TREA

Chemical vapor deposition wafer carrier with thermal cover

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Information

  • Patent Grant
  • D854506
  • Patent Number
    D854,506
  • Date Filed
    Monday, March 26, 2018
    6 years ago
  • Date Issued
    Tuesday, July 23, 2019
    5 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D15 144
    • D15 1441
    • D15 1442
    • D23 323
    • D23 328
    • D23 335
    • D23 336
    • D23 337
    • D23 341
    • D23 352
    • D23 357
    • D23 385
    • D23 386
    • D23 397
    • D23 399
    • D23 400
    • D23 406
    • D23 411
    • D23 413
    • D23 499
    • CPC
    • C23C16/455
    • C23C16/45502
    • C23C16/45517
    • C23C16/4582
    • C23C16/4583
    • C23C16/4584
    • C23C16/4585
    • C23C16/4401
    • C23C16/4402
    • C23C16/4409
    • H01L21/50
    • H01L21/4817
    • H01L21/4871
    • H01L23/02
    • H01L23/04
    • H01L23/12
    • H01L23/13
    • H01L23/14
    • H05K3/30
    • B24B37/27
    • B24B37/28
    • B24B37/30
    • B24B41/06
    • B24B41/067
    • B24B37/04
    • B64C11/04
    • B64C11/16
    • B64C11/14
    • B64C11/18
    • B64C11/20
    • B64C2001/009
    • F03D3/062
    • F04D19/002
    • F24F1/0018
    • B64D13/02
    • E04C2/427
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Information
Abstract
Description


FIG. 1 is a perspective view of a chemical vapor deposition wafer carrier with thermal cover, showing our new design.



FIG. 2 is a top plan view thereof.



FIG. 3 is a right side view thereof, with the left side view, front view, and rear view being identical.



FIG. 4 is a bottom plan view thereof; and,



FIG. 5 is a perspective view of the thermal cover of the chemical vapor deposition wafer carrier with thermal cover, shown separately for ease of illustration.


The broken lines in FIG. 4 form no part of the claimed design.


Claims
  • The ornamental design for a chemical vapor deposition wafer carrier with thermal cover, as shown and described.
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