initiated within a reaction region coupled to a group of two or more chemical sensors. The group of chemical sensors may for example include respective chemically-sensitive field effect transistors having a common floating gate in communication with the reaction region, as described above with respect to
At step 410, individual output signals are obtained from the chemical sensors in the group. The individual output signals may for example be obtained by selecting and reading out the individual chemical sensors using the techniques described above. In some embodiments, flowing of reagent(s) causes chemical reactions within the reaction region that release hydrogen ions, and the amplitude of the individual output signals from the chemical sensors is related to the amount of hydrogen ions detected.
At step 420, a resultant output signal for the group is calculated based on one or more of the individual output signals. The resultant output signal may for example be an average of the individual output signals. Alternatively, other techniques may be used to calculate the resultant output signal.
At step 430, a characteristic of the chemical reaction is determined based on the resultant output signal. For example, the characteristic of the chemical reaction may be determined based on the value of the resultant output signal using the techniques disclosed in Rearick et al., U.S. patent application Ser. No. 13/339,846, filed Dec. 29, 2011, based on U.S. Prov. Pat. Appl. Nos. 61/428,743, filed Dec. 30, 2010, and 61/429,328, filed Jan. 3, 2011, and in Hubbell, U.S. patent application Ser. No. 13/339,753, filed Dec. 29, 2011, based on U.S. Prov. Pat. Appl. No 61/428,097, filed Dec. 29, 2010, each of which were incorporated by reference above.
The chemical sensor 331.1 is representative of the group of chemical sensors 331.1-331.4. In the illustrated example, the chemically-sensitive field effect transistor 341.1 of the chemical sensor 331.1 is a chemically-sensitive field effect transistor (chemFET), more specifically an ion-sensitive field effect transistor (ISFET) in this example.
The chemically-sensitive field effect transistor 341.1 includes common floating gate 370 having a conductive element 520 coupled to the reaction region 380. The conductive element 520 is the uppermost floating gate conductor (also referred to herein as a sensor plate) in the common floating gate 370. In the embodiment illustrated in
In
The chemically-sensitive field effect transistor 341.1 includes a source region 521 and a drain region 522 within a semiconductor substrate 354. The source region 521 and the drain region 522 comprise doped semiconductor material having a conductivity type different from the conductivity type of the substrate 554. For example, the source region 521 and the drain region 522 may comprise doped P-type semiconductor material, and the substrate may comprise doped N-type semiconductor material.
Channel region 523 separates the source region 521 and the drain region 522. The common floating gate 370 includes a conductive element 551 separated from the channel region 523 by a gate dielectric 552. The gate dielectric 552 may be for example silicon dioxide. Alternatively, other dielectrics may be used for the gate dielectric 552.
As shown in
In the illustrated embodiment, the upper surface 530 of the conductive element 520 is the bottom surface of the reaction region 380. That is, there is no intervening deposited material layer between the upper surface 530 of the conductive element 520 and the reaction region 380. As a result of this structure, the upper surface 530 of the conductive element 520 acts as the sensing surface for the group of chemical sensors 331.1-331.4. The conductive element 520 may comprise one or more of a variety of different materials to facilitate sensitivity to particular ions (e.g. hydrogen ions).
During manufacturing and/or operation of the device, a thin oxide of the electrically conductive material of the conductive element 520 may be grown on the upper surface 530 which acts as a sensing material (e.g. an ion-sensitive sensing material) for the group of chemical sensors 331.1-331.4. For example, in one embodiment the conductive element 520 may be titanium nitride, and titanium oxide or titanium oxynitride may be grown on the upper surface 530 during manufacturing and/or during exposure to solutions during use. Whether an oxide is formed depends on the conductive material, the manufacturing processes performed, and the conditions under which the device is operated.
In the illustrated example, the conductive element 520 is shown as a single layer of material. More generally, the conductive element 520 may comprise one or more layers of a variety of electrically conductive materials, such as metals or ceramics, depending upon the embodiment. The conductive material can be for example a metallic material or alloy thereof, or can be a ceramic material, or a combination thereof. An exemplary metallic material includes one of aluminum, copper, nickel, titanium, silver, gold, platinum, hafnium, lanthanum, tantalum, tungsten, iridium, zirconium, palladium, or a combination thereof. An exemplary ceramic material includes one of titanium nitride, titanium aluminum nitride, titanium oxynitride, tantalum nitride, or a combination thereof.
In some alternative embodiments, an additional conformal sensing material (not shown) is deposited on the sidewall of the opening in the dielectric material 510 and on the upper surface 530 of the sensor plate 520. In such a case, an inner surface of the deposited sensing material defines the reaction region 380. The sensing material may comprise one or more of a variety of different materials to facilitate sensitivity to particular ions. For example, silicon nitride or silicon oxynitride, as well as metal oxides such as silicon oxide, aluminum or tantalum oxides, generally provide sensitivity to hydrogen ions, whereas sensing materials comprising polyvinyl chloride containing valinomycin provide sensitivity to potassium ions. Materials sensitive to other ions such as sodium, silver, iron, bromine, iodine, calcium, and nitrate may also be used, depending upon the embodiment.
In operation, reactants, wash solutions, and other reagents may move in and out of the reaction region 580 by a diffusion mechanism 540. Each of the chemical sensors 331.1-331.4 are responsive to (and generates an output signal related to) the amount of charge 524 proximate to the conductive element 520. The presence of charge 524 in an analyte solution alters the surface potential at the interface between the analyte solution and the conductive element 520, due to the protonation or deprotonation of surface charge groups. Changes in the charge 524 cause changes in the voltage on the floating gate structure 518, which in turn changes in the threshold voltages of the chemically-sensitive transistors 341.1-341.4 of each of the chemical sensors 331.1-331.4. The respective changes in threshold voltages can be measured by measuring the current through the respective channel regions (e.g. channel region 523 of sensor 331.1). As a result, each of the chemical sensors 331.1-331.4 can be operated to provide individual current-based or voltage-based output signals on an array line connected to its corresponding source region or drain region.
In an embodiment, reactions carried out in the reaction region 380 can be analytical reactions to identify or determine characteristics or properties of an analyte of interest. Such reactions can directly or indirectly generate byproducts that affect the amount of charge 524 adjacent to the conductive element 520. If such byproducts are produced in small amounts or rapidly decay or react with other constituents, multiple copies of the same analyte may be analyzed in the reaction region 380 at the same time in order to increase the individual output signals generated by the group of chemical sensors 331.1-331.4. In an embodiment, multiple copies of an analyte may be attached to a solid phase support 512, either before or after deposition into the reaction region 380. The solid phase support 512 may be microparticles, nanoparticles, beads, solid or porous gels, or the like. For simplicity and ease of explanation, solid phase support 512 is also referred herein as a particle. For a nucleic acid analyte, multiple, connected copies may be made by rolling circle amplification (RCA), exponential RCA, Recombinase Polymerase Amplification (RPA), Polymerase Chain Reaction amplification (PCR), emulsion PCR amplification, or like techniques, to produce an amplicon without the need of a solid support.
In various exemplary embodiments, the methods, systems, and computer readable media described herein may advantageously be used to process and/or analyze data and signals obtained from electronic or charged-based nucleic acid sequencing. In electronic or charged-based sequencing (such as, pH-based sequencing), a nucleotide incorporation event may be determined by detecting ions (e.g., hydrogen ions) that are generated as natural by-products of polymerase-catalyzed nucleotide extension reactions. This may be used to sequence a sample or template nucleic acid, which may be a fragment of a nucleic acid sequence of interest, for example, and which may be directly or indirectly attached as a clonal population to a solid support, such as a particle, microparticle, bead, etc. The sample or template nucleic acid may be operably associated to a primer and polymerase and may be subjected to repeated cycles or “flows” of deoxynucleoside triphosphate (“dNTP”) addition (which may be referred to herein as “nucleotide flows” from which nucleotide incorporations may result) and washing. The primer may be annealed to the sample or template so that the primer's 3′ end can be extended by a polymerase whenever dNTPs complementary to the next base in the template are added. Then, based on the known sequence of nucleotide flows and on measured output signals from the chemical sensors indicative of ion concentration during each nucleotide flow, the identity of the type, sequence and number of nucleotide(s) associated with a sample nucleic acid present in a reaction region coupled to a group of chemical sensors can be determined.
The structure 600 can be formed by depositing a layer of gate dielectric material on the semiconductor substrate 554, and depositing a layer of polysilicon (or other electrically conductive material) on the layer of gate dielectric material. The layer of polysilicon and the layer gate dielectric material can then be etched using an etch mask to form the gate dielectric elements (e.g. gate dielectric 552) and the lowermost conductive material element (e.g. conductive element 551) of the floating gate structures. Following formation of an ion-implantation mask, ion implantation can then be performed to form the source and drain regions (e.g. source region 52 land a drain region 522) of the chemical sensors.
A first layer of the dielectric material 519 can then be deposited over the lowermost conductive material elements. Conductive plugs can then be formed within vias etched in the first layer of dielectric material 519 to contact the lowermost conductive material elements of the floating gate structures. A layer of conductive material can then be deposited on the first layer of the dielectric material 519 and patterned to form second conductive material elements electrically connected to the conductive plugs. This process can then be repeated multiple times to form the partially completed floating gate structures shown in
Forming the structure 600 in
Next, conductive material 700 is formed on the structure illustrated in
The conductive material 700 includes one or more layers of electrically conductive material. For example, the conductive material 700 may include a layer of titanium nitride formed on a layer of aluminum, or a layer of titanium nitride formed on a layer of copper. Alternatively, the number of layers may be different than two, and other and/or additional conductive materials may be used. Examples of conductive materials that can be used in some embodiments include tantalum, aluminum, lanthanum, titanium, zirconium, hafnium, tungsten, palladium, iridium, etc., and combinations thereof.
The locations of the mask elements 720, 722 define the locations of the sensor plates for the chemically-sensitive field effect transistors of the corresponding groups of chemical sensors. In the illustrated embodiment, the mask elements 720, 722 comprise photoresist material which has been patterned using a lithographic process. Alternatively, other techniques and materials may be used.
Next, the conductive material 700 is etched using the mask elements 700, 722 as a mask, resulting in the structure illustrated in
Next, the mask elements 700, 722 are removed and dielectric material 510 is formed, resulting in the structure illustrated in
Next, the dielectric material 510 is etched to form openings defining reaction regions 380, 382 extending to upper surfaces of the conductive material elements 520, 810, resulting in the structure illustrated in
In
In
As shown in
The amplitude of the desired signal detected by the chemical sensors 331.1-331.4 in response to the charge 524 in an analyte solution is a superposition of the charge concentration along the interface between the conductive element 1120 and the analyte solution. Because the charge 524 is more highly concentrated at the bottom and middle of the reaction region 380, the width 1125 of the conductive element 1120 is a tradeoff between the amplitude of the desired signal detected in response to the charge 524, and the fluidic noise due to random fluctuation between the conductive element 1120 and the analyte solution. Increasing the width 1125 of the conductive element 1120 increases the fluidic interface area for the chemical sensors 331.1-331.4, which reduces fluidic noise. However, since the localized surface density of charge 524 decreases with distance from the middle of the reaction region 380, the conductive element 1120 detects a greater proportion of the signal from areas having lower charge concentration, which can reduce the overall amplitude of the detected signal. In contrast, decreasing the width 1122 of the conductive element 1120 reduces the sensing surface area and thus increases the fluidic noise, but also increases the overall amplitude of the detected signal.
For a very small sensing surface area, Applicants have found that the fluidic noise changes as a function of the sensing surface area differently than the amplitude of the desired signal. Because the SNR of an individual output signal is the ratio of these two quantities, there is an optimal width 1125 at which the SNR of the individual output signals from the chemical sensors 331.1-331.2 is maximum.
The optimal width 1125 can vary from embodiment to embodiment depending on the material characteristics of the conductive element 1120 and the dielectric materials 510, 1160, the volume, shape, aspect ratio (such as base width-to-well depth ratio), and other dimensional characteristics of the reaction regions, the nature of the reaction taking place, as well as the reagents, byproducts, or labeling techniques (if any) that are employed. The optimal width may for example be determined empirically.
Next, conductive material 1300 is formed on the structure illustrated in
The conductive material 1300 may comprise one or more layers of conductive material, such as those described above with respect the conductive material 700 of
Next, the conductive material 1300 is etched using the mask elements 1320, 1322 as a mask to form the conductive elements 1120, 1400. Dielectric material 1160 is then formed between the conductive elements 1120, 1400, resulting in the structure illustrated in
Next, dielectric material 510 is formed on the structure illustrated in
Next, the dielectric material 1160 is etched using the mask elements 1510, 1520, 1530 as an etch mask to form openings 1610, 1620 within the dielectric material 1160, resulting in the structure illustrated in
Next, the mask elements 1510, 1520, 1530 are removed and conductive material 1800 is deposited on the structure illustrated in
Next, a planarization process (e.g. CMP) is performed to remove the conductive material 1800 from the upper surface of the dielectric material 1160, resulting in the structure illustrated in
Next, dielectric material 510 is formed on the structure illustrated in
Next, conductive elements 1120, 1400 are formed on the upper surface of the dielectric material 1900, resulting in the structure illustrated in
Next, dielectric material 510 is formed on the structure illustrated in
The dielectric material 1900 may comprise material different than that of dielectric material 510. For example, the dielectric material 510 may comprise material (e.g. silicon oxide) which can be selectively etched relative to the material (e.g. silicon nitride) of the dielectric material 1900 when subjected to a chosen etch process. In such a case, the dielectric material 1900 can act as an etch stop during the etching process used to form the reaction regions 380, 382. In doing so, the dielectric material 1900 can prevent etching below the conductive elements 1120, 1400, and thus can define and maintain the shape of the reaction regions 380, 382.
Various embodiments may be implemented using hardware elements, software elements, or a combination of both. Examples of hardware elements may include processors, microprocessors, circuits, circuit elements (e.g., transistors, resistors, capacitors, inductors, and so forth), integrated circuits, application specific integrated circuits (ASIC), programmable logic devices (PLD), digital signal processors (DSP), field programmable gate array (FPGA), logic gates, registers, semiconductor device, chips, microchips, chip sets, and so forth. Examples of software may include software components, programs, applications, computer programs, application programs, system programs, machine programs, operating system software, middleware, firmware, software modules, routines, subroutines, functions, methods, procedures, software interfaces, application program interfaces (API), instruction sets, computing code, computer code, code segments, computer code segments, words, values, symbols, or any combination thereof. Determining whether an embodiment is implemented using hardware elements and/or software elements may vary in accordance with any number of factors, such as desired computational rate, power levels, heat tolerances, processing cycle budget, input data rates, output data rates, memory resources, data bus speeds and other design or performance constraints.
Some embodiments may be implemented, for example, using a computer-readable medium or article which may store an instruction or a set of instructions that, if executed by a machine, may cause the machine to perform a method and/or operations in accordance with the embodiments. Such a machine may include, for example, any suitable processing platform, computing platform, computing device, processing device, computing system, processing system, computer, processor, or the like, and may be implemented using any suitable combination of hardware and/or software. The computer-readable medium or article may include, for example, any suitable type of memory unit, memory device, memory article, memory medium, storage device, storage article, storage medium and/or storage unit, for example, memory, removable or non-removable media, erasable or non-erasable media, writeable or re-writeable media, digital or analog media, hard disk, floppy disk, read-only memory compact disc (CD-ROM), recordable compact disc (CD-R), rewriteable compact disc (CD-RW), optical disk, magnetic media, magneto-optical media, removable memory cards or disks, various types of Digital Versatile Disc (DVD), a tape, a cassette, or the like. The instructions may include any suitable type of code, such as source code, compiled code, interpreted code, executable code, static code, dynamic code, encrypted code, and the like, implemented using any suitable high-level, low-level, object-oriented, visual, compiled and/or interpreted programming language.
While the present invention is disclosed by reference to the preferred embodiments and examples detailed above, it is to be understood that these examples are intended in an illustrative rather than in a limiting sense. It is contemplated that modifications and combinations will readily occur to those skilled in the art, which modifications and combinations will be within the spirit of the invention and the scope of the following claims.
This application is a continuation of U.S. application Ser. No. 17/070,142, filed Oct. 14, 2020. U.S. application Ser. No. 17/070,142 is divisional of U.S. application Ser. No. 16/663,052, filed Oct. 24, 2019; which is issued as U.S. Pat. No. 10,816,504 on Oct. 27, 2020. U.S. Pat. No. 10,816,504 is a divisional of U.S. application Ser. No. 14/293,247 filed Jun. 2, 2014; which issued as U.S. Pat. No. 10,458,942 on Oct. 29, 2019. U.S. Pat. No. 10,458,942 claims benefit of U.S. Provisional Application No. 61/833,375 filed Jun. 10, 2013. The entire contents of the aforementioned applications are incorporated by reference herein, each in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
4086642 | Yoshida et al. | Apr 1978 | A |
4411741 | Janata | Oct 1983 | A |
4437969 | Covington et al. | Mar 1984 | A |
4438354 | Haque et al. | Mar 1984 | A |
4444644 | Hiramoto et al. | Apr 1984 | A |
4490678 | Kuisl et al. | Dec 1984 | A |
4641084 | Komatsu | Feb 1987 | A |
4660063 | Anthony | Apr 1987 | A |
4691167 | V'd et al. | Sep 1987 | A |
4701253 | Ligtenberg et al. | Oct 1987 | A |
4722830 | Urie et al. | Feb 1988 | A |
4743954 | Brown | May 1988 | A |
4764797 | Shaw et al. | Aug 1988 | A |
4777019 | Dandekar | Oct 1988 | A |
4822566 | Newman | Apr 1989 | A |
4863849 | Melamede | Sep 1989 | A |
4864229 | Lauks et al. | Sep 1989 | A |
4874499 | Smith et al. | Oct 1989 | A |
4893088 | Myers et al. | Jan 1990 | A |
4927736 | Mueller et al. | May 1990 | A |
4971903 | Hyman | Nov 1990 | A |
5009766 | Lauks | Apr 1991 | A |
5038192 | Bonneau et al. | Aug 1991 | A |
5110441 | Kinlen et al. | May 1992 | A |
5113870 | Rossenfeld | May 1992 | A |
5126759 | Small et al. | Jun 1992 | A |
5138251 | Koshiishi et al. | Aug 1992 | A |
5140393 | Hijikihigawa et al. | Aug 1992 | A |
5142236 | Maloberti et al. | Aug 1992 | A |
5151587 | Machida et al. | Sep 1992 | A |
5151759 | Vinal | Sep 1992 | A |
5164319 | Hafeman et al. | Nov 1992 | A |
5202576 | Liu et al. | Apr 1993 | A |
5284566 | Cuomo et al. | Feb 1994 | A |
5317407 | Michon | May 1994 | A |
5319226 | Sohn et al. | Jun 1994 | A |
5407854 | Baxter et al. | Apr 1995 | A |
5436149 | Barnes | Jul 1995 | A |
5439839 | Jang | Aug 1995 | A |
5466348 | Holm-Kennedy | Nov 1995 | A |
5475337 | Tatsumi | Dec 1995 | A |
5490971 | Gifford et al. | Feb 1996 | A |
5554339 | Cozzette et al. | Sep 1996 | A |
5583462 | Grasshoff | Dec 1996 | A |
5587894 | Naruo | Dec 1996 | A |
5593838 | Zanzucchi et al. | Jan 1997 | A |
5600451 | Maki | Feb 1997 | A |
5627403 | Bacchetta et al. | May 1997 | A |
5631704 | Dickinson et al. | May 1997 | A |
5637469 | Wilding et al. | Jun 1997 | A |
5646558 | Jamshidi | Jul 1997 | A |
5702964 | Lee | Dec 1997 | A |
5793230 | Chu et al. | Aug 1998 | A |
5846708 | Hollis et al. | Dec 1998 | A |
5894284 | Garrity et al. | Apr 1999 | A |
5907765 | Lescouzeres et al. | May 1999 | A |
5911873 | McCarron et al. | Jun 1999 | A |
5912560 | Pasternak | Jun 1999 | A |
5922591 | Anderson et al. | Jul 1999 | A |
5923421 | Rajic et al. | Jul 1999 | A |
5944970 | Rosenblatt | Aug 1999 | A |
5958703 | Dower et al. | Sep 1999 | A |
5965452 | Kovacs | Oct 1999 | A |
6002299 | Thomsen | Dec 1999 | A |
6021172 | Fossum et al. | Feb 2000 | A |
6107032 | Kilger et al. | Aug 2000 | A |
6191444 | Clampitt et al. | Feb 2001 | B1 |
6195585 | Karunasiri et al. | Feb 2001 | B1 |
6210891 | Nyren et al. | Apr 2001 | B1 |
6255678 | Sawada et al. | Jul 2001 | B1 |
6262568 | Komatsu et al. | Jul 2001 | B1 |
6274320 | Rothberg et al. | Aug 2001 | B1 |
6275061 | Tomita | Aug 2001 | B1 |
6280586 | Wolf et al. | Aug 2001 | B1 |
6294133 | Sawada et al. | Sep 2001 | B1 |
6327410 | Walt et al. | Dec 2001 | B1 |
6353324 | Uber, III et al. | Mar 2002 | B1 |
6355431 | Chee et al. | Mar 2002 | B1 |
6361671 | Mathies et al. | Mar 2002 | B1 |
6372291 | Hua et al. | Apr 2002 | B1 |
6376256 | Dunnington et al. | Apr 2002 | B1 |
6384684 | Redman-White | May 2002 | B1 |
6403957 | Fodor et al. | Jun 2002 | B1 |
6406848 | Bridgham et al. | Jun 2002 | B1 |
6413792 | Sauer et al. | Jul 2002 | B1 |
6429027 | Chee et al. | Aug 2002 | B1 |
6432360 | Church | Aug 2002 | B1 |
6433386 | Yun et al. | Aug 2002 | B1 |
6459398 | Gureshnik et al. | Oct 2002 | B1 |
6465178 | Chappa et al. | Oct 2002 | B2 |
6475728 | Martin et al. | Nov 2002 | B1 |
6482639 | Snow et al. | Nov 2002 | B2 |
6485944 | Church et al. | Nov 2002 | B1 |
6490220 | Merritt et al. | Dec 2002 | B1 |
6499499 | Dantsker et al. | Dec 2002 | B2 |
6511803 | Church et al. | Jan 2003 | B1 |
6518024 | Choong et al. | Feb 2003 | B2 |
6518146 | Singh et al. | Feb 2003 | B1 |
6535824 | Mansky et al. | Mar 2003 | B1 |
6537881 | Rangarajan et al. | Mar 2003 | B1 |
6538593 | Yang et al. | Mar 2003 | B2 |
6545620 | Groeneweg | Apr 2003 | B2 |
6571189 | Jensen et al. | May 2003 | B2 |
6602702 | McDevitt et al. | Aug 2003 | B1 |
6605428 | Kilger et al. | Aug 2003 | B2 |
6613513 | Parce et al. | Sep 2003 | B1 |
6618083 | Chen et al. | Sep 2003 | B1 |
6624637 | Pechstein | Sep 2003 | B1 |
6627154 | Goodman et al. | Sep 2003 | B1 |
6654505 | Bridgham et al. | Nov 2003 | B2 |
6657269 | Migliorato et al. | Dec 2003 | B2 |
6671341 | Kinget et al. | Dec 2003 | B1 |
6682899 | Bryan et al. | Jan 2004 | B2 |
6682936 | Kovacs | Jan 2004 | B2 |
6686638 | Fischer et al. | Feb 2004 | B2 |
6700814 | Nahas et al. | Mar 2004 | B1 |
6703660 | Yitzchaik et al. | Mar 2004 | B2 |
6716629 | Hess et al. | Apr 2004 | B2 |
6762022 | Makarov et al. | Jul 2004 | B2 |
6770472 | Manalis et al. | Aug 2004 | B2 |
6780591 | Williams et al. | Aug 2004 | B2 |
6795006 | Delight et al. | Sep 2004 | B1 |
6806052 | Bridgham et al. | Oct 2004 | B2 |
6828100 | Ronaghi | Dec 2004 | B1 |
6831994 | Bridgham et al. | Dec 2004 | B2 |
6841128 | Kambara et al. | Jan 2005 | B2 |
6859570 | Walt et al. | Feb 2005 | B2 |
6878255 | Wang et al. | Apr 2005 | B1 |
6888194 | Yoshino | May 2005 | B2 |
6898121 | Chien | May 2005 | B2 |
6906524 | Chung et al. | Jun 2005 | B2 |
6919211 | Fodor et al. | Jul 2005 | B1 |
6926865 | Howard | Aug 2005 | B2 |
6927045 | Hadd et al. | Aug 2005 | B2 |
6929944 | Matson | Aug 2005 | B2 |
6939451 | Zhao et al. | Sep 2005 | B2 |
6953958 | Baxter et al. | Oct 2005 | B2 |
6958216 | Kelley et al. | Oct 2005 | B2 |
6969488 | Bridgham et al. | Nov 2005 | B2 |
6998274 | Chee et al. | Feb 2006 | B2 |
7008550 | Li et al. | Mar 2006 | B2 |
7019305 | Eversmann et al. | Mar 2006 | B2 |
7022288 | Boss | Apr 2006 | B1 |
7033754 | Chee et al. | Apr 2006 | B2 |
7037687 | Williams et al. | May 2006 | B2 |
7045097 | Kovacs | May 2006 | B2 |
7049645 | Sawada et al. | May 2006 | B2 |
7060431 | Chee et al. | Jun 2006 | B2 |
7067886 | Bonges, III et al. | Jun 2006 | B2 |
7084641 | Brederlow et al. | Aug 2006 | B2 |
7085502 | Shushakov et al. | Aug 2006 | B2 |
7087387 | Gerdes et al. | Aug 2006 | B2 |
7090975 | Shultz et al. | Aug 2006 | B2 |
7091059 | Rhodes | Aug 2006 | B2 |
7092757 | Larson et al. | Aug 2006 | B2 |
7097973 | Zenhausern | Aug 2006 | B1 |
7105300 | Parce et al. | Sep 2006 | B2 |
7106089 | Nakano et al. | Sep 2006 | B2 |
7129554 | Lieber et al. | Oct 2006 | B2 |
7169560 | Lapidus et al. | Jan 2007 | B2 |
7173445 | Fujii et al. | Feb 2007 | B2 |
7190026 | Lotfi et al. | Mar 2007 | B2 |
7192745 | Jaeger | Mar 2007 | B2 |
7193453 | Wei et al. | Mar 2007 | B2 |
7211390 | Rothberg et al. | May 2007 | B2 |
7220550 | Keen | May 2007 | B2 |
7223540 | Pourmand et al. | May 2007 | B2 |
7226734 | Chee et al. | Jun 2007 | B2 |
7229799 | Williams | Jun 2007 | B2 |
7235389 | Lim et al. | Jun 2007 | B2 |
7238323 | Knapp et al. | Jul 2007 | B2 |
7239188 | Xu et al. | Jul 2007 | B1 |
7244559 | Rothberg et al. | Jul 2007 | B2 |
7244567 | Chen et al. | Jul 2007 | B2 |
7264929 | Rothberg et al. | Sep 2007 | B2 |
7264934 | Fuller | Sep 2007 | B2 |
7265929 | Umeda et al. | Sep 2007 | B2 |
7267751 | Gelbart et al. | Sep 2007 | B2 |
7276749 | Martin et al. | Oct 2007 | B2 |
7279588 | Hong et al. | Oct 2007 | B2 |
7282370 | Bridgham et al. | Oct 2007 | B2 |
7285384 | Fan et al. | Oct 2007 | B2 |
7291496 | Holm-Kennedy | Nov 2007 | B2 |
7297518 | Quake et al. | Nov 2007 | B2 |
7298475 | Gandhi et al. | Nov 2007 | B2 |
7303875 | Bock et al. | Dec 2007 | B1 |
7317216 | Holm-Kennedy | Jan 2008 | B2 |
7317484 | Dosluoglu et al. | Jan 2008 | B2 |
7323305 | Leamon et al. | Jan 2008 | B2 |
7335526 | Peters et al. | Feb 2008 | B2 |
7335762 | Rothberg et al. | Feb 2008 | B2 |
7359058 | Kranz et al. | Apr 2008 | B2 |
7361946 | Johnson et al. | Apr 2008 | B2 |
7363717 | Ekseth et al. | Apr 2008 | B2 |
7381936 | Tan et al. | Jun 2008 | B2 |
7394263 | Pechstein et al. | Jul 2008 | B2 |
7419636 | Aker et al. | Sep 2008 | B2 |
7425431 | Church et al. | Sep 2008 | B2 |
7455971 | Chee et al. | Nov 2008 | B2 |
7462452 | Williams et al. | Dec 2008 | B2 |
7462512 | Levon et al. | Dec 2008 | B2 |
7462709 | Jaeger | Dec 2008 | B2 |
7465512 | Wright et al. | Dec 2008 | B2 |
7466258 | Akopyan et al. | Dec 2008 | B1 |
7470352 | Eversmann et al. | Dec 2008 | B2 |
7476504 | Turner | Jan 2009 | B2 |
7482153 | Okada et al. | Jan 2009 | B2 |
7482677 | Lee et al. | Jan 2009 | B2 |
7499513 | Tetzlaff et al. | Mar 2009 | B1 |
7515124 | Yaguma et al. | Apr 2009 | B2 |
7534097 | Wong et al. | May 2009 | B2 |
7538827 | Chou | May 2009 | B2 |
7575865 | Leamon et al. | Aug 2009 | B2 |
7576037 | Engelhardt et al. | Aug 2009 | B2 |
7590211 | Burney | Sep 2009 | B1 |
7595883 | El Gamal et al. | Sep 2009 | B1 |
7605650 | Forbes | Oct 2009 | B2 |
7608810 | Yamada | Oct 2009 | B2 |
7609093 | Sarig et al. | Oct 2009 | B2 |
7609303 | Lee et al. | Oct 2009 | B1 |
7612369 | Stasiak | Nov 2009 | B2 |
7612817 | Tay | Nov 2009 | B2 |
7614135 | Santini, Jr. et al. | Nov 2009 | B2 |
7622294 | Walt et al. | Nov 2009 | B2 |
7645596 | Williams et al. | Jan 2010 | B2 |
7649358 | Toumazou et al. | Jan 2010 | B2 |
7667501 | Surendranath et al. | Feb 2010 | B2 |
7686929 | Toumazou et al. | Mar 2010 | B2 |
7695907 | Miyahara et al. | Apr 2010 | B2 |
7733401 | Takeda | Jun 2010 | B2 |
7772383 | Chakrabarti et al. | Aug 2010 | B2 |
7785785 | Pourmand et al. | Aug 2010 | B2 |
7785790 | Church et al. | Aug 2010 | B1 |
7794584 | Chodavarapu et al. | Sep 2010 | B2 |
7821806 | Horiuchi | Oct 2010 | B2 |
7824900 | Iwadate et al. | Nov 2010 | B2 |
7838226 | Kamahori et al. | Nov 2010 | B2 |
7842377 | Lanphere et al. | Nov 2010 | B2 |
7842457 | Berka et al. | Nov 2010 | B2 |
7859029 | Lee et al. | Dec 2010 | B2 |
7859291 | Kim | Dec 2010 | B2 |
7875440 | Williams et al. | Jan 2011 | B2 |
7884398 | Levon et al. | Feb 2011 | B2 |
7885490 | Heideman et al. | Feb 2011 | B2 |
7888013 | Miyahara et al. | Feb 2011 | B2 |
7888015 | Toumazou et al. | Feb 2011 | B2 |
7888708 | Yazawa et al. | Feb 2011 | B2 |
7890891 | Stuber et al. | Feb 2011 | B2 |
7898277 | Weir | Mar 2011 | B2 |
7923240 | Su | Apr 2011 | B2 |
7927797 | Nobile et al. | Apr 2011 | B2 |
7932034 | Esfandyarpour et al. | Apr 2011 | B2 |
7948015 | Rothberg et al. | May 2011 | B2 |
7955995 | Kakehata et al. | Jun 2011 | B2 |
7960776 | Kim et al. | Jun 2011 | B2 |
7972828 | Ward et al. | Jul 2011 | B2 |
7981362 | Glezer et al. | Jul 2011 | B2 |
8012690 | Berka et al. | Sep 2011 | B2 |
8017938 | Gomez et al. | Sep 2011 | B2 |
8035175 | Shim et al. | Oct 2011 | B2 |
8052863 | Suzuki et al. | Nov 2011 | B2 |
8067731 | Matyjaszczyk et al. | Nov 2011 | B2 |
8072188 | Yorinobu et al. | Dec 2011 | B2 |
8114591 | Toumazou et al. | Feb 2012 | B2 |
8124936 | Lagna | Feb 2012 | B1 |
8133698 | Silver | Mar 2012 | B2 |
8138496 | Li et al. | Mar 2012 | B2 |
8154480 | Shishido et al. | Apr 2012 | B2 |
8199859 | Zerbe et al. | Jun 2012 | B2 |
8217433 | Fife | Jul 2012 | B1 |
8227877 | Lee et al. | Jul 2012 | B2 |
8231831 | Hartzell et al. | Jul 2012 | B2 |
8232813 | Burdett et al. | Jul 2012 | B2 |
8247849 | Fife et al. | Aug 2012 | B2 |
8248356 | Chen | Aug 2012 | B2 |
8262900 | Rothberg et al. | Sep 2012 | B2 |
8263336 | Rothberg et al. | Sep 2012 | B2 |
8264014 | Rothberg et al. | Sep 2012 | B2 |
8269261 | Rothberg et al. | Sep 2012 | B2 |
8277628 | Ronaghi et al. | Oct 2012 | B2 |
8293082 | Rothberg et al. | Oct 2012 | B2 |
8306757 | Rothberg et al. | Nov 2012 | B2 |
8313625 | Rothberg et al. | Nov 2012 | B2 |
8313639 | Rothberg et al. | Nov 2012 | B2 |
8317999 | Rothberg et al. | Nov 2012 | B2 |
8340914 | Gatewood et al. | Dec 2012 | B2 |
8343856 | Therrien et al. | Jan 2013 | B2 |
8349167 | Rothberg et al. | Jan 2013 | B2 |
8357547 | Lee et al. | Jan 2013 | B2 |
8361713 | Bridgham et al. | Jan 2013 | B2 |
8383896 | Floyd | Feb 2013 | B2 |
8415716 | Rothberg et al. | Apr 2013 | B2 |
8421437 | Levine | Apr 2013 | B2 |
8426898 | Rothberg et al. | Apr 2013 | B2 |
8426899 | Rothberg et al. | Apr 2013 | B2 |
8435395 | Rothberg et al. | May 2013 | B2 |
8441044 | Rothberg et al. | May 2013 | B2 |
8445194 | Drmanac et al. | May 2013 | B2 |
8445945 | Rothberg et al. | May 2013 | B2 |
8449824 | Sun | May 2013 | B2 |
8450781 | Rothberg et al. | May 2013 | B2 |
8470164 | Rothberg et al. | Jun 2013 | B2 |
8487790 | Fife et al. | Jul 2013 | B2 |
8492800 | Rothberg et al. | Jul 2013 | B2 |
8496802 | Rothberg et al. | Jul 2013 | B2 |
8502278 | Rothberg et al. | Aug 2013 | B2 |
8519448 | Rothberg et al. | Aug 2013 | B2 |
8524057 | Rothberg et al. | Sep 2013 | B2 |
8530941 | Rothberg et al. | Sep 2013 | B2 |
8535513 | Rothberg et al. | Sep 2013 | B2 |
8552771 | Jordan et al. | Oct 2013 | B1 |
8558288 | Rothberg et al. | Oct 2013 | B2 |
8575664 | Rothberg et al. | Nov 2013 | B2 |
8592154 | Rearick | Nov 2013 | B2 |
8653567 | Fife | Feb 2014 | B2 |
8658017 | Rothberg et al. | Feb 2014 | B2 |
8673627 | Nobile et al. | Mar 2014 | B2 |
8685230 | Rothberg et al. | Apr 2014 | B2 |
8685298 | Rockenschaub et al. | Apr 2014 | B2 |
8728844 | Liu et al. | May 2014 | B1 |
8731847 | Johnson et al. | May 2014 | B2 |
8742469 | Milgrew | Jun 2014 | B2 |
8742472 | Rothberg et al. | Jun 2014 | B2 |
8747748 | Li et al. | Jun 2014 | B2 |
8748947 | Milgrew | Jun 2014 | B2 |
8764969 | Rothberg et al. | Jul 2014 | B2 |
8766327 | Milgrew | Jul 2014 | B2 |
8766328 | Rothberg et al. | Jul 2014 | B2 |
8776573 | Rearick et al. | Jul 2014 | B2 |
8786331 | Jordan et al. | Jul 2014 | B2 |
8796036 | Fife et al. | Aug 2014 | B2 |
8821798 | Bustillo et al. | Sep 2014 | B2 |
8823380 | Levine et al. | Sep 2014 | B2 |
8841217 | Fife et al. | Sep 2014 | B1 |
8847637 | Guyton | Sep 2014 | B1 |
8912005 | Fife et al. | Dec 2014 | B1 |
8945912 | Bashir et al. | Feb 2015 | B2 |
8962366 | Putnam et al. | Feb 2015 | B2 |
8963216 | Fife et al. | Feb 2015 | B2 |
8983783 | Johnson et al. | Mar 2015 | B2 |
9023674 | Shen et al. | May 2015 | B2 |
9164070 | Fife | Oct 2015 | B2 |
9201041 | Dalton et al. | Dec 2015 | B2 |
9270264 | Jordan et al. | Feb 2016 | B2 |
9389199 | Cheng et al. | Jul 2016 | B2 |
9618475 | Rothberg et al. | Apr 2017 | B2 |
9671363 | Fife et al. | Jun 2017 | B2 |
20020012933 | Rothberg et al. | Jan 2002 | A1 |
20020042388 | Cooper et al. | Apr 2002 | A1 |
20020070791 | Dabral | Jun 2002 | A1 |
20020081714 | Jain et al. | Jun 2002 | A1 |
20020085136 | Moon et al. | Jul 2002 | A1 |
20020150909 | Stuelpnagel et al. | Oct 2002 | A1 |
20020168678 | Williams et al. | Nov 2002 | A1 |
20030020334 | Nozu | Jan 2003 | A1 |
20030044833 | Benchikh et al. | Mar 2003 | A1 |
20030054396 | Weiner | Mar 2003 | A1 |
20030064366 | Hardin et al. | Apr 2003 | A1 |
20030068629 | Rothberg et al. | Apr 2003 | A1 |
20030108867 | Chee et al. | Jun 2003 | A1 |
20030119020 | Stevens et al. | Jun 2003 | A1 |
20030124572 | Umek et al. | Jul 2003 | A1 |
20030124599 | Chen et al. | Jul 2003 | A1 |
20030141928 | Lee | Jul 2003 | A1 |
20030141929 | Casper et al. | Jul 2003 | A1 |
20030152994 | Woudenberg et al. | Aug 2003 | A1 |
20030155942 | Thewes | Aug 2003 | A1 |
20030175990 | Hayenga et al. | Sep 2003 | A1 |
20030186262 | Cailloux | Oct 2003 | A1 |
20030211502 | Sauer et al. | Nov 2003 | A1 |
20030215791 | Garini et al. | Nov 2003 | A1 |
20030215857 | Kilger et al. | Nov 2003 | A1 |
20030224419 | Corcoran et al. | Dec 2003 | A1 |
20030227296 | Lee | Dec 2003 | A1 |
20040002470 | Keith et al. | Jan 2004 | A1 |
20040023253 | Kunwar et al. | Feb 2004 | A1 |
20040079636 | Hsia et al. | Apr 2004 | A1 |
20040106211 | Kauer et al. | Jun 2004 | A1 |
20040121354 | Yazawa et al. | Jun 2004 | A1 |
20040130377 | Takeda et al. | Jul 2004 | A1 |
20040136866 | Pontis et al. | Jul 2004 | A1 |
20040146849 | Huang et al. | Jul 2004 | A1 |
20040185484 | Costa et al. | Sep 2004 | A1 |
20040185591 | Hsiung et al. | Sep 2004 | A1 |
20040197803 | Yaku et al. | Oct 2004 | A1 |
20050006234 | Hassibi | Jan 2005 | A1 |
20050009022 | Weiner et al. | Jan 2005 | A1 |
20050031490 | Gumbrecht et al. | Feb 2005 | A1 |
20050032075 | Yaku et al. | Feb 2005 | A1 |
20050058990 | Guia et al. | Mar 2005 | A1 |
20050093645 | Watanabe et al. | May 2005 | A1 |
20050106587 | Klapproth et al. | May 2005 | A1 |
20050151181 | Beintner et al. | Jul 2005 | A1 |
20050156207 | Yazawa et al. | Jul 2005 | A1 |
20050156584 | Feng | Jul 2005 | A1 |
20050181440 | Chee et al. | Aug 2005 | A1 |
20050189960 | Tajima | Sep 2005 | A1 |
20050191698 | Chee et al. | Sep 2005 | A1 |
20050202582 | Eversmann et al. | Sep 2005 | A1 |
20050206548 | Muramatsu et al. | Sep 2005 | A1 |
20050212016 | Brunner et al. | Sep 2005 | A1 |
20050221473 | Dubin et al. | Oct 2005 | A1 |
20050230245 | Morgenshtein et al. | Oct 2005 | A1 |
20050239132 | Klapproth | Oct 2005 | A1 |
20050282224 | Fouillet et al. | Dec 2005 | A1 |
20060000772 | Sano et al. | Jan 2006 | A1 |
20060024711 | Lapidus et al. | Feb 2006 | A1 |
20060035400 | Wu et al. | Feb 2006 | A1 |
20060038601 | Giguere et al. | Feb 2006 | A1 |
20060057025 | Eversmann et al. | Mar 2006 | A1 |
20060057604 | Chen et al. | Mar 2006 | A1 |
20060141474 | Miyahara et al. | Jun 2006 | A1 |
20060154399 | Sauer et al. | Jul 2006 | A1 |
20060166203 | Tooke | Jul 2006 | A1 |
20060182664 | Peck et al. | Aug 2006 | A1 |
20060197118 | Migliorato et al. | Sep 2006 | A1 |
20060199193 | Koo et al. | Sep 2006 | A1 |
20060199493 | Hartmann et al. | Sep 2006 | A1 |
20060205061 | Roukes | Sep 2006 | A1 |
20060219558 | Hafeman et al. | Oct 2006 | A1 |
20060228721 | Leamon et al. | Oct 2006 | A1 |
20060246497 | Huang et al. | Nov 2006 | A1 |
20060266946 | Defrise et al. | Nov 2006 | A1 |
20060269927 | Lieber et al. | Nov 2006 | A1 |
20060289726 | Paulus et al. | Dec 2006 | A1 |
20070031291 | Piech et al. | Feb 2007 | A1 |
20070087401 | Neilson et al. | Apr 2007 | A1 |
20070092872 | Rothberg et al. | Apr 2007 | A1 |
20070095663 | Chou et al. | May 2007 | A1 |
20070096164 | Peters et al. | May 2007 | A1 |
20070099173 | Spira et al. | May 2007 | A1 |
20070138132 | Barth | Jun 2007 | A1 |
20070172865 | Hardin et al. | Jul 2007 | A1 |
20070212681 | Shapiro et al. | Sep 2007 | A1 |
20070217963 | Elizarov et al. | Sep 2007 | A1 |
20070231824 | Chee et al. | Oct 2007 | A1 |
20070233477 | Halowani et al. | Oct 2007 | A1 |
20070247170 | Barbaro et al. | Oct 2007 | A1 |
20070250274 | Volkov et al. | Oct 2007 | A1 |
20070262363 | Tao et al. | Nov 2007 | A1 |
20070278488 | Hirabayashi et al. | Dec 2007 | A1 |
20080003142 | Link et al. | Jan 2008 | A1 |
20080014589 | Link et al. | Jan 2008 | A1 |
20080047836 | Strand et al. | Feb 2008 | A1 |
20080063566 | Matsumoto et al. | Mar 2008 | A1 |
20080085219 | Beebe et al. | Apr 2008 | A1 |
20080096216 | Quake | Apr 2008 | A1 |
20080111161 | Sorge et al. | May 2008 | A1 |
20080121946 | Youn et al. | May 2008 | A1 |
20080136933 | Dosluoglu et al. | Jun 2008 | A1 |
20080164917 | Floyd et al. | Jul 2008 | A1 |
20080178692 | Jung et al. | Jul 2008 | A1 |
20080185616 | Johnson et al. | Aug 2008 | A1 |
20080204048 | Stasiak et al. | Aug 2008 | A1 |
20080205559 | Iida | Aug 2008 | A1 |
20080210931 | Truong et al. | Sep 2008 | A1 |
20080230386 | Srinivasan et al. | Sep 2008 | A1 |
20090048124 | Leamon et al. | Feb 2009 | A1 |
20090062132 | Borner | Mar 2009 | A1 |
20090075383 | Buschmann et al. | Mar 2009 | A1 |
20090079414 | Levon et al. | Mar 2009 | A1 |
20090120905 | Kohl et al. | May 2009 | A1 |
20090121258 | Kumar | May 2009 | A1 |
20090127689 | Ye et al. | May 2009 | A1 |
20090149607 | Karim et al. | Jun 2009 | A1 |
20090156425 | Walt et al. | Jun 2009 | A1 |
20090170728 | Walt et al. | Jul 2009 | A1 |
20090194416 | Hsiung et al. | Aug 2009 | A1 |
20090273386 | Korobeynikov et al. | Nov 2009 | A1 |
20090299138 | Mitsuhashi | Dec 2009 | A1 |
20100007326 | Nakazato | Jan 2010 | A1 |
20100026814 | Shimoda | Feb 2010 | A1 |
20100039146 | Park et al. | Feb 2010 | A1 |
20100052765 | Makino | Mar 2010 | A1 |
20100105373 | Kanade | Apr 2010 | A1 |
20100133547 | Kunze et al. | Jun 2010 | A1 |
20100137143 | Rothberg | Jun 2010 | A1 |
20100176463 | Koizumi et al. | Jul 2010 | A1 |
20100244106 | Parker et al. | Sep 2010 | A1 |
20100273166 | Garcia | Oct 2010 | A1 |
20100301398 | Rothberg et al. | Dec 2010 | A1 |
20110037121 | Lee et al. | Feb 2011 | A1 |
20110062972 | Je et al. | Mar 2011 | A1 |
20110114827 | Yamaoka et al. | May 2011 | A1 |
20110165557 | Ah et al. | Jul 2011 | A1 |
20110169056 | Wey et al. | Jul 2011 | A1 |
20110181253 | Isham et al. | Jul 2011 | A1 |
20110236263 | Sawada et al. | Sep 2011 | A1 |
20110262903 | Davidson et al. | Oct 2011 | A1 |
20110263463 | Rothberg et al. | Oct 2011 | A1 |
20110275522 | Rothberg et al. | Nov 2011 | A1 |
20110281737 | Rothberg et al. | Nov 2011 | A1 |
20110281741 | Rothberg et al. | Nov 2011 | A1 |
20110287945 | Rothberg et al. | Nov 2011 | A1 |
20110299337 | Parris et al. | Dec 2011 | A1 |
20120000274 | Fife | Jan 2012 | A1 |
20120001056 | Fife et al. | Jan 2012 | A1 |
20120001236 | Fife | Jan 2012 | A1 |
20120001237 | Fife et al. | Jan 2012 | A1 |
20120001615 | Levine | Jan 2012 | A1 |
20120001616 | Fife | Jan 2012 | A1 |
20120001646 | Bolander et al. | Jan 2012 | A1 |
20120013392 | Rothberg et al. | Jan 2012 | A1 |
20120034607 | Rothberg et al. | Feb 2012 | A1 |
20120045368 | Hinz et al. | Feb 2012 | A1 |
20120045844 | Rothberg et al. | Feb 2012 | A1 |
20120055811 | Rothberg et al. | Mar 2012 | A1 |
20120055813 | Rothberg et al. | Mar 2012 | A1 |
20120056248 | Fife | Mar 2012 | A1 |
20120060587 | Babcock et al. | Mar 2012 | A1 |
20120129703 | Rothberg et al. | May 2012 | A1 |
20120129732 | Rothberg et al. | May 2012 | A1 |
20120135870 | Rothberg et al. | May 2012 | A1 |
20120143531 | Davey et al. | Jun 2012 | A1 |
20120154018 | Sugiura | Jun 2012 | A1 |
20120161207 | Homyk et al. | Jun 2012 | A1 |
20120173159 | Davey et al. | Jul 2012 | A1 |
20120249192 | Matsushita | Oct 2012 | A1 |
20120261274 | Rearick et al. | Oct 2012 | A1 |
20120286771 | Rothberg et al. | Nov 2012 | A1 |
20120326213 | Bustillo et al. | Dec 2012 | A1 |
20120326767 | Milgrew | Dec 2012 | A1 |
20120329043 | Milgrew | Dec 2012 | A1 |
20120329192 | Bustillo et al. | Dec 2012 | A1 |
20130001653 | Milgrew et al. | Jan 2013 | A1 |
20130009214 | Bustillo et al. | Jan 2013 | A1 |
20130027594 | Krymski | Jan 2013 | A1 |
20130056353 | Nemirovsky et al. | Mar 2013 | A1 |
20130105868 | Kalnitsky et al. | May 2013 | A1 |
20130135018 | Kuo et al. | May 2013 | A1 |
20130189790 | Li et al. | Jul 2013 | A1 |
20130210128 | Rothberg et al. | Aug 2013 | A1 |
20130210182 | Rothberg et al. | Aug 2013 | A1 |
20130210641 | Rothberg et al. | Aug 2013 | A1 |
20130217004 | Rothberg et al. | Aug 2013 | A1 |
20130217587 | Rothberg et al. | Aug 2013 | A1 |
20130273664 | Toumazou | Oct 2013 | A1 |
20130281307 | Li et al. | Oct 2013 | A1 |
20130324421 | Rothberg et al. | Dec 2013 | A1 |
20130341734 | Merz | Dec 2013 | A1 |
20140075237 | Ware | Mar 2014 | A1 |
20140080717 | Li et al. | Mar 2014 | A1 |
20140148345 | Li et al. | May 2014 | A1 |
20140234981 | Zarkesh-Ha et al. | Aug 2014 | A1 |
20140235463 | Rothberg et al. | Aug 2014 | A1 |
20140308752 | Chang et al. | Oct 2014 | A1 |
20140367748 | Dalton et al. | Dec 2014 | A1 |
20150097214 | Chen et al. | Apr 2015 | A1 |
20160178568 | Cheng et al. | Jun 2016 | A1 |
20170038334 | Barbee et al. | Feb 2017 | A1 |
20170059514 | Hoffman | Mar 2017 | A1 |
20170102356 | Lin et al. | Apr 2017 | A1 |
Number | Date | Country |
---|---|---|
1582334 | Feb 2005 | CN |
101676714 | Mar 2010 | CN |
4232532 | Apr 1994 | DE |
4430811 | Sep 1995 | DE |
102004044299 | Mar 2006 | DE |
102008012899 | Sep 2009 | DE |
1243925 | Sep 2002 | EP |
1371974 | Dec 2003 | EP |
1542009 | Jun 2005 | EP |
1669749 | Jun 2006 | EP |
1870703 | Dec 2007 | EP |
1975246 | Oct 2008 | EP |
S5870155 | Apr 1983 | JP |
S62237349 | Oct 1987 | JP |
H02250331 | Oct 1990 | JP |
H02310931 | Dec 1990 | JP |
H0580115 | Apr 1993 | JP |
H1078827 | Mar 1998 | JP |
2000055874 | Feb 2000 | JP |
2002221510 | Aug 2002 | JP |
2002272463 | Sep 2002 | JP |
2003279532 | Oct 2003 | JP |
2003322633 | Nov 2003 | JP |
2004500033 | Jan 2004 | JP |
2004343441 | Dec 2004 | JP |
2005515475 | May 2005 | JP |
2006138846 | Jun 2006 | JP |
2006284225 | Oct 2006 | JP |
2007512810 | May 2007 | JP |
2008215974 | Sep 2008 | JP |
200946904 | Nov 2009 | TW |
WO-2004040291 | May 2004 | WO |
WO-2004048962 | Jun 2004 | WO |
WO-2005015156 | Feb 2005 | WO |
WO-2005054431 | Jun 2005 | WO |
WO-2005062049 | Jul 2005 | WO |
WO-2005084367 | Sep 2005 | WO |
WO-2005090961 | Sep 2005 | WO |
WO-2006056226 | Jun 2006 | WO |
WO-2007002204 | Jan 2007 | WO |
WO-2008058282 | May 2008 | WO |
WO-2008107014 | Sep 2008 | WO |
WO-2009041917 | Apr 2009 | WO |
WO-2010047804 | Apr 2010 | WO |
WO-2010138186 | Dec 2010 | WO |
WO-2012046137 | Apr 2012 | WO |
WO-2012152308 | Nov 2012 | WO |
Entry |
---|
Ahmadian A., et al., “Single-Nucleotide Polymorphism Analysis by Pyrosequencing,” Analytical and Biochemistry, 2000, vol. 280, pp. 103-110. |
Akiyama et al., “Ion-Sensitive Field-Effect Transistors with Inorganic Gate Oxide for pH Sensing”, IEEE Transactions on Electron Devices, vol. 29, No. 12, 1982, pp. 1936-1941. |
Bandettini et al., “Processing Strategies for Time-Course Data Sets in Functional MRI of the Human Brain,” MRM, vol. 30, 1993, pp. 161-172. |
Bandiera et al., “A fully electronic sensor for the measurement of cDNA hybridization kinetics”, Biosensors & Bioelectronics, vol. 22, Nos. 9-10, Apr. 15, 2007, pp. 2108-2114. |
Barbaro et al., “A Charge-Modulated FET for Detection of Biomolecular Processes: Conception, Modeling, and Simulation”, IEEE Transactions on Electron Devices, vol. 53, No. 1, 2006, pp. 158-166. |
Barbaro et al., “A CMOS, Fully Integrated Sensor for Electronic Detection of DNA Hybridization”, IEEE Electronic Device Letters, vol. 27, No. 7, 2006, pp. 595-597. |
Barbaro M., et al., “Fully Electronic DNA Hybridization Detection by a Standard CMOS Biochip,” Sensors and Actuators B: Chemical, 2006, vol. 118, pp. 41-46. |
Bashford et al., “Automated bead-trapping apparatus and control system for singlemolecule DNA sequencing”, Optics Express, vol. 16, No. 5, Mar. 3, 2008, pp. 3445-3455. |
Baumann et al., “Microelectronic sensor system for microphysiological application on living cells”, Sensors and Actuators B: Chemical, vol. 55, No. 1, Apr. 1999, pp. 77-89. |
Bausells et al., “Ion-sensitive field-effect transistors fabricated in a commercial CMOS technology”, Sensors and Actuators B: Chemical, vol. 57, Nos. 1-3, 1999, pp. 56-62. |
Bergveld, “ISFET, Theory and Practice”, IEEE Sensor Conference, Toronto, Oct. 2003, pp. 1-26. |
Bergveld P., “Thirty years of ISFETOLOGY What happened in the past 30 years and what may happen in the next 30 years,” Sensors and Actuators B: Chemical, Jan. 2003, vol. 88, No. 1, pp. 1-20. |
Besselink et al., “ISFET Affinity Sensor”, Chapter 12 in Methods in Biotechnology, Affinity Biosensors: Techniques and Protocols, vol. 7, 1998, pp. 173-185. |
Bobrov et al., “Chemical sensitivity of an ISFET with Ta2O5 membrane in strong acid and alkaline solutions”, Sensors and Actuators B: Chemical, vol. 3, No. 1, Jan. 1991, pp. 75-81. |
Bockelmann et al., “Detecting DNA by field effect transistor arrays”, Proceedings of the 2006 IFIP International Conference on Very Large Scale Integration, 2006, pp. 164-168. |
Bousse et al., “A process for the combined fabrication of ion sensors and CMOS circuits”, IEEE Electron Device Letters, vol. 9, No. 1, Jan. 1988, pp. 44-46. |
Bousse et al., “Zeta potential measurements of Ta2O5 and SiO2 thin films” Journal of Colloid and Interface Science, vol. 147, No. 1, Nov. 1991, pp. 22-32. |
Chan et al., “An Integrated ISFETs Instrumentation System in Standard CMOS Technology”, IEEE Journal of Solid-State Circuits, vol. 45, No. 9, Sep. 2010, pp. 1923-1934. |
Chen et al., “Silicon-based nanoelectronic field-effect pH sensor with local gate control”, Applied Physics Letter, vol. 89, Nov. 2006, pp. 223512-1-223512-3. |
Chen et al., “Nanoscale field effect transistor for biomolecular signal amplification”, Applied Physics Letter, vol. 91, No. 24, Nov. 2007, pp. 243511-1-243511-3. |
Chin et al., “Titanium Nitride Membrane Application to Extended Gate Field Effect Transistor pH Sensor Using VLSI Technology”, Japanese Journal of Applied Physics, vol. 40, Part 1, No. 11, Nov. 2001, pp. 6311-6315. |
Chou et al., “Simulation of Ta2O5-gate ISFET temperature characteristics”, Sensor and Actuators B: Chemical, vol. 71, Nos. 1-2, Nov. 2000, pp. 73-76. |
Chou et al., “Letter to the Editor on Simulation of Ta2O5-gate ISFET temperature characteristics”, Sensors and Actuators B: Chemical, vol. 80, 2001, pp. 290-291. |
Chung et al., “ISFET interface circuit embedded with noise rejection capability”, Electronics Letters, vol. 40, No. 18, e-pub, 2 Pages, Sep. 2, 2004, pp. 1115-1116. |
Chung et al., “ISFET performance enhancement by using the improved circuit techniques”, Sensors and Actuators B: Chemical, vol. 113, No. 1, Jan. 2006, pp. 555-562. |
Chung et al., “New ISFET interface circuit design with temperature Compensation”, CiteSeerx—URL: http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.95.2321&rep=rep1-&type=pdf, 2006, pp. 1. |
Chung et al., “New ISFET Interface Circuit Design with Temperature Compensation”, Microelectronics Journal, vol. 37, No. 10, Oct. 1, 2006, pp. 1105-1114. |
Chung et al., “Temperature compensation electronics for ISFET readout applications”, Biomedical Circuits and Systems, IEEE International Workshop Singapore, Dec. 1, 2004, pp. 305-308. |
Dahl et al., “Circle-to-circle amplification for precise and sensitive DNA analysis,” Proceedings of the National Academy of Sciences, vol. 101, No. 13, Mar. 2004, pp. 4548-4553. |
Dazhong et al., “Research of CMOS Biosensor IC for Extracellular Electrophysiological Signal Recording and pH value Measuring”, Solid-State and Integrated-Circuit Technology, 9th International Conference, NJ USA, Oct. 20, 2008, pp. 2557-2560. |
Dorf, “The Electrical Engineering Handbook”, University of California, Davis, CRC Press, 2 edition, Chapter 3—Linear Circuit Analysis, Jun. 25, 2004, pp. 3-1 to 3-66. |
Eastman Kodak Company, “Image Sensor Solutions-Full-Frame CCD Image Sensor Performance Specification”, www.physics.csbsju.edu/370/photometry/manuals/kaf-1001e.pdf, Feb. 19, 2001. |
Eijkel et al., “Measuring Donnan-related phenomena using a solid-state ion sensor and a concentration-step method”, Journal of Membrane Science, vol. 127, May 1997, pp. 203-221. |
Eijkel, “Potentiometric detection and characterization of adsorbed protein using stimulus-response measurement techniques”, Thesis, Sep. 3, 1955, pp. 1-147; pp. 160-192. |
Eltoukhy et al., “A 0.18um CMOS 10-6 lux bioluminescence detection system-on-chip”, 2004 IEEE Inti Solid States Conference. Digest of Technical Papers. Session 12, Microsystems/12.3, Feb. 17, 2004. pp. 1-3. |
Eltoukhy et al., “A. 0.18-μm CMOS Bioluminescence Detection Lab-on-Chip”, IEEE Journal of Solid-State Circuits, vol. 41, No. 3, Apr. 2006, pp. 651-662. |
EP Extended Search report dated May 27, 2015, to EP Patent Application No. 09822323.3. |
EP Extended Search report dated Nov. 7, 2017, to EP Patent Application No. 17167536.5. |
EP09798251.6, Extended Search Report, dated Aug. 27, 2013, 6 pages. |
EP10780930.3, Search Report, dated Jun. 15, 2015, 3 pages. |
EP10780935.2, Partial Search Report, dated Jun. 9, 2015, 5 pages. |
EP10780935.2, Supplementary Search Report, dated Sep. 30, 2015. |
EP10857377.5, Search Report, dated Jun. 26, 2015, 3 pages. |
EP11801437.2, European Search Report, dated Jul. 8, 2014. |
EP11801437.2, Extended Search Report, dated Jul. 25, 2013, 10 pages. |
EP11801439.8, Extended Search Report, dated Mar. 7, 2014, 9 pages. |
EP11804218.3, Extended Search Report, dated Jul. 11, 2013, 3 pages. |
EP11827128.7, Search Report, dated Aug. 1, 2013, 5 pages. |
EP13161312.7, Extended Search Report, dated Oct. 15, 2013, 8 pages. |
EP13163995.7, Extended Search Report, dated Aug. 20, 2013, 6 pages. |
EP13164768.7, Extended Search Report, dated Aug. 20, 2013, 6 pages. |
EP13174555.6, Extended Search Report, dated Dec. 4, 2013, 8 pages. |
EP13174555.6, Search Report, dated Nov. 21, 2013, 5 pages. |
EP13177039.8, Search Report, dated Nov. 21, 2013, 9 pages. |
EP13177590.0, Search Report, dated Nov. 20, 2013, 5 pages. |
EP14152861.2, Search Report, dated Jul. 7, 2014, 5 pages. |
EP15170247.9, Search Report, dated Nov. 10, 2015, 4 pages. |
Eriksson et al., “Pyrosequencing™ Technology at Elevated Temperature” Electrophoresis, vol. 25, No. 1, Jan. 2004, pp. 20-27. |
Esfandyarpour et al., “Gate-controlled microfluidic chamber with magnetic bead for DNA sequencing-by-synthesis technology”, Proc 5th Intl Conf Nanochannels, Microchannels and Minichannels, Puebla, Mexico, Jun. 18-20, 2007, pp. 1-5. |
Faramarzpour et al., “CMOS-Based Active Pixel for Low-Light Level Detection: Analysis and Measurements”, IEEE Trans Electron Devices, vol. 54, No. 12, Dec. 2007, pp. 3229-3237. |
Finn et al., “Towards an Optimization of FET-Based Bio-Sensors”, European Cells and Materials, vol. 4, Sup 2, 2002, pp. 21-23. |
Fraden, “Handbook of Modern Sensors-Physics, Designs, and Applications”, 17.3.2 CHEMFET Sensors, 1996, pp. 499-501. |
Fritz et al., “Electronic detection of DNA by its intrinsic molecular charge”, Proceedings of the National Academy of Sciences, vol. 99, No. 22, Oct. 29, 2002, pp. 14142-14146. |
Gardner et al., “Enhancing electronic nose performance by sensor selection using a new integer-based genetic algorithm approach”, Sensors and Actuators B: Chemical, vol. 106, No. 1, Apr. 2005, pp. 114-121. |
Gracia et al., “Test Structures for ISFET Chemical Sensors”, IEEE Proceedings of the 1992 International Conference on Microelectronic Test Structures, vol. 5, 1992, pp. 156-159. |
Hammond et al., “A System-on-Chip Digital pH Meter for Use in a Wireless Diagnostic Capsule”, IEEE Transactions on Biomedical Engineering, vol. 52, No. 4, May 2005, pp. 687-694. |
Hammond et al., “Encapsulation of a liquid-sensing microchip using SU-8 photoresist”, MicroElectronic Engineering, vols. 73-74, Jun. 2004, pp. 893-897. |
Hammond et al., “Genomic sequencing and analysis of a Chinese Hamster ovary cell line using Illumina sequencing technology”, BMC Genomics, vol. 12, No. 67, Jan. 2011, pp. 1-8. |
HAMMOND P.A., et al., “Design of a Single-Chip pH Sensor Using a Conventional 0.6-μm CMOS Process,” IEEE Sensors Journal, Dec. 2004, vol. 4, No. 6, pp. 706-712. |
HAMMOND P.A., et al., “Performance and System-on-Chip Integration of an Unmodified CMOS ISFET,” Sensors and Actuators B: Chemical, Nov. 2005, vol. 111-112, pp. 254-258. |
HAN “Label-free detection of biomolecules by a field-effect transistor microarray biosensor with bio-functionalized gate surfaces,” Masters Dissertation, RWTH Aachen University, 2006, pp. 1-63. |
Hanshaw et al., “An indicator displacement system for fluorescent detection of phosphate oxyanions under physiological conditions”, Tetrahedron Letters, vol. 45, No. 47, Nov. 15, 2004, pp. 8721-8724. |
Hara et al., “Dynamic response of a Ta2O5-gate pH-sensitive field-effect transistor”, Sensors Actuators B: Chemical, vol. 32, No. 2, May 1996, pp. 115-119. |
Hermon et al., “Miniaturized bio-electronic hybrid for chemical sensing applications”, Tech Connect News, Apr. 22, 2008, pp. 1. |
Hideshima et al., “Detection of tumor marker in blood serum using antibody-modified field effect transistor with optimized BSA blocking”, Sensors and Actuations B: Chemical, vol. 161, No. 1, Jan. 2012, pp. 146-150. |
Hijikata et al., “Identification of a Single Nucleotide Polymorphism in the MXA Gene Promoter (T/T at nt-88) Correlated with the Response of Hepatitis C Patients to Interferon”, Intervirology, vol. 43, No. 2, 2000, pp. 124-127. |
Hizawa et al., “32.times.32 pH Image Sensors for Real Time Observation of Biochemical Phenomena”, Transducers & Eurosensors '07, 14th Intl. Conf, on Solid-State, Actuators and Microsystems, Lyon, France, Jun. 10-14, 2007, pp. 1311-1312. |
Hizawa, et al., “Sensing Characteristics of Charge Transfer Type pH Sensor by Accumulative Operation”, IEEE Sensors, EXCO, Daegu, Korea, Oct. 22-25, 2006, pp. 144-147. |
Hizawa T., et al., “Fabrication of a Two-dimensional pH Image Sensor Using a Charge Transfer Technique,” Sensors and Actuators B: Chemical, Oct. 2006, vol. 117, No. 2, pp. 509-515. |
Ingebrandt et al., “Label-free Detection of DNA using Field-Effect Transistors”, Physica status solidi A, vol. 203, No. 14, Nov. 2006, pp. 3399-3411. |
Izuru, “Kojien”, published by Owanami, Fourth Edition, 1991, pp. 2683. |
Jakobson et al., “Low frequency noise and drift in Ion Sensitive Field Effect Transistors”, Sensors Actuators B: Chemical, vol. 68, Nos. 1-3, Aug. 2000, pp. 134-139. |
Ji et al., “A CMOS contact imager for locating individual cells”, IEEE International Symposium on Circuits and Systems, 2006, pp. 3357-3360. |
Ji et al., “Contact Imaging: Simulation and Experiment”, IEEE Trans Circuits Systems-I: Regular Papers, vol. 54, No. 8, 2007, pp. 1698-1710. |
Kim et al., “An FET-type charger sensor for highly sensitive detection of DNA sequence”, Biosensors & Bioelectronics, vol. 20, No. 1, Jul. 30, 2004, pp. 69-74. |
Klein, “Time effects of ion-sensitive field-effect transistors”, Sensors and Actuators, vol. 17, Nos. 1-2, May 1989, pp. 203-208. |
Koch et al., “Protein detection with a novel ISFET-based zeta potential analyzer”, Biosensors & Bioelectronics, vol. 14, No. 4, Apr. 1999, pp. 413-421. |
Krause et al., “Extended Gate Electrode Arrays for Extracellular Signal Recordings”, Sensors and Actuators B: Chemical, vol. 70, Nos. 1-3, Nov. 2000, pp. 101-107. |
Kruise et al., “Detection of protein concentrations using a pH-step titration method”, Sensors Actuators B: Chemical, vol. 44, Nos. 1-3, Oct. 1997, pp. 297-303. |
Leamon et al., “A Massively Parallel PicoTiterPlate Based Platform for Discrete Picoliter-Scale Polymerase Chain Reactions”, Electrophoresis, vol. 24, No. 21, Nov. 24, 2003, pp. 3769-3777. |
Leamon J.H., et al., “Cramming More Sequencing Reactions onto Microreactor Chips,” Chemical Reviews, Aug. 2007, vol. 107, No. 8, pp. 3367-3376. |
Lee et al. “An Enhanced Glucose Biosensor Using Charge Transfer Techniques” Biosensors & Bioelectronics, vol. 24, No. 4, Dec. 2008, pp. 650-656. |
Lee et al., “Ion-sensitive Field-Effect Transistor for Biological Sensing”, Sensors, vol. 9, No. 9, 2009, pp. 7111-7131. |
Li et al., “Sequence-Specific Label-Free DNA Sensors based on Silico Nanowires”, Nano Letters, vol. 4, No. 2, Jan. 2004, pp. 245-247. |
Ligler et al., “Array biosensor for detection of toxins”, Analytical and Bioanalytical Chemistry, vol. 377, No. 3, Oct. 2003, pp. 469-477. |
Lin et al., “Practicing the Novolacdeep-UV portable conformable masking technique”, Journal of Vacuum Science and Technology, vol. 19, No. 4, 1981, pp. 1313-1319. |
Liu et al., “An ISFET based sensing array with sensor offset compensation and pH sensitivity enhancement”, IEEE International Symposium on Circuits and Systems, Jun. 2, 2010, pp. 2283-2286. |
Lohrengel et al., “A new microcell or microreactor for material surface investigations at large current densities”, Electrochimica Acta, vol. 49, Nos. 17-18, Jul. 2004, pp. 2863-2870. |
Lui et al., “A Test Chip for ISFET/CMNOS Technology Development”, IEEE International Conference on Microelectronic Test Structures, vol. 9, 1996, pp. 123-128. |
Maki et al., “Nanowire-transistor based ultra-sensitive DNA methylation detection”, Biosensors & Bioelectronics, vol. 23, No. 6, Jan. 2008, pp. 780-787. |
Margulies M., et al., “Genome Sequencing in Microfabricated High-Density Picolitre Reactors,” Nature, 2005, vol. 437, No. 7057, pp. 376-380. |
Marshall et al., “DNA chips: an array of possibilities”, Nature Biotechnology, vol. 16, No. 1, Jan. 1998, pp. 27-31. |
Martinoia et al., “A behavioral macromodel of the ISFET in SPICE”, Sensors and Actuators B: Chemical, vol. 62, No. 3, Mar. 2000, pp. 182-189. |
Martinoia S., et al., “Development of ISFET Array-Based Microsystems for Bioelectrochemical Measurements of Cell Populations,” Biosensors & Bioelectronics, Dec. 2001, vol. 16, Nos. 9-12, pp. 1043-1050. |
Matsuo et al. “Charge Transfer Type pH Sensor with Super High Sensitivity” 14th International Conference on Solid-State Sensors Actuators and Microsystems, France, Jun. 10-14, 2007, pp. 1881-1884. |
Matula, “Electrical Resistivity of Copper, Gold, Palladium, and Silver”, Journal of Physical and Chemical Reference Data, vol. 8, No. 4, 1979, pp. 1147-1298. |
Medoro et al., “A Lab-on-Chip for Cell Detection and Manipulation”, IEEE Sensors Journal, vol. 3, No. 3, 2003, pp. 317-325. |
Meyburg et al., “N-Channel field-effect transistors with floating gates for extracellular recordings”, Biosensors and Bioelectronics, vol. 21, No. 7, Jan. 15, 2006, pp. 1037-1044. |
Milgrew et al., “A 16x16 CMOS proton camera array for direct extracellular imaging of hydrogen-ion activity”, IEEE Inti Solid-State Circuits Conference, Session 32:24, 2008, pp. 590-591, 638. |
Milgrew et al., “A Proton Camera Array Technology for Direct Extracellular Ion Imaging”, IEEE International Symposium on Industrial Electronics, 2008, pp. 2051-2055. |
Milgrew et al., “Matching the transconductance characteristics of CMOS ISFET arrays by removing trapped charge”, IEEE Transactions on Electronic Devices, vol. 55, No. 4, 2008, pp. 1074-1079. |
Milgrew et al., “Microsensor Array Technology for Direct Extracellular Imaging”, Dept Electronic and EE, University of Glasgow, Apr. 5, 2006, pp. 1-23. |
Milgrew et al., “The fabrication of scalable multi-sensor arrays using standard CMOS technology”, IEEE Custom Integrated Circuits Conference, 2003, pp. 513-516. |
Milgrew M.J., et al., “A Large Transistor-based Sensor Array Chip for Direct Extracellular Imaging,” Sensors and Actuators B: Chemical, 2005, vol. 111-112, pp. 347-353. |
Milgrew M.J., et al., “The Development of Scalable Sensor Arrays Using Standard CMOS Technology,” Sensors and Actuators B: Chemical, Sep. 2004, vol. 103, Nos. 1-2, pp. 37-42. |
Miyahara et al., “Biochip Using Micromachining Technology”, Journal of Institute of Electrostatics, Japan, vol. 27, No. 6, 2003, pp. 268-272. |
Miyahara et al., “Direct Transduction of Primer Extension into Electrical Signal Using Genetic Field Effect Transistor”, Micro Total Analysis Systems, vol. 1, Proceedings of UTAS 2004, 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Malmo, Sweden, Sep. 26-30, 2004, pp. 303-305. |
Miyahara et al., “Potentiometric Detection of DNA Molecules Using Field Effect Transistor”, The Japan Society of Applied Physics, No. 3, 2003, pp. 1180, 30A-S2. |
Morgenshtein et al., “Wheatstone-Bridge readout interface for ISFET/REFET applications”, Sensors and Actuators B: Chemical, vol. 98, No. 1, Mar. 2004, pp. 18-27. |
Moriizumi, “Biosensors”, Oyo Buturi (monthly publication of the Japan Society of Applied Physics), vol. 54, No. 2, Feb. 10, 1985, pp. 98-114. |
Naidu et al., “Introduction to Electrical Engineering”, Chapter 1—Fundamental Concepts of Electricity, McGraw Hill Education (India) Private Limited, 1995, pp. 1-10. |
Nakazato, “An Integrated ISFET Sensor Array”, Sensors, Nov. 2009, vol. 9, No. 11, ISSN:1424-8220, [online], Internet, URL, http://www.mdpi.com/1424-8220/9/11/8831/pdf, Nov. 2009, pp. 8831-8851. |
Nakazato et al., “28p-Y-7 ISFET sensor array integrated circuits based on the standard CMOS process”, The 55th annual meeting of the Japan Society of Applied Physics, Book of Abstracts, Mar. 27, 2008, p. 70. |
Neaman, “Electronic Circuit Analysis and Design”, McGraw Hill Higher Education, 2nd Edition, Chapter 6—Basic FET Amplifiers, (reference will be uploaded in 2 parts due to size) part 1 of 2, Dec. 1, 2000, pp. 313-345. |
Neaman, “Electronic Circuit Analysis and Design”, McGraw Hill Higher Education, 2nd Edition, Chapter 6—Basic FET Amplifiers, (reference will be uploaded in 2 parts due to size) part 2 of 2, Dec. 1, 2000, pp. 346-381. |
Nishiguchi et al., “Si nanowire ion-sensitive field-effect transistors with a shared floating gate”, Applied Physics Letters, vol. 94, Apr. 2009, pp. 163106-1 to 163106-3. |
Nyren et al., “Enzymatic Method for Continuous Monitoring of Inorganic Pyrophosphate Synthesis”, Analytical Biochemistry, vol. 151, No. 2, Dec. 1985, pp. 504-509. |
Oelßner et al., “Encapsulation of ISFET sensor chips”, Sensors Actuators B: Chemical, vol. 105, No. 1, Feb. 2005, pp. 104-117. |
Oelßner et al., “Investigation of the dynamic response behavior of ISFET pH sensors by means of laser Doppler velocimetry (LDV)”, Sensors and Actuators B: Chemical, vol. 27, Nos. 1-3, Jun. 1995, pp. 345-348. |
Offenhausser et al., “Field-Effect transistor array for monitoring electrical activity from mammalian neurons in culture”, Biosensors & Bioelectronics, vol. 12, No. 8, Jan. 1997, pp. 819-826. |
Ohno et al., “Electrolyte-Gated Graphene Field-Effect Transistors for Detecting pH and Protein Adsorption”, Nano Letters, vol. 9, No. 9, Jul. 28, 2009, pp. 3318-3322. |
Palan et al., “New ISFET sensor interface circuit for biomedical applications”, Sensors and Actuators B: Chemical, vol. 57, Nos. 1-3, Sep. 1999, pp. 63-68. |
Park et al., “ISFET glucose sensor system with fast recovery characteristics by employing electrolysis”, Sensors and Actuators B: Chemical, vol. 83, Nos. 1-3, Mar. 15, 2002, pp. 90-97. |
Patolsky et al., “Nanowire-Based Biosensors”, Analytical Chemistry, vol. 78, No. 13, Jul. 1, 2006, pp. 4261-4269. |
PCT/JP2005/001987, Search Report, dated Apr. 5, 2005. |
PCT/JP2005/015522, Search Report, dated Sep. 27, 2005. |
PCT/US2007/025721, Declaration of Non-Establishment of International Search Report, dated Jul. 15, 2008. |
PCT/US2007/025721, Preliminary Report and Written Opinion on Patentability, dated Jun. 16, 2009. |
PCT/US2009/003766, Search Report and Written Opinion, dated Apr. 8, 2010. |
PCT/US2009/003797, Search Report and Written Opinion, dated Mar. 12, 2010. |
PCT/US2009/005745, Search Report and Written Opinion, dated Dec. 11, 2009. |
PCT/US2010/001543, Search Report and Written Opinion, dated Oct. 13, 2010. |
PCT/US2010/001553, Search Report and Written Opinion, dated Jul. 28, 2010. |
PCT/US2010/048835, Search Report and Written Opinion, dated Dec. 16, 2010. |
PCT/US2011/042655, Search Report and Written Opinion, dated Oct. 21, 2011. |
PCT/US2011/042660, Search Report and Written Opinion, dated Nov. 2, 2011. |
PCT/US2011/042665, Search Report and Written Opinion, dated Nov. 2, 2011. |
PCT/US2011/042668, Search Report and Written Opinion, dated Oct. 28, 2011. |
PCT/US2011/042669, Search Report and Written Opinion, dated Jan. 9, 2012. |
PCT/US2011/042683, Search Report and Written Opinion, dated Feb. 16, 2012. |
PCT/US2012/058996, Search Report and Written Opinion, dated Jan. 22, 2013. |
PCT/US2012/071471, Search Report and Written Opinion, dated Apr. 24, 2013. |
PCT/US2012/071482, Search Report and Written Opinion, dated May 23, 2013. |
PCT/US2013/022129, Search Report and Written Opinion, dated Aug. 9, 2013. |
PCT/US2013/022140, Search Report and Written Opinion, dated May 2, 2013. |
PCT/US2014/020887, Search Report and Written Opinion, dated May 30, 2014. |
PCT/US2014/020892, Search Report and Written Opinion, dated Jun. 3, 2014. |
PCT/US2014/040923, Search Report and Written Opinion, dated Sep. 1, 2014. |
PCT/US2015/066052, Search Report and Written Opinion, dated Apr. 7, 2016. |
Poghossian et al., “Functional testing and characterization of ISFETs on wafer level by means of a micro-droplet cell”, Sensors, vol. 6, No. 4, Apr. 2006, pp. 397-404. |
Pollack et al., “Genome-wide analysis of DNA copy-number changes using cDNA microarrays”, Nature Genetics, vol. 23, No. 1, Sep. 1999, pp. 41-46. |
Pourmand N., et al., “Direct Electrical Detection of DNA Synthesis,” Proceedings of the National Academy of Sciences, Apr. 25, 2006, vol. 103, No. 17, pp. 6466-6470. |
Pouthas et al., “Spatially resolved electronic detection of biopolymers”, Physical Review, vol. 70, No. 3, Sep. 2004, p. 031906-1-031906-8. |
Premanode et al., “A composite ISFET readout circuit employing current feedback”, Sensors Actuators B: Chemical, vol. 127, No. 2, Nov. 2007, pp. 486-490. |
Premanode et al., “A novel, low power biosensor for real time monitoring of creatinine and urea in peritoneal dialysis”, Sensors and Actuators B: Chemical, vol. 120, No. 2, Jan. 2007, pp. 732-735. |
Premanode et al., “Drift Reduction in Ion-Sensitive FETs using correlated double sampling”, Electronics Letters, vol. 43, No. 16, Aug. 2, 2007, pp. 857-859. |
Premanode et al., “Ultra-low power precision ISFET readout using global current feedback”, Electronic Letters, vol. 42, No. 22, Oct. 26, 2006, pp. 1264-1265. |
Purushothaman et al., “Protons and single nucleotide polymorphism detection: A simple use for the Ion Sensitive Field Effect Transistor”, Sensors and Actuators B: Chemical, vol. 114, No. 2, Apr. 2006, pp. 964-968. |
Purushothaman S., et al., “Towards Fast Solid State DNA Sequencing,” IEEE ISCAS Proceedings, Circuits and Systems, 2002, vol. 4, pp. IV-169-IV-172. |
Rodriguez-Villegas, “Solution to trapped charge in FGMOS transistors”, Electronics Letters, vol. 39, No. 19, Oct. 2003, pp. 1416-1417. |
Ronaghi M., et al., “A Sequencing Method Based on Real-Time Pyrophosphate,” Science, Jul. 17, 1998, vol. 281, pp. 363-365. |
Rothberg J.M., et al., “An Integrated Semiconductor Device Enabling Non-optical Genome Sequencing,” Nature, Jul. 20, 2011, vol. 475, pp. 348-352. |
Rowe et al., “An Array Immunosensor for Simultaneous Detection of Clinical Analytes”, Analytical Chemistry, vol. 71, No. 2, 1999, pp. 433-439. |
Sakata et al., “Cell-based field effect devices for cell adhesion analysis”, Intl. Conf. on Microtechnologies in Medicine and Biology, May 9-12, 2006, Okinawa, Japan, 2006, pp. 177-179. |
Sakata et al., “Detection of DNA recognition events using multi-well field effect transistor”, Biosensors & Bioelectronics, vol. 21, 2005, pp. 827-832. |
Sakata et al., “Detection sensitivity of genetic field effect transistor combined with charged nanoparticle-DNA conjugate”, Intl. Conf. on Microtechnologies in Medicine and Biology, May 9-12, 2005, Okinawa, Japan, 2006, pp. 97-100. |
Sakata et al., “Direct detection of single nucleotide polymorphism using genetic field effect transistor”, International Microprocesses and Nanotechnology Conference. Oct. 26-29, 2004. Osaka, Japan. Digest of Papers Microprocesses and Nanotechnology 2004. pp. 226-227. |
Sakata et al., “Direct Detection of Single-Base Extension Reaction Using Genetic Field Effect Transistor”, Proc. of 3rd Ann. Intl. IEEE EMBS Special Topic Conf. on Microtechnologies in Medicine and Biology, Kahuku, Oahu, HI, May 12-15, 2005, pp. 219-222. |
Sakata et al., “Direct transduction of allele-specific primer extension into electrical signal using genetic field effect transistor”, Biosensors & Bioelectronics, vol. 22, 2007, pp. 1311-1316. |
Sakata et al., “DNA Analysis Chip Based on Field-Effect Transistors”, Japanese Journal of Applied Physics, vol. 44, No. 4B, 2005, pp. 2854-2859. |
Sakata et al., “DNA Sequencing Using Genetic Field Effect Transistor”, 13th International Conference on Solid-State sensors, Actuators and Microsystems, vol. 2, Jun. 5-9, 2005, Seoul, Korea, pp. 1676-1679. |
Sakata et al., “Immobilization of oligonucleotide probes on Si3N4 surface and its application to genetic field effect transistor”, Materials Science and Engineering: C, vol. 24, Nos. 6-8, Dec. 2004, pp. 827-832. |
Sakata et al., “Potential Behavior of Biochemically Modified Gold Electrode for Extended-Gate Field-Effect Transistor”, Japanese Journal of Applied Physics, vol. 44, Part 1, No. 4S, Apr. 2005, pp. 2860-2863. |
Sakata et al., “Potential response of genetic field effect transistor to charged nanoparticle-DNA conjugate”, International Microprocesses and Nanotechnology Conference. Oct. 25-28, 2005. Tokyo, Japan. Digest of Papers Microprocesses and Nanotechnology 2005. pp. 42-43. |
Sakata et al., “Potentiometric Detection of Allele Specific Oligonucleotide Hybridization Using Genetic Field Effect Transistor”, Micro Total Analysis Systems, vol. 1,8th Intl. Conf. on Miniaturized Systems for Chemistry and Life Sciences, Sep. 26-30, 2004, Malmo, Sweden, pp. 300-302. |
Sakata et al., “Potentiometric Detection of DNA Molecules Hybridization Using Gene Field Effect Transistor and Intercalator”, Materials Research Society Symposium Proceedings, vol. 782, Micro- and Nanosystems, Boston, Massachusetts, Jan. 2003, pp. 393-398. |
Sakata et al., “Potentiometric Detection of DNA Using Genetic Transistor”, Denki Gakkai Kenkyukai Shiryo Chemical Sensor Kenkyukai, CHS-03-51-55, 2003, pp. 1-5. |
Sakata et al., “Potentiometric Detection of Single Nucleotide Polymorphism by Using a Genetic Field-effect transistor”, ChemBioChem, vol. 6, No. 4, Apr. 2005, pp. 703-710. |
Sakata T., et al., “DNA Sequencing Based on Intrinsic Molecular Charges,” Angewandte Chemie International, Mar. 27, 2006, vol. 45, No. 14, pp. 2225-2228. |
Sakurai T., et al., “Real-Time Monitoring of DNA Polymerase Reactions by a Micro ISFET pH Sensor,” Analytical Chemistry, Sep. 1992, vol. 64, No. 17, pp. 1996-1997. |
Salama, “CMOS luminescence detection lab-on-chip: modeling, design, and characterization”, Thesis, Presented at Stanford University, 2005, pp. ii-78. |
Salama, “Modeling and simulation of luminescence detection platforms”, Biosensors & Bioelectronics, vol. 19, No. 11, Jun. 15, 2004, pp. 1377-1386. |
Sawada et al., “A novel fused sensor for photo- and ion-sensing”, Sensors and Actuators B: Chemical, vol. 106, No. 2, May 2005, pp. 614-618. |
Sawada et al., “Highly sensitive ion sensors using charge transfer technique”, Sensors and Actuators B: Chemical, vol. 98, No. 1, Mar. 2004, pp. 69-72. |
Schasfoort et al., “A new approach to ImmunoFET operation”, Biosensors & Bioelectronics, vol. 5, No. 2, 1990, pp. 103-124. |
Schasfoort et al., “Field-effect flow control for microfabricated fluidic networks”, Science, vol. 286. No. 5441, Oct. 29, 1999, pp. 942-945. |
Schoning et al., “Bio FEDs (Field-Effect Devices): State-of-the-Art and New Directions”, Electroanalysis, vol. 18, Nos. 19-20, Sep. 2006, pp. 1893-1900. |
Schroder, “6. Oxide and Interface Trapped Charges, Oxide Thickness”, Semiconductor Material and Device Characterization, John Wiley & Sons, ISBN: 978-0-471-73906-7, Feb. 2006, pp. 319-387. |
Seong-Jin et al. “Label-Free CMOS DNA Quantification With On-Chip Noise Reduction Schemes” Solid-State Sensors, Actuators and Microsystems Conference, IEEE, Jun. 10, 2013, pp. 947-950. |
Shah, “Microfabrication of a parellelrray DNA pyrosequencing chip”, NNIN REU Research Accomplishments, 2005, pp. 130-131. |
Shepherd et al., “A biochemical translinear principle with weak inversion ISFETs”, IEEE Trans Circuits Syst-I, vol. 52, No. 12, Dec. 2005, pp. 2614-2619. |
Shepherd et al., “A novel voltage-clamped CMOS ISFET sensor interface”, IEEE, 2007, pp. 3331-3334. |
Shepherd et al., “Towards direct biochemical analysis with weak inversion ISFETS”, Intl Workshop on Biomedical, 2004, pp. S1.5-5-S1.5-8. |
Shepherd et al., “Weak inversion ISFETs for ultra-low power biochemical sensing and real-time analysis”, Sensors Actuators B, vol. 107, 2005, pp. 468-473. |
Shi et al., “Radical Capillary Array Electrophoresis Microplace and Scanner for High-Performance Nucleic Acid Analysis”, Analytical Chemistry, vol. 71, No. 23, 1999, pp. 5354-5361. |
Simonian et al., “FET based biosensors for the direct detection of organophosphate neurotoxins”, Electroanalysis, vol. 16, No. 22, 2004, pp. 1896-1906. |
Souteyrand et al., “Direct detection of the hybridization of synthetic homo-oligomer DNA sequences by field effect”, Journal of Physical Chemistry B, vol. 101, No. 15, 1997, pp. 2980-2985. |
Starodub et al., “Immunosensor for the determination of the herbicide simazine based on an ion-selective field-effect transistor”, Analytica Chimica Acta, vol. 424, No. 1, Nov. 2000, pp. 37-43. |
Takenaka et al., “DNA Sensing on a DNA Probe-Modified Electrode Using Ferrocenylnaphthalene Dimide as the Electrochemically Active Ligand”, Analytical Chemistry, vol. 72. No. 6, 2000, pp. 1334-1341. |
Temes et al., “A Tutorial Discussion of the Oversampling Method for A/D and D/A Conversion”, IEEE International Symposium on Circuits and Systems, vols. 2 of 4, 1990, 5 pages. |
Thewes et al., “CMOS-based Biosensor Arrays”, Proceedings of the Design, Automation and Test in Europe Conference and Exhibition, 2005, 2 pages. |
Tokuda et al., “A CMOS image sensor with optical and potential dual imaging function for on-chip bioscientific applications”, Sensors and Actuators A: Physical, vol. 125, No. 2, Jan. 2006, pp. 273-280. |
Tomaszewski et al., “Electrical characterization of ISFETs”, Journal of Telecommunications and Information Technology, Mar. 2007, pp. 55-60. |
Toumazou et al., “Using transistors to linearise biochemistry,” Electronics Letters, vol. 43, No. 2, Jan. 18, 2007, 3 pages. |
Truman et al. “Monitoring liquid transport and chemical composition in lab on a chip systems using ion sensitive FET devices”, Lab on a Chip, vol. 6, No. 9, Jul. 2006, pp. 1220-1228. |
Unknown, “ISFET Wikipedia article”, Wikipedia, Last modified Nov. 7, 2006. |
Unknown, “OV5640 Datasheet Product Specification”, 1/4″ color CMOS QSXGA (5 megapixel) image sensor with OmniBSI technology. May 1, 2011, p. 1, line 9 and pp. 2-7, paragraph 1. |
Uslu et al., “Labelfree fully electronic nucleic acid detection system based on a fieldeffect transistor device”, Biosensors and Bioelectronics, vol. 19. No. 12, Jul. 2004, pp. 1723-1731. |
Van Der Schoot et al., “The Use of a Multi-ISFET Sensor Fabricated in a Single Substrate”, Sensors and Actuators, vol. 12, No. 4, Nove.-Dec. 1987, pp. 463-468. |
Van Der Wouden et al., “Directional flow induced by synchronized longitudinal and zeta-potential controlling AC-electrical fields”, Lab Chip, vol. 6, No. 10, Oct. 2006, pp. 1300-1305. |
Van Hal et al., “A general model to describe the electrostatic potential at electrolyte oxide interfaces”, Advances in Colloid and Interface Science, vol. 69, Nos. 1-3, Dec. 1996, pp. 31-62. |
Van Kerkhof, “Development of an ISFET based heparin sensor using the ion-step measuring method”, Biosensors & Bioelectronics, vol. 8, Nos. 9-10, 1993, pp. 463-472. |
Van Kerkhof et al., “ISFET Responses on a stepwise change in electrolyte concentration at constant pH”, Sensors Actuators B: Chemical, vol. 18-19, Mar. 1994, pp. 56-59. |
Van Kerkhof et al., “The development of an ISFET-based heparin sensor,” Thesis 1994. Published Aug. 10, 1965. |
Van Kerkhof et al., “The ISFET based heparin sensor with a monolayer of protamine as affinity ligand”, Biosensors & Bioelectronics, vol. 10, Nos. 3-4, 1995, pp. 269-282. |
Vardalas, “Twists and Turns in the Development of the Transistor”, IEEE—USA Today's Engineer Online, May 2003, 6 pages. |
Voigt et al., “Diamond-like carbon-gate pH-ISFET”, Sensors and Actuators B: Chemical, vol. 44, Nos. 1-3, Oct. 1997, pp. 441-445. |
Wagner et al., “All-in-one solid-state device based on a light-addressable potentiometric sensor platform”, Sensors and Actuators B: Chemical, vol. 117, No. 2, Oct. 2006, pp. 472-479. |
Wang et al., “Label-free detection of small-molecule-protein interactions by using nanowire nanosensors”, Proceedings of the National Academy of Sciences, vol. 102, No. 9, Mar. 2005, pp. 3208-3212. |
Wilhelm et al., “pH Sensor Based on Differential Measurements on One pH-FET Chip”, Sensors and Actuators B: Chemical, vol. 4, Nos. 1-2, May 1991, pp. 145-149. |
Woias et al., “Slow pH response effects of silicon nitride ISFET sensors”, Sensors and Actuators B: Chemical, vol. 48, Nos. 1-3, May 1998, pp. 501-504. |
Woias P., et al., “Modelling the Short-Time Response of ISFET Sensors,” Sensors and Actuators B: Chemical, Mar. 1995, vol. 24, Nos. 1-3, pp. 211-217. |
Wood et al., “Base composition-independent hybridization in tetramethylammonium chloride: a method for oligonucleotide screening of highly complex gene libraries”, Proceedings of the National Academy of Sciences, vol. 82, No. 6, Mar. 1985, pp. 1585-1588. |
Wu et al., “DNA and protein microarray printing on silicon nitride waveguide surfaces”, Biosensensors & Bioelectronics, vol. 21, No. 7, Jan. 2006, pp. 1252-1263. |
Xu et al., “Analytical Aspects of FET-Based Biosensors”, Frontiers in Bioscience, vol. 10, Jan. 2005, pp. 420-430. |
Yeowt.C.W., et al., “A Very Large Integrated pH-ISFET Sensor Array Chip Compatible with Standard CMOS Processes,” Sensor and Actuators B: Chemical, Oct. 1997, vol. 44, Nos. 1-3, pp. 434-440. |
Yoshida et al., “Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al2O3—Ta2O5 and Al2O3—ZrO2”, Journal of the Electrochemical Society, vol. 151, No. 3, 2004, pp. H53-H58. |
Yuqing et al., “Ion sensitive field effect transducer-based biosensors”, Biotechnology Advances, vol. 21, No. 6, Sep. 2003, pp. 527-534. |
Zhang et al., “32-Channel Full Customized CMOS Biosensor Chip for Extracellular neural Signal Recording”, Proc. of the 2nd Intl. IEEE EMBs Conf. on Neural Engineering, Arlington, Virginia, Mar. 16-19, 2005, pp. v-viii. |
Zhao et al., “Floating-Gate Ion Sensitive Field-Effect Transistor for Chemical and Biological Sensing”, MRS Proceedings, vol. 828, 2005, pp. 349-354. |
Zhou et al., “Quantitative detection of single nucleotide polymorphisms for a pooled sample by a bioluminometric assay coupled with modified primer extension reactions (BAMPER)”, Nucleic Acids Research, vol. 29, No. 19, Oct. 2001, (e93), 1-11. |
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