Patent Grant
7451553
This application claims priority to Chinese Application No. 200610024139.5; filed on Feb. 24, 2006; commonly assigned, and of which is hereby incorporated by reference for all purposes.
The present invention is directed to integrated circuits and their processing for the manufacture of semiconductor devices. More particularly, the invention provides a method and device for a clean room shoe and/or boot for the manufacture of integrated circuits. As merely an example, the shoe and/or boot is used in a clean room facility having a rating of about Class 100, Class 10, or better. But it would be recognized that the invention has a much broader range of applicability.
Integrated circuits have evolved from a handful of interconnected devices fabricated on a single chip of silicon to millions of devices. Conventional integrated circuits provide performance and complexity far beyond what was originally imagined. In order to achieve improvements in complexity and circuit density (i.e., the number of devices capable of being packed onto a given chip area), the size of the smallest device feature, also known as the device “geometry”, has become smaller with each generation of integrated circuits.
Increasing circuit density has not only improved the complexity and performance of integrated circuits but has also provided lower cost parts to the consumer. An integrated circuit or chip fabrication facility can cost hundreds of millions, or even billions, of U.S. dollars. Each fabrication facility will have a certain throughput of wafers, and each wafer will have a certain number of integrated circuits on it. Therefore, by making the individual devices of an integrated circuit smaller, more devices may be fabricated on each wafer, thus increasing the output of the fabrication facility. Making devices smaller is very challenging, as each process used in integrated fabrication has a limit. That is to say, a given process typically only works down to a certain feature size, and then either the process or the device layout needs to be changed. Additionally, as devices require faster and faster designs, improved fabrication facilities and other related articles must be improved.
An example of an article that has limitations is a clean room garment and shoes. These garments and shoes must periodically be washed in order to maintain a substantially particle free environment in conventional fabrication facilities, commonly called wafer fabs. Unfortunately, life expectancy of clean room garments and shoes are often limited. These and other limitations of clean room garments can be found throughout the present specification and more particularly below.
From the above, it is seen that an improved technique for processing semiconductor devices including cleaning clean room garments is desired.
According to the present invention, techniques for processing integrated circuits for the manufacture of semiconductor devices are provided. More particularly, the invention provides a method and device for a clean room shoe and/or boot for the manufacture of integrated circuits. As merely an example, the shoe and/or boot is used in a clean room facility having a rating of about Class 100, Class 10, or better. But it would be recognized that the invention has a much broader range of applicability.
In a specific embodiment, the present invention provides a clean room shoe article, e.g., shoe, boot, safety shoe, safety boot. The article has a sole region. The article has an upper particle free polymer material having a toe region and an ankle region. The upper particle free polymer material is coupled to the sole region. The upper particle free polymer material is capable of enclosing a foot of a human user. The toe region houses an entirety of toes of the human user. The article has a steel toe housing member enclosing and protecting the entirety of the toes of the human user. The article has an enclosure provided in the toe region of the upper particle free polymer material. The enclosure is adapted to house the steel toe housing member. A sealing region is provided within a vicinity of the enclosure. The sealing region is adapted to maintain the steel toe housing member within the enclosure and is also adapted to open and remove the steel toe housing member from the enclosure provided in the toe region of the upper particle free polymer material.
In an alternative specific embodiment, the present invention provides a method for cleaning a clean room shoe article, e.g., shoe, boot, safety shoe, safety boot. The method includes providing the article. The article has a sole region. The article has an upper particle free polymer material having a toe region and an ankle region. The upper particle free polymer material is coupled to the sole region. The upper particle free polymer material is capable of enclosing a foot of a human user. The toe region houses an entirety of toes of the human user. The article has a steel toe housing member enclosing and protecting the entirety of the toes of the human user. The article has an enclosure provided in the toe region of the upper particle free polymer material. The enclosure is adapted to house the steel toe housing member. A sealing region is provided within a vicinity of the enclosure. The sealing region is adapted to maintain the steel toe housing member within the enclosure and is also adapted to open and remove the steel toe housing member from the enclosure provided in the toe region of the upper particle free polymer member. In a specific embodiment, the method includes releasing the sealing region and removing at least the steel toe housing member from the enclosure. In a preferred embodiment, the steel toe housing member is free and clear from the article. The method includes subjecting the clean room shoe article without the steel toe housing member to one or more cleaning processes.
Many benefits are achieved by way of the present invention over conventional techniques. For example, the present technique provides an easy to use process that relies upon conventional technology. In some embodiments, the method provides higher device yields in dies per wafer. Additionally, the method provides a process that is compatible with conventional process technology without substantial modifications to conventional equipment and processes. Preferably, the invention provides for an improved clean room shower that can withstand multiple washings without substantial damage to the clean room shoe according to a specific embodiment. Depending upon the embodiment, one or more of these benefits may be achieved. These and other benefits will be described in more throughout the present specification and more particularly below.
Various additional objects, features and advantages of the present invention can be more fully appreciated with reference to the detailed description and accompanying drawings that follow.
According to the present invention, techniques for processing integrated circuits for the manufacture of semiconductor devices are provided. More particularly, the invention provides a method and device for a clean room shoe and/or boot for the manufacture of integrated circuits. As merely an example, the shoe and/or boot is used in a clean room facility having a rating of about Class 100, Class 10, or better. But it would be recognized that the invention has a much broader range of applicability.
In a specific embodiment, the article has a sealing region 107 is provided within a vicinity of the enclosure. The sealing region is adapted to maintain the steel toe housing member within the enclosure and is also adapted to open and remove the steel toe housing member from the enclosure provided in the toe region of the upper particle free polymer member. As shown, the sealing region is closed and seals the steel toe housing member within the enclosure. Of course, there can be other variations, modifications, and alternatives. Further details of the sealing region are provided throughout the present specification and more particularly below.
A method for cleaning a shoe article according to an embodiment of the present invention may be outlined as follows.
1. Provide a shoe article (which has been described above);
2. Release the sealing region;
3. Remove at least the steel toe housing member from the enclosure to free and clear from the article;
4. Subject the clean room shoe article without the steel toe housing member to one or more cleaning processes;
5. Inspect clean room shoe article;
6. Insert the steel toe housing member into the enclosure;
7. Seal sealing region;
8. Use shoe article in clean room;
9. Repeat steps 2 through 8; and
10. Perform other steps, as desired.
The above sequence of steps provides a method according to an embodiment of the present invention. In a specific embodiment, the present invention provides a method for cleaning a shoe article, which removes the steel toe housing member. Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein. Details of the present method and structure can be found throughout the present specification and more particularly below.
A sealing region is provided within a vicinity of the enclosure. The sealing region is adapted to maintain the steel toe housing member within the enclosure and is also adapted to open and remove the steel toe housing member from the enclosure provided in the toe region of the upper particle free polymer member. In a specific embodiment, the method includes releasing the sealing region and removing at least the steel toe housing member from the enclosure. In a preferred embodiment, the steel toe housing member is free and clear from the article. The method includes subjecting the clean room shoe article without the steel toe housing member to one or more cleaning processes.
In a specific embodiment, the method includes using (step 405) the shoe article. The shoe article is used in a clean room environment. The shoe article is preferably a safety shoe and/or boot with a steel toe member to protect the toes of a user. The steel toe member is capable of withstanding a force of about one metric ton and less according to a specific embodiment. Of course, there can be other variations, modifications, and alternatives.
In a specific embodiment, the method removes the steel toe housing member from the enclosure, step 407. The method unseals the sealing region to expose the steel toe housing member according to a specific embodiment. Depending upon the embodiment, the sealing region can be a zipper, zip lock apparatus, buttons, or other locking devices. Of course, there can be other variations, modifications, and alternatives.
The method subjects the shoe article without steel toe member into a cleaning process, step 409. The cleaning process can be a combination of solvents, water based solutions, surfactants, and other solutions to remove contaminants and/or particles from the shoe article. Of course, there are other variations, modifications, and alternatives.
In a specific embodiment, the method inserts (step 411) the steel toe housing member into the enclosure of the shoe article after cleaning. Depending upon the embodiment, the method determines if the cleaning process is acceptable, step 413. If the cleaning process is acceptable and the shoe article meets specifications, the shoe article is used again, step 405, via branch 417. Alternatively, the method goes to stop, step 415, via branch 419. Of course, there are other variations, modifications, and alternatives.
The above sequence of steps provides a method according to an embodiment of the present invention. In a specific embodiment, the present invention provides a method for cleaning a shoe article, which removes the steel toe housing member. Other alternatives can also be provided where steps are added, one or more steps are removed, or one or more steps are provided in a different sequence without departing from the scope of the claims herein.
It is also understood that the examples and embodiments described herein are for illustrative purposes only and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application and scope of the appended claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2006 1 0024139 | Feb 2006 | CN | national |
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