Number | Name | Date | Kind |
---|---|---|---|
4342045 | Kim | Jul 1982 | |
4641173 | Malhi et al. | Feb 1987 | |
4654865 | Sunazuka et al. | Mar 1987 | |
4656491 | Igarashi | Apr 1987 | |
4675715 | Lepselter et al. | Jun 1987 | |
4686551 | Mihara | Aug 1987 | |
4689655 | Sonnenberger | Aug 1987 |
Entry |
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Murarka, "Refractory Silicides for Integrated Circuits", J. Vac. Sci. Technol., 17(4), Jul./Aug. 1980, pp. 776-792. |