Circuit simulation method and circuit simulation apparatus

Abstract

A circuit simulation method for estimating electrical characteristics of a semiconductor device is provided. The circuit simulation method includes: (A) generating a device model parameter of a semiconductor device model used in a circuit simulation; and (B) executing the circuit simulation by using the semiconductor device model and the generated device model parameter. The (A) step includes: (a) generating a plurality of device model parameters with respect to a plurality of different temperatures; and (b) generating the device model parameter corresponding to a specified temperature by interpolating between the plurality of device model parameters.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, advantages and features of the present invention will be more apparent from the following description taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a view showing a schema of a process flow of a conventional model parameter extraction;

FIG. 2 is a flowchart showing an order of the conventional model parameter extraction;

FIG. 3 is a graph showing a device characteristics measurement data;

FIG. 4 is a graph showing a relation between the device characteristics measurement data and a result of a conventional circuit simulation;

FIG. 5 is a flowchart schematically showing a circuit simulation method according to the present invention;

FIG. 6 is a block diagram showing an example of a configuration of a circuit simulation apparatus according to the present invention;

FIG. 7 is a block diagram showing an example of a data storage unit in the circuit simulation apparatus;

FIG. 8 is a block diagram showing an example of a program storage unit in the circuit simulation apparatus;

FIG. 9 is a flowchart showing a method of generating intermediate data in the parameter extraction according to the present invention;

FIG. 10 is a flowchart showing a method of generating device model parameter sets in the parameter extraction according to the present invention;

FIG. 11 is a graph visually showing an example of the parameter extraction according to the present invention;

FIG. 12 is a flowchart showing a method of determining a device model parameter whose temperature dependence is not supported by a device model and a method of a circuit simulation at a temperature Tx;

FIG. 13 is a graph showing a relation between device characteristics measurement data and a result of the circuit simulation according to the present invention; and

FIGS. 14A and 14B are graphs showing the result of the circuit simulation according to the present invention and the conventional technique, respectively.

Claims

1. A circuit simulation method for estimating electrical characteristics of a semiconductor device, comprising: (A) generating a device model parameter of a semiconductor device model used in a circuit simulation; and(B) executing said circuit simulation by using said semiconductor device model and said generated device model parameter,wherein said (A) step includes;(a) generating a plurality of device model parameters with respect to a plurality of different temperatures; and(b) generating said device model parameter corresponding to a specified temperature by interpolating between said plurality of device model parameters.

2. The circuit simulation method according to claim 1, wherein temperature dependence of said device model parameter is not supported by said semiconductor device model.

3. The circuit simulation method according to claim 2, wherein said (a) step includes:(a1) reading a plurality of device characteristics measurement data indicating electrical characteristics of said semiconductor device and measured under said plurality of different temperatures; and(a2) generating said plurality of device model parameters so as to fit in with said plurality of device characteristics measurement data.

4. The circuit simulation method according to claim 3, wherein in said (a2) step, said plurality of device model parameters are so generated as to increase or decrease monotonically in accordance with temperature.

5. The circuit simulation method according to claim 3, wherein said plurality of different temperatures include a first temperature, a second temperature higher than said first temperature and a third temperature higher than said second temperature,wherein said plurality of device characteristics measurement data include:a first measurement data measured under a condition of said first temperature;a second measurement data measured under a condition of said second temperature; anda third measurement data measured under a condition of said third temperature,wherein said plurality of device model parameters include:a first device model parameter associated with said first temperature;a second device model parameter associated with said second temperature; anda third device model parameter associated with said third temperature,wherein said (a2) step includes:(a21) generating said first device model parameter so as to fit in with said first measurement data;(a22) generating said second device model parameter so as to fit in with said second measurement data; and(a23) generating said third device model parameter so as to be larger than said second device model parameter if said second device model parameter is larger than said first device model parameter, while generating said third device model parameter so as to be smaller than said second device model parameter if said second device model parameter is smaller than said first device model parameter.

6. A computer program product embodied on a computer-readable medium and, when executed, causing a computer to perform a circuit simulation method comprising: (A) generating a device model parameter of a semiconductor device model used in a circuit simulation; and(B) executing said circuit simulation by using said semiconductor device model and said generated device model parameter,wherein said (A) step includes:(a) generating a plurality of device model parameters with respect to a plurality of different temperatures; and(b) generating said device model parameter corresponding to a specified temperature by interpolating between said plurality of device model parameters.

7. The computer program product according to claim 6, wherein temperature dependence of said device model parameter is not supported by said semiconductor device model.

8. The computer program product according to claim 7, wherein said (a) step includes:(a1) reading a plurality of device characteristics measurement data indicating electrical characteristics of said semiconductor device and measured under said plurality of different temperatures from a storage device; and(a2) generating said plurality of device model parameters so as to fit in with said plurality of device characteristics measurement data.

9. The computer program product according to claim 8, wherein in said (a2) step, said plurality of device model parameters are so generated as to increase or decrease monotonically in accordance with temperature.

10. The computer program product according to claim 8, wherein said plurality of different temperatures include a first temperature, a second temperature higher than said first temperature and a third temperature higher than said second temperature,wherein said plurality of device characteristics measurement data include:a first measurement data measured under a condition of said first temperature;a second measurement data measured under a condition of said second temperature; anda third measurement data measured under a condition of said third temperature,wherein said plurality of device model parameters include:a first device model parameter associated with said first temperature;a second device model parameter associated with said second temperature; anda third device model parameter associated with said third temperature,wherein said (a2) step includes;(a21) generating said first device model parameter so as to fit in with said first measurement data;(a22) generating said second device model parameter so as to fit in with said second measurement data; and(a23) generating said third device model parameter so as to be larger than said second device model parameter if said second device model parameter is larger than said first device model parameter, while generating said third device model parameter so as to be smaller than said second device model parameter if said second device model parameter is smaller than said first device model parameter.

11. A circuit simulation apparatus for estimating electrical characteristics of a semiconductor device, comprising; a parameter generation module configured to generate a device model parameter of a semiconductor device model; anda simulation module configured to execute a circuit simulation by using said semiconductor device model and said generated device model parameter,wherein said parameter generation module generates a plurality of device model parameters with respect to a plurality of different temperatures, and generates said device model parameter corresponding to a specified temperature by interpolating between said plurality of device model parameters.

12. The circuit simulation apparatus according to claim 11, wherein temperature dependence of said device model parameter is not supported by said semiconductor device model.

13. The circuit simulation apparatus according to claim 12, wherein said parameter generation module reads a plurality of device characteristics measurement data indicating electrical characteristics of said semiconductor device and measured under said plurality of different temperatures, and generates said plurality of device model parameters so as to fit in with said plurality of device characteristics measurement data.

14. The circuit simulation apparatus according to claim 13, wherein said parameter generation module generates said plurality of device model parameters so as to increase or decrease monotonically in accordance with temperature.