Claims
- 1. A circuit for modifying the output of an ultrasonic generator, which comprises:a) modification circuitry which modifies the output; b) an AC switch, operatively connected to the modification circuitry, which switches the modification circuitry into and out of the output stage of the ultrasonic generator; and c) control circuitry, associated with the AC switch, which is adapted to turn off and turn on the AC switch.
- 2. The circuit according to claim 1 wherein the AC switch is a triac and wherein the control circuitry is operatively connected to the ultrasonic generator to activate the ultrasonic generator and to deactivate the ultrasonic generator when the triac is deactivated.
- 3. The circuit according to claim 1 wherein the AC switch is a series/parallel active device configuration.
- 4. The circuit according to claim 1 wherein the AC switch is an AC conducting device with forced turn off and turn on capability.
- 5. The circuit according to claim 1 wherein said AC switch is a triac and the control circuitry that supplies the turn off signal to the AC switch for a duration D1 is adapted to further supply a second turn off signal for a duration D2 to the ultrasonic generator, where D2 and D1 are concurrent for a time equal to or greater than the triac turn off time.
- 6. The circuit according to claim 1 wherein said AC switch is a pair of back to back silicon controlled rectifiers and the control circuitry that supplies the turn off signal to the AC switch for a duration D1 is adapted to supply the turn off signals to said rectifiers for the duration D1, and is adapted to further supply a third turn off signal for a duration D2 to the ultrasonic generator, where D2 and D1 are concurrent for a time equal to or greater than the turn off time of said silicon controlled rectifiers.
- 7. The circuit according to claim 1 wherein the AC switch is a back to back or a series gate controlled thyristor configuration.
- 8. The circuit according to claim 1 wherein the ultrasonic generator is a multiple frequency ultrasonic generator.
- 9. The circuit according to claim 1 wherein the ultrasonic generator is an oscillator.
- 10. The circuit according to claim 1 wherein the ultrasonic generator is a non self-oscillating ultrasonic generator.
- 11. The circuit according to claim 8 wherein the output of the ultrasonic generator comprises a center frequency wherein the modification circuitry maintains full power output from the ultrasonic generator as the center frequency of the ultrasonic generator is changed.
- 12. The circuit according to claim 1 wherein the output of the ultrasonic generator comprises an output frequency wherein the modification circuitry produces a change in the output frequency.
- 13. The circuit according to claim 1 wherein the output of the ultrasonic generator comprises an output amplitude, wherein the modification circuitry produces a change in the output amplitude.
- 14. The circuit according to claim 1 wherein the output of the ultrasonic generator comprises an output power wherein the modification circuitry produces a change in the output power.
- 15. The circuit according to claim 1 wherein the output of the ultrasonic generator comprises an output impedance wherein the modification circuitry produces a change in the output impedance.
- 16. The circuit according to claim 1 wherein the output of the ultrasonic generator comprises an output waveform wherein the modification circuitry produces a change in the output waveform.
- 17. The circuit according to claim 1 wherein the modification circuitry comprises at least one capacitor.
- 18. The circuit according to claim 1 wherein the modification circuitry comprises at least one inductor.
- 19. The circuit according to claim 1 wherein the modification circuitry comprises at least one resistor.
- 20. The circuit according to claim 1 wherein the modification circuitry comprises an active and passive network, said active and passive network comprising active components and the control circuitry is adapted to control said active components in said active and passive network.
- 21. A circuit for modifying the output frequency of an ultrasonic oscillator, which comprisesa) at least one capacitor modification circuit, adapted to be inserted into the output stage of the oscillator, for changing the output frequency; b) at least one AC switch, which is operatively connected to the at least one capacitor modification circuit, for switching the at least one capacitor modification circuit into and out of the output stage of the ultrasonic oscillator; and c) a controller, operatively connected to the at least one AC switch, to selectively activate and deactivate the at least one AC switch.
- 22. The circuit according to claim 21 wherein the at least one AC switch is a triac and the controller is operatively connected to the oscillator to selectively activate the oscillator and deactivate the oscillator when the at least one triac is deactivated.
- 23. The circuit according to claim 21, wherein the at least one AC switch is a series/parallel active device configuration.
- 24. The circuit according to claim 21 wherein the least one AC switch is a pair of back to back silicon controlled rectifiers and the controller is operatively connected to the ultrasonic oscillator to selectively activate the ultrasonic oscillator and deactivate the ultrasonic oscillator when the at least one pair of back to back silicon controlled rectifiers is deactivated.
- 25. The circuit according to claim 21, wherein the at least one capacitor modification circuit is comprised of a capacitor.
- 26. The circuit according to claim 22, wherein the controller is adapted to supply a first turn off signal for a duration D2 to the ultrasonic oscillator and a second turn off signal for a duration D1 to one or more of the triacs, such that D2 and D1 are concurrent for a time equal to or greater than the triac turn off time.
- 27. The circuit according to claim 26 wherein the controller is further adapted to selectively activate and deactivate the one or more triacs so as to step sweep the output frequency of the ultrasonic oscillator.
- 28. A circuit for modifying the output frequency of an ultrasonic oscillator, which comprisesa) at least one inductor modification circuit, adapted to be inserted into the output stage of the ultrasonic oscillator, for modifying the output frequency; b) at least one AC switch, which is operatively connected to the at least one inductor modification circuit, for switching the at least one inductor modification circuit into and out of the output stage of the ultrasonic oscillator; and c) a controller, operatively connected to the at least one AC switch, to selectively activate and deactivate the at least one AC switch.
- 29. The circuit according to claim 28 wherein the at least one AC switch is a triac and the controller is operatively connected to the ultrasonic oscillator to selectively activate the ultrasonic oscillator and deactivate the ultrasonic oscillator when the at least one triac is deactivated.
- 30. The circuit according to claim 28, wherein the at least one AC switch is a series/parallel active device configuration.
- 31. The circuit according to claim 28 wherein the least one AC switch is a pair of back to back silicon controlled rectifiers and the controller is operatively connected to the ultrasonic oscillator to selectively activate the ultrasonic oscillator and deactivate the ultrasonic oscillator when the at least one pair of back to back silicon controlled rectifiers is deactivated.
- 32. The circuit according to claim 28, wherein the at least one inductor modification circuit is comprised of an inductor.
- 33. The circuit according to claim 29, wherein the controller is adapted to supply a first turn off signal for a duration D2 to the ultrasonic oscillator and a second turn off signal for a duration D1 to one or more of the triacs, such that D2 and D1 are concurrent for a time equal to or greater than the triac turn off time.
- 34. The circuit according to claim 33 wherein the controller is further adapted to selectively activate and deactivate the one or more triacs so as to step sweep the output frequency of the ultrasonic oscillator.
- 35. A circuit for modifying the output of a non self-oscillating ultrasonic generator, which comprises:a) at least one capacitor modification circuit, adapted to be inserted into the output stage of the ultrasonic generator, which modifies the output power or amplitude of the ultrasonic generator; b) at least one AC switch, which is operatively connected to the at least one capacitor modification circuit, for switching the at least one capacitor modification circuit into and out of the output stage of the ultrasonic generator; and c) a controller, operatively connected to the at least one AC switch to selectively activate and deactivate the at least one AC switch.
- 36. The circuit according to claim 35 wherein the at least one AC switch is a triac and the controller is operatively connected to the ultrasonic generator to activate the ultrasonic generator and to deactivate the ultrasonic generator when the at least one triac is deactivated.
- 37. The circuit according to claim 35, wherein the at least one AC switch is a series/parallel active device configuration.
- 38. The circuit according to claim 35, wherein each of the at least one AC switch is a pair of back to back silicon controlled rectifiers.
- 39. The circuit according to claim 35, wherein the at least one capacitor modification circuit is comprised of at least one capacitor.
- 40. The circuit according to claim 36, wherein the controller is adapted to supply a first turn off signal for a duration D2 to the ultrasonic generator and a second turn off signal for a duration D1 to one or more of the triacs, such that D2 and D1 are concurrent for a time equal to or greater than the triac turn off time.
- 41. The circuit according to claim 35 wherein the AC switch is an AC conducting device with forced turn off and turn on capability.
- 42. The circuit according to claim 35 wherein the AC switch is a back to back or a series gate controlled thyristor configuration.
- 43. A circuit for modifying the output of a non self-oscillating ultrasonic generator, which comprises:a) at least one inductive modification circuit, adapted to be inserted into the output stage of the ultrasonic generator, which modifies the output power or amplitude of the ultrasonic generator; b) at least one AC switch, which is operatively connected to the at least one inductive modification circuit, for switching the at least one inductive modification circuit into and out of the output stage of the ultrasonic generator; and c) a controller, operatively connected to the at least one AC switch to selectively activate and deactivate the at least one AC switch.
- 44. The circuit according to claim 43 wherein the at least one AC switch is a triac and the controller is operatively connected to the ultrasonic generator to activate the ultrasonic generator and to deactivate the ultrasonic generator when the at least one triac is deactivated.
- 45. The circuit according to claim 43, wherein the at least one AC switch is a series/parallel active device configuration.
- 46. The circuit according to claim 43, wherein each of the at least one AC switch is a pair of back to back silicon controlled rectifiers.
- 47. The circuit according to claim 43, wherein the at least one inductive modification circuit is comprised of at least one inductor.
- 48. The circuit according to claim 44, wherein the controller is adapted to supply a first turn off signal for a duration D2 to the ultrasonic generator and a second turn off signal for a duration D1 to one or more of the triacs, such that D2 and D1 are concurrent for a time equal to or greater than the triac turn off time.
- 49. The circuit according to claim 43 wherein the AC switch is an AC conducting device with forced turn off and turn on capability.
- 50. The circuit according to claim 43 wherein the AC switch is a back to back gate controlled thyristor configuration.
- 51. The circuit according to claim 43 wherein the AC switch is a series gate controlled thyristor configuration.
- 52. A circuit for modifying the output of an ultrasonic generator having at least one transducer, which comprises:a) modification circuitry which modifies the output; b) at least one AC switch operatively connected to said modification circuitry; c) control circuitry adapted to turn off and turn on the AC switch said control circuitry comprising: (i) at least one binary code input; (ii) at least one monostable multivibrator operatively connected to said at least one binary code input; (iii) a NOR gate operatively connected to said at least one monostable multivibrator and adapted to transmit a reduced voltage to said at least one AC switch; (iv) at least one sub-circuit comprising a resistor and a capacitor said at least one sub-circuit operatively connected to said at least one binary input and adapted to delay transmission of a signal to said at least one AC switch; and (v) at least one binary code decoder operatively connected between said at least one sub-circuit and to said at least one AC switch.
- 53. A circuit for modifying the output of an ultrasonic generator according to claim 52 wherein said binary code decoder is made with NAND logic units.
- 54. The circuit according to claim 52 wherein said modification circuit modifies the output of a multiple frequency ultrasonic generator and is located between said at least one transducer and said ultrasonic generator.
- 55. The circuit according to claim 54 wherein said modification circuit comprising at least one capacitor; and wherein said AC switch comprising at least one triac operatively connected to said at least one capacitor wherein said at least one capacitor and said at least one triac are connected in parallel between said at least one transducer and said ultrasonic generator.
- 56. The circuit according to claim 55 wherein said modification circuit further comprises a sub-circuit, said sub-circuit having a second capacitor and a second AC switch connected in series wherein said sub-circuit is connected in series with said at least one transducer when said second AC switch is on.
- 57. The circuit according to claim 56 where in said modification circuit further comprises a second sub-circuit said second sub-circuit having a third capacitor and a third AC switch connected in series wherein said second subcircuit is connected in parallel with said at least one transducer when said third AC switch is on.
- 58. The circuit according to claim 57 wherein said modification circuit further comprises a third sub-circuit said third sub-circuit comprising a fourth capacitor and a fourth AC switch in series, wherein said third subcircuit is connected in parallel with said at least one transducer when said fourth AC switch is on.
- 59. The circuit according to claim 58 wherein said modification circuit further comprises a fourth sub-circuit said fourth sub-circuit comprising a fifth capacitor and a fifth AC switch forming a series structure.
- 60. The circuit of claim 52 wherein said AC switch is a triac.
- 61. The circuit of claim 52 wherein said AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 62. The circuit of claim 52 wherein said AC switch is a series/parallel active device configuration.
- 63. A circuit for modifying the output of an ultrasonic oscillator comprising:a) one capacitor modification circuit having (i) a capacitor; (ii) at least one AC switch operatively connected in series to said capacitor; and, b) a controller operatively connected to said AC switch and operatively connected to said ultrasonic oscillator.
- 64. The circuit according to claim 63 wherein said at least one AC switch is a triac.
- 65. The circuit according to claim 63 wherein said at least one AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 66. The circuit of claim 63 wherein said AC switch is a series/parallel active device configuration.
- 67. The circuit of claim 63 further comprising:a second capacitor modification circuit having a second capacitor operatively connected in series to a second AC switch, said second AC switch operatively connected to said controller.
- 68. The circuit according to claim 67 wherein said second AC switch is a triac.
- 69. The circuit according to claim 67 wherein said second AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 70. The circuit of claim 67 wherein said second AC switch is a series/parallel active device configuration.
- 71. A modification circuit of claim 67 further comprising;a third capacitor modification circuit having a third capacitor operatively connected in series to a third AC switch, said third AC switch operatively connected to said controller.
- 72. The circuit according to claim 71 wherein said third AC switch is a triac.
- 73. The circuit according to claim 71 wherein said third AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 74. The circuit of claim 71 wherein said third AC switch is a series/parallel active device configuration.
- 75. A modification circuit for modifying the output frequency of an ultrasonic oscillator comprising:a) at least one inductor modification circuit having (i) at least one inductor; and, (ii) an AC switch operatively connected in series to said at least one inductor; and, b) a controller operatively connected to each of said AC switch and said ultrasonic oscillator.
- 76. The circuit according to claim 75 wherein said AC switch is a triac.
- 77. The circuit according to claim 75 wherein said AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 78. The circuit of claim 75 wherein said AC switch is a series/parallel active device configuration.
- 79. A modification circuit according to claim 75 further comprising a resistor modification circuit having at least one resistor and a second AC switch operatively connected in series with said at least one resistor, said second AC switch operatively connected to said controller, wherein said resistor modification circuit is connected in parallel with said at least one inductor modification circuit.
- 80. The circuit according to claim 79 wherein said second AC switch is a triac.
- 81. The circuit according to claim 79 wherein said second AC switch is a pair of back-to-back silicon-controlled rectifiers.
- 82. The circuit of claim 79 wherein said second AC switch is a series/parallel active device configuration.
- 83. A modification circuit according to claim 79 further comprising:a capacitor modification circuit having, at least one capacitor and a third AC switch, said at least one capacitor and said third AC switch forming a parallel structure, wherein said third AC switch is operatively connected to said controller.
- 84. The circuit according to claim 83 wherein said third AC switch is a triac.
- 85. The circuit according to claim 83 wherein said third AC switch is a pair of back-to-back silicon controlled rectifiers.
- 86. The circuit of claim 83 wherein said second AC switch is a series/parallel active device configuration.
- 87. A modification circuit for modifying the output of a non self-oscillating ultrasonic generator comprising:a) at least one capacitor modification circuit adapted to be inserted into the output stage of said non self-oscillating ultrasonic generator, said at least one capacitor modification circuit having at least one capacitor; b) at least one AC switch operatively connected to said at least one capacitor modification circuit; and, c) a controller operatively connected to said at least one AC switch.
- 88. The circuit according to claim 87 wherein said at least one AC switch is a triac.
- 89. The circuit according to claim 87 wherein said at least one AC switch is a pair of back-to-back silicon controlled rectifiers.
- 90. A circuit for modifying the output of a non-self oscillating ultrasonic generator comprising:a) at least one inductor modification circuit having at least one inductor; b) at least one AC switch operatively connected to said at least one inductor modification circuit; and c) a controller operatively connected to said at least one AC switch.
- 91. The circuit according to claim 90 wherein said at least one AC switch is a triac.
- 92. The circuit according to claim 90 wherein said at least one AC switch is a series/parallel active device configuration.
- 93. The circuit according to claim 90 wherein each of the at least one AC switch is a pair of back-to-back silicon controlled rectifiers.
- 94. The circuit according to claim 90 wherein the AC switch is a back-to-back gate controlled thyristor configuration.
- 95. The circuit according to claim 90 wherein the AC switch is a series gate controlled thyristor configuration.
CROSS REFERENCE TO RELATED APPLICATIONS
The following U.S. Patents and pending U.S. Patent Applications are related to the present application, and hereby incorporated by reference:
U.S. application Ser. No. 08/718,945 filed Sep. 24, 1996, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which claims priority of Provisional Application Ser. No. 60/023,150 filed Aug. 5, 1996, entitled “Apparatus and Methods for Processing and Cleaning Semiconductor Wafers and Other Delicate Parts”. U.S. application Ser. No. 08/718,945 issued in Nov. 10, 1998 as U.S. Pat. No. 5,834,871.
U.S. application Ser. No. 09/066,171 filed Apr. 24, 1998, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which is a continuation of U.S. Pat. No. 5,834,871 and is issued in Dec. 14, 1999 as U.S. Pat. No. 6,002,195.
U.S. application Ser. No. 09/097,374, filed Jun. 15, 1998, entitled “Systems and Methods for Ultrasonically Processing Delicate Parts”, issued on Jan. 25, 2000 as U.S. Pat. No. 6,016,821, claiming priority to U.S. Provisional Patent Application Ser. No. 60/049,717 filed on Jun. 16, 1997, and entitled “Systems and Methods for Ultrasonically Processing Delicate Parts”. U.S. application Ser. No. 09/097,374 is also a continuation-in-part of U.S. application Ser. No. 08/718,945, filed on Sep. 24, 1996, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which issued on Nov. 10, 1998 as U.S. Pat. No. 5,834,871.
U.S. application Ser. No. 09/066,158 filed Apr. 24, 1998, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which is a continuation-in-part of U.S. Pat. No. 5,834,871 and is issued in Jan. 30, 2001 as U.S. Pat. No. 6,181,051 B1 U.S. application Ser. No. 09/066,158 also claims priority to U.S. Provisional application 60/023,150.
U.S. application Ser. No. 09/370,302, filed Aug. 9, 1999, entitled “Probe System for Ultrasonic Processing Tank”, still pending.
U.S. application Ser. No. 09/371,704, filed Aug. 9, 1999, entitled “Ultrasonic Generating Unit having a Plurality of Ultrasonic Transducers”, now issued Jan. 30, 2001 as U.S. Pat. No. 6,181,052 B1.
U.S. application Ser. No. 09/370,751, filed Aug. 9, 1999, entitled “Power System for Impressing AC voltage Across a Capacitive Element”, and is now issued Jan. 9, 2001 as U.S. Pat. No. 6,172,444 B1.
U.S. application Ser. No. 09/370,324, filed Aug. 9, 1999, entitled “Ultrasonic Transducer with Bias Bolt Compression Bolt”, issued on Sep. 11, 2001 as U.S. Pat. No. 6,288,476 B1.
U.S. application Ser. No. 09/370,301, filed Aug. 9, 1999, entitled “Ultrasonic Transducer with Epoxy Compression Elements”, now issued Jun. 5, 2001 as U.S. Pat. No. 6,242,847 B1.
U.S. application Ser. No. 09/504,567, filed Feb. 15, 2000, entitled “Multiple Frequency Cleaning System”, issued on Nov. 6, 2001 as U.S. Pat. No. 6,313,565 B1.
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