The present invention relates to thermal inkjet printers and methods of forming the same, and more particularly, relates to different resolution thermal inkjet printheads and methods of forming the same using a common thermal ejection chip design.
Inkjet printers eject liquid ink droplets onto a recording medium, such as paper, from a printhead that moves relative to the recording medium and/or vice-versa. A printhead generally comprises one or more thermal ejection chips, each including a semiconductor substrate upon which one or more heater elements, such as electrical resistors, are disposed for transferring thermal energy into liquid ink. The liquid ink is heated such that a rapid volumetric change occurs in the ink resulting from a liquid to vapor transition and, consequently, the ink is forcibly ejected from the printhead as an ink droplet onto a recording medium.
In typical ejection chip designs, one of the first variables to be fixed is the vertical resolution of drop placement, i.e., the vertical spacing between drops of ink ejected from an ejection chip. From this starting point other properties such as the heater addressing matrix, input data register length, and chip clock speeds, to name a few, can be defined. Using this method, ejection chips with similar properties except for vertical resolution often have dissimilar electrical interfaces which require specific components for operation, for example, a unique ASIC, driver card and/or carrier for each design, to name a few. While this may provide a cost effective bill of materials for a specific design, such savings can be offset by increased development resources and time to market. Therefore, this design approach is best suited for high volume designs with long product life cycles.
An object of the present invention is to provide an improved chip architecture that enables shorter development cycles and customized designs to fit individual customer needs.
It is further an object of the present invention to provide a common chip base upon which a plurality of thermal ejection chip configurations can be achieved.
According to an exemplary embodiment, a method of fabricating a fluid ejection chip, and the resulting fluid ejection chip are disclosed. The method comprises: (a) providing a substrate; (b) forming a plurality of drive elements on the substrate; (c) forming a plurality of groups of drive elements, each group comprising at least two drive elements of the plurality of drive elements electrically coupled in parallel; (d) forming a plurality of fluid ejection devices on the substrate; and (e) electrically coupling each fluid ejection device of the plurality of fluid ejection devices with a respective group of the plurality of groups of drive elements so that the plurality of drive elements selectively activate the plurality of fluid ejection devices for causing fluid to be expelled from the printhead in accordance with image data.
In exemplary embodiments, the method comprises the step of forming a via on the substrate that provides fluid communication between the fluid ejection elements and a fluid supply.
In exemplary embodiments, the plurality of drive elements comprises transistors.
In exemplary embodiments, the step of electrically coupling each fluid ejection device with a respective group of drive elements comprises depositing an electrical interconnect on the substrate.
In exemplary embodiments, each group comprises four drive elements.
According to an exemplary embodiment, a fluid ejection chip is disclosed that comprises a substrate, a plurality of groups of drive elements formed on the substrate, and a plurality of fluid ejection devices disposed on the substrate. Each group of drive elements includes at least two drive elements electrically coupled in parallel. Each fluid ejection device of the plurality of fluid ejection devices is electrically coupled with a respective group of the plurality of groups of drive elements so that the plurality of drive elements selectively activate the plurality of fluid ejection devices for causing fluid to be expelled from the printhead in accordance with image data.
In exemplary embodiments, the substrate further comprises a via that provides fluid communication between the fluid ejection devices and a fluid supply.
In exemplary embodiments, each fluid ejection device of the plurality of fluid ejection devices elements is vertically spaced from an adjacent fluid ejection device along the via.
In exemplary embodiments, the plurality of fluid ejection devices is formed in two columns, each column on an opposing side of the via.
In exemplary embodiments, each fluid ejection device of the plurality of fluid ejection devices elements is vertically spaced a uniform distance from a vertically-adjacent fluid ejection device along the via.
In exemplary embodiments, each column is vertically offset from the other column.
In exemplary embodiments, each column is vertically offset from the other column by a distance that is half a uniform vertical distance between each vertically-adjacent fluid ejection device of the plurality of fluid ejection devices.
In exemplary embodiments, the plurality of groups of drive elements is comprised of transistors.
In exemplary embodiments, each group comprises four drive elements electrically coupled in parallel.
According to an exemplary embodiment, an inkjet printer is disclosed that comprises a printhead comprising a fluid ejection chip. The fluid ejection chip comprises a substrate, a plurality of groups of drive elements formed on the substrate, and a plurality of fluid ejection devices disposed on the substrate. Each group of drive elements includes at least two drive elements electrically coupled in parallel. Each fluid ejection device of the plurality of fluid ejection devices is electrically coupled with a respective group of the plurality of groups of drive elements so that the plurality of drive elements selectively activate the plurality of fluid ejection devices for causing fluid to be expelled from the printhead in accordance with image data.
The features and advantages of the present invention will be more fully understood with reference to the following, detailed description of illustrative embodiments of the present invention when taken in conjunction with the accompanying figures, wherein:
The headings used herein are for organizational purposes only and are not meant to be used to limit the scope of the description or the claims. As used throughout this application, the words “may” and “can” are used in a permissive sense (i.e., meaning having the potential to), rather than the mandatory sense (i.e., meaning must). Similarly, the words “include,” “including,” and “includes” mean including but not limited to. To facilitate understanding, like reference numerals have been used, where possible, to designate like elements common to the figures.
With reference to
Adhered to one surface 18 of the housing 12 is a portion 19 of a flexible circuit, especially a tape automated bond (TAB) circuit 20. The other portion 21 of the TAB circuit 20 is adhered to another surface 22 of the housing. In this embodiment, the two surfaces 18, 22 are perpendicularly arranged to one another about an edge 23 of the housing.
The TAB circuit 20 supports a plurality of input/output (I/O) connectors 24 for electrically connecting a heater chip 25 to an external device, such as a printer, fax machine, copier, photo-printer, plotter, all-in-one, etc., during use. Pluralities of electrical conductors 26 exist on the TAB circuit 20 to electrically connect and short the I/O connectors 24 to the input terminals (bond pads 28) of the heater chip 25. Those skilled in the art know various techniques for facilitating such connections. While
The heater chip 25 contains a column 34 of a plurality of fluid firing elements that serve to eject ink from compartment 16 during use. The fluid firing elements may embody resistive heater elements formed as thin film layers on a silicon substrate. In embodiments, other types of configurations, such as those with piezoelectric elements, may be used. The pluralities of fluid firing elements in column 34 are shown adjacent an ink via 32 as a row of five dots but in practice may include several hundred or thousand fluid firing elements. As described below, vertically adjacent ones of the fluid firing elements may or may not have a lateral spacing gap or stagger there between. In general, the fluid firing elements have vertical pitch spacing comparable to the dots-per-inch resolution of an attendant printer. Some examples include spacing of 1/300th, 1/600th, 1/1200th, 1/2400th or other of an inch along the longitudinal extent of the via. To form the vias, many processes are known that cut or etch the via 32 through a thickness of the heater chip. Some of the more preferred processes include grit blasting or etching, such as wet, dry, reactive-ion-etching, deep reactive-ion-etching, or other. A nozzle plate (not shown) has orifices thereof aligned with each of the heaters to project the ink during use. The nozzle plate may attach with an adhesive or epoxy or may be fabricated as a thin-film layer.
With reference to
While in the print zone, the carriage 42 reciprocates in the Reciprocating Direction generally perpendicularly to the paper 52 being advanced in the Advance Direction as shown by the arrows. Ink drops from compartment 16 (
To print or emit a single drop of ink, the fluid firing elements (the dots of column 34,
A control panel 58, having user selection interface 60, also accompanies many printers as an input 62 to the controller 57 to provide additional printer capabilities and robustness.
It will be understood that the inkjet printhead 10 and inkjet printer 40 described above are exemplary, and that other inkjet printheads and/or inkjet printer configurations may be used with the various embodiments of the present invention.
Turning now to
As shown, substrate 110 is provided in a substantially rectangular block shape, and may have been formed from, for example, a silicon wafer, to have such a configuration or may have been subject to one or more shaping processes, for example, dicing or cutting. In embodiments, substrate 110 may be provided in a substantially unprocessed configuration, for example, having one or more surface deformities and/or having an asymmetrical configuration.
Substrate 110 may be subject to one or more processes that form fluid channels within and/or along the substrate 110 and that define and/or deposit active electrical circuit elements or drive elements along portions of substrate 110. Such processes, termed front-end-of-line (FEOL) processes, may include, for example, semiconductor doping, etching, grit blasting, chemical-mechanical planarization, deposition of one or more layers of materials, and/or photolithographic patterning, to name a few.
In the exemplary embodiment described herein, FEOL processing is used to form a centrally-disposed ink via 112 along a portion of substrate 110 Ink via 112 may be in fluid communication with a reservoir of liquid ink, such as compartment 16 of a printhead 10 (
The FEOL processing of substrate 110 also disposes a number of drive elements, such as, for example, field effect transistors (FETs) 120 along thermal ejection chip 100. Each FET 120 may include a gate as well as source and drain terminals, so that a potential difference applied between the gate and the source terminal affects a conductive channel along which electrons flow between the source and the drain terminal. It will be understood that alternative configurations of transistors may be used in addition to and/or in place of FETs 120. In embodiments, FEOL processing may produce additional and/or alternative active circuit elements or drive elements on a substrate, for example, diodes, silicon-controlled rectifier devices (SCRs), and/or logic cells, to name a few. As described further herein, the configuration of substrate 110 and FETs 120 at the end of FEOL processing provides a base chip 150 upon which a plurality of configurations of thermal ejection chips may be selectively formed through subsequent processing steps.
Such a set of subsequent processing steps following FEOL processing, termed back-end-of-line (BEOL) processes include providing one or more interconnecting electrical elements, e.g., metallic wiring and/or contacts, between electrical elements and/or circuits defined on the semiconductor substrate 110 and/or portions thereof. Accordingly, BEOL processing steps may include deposition of materials on the substrate 110 such as conductive materials, resistive materials, and/or insulative materials, to name a few. In this regard, one or more completed electrical circuits are formed at the conclusion of BEOL processing. The FEOL and BEOL processes described above may be varied, for example with a different number of and/or alternative processing steps, to achieve desired results.
Referring to
Heaters 130, as shown, are arranged in columns L, R, so that vertically adjacent heaters 130 in a single column are separated a uniform distance D from one another along the ink via 112. In the exemplary embodiment shown, each vertically adjacent heater 130 of a single column is spaced about 42.3 μm from one another. However, each heater 130 of the column L on the left side of the ink via 112 is vertically offset from each corresponding heater 130 of the column R on the right side of the ink via 112 by a vertical distance of about half the uniform vertical distance D, e.g., D/2. In the exemplary embodiment shown, each heater 130 is vertically spaced a distance of about 21.2 μm from a corresponding heater 130 in the opposite column of heaters 130. Such a configuration may be used to define a 1200 dpi printhead.
In this regard, heaters 130 in the column L are vertically offset from heaters 130 in the column R such that the heaters 130 have a vertically staggered arrangement along ink via 112 so that a minimum amount of empty space, e.g., space devoid of a heater 130, is present on substrate 110 along ink via 112. Accordingly, droplets of liquid ink can be flash vaporized and ejected at a greater number of vertical positions, e.g., double, along thermal ejection chip 100 by advantageously using the symmetry of columns L, R of heaters 130 on opposite sides of ink via 112.
Turning now to
Such a reduction in the number of heaters 130 placed along thermal ejection chip 200 may be desirable based upon a particular inkjet printing application and/or due to considerations relating the fabrication process of the resulting thermal ejection chip, e.g., time, cost, material, and/or regulatory considerations. For example, it may be desirable to reduce resolution when printing on boxes or other non-traditional surfaces in a manufacturing environment. Industrial applications may be better served by printing with larger drops at a lower resolution. This provides improved throw distance (acceptable distance between the print head and the object) and enables higher overall print speeds.
In conventional printhead manufacturing processes, since the placement and arrangement of FETs is completed during FEOL processing, FEOL processing must be specifically tailored to the later BEOL processing of the heaters, with dependence on the desired resolution of the printhead. Such a disjoint in the method of fabrication of thermal ejection chips may result in, for example, greater monetary and/or time costs due to reconfiguring a fabrication and assembly process for different applications. Using the methods described in this invention, an inventory of wafers with a common base chip can be configured at the back-end process to serve multiple markets. For example, the same base chip could be configured as a 1200 dpi device for an office printer or as a 300 dpi device for industrial applications.
Accordingly, it would be desirable to provide a thermal ejection chip formed by FEOL processing that can later be tailored during BEOL processing so that the ejection chip can be used as a base “template” to achieve a variety of thermal generation profiles.
Turning now to
In this regard, drive unit 140 presents the option to activate one or both of the coupled FETs 120 to achieve a desired performance of a corresponding heater 130. Thus, a greater number of FETs 120 than needed for a particular inkjet printing operation may be provided, with the option to allow the excess number of FETs 120 to remain inactive and/or to modulate a coupled pair of FETs 120 in a drive unit 140 to deliver the standard electrical power output of a single FET 120. A user is thus presented with the option of tailoring base chip 150 (
Turning now to
Such a reduction in the number of heaters 130 placed along thermal ejection chip 100 may be desirable based upon a particular inkjet printing application and/or due to considerations relating the fabrication process of the resulting thermal ejection chip as described above.
Turning now to
In this regard, BEOL processing steps applied to base chip 150 (
In accordance with the exemplary embodiments described herein, a common base chip design 150 (
It will be understood that a common base chip design is not limited to the number and/or configuration of FETs 120 described above. In embodiments, the number and/or configuration of FETs 120 on a base chip may be dictated by the highest resolution of vertical drop placement, i.e., a base chip may include a number of FETs 120 corresponding to a maximum desired number of heaters 130 in a one-to-one ratio (the highest resolution case), and the various FETs 120 may be coupled into drive units for lower resolution cases.
As shown in
While this invention has been described in conjunction with the embodiments outlined above, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. Accordingly, the exemplary embodiments of the invention, as set forth above, are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit and scope of the invention.
This application is related to U.S. patent application Ser. No. _______(attorney docket no. 35968/1050), filed Aug. 28, 2014, entitled ADDRESS ARCHITECTURE FOR FLUID EJECTION CHIP, the contents of which are incorporated herein by reference in their entirety.