Patent Application
20200063064
The present invention relates to a cleaning liquid including a fine gas bubble group in a liquid.
Patent Document 1 discloses a cleaning liquid. The cleaning liquid includes nano-size gas bubbles dissolved in a liquid at a saturation dissolution concentration. Patent Document 1 focuses on the hydrogen bonding distance of the liquid molecules in order to improve the cleaning effect.
Patent Document 1: Japanese Patent Application Laid-open No. 2011-88979
Patent Document 1 in addition focuses on external forces that collapse gas bubbles. Such external forces include pressure change, temperature change, shock waves, ultrasonic waves, infrared radiation and vibration. It is surmised that the collapse of gas bubbles contributes to an improvement in the cleaning power.
An object of the present invention is to provide a cleaning liquid that exhibits a remarkably better cleaning effect than ever before.
According to a first aspect of the present invention, there is provided a cleaning liquid comprising a liquid, a first fine gas bubble group included in the liquid and comprising a gas at a first temperature, and a second fine gas bubble group included in the liquid and comprising a gas at a second temperature that is lower than the first temperature.
In accordance with the first aspect, when an object makes contact with the cleaning liquid, the first fine gas bubble group and the second fine gas bubble group act one after another on the border (interface contour) between the surface of the object and a substance (e.g. contaminant) adhering to the surface of the object. Due to the gas at a first temperature and the gas at a second temperature acting on the same position, the temperature repeatedly changes at the interface contour (the temperature oscillates). The oscillation of the temperature causes detachment at the interface. Accompanying the progress of detachment the gas penetrates into the inside via the contour. In this way, the substance becomes detached from the surface of the object. The substance is separated from the object. By virtue of the action of the temperature oscillation, the cleaning liquid exhibits a remarkably better cleaning effect than ever before even without necessarily using the energy of collapsing gas bubbles.
Embodiments of the present invention are explained below by reference to the attached drawings.
The first gas bubble generating device 14 has a supply port 14a opening in the liquid 13. The first gas bubble generating device 14 shoots out fine gas bubbles into the liquid 13 via the supply port 14a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of a defined value or less. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 14a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles is preferably no greater than 1 μm. Here, the first gas bubble generating device 14 shoots out a first fine gas bubble group formed from gas at a first temperature. The concentration of the gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 16a is connected to the first gas bubble generating device 14. The gas source 16a supplies gas to the first gas bubble generating device 14. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. A temperature regulating device 17a is connected to the gas source 16a. The temperature regulating device 17a regulates the temperature of the gas of the gas source 16a. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 17a (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the first temperature is supplied from the gas source 16a to the first gas bubble generating device 14.
Similarly, the second gas bubble generating device 15 has a supply port 15a opening in the liquid 13. The second gas bubble generating device 15 shoots out fine gas bubbles into the liquid 13 via the supply port 15a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of a defined value or less. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 15a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles is preferably no greater than 1 μm. Here, the second gas bubble generating device 15 shoots out a second fine gas bubble group formed from gas at a second temperature that is lower than the first temperature. The diameter of the gas may not only be equal to that of the first gas bubble generating device 14 but may also be smaller or larger than that. The average diameter of the second fine gas bubble group is preferably smaller than the average diameter of the first fine gas bubble group. The concentration of the gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 16b is connected to the second gas bubble generating device 15. The gas source 16b supplies gas to the second gas bubble generating device 15. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first gas bubble generating device 14. A temperature regulating device 17b is connected to the gas source 16b. The temperature regulating device 17b regulates the temperature of the gas of the gas source 16b. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 17b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the second temperature is supplied from the gas source 16b to the second gas bubble generating device 15.
When such a cleaning liquid production device 11 operates, a first fine gas bubble group 18a formed from gas at the first temperature and a second fine gas bubble group 18b formed from gas at the second temperature are shot out into the liquid 13 in the liquid tank 12. As a result, a cleaning liquid including the first fine gas bubble group 18a formed from gas at the first temperature and the second fine gas bubble group 18b formed from gas at the second temperature in the single liquid 13 is produced. The temperature of the liquid 13 may be set freely to be at least the second temperature but no greater than the first temperature. When the liquid 13 is for example pure water or an aqueous solution, the temperature of the liquid 13 is desirably set at no greater than 80 degrees Celsius. If the temperature of the water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
A temperature regulating device 25a is connected to the liquid tank 22. The temperature regulating device 25a regulates the temperature of the preliminary cleaning liquid 23 within the liquid tank 22. When regulating the temperature in this way, thermal energy is applied to the preliminary cleaning liquid 23 from the temperature regulating device 25a (or the liquid is deprived thereof). Thermal energy (either plus or minus) may be transferred to the preliminary cleaning liquid 23 by any method. Here, the thermal energy is in equilibrium between the first fine gas bubble group 24 and the liquid in the preliminary cleaning liquid 23. Therefore, the temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the preliminary cleaning liquid 23. Here, the temperature of the preliminary cleaning liquid 23 is maintained at the first temperature by virtue of the temperature regulating device 25a. The first temperature is desirably set at no greater than 80 degrees Celsius. When the liquid is for example pure water or an aqueous solution, if the temperature of the pure water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
A gas bubble generating device 26 is connected to the liquid tank 22. The gas bubble generating device 26 has a supply port 26a opening in the preliminary cleaning liquid 23. The gas bubble generating device 26 shoots out fine gas bubbles into the preliminary cleaning liquid 23 via the supply port 26a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 26a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the gas bubble generating device 26 shoots out a second fine gas bubble group 27 formed from a gas at a second temperature that is lower than the first temperature. The diameter of the gas may not only be equal to but may also be smaller than or larger than that of the first fine gas bubble group 24 included in the preliminary cleaning liquid 23. The average diameter of the second fine gas bubble group 27 is preferably smaller than the average diameter of the first fine gas bubble group 24. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 28 is connected to the gas bubble generating device 26. The gas source 28 supplies gas to the gas bubble generating device 26. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first fine gas bubble group 24. A temperature regulating device 25b is connected to the gas source 28. The temperature regulating device 25b regulates the temperature of the gas of the gas source 28. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 25b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the second temperature is supplied from the gas source 28 to the gas bubble generating device 26.
When such a cleaning liquid production device 21 operates, the second fine gas bubble group 27 formed from the gas at the second temperature is shot out into the preliminary cleaning liquid 23 in the liquid tank 22. As a result, a cleaning liquid including the first fine gas bubble group 24 formed from the gas at the first temperature and the second fine gas bubble group 27 formed from the gas at the second temperature in a single liquid is produced. The temperature of the liquid may be set freely to be at least the second temperature but no greater than the first temperature. In the arrangement above, the first fine gas bubble group 24 formed from the gas at the first temperature is present in the preliminary cleaning liquid 23 in advance, and the second fine gas bubble group 27 formed from the gas at the second temperature, which is lower than the first temperature, is shot out into the preliminary cleaning liquid 23; conversely, the second fine gas bubble group 27 formed from the gas at the second temperature may be present in the preliminary cleaning liquid 23 in advance, and the first fine gas bubble group 24 formed from the gas at the first temperature may be shot out into the preliminary cleaning liquid 23.
A first gas bubble generating device 34 is connected to the first liquid tank 32a. The first gas bubble generating device 34 has a supply port 34a opening in the liquid. The liquid may employ not only pure water but also a liquid that uses water or an organic solvent as a solvent and has an electrolyte, a surfactant, a gas, etc. dissolved therein. The first gas bubble generating device 34 shoots out fine gas bubbles into the liquid via the supply port 34a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 34a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the first gas bubble generating device 34 shoots out a first fine gas bubble group 35a formed from the gas at a first temperature. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 36a is connected to the first gas bubble generating device 34. The gas source 36a supplies gas to the first gas bubble generating device 34. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. A temperature regulating device 37a is connected to the gas source 36a. The temperature regulating device 37a regulates the temperature of the gas of the gas source 36a. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 37a (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the first temperature is supplied from the gas source 36a to the first gas bubble generating device 34.
In this arrangement, a temperature regulating device may be connected to the first liquid tank 32a. The thermal energy is in equilibrium between the first fine gas bubble group 35a and the liquid in the first preliminary cleaning liquid 33a. The temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the first preliminary cleaning liquid 33a. The temperature of the first preliminary cleaning liquid 33a may be maintained at the first temperature by virtue of the temperature regulating device.
Similarly, a second gas bubble generating device 38 is connected to the second liquid tank 32b. The second gas bubble generating device 38 has a supply port 38a opening in the liquid. The liquid may employ a liquid that uses water or an organic solvent as a solvent and has an electrolyte, a surfactant, a gas, etc. dissolved therein. The second gas bubble generating device 38 shoots out fine gas bubbles into the liquid via the supply port 38a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 38a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the second gas bubble generating device 38 shoots out a second fine gas bubble group 35b formed from the gas at the second temperature, which is lower than the first temperature. The diameter of the gas may not only be equal to but may also be smaller than or larger than that of the first gas bubble generating device 34. The average diameter of the second fine gas bubble group is preferably smaller than the average diameter of the first fine gas bubble group. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 36b is connected to the second gas bubble generating device 38. The gas source 36b supplies gas to the second gas bubble generating device 38. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first gas bubble generating device 34. A temperature regulating device 37b is connected to the gas source 36b. The temperature regulating device 37b regulates the temperature of the gas of the gas source 36b. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 37b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the second temperature is supplied from the gas source 36b to the second gas bubble generating device 38.
In this arrangement, a temperature regulating device may be connected to the second liquid tank 32b. The thermal energy is in equilibrium between the second fine gas bubble group 35b and the liquid in the second preliminary cleaning liquid 33b. The temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the second preliminary cleaning liquid 33b. The temperature of the second preliminary cleaning liquid 33b may be maintained at the second temperature by virtue of the temperature regulating device.
When such a cleaning liquid production device 31 operates, the first preliminary cleaning liquid 33a including the first fine gas bubble group 35a formed from the gas at the first temperature is produced in the first liquid tank 32a, and the second preliminary cleaning liquid 33b including the second fine gas bubble group 35b formed from the gas at the second temperature is produced in the second liquid tank 32b. As a result of the first preliminary cleaning liquid 33a and the second preliminary cleaning liquid 33b being mixed in the mixing vessel 32c, a cleaning liquid 39 including the first fine gas bubble group 35a formed from the gas at the first temperature and the second fine gas bubble group 35b formed from the gas at the second temperature in a single liquid is produced. The temperature of the liquid may be set freely to be at least the second temperature but no greater than the first temperature. When the liquid is for example pure water or an aqueous solution, the temperature of the liquid 13 is desirably set at no greater than 80 degrees Celsius. If the temperature of the pure water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
The cleaning device 41 includes a stirring mechanism 45. The stirring mechanism 45 has a holder 45a for holding an object to be cleaned W. The holder 45a is immersed in the cleaning liquid 42. The stirring mechanism 45 drives the holder 45a so as to move the object to be cleaned W in the cleaning liquid 43 of the cleaning tank 42. In this way, the object to be cleaned W is exposed to the cleaning liquid 43. The cleaning liquid 43 is stirred accompanying the movement. The first fine gas bubble group 44a and the second fine gas bubble group 44b are mixed with each other in response to being stirred. The first fine gas bubble group 44a and the second fine gas bubble group 44b collide with the surface of the object to be cleaned W. Fine gas bubbles having different temperatures make contact one after another with the border (interface contour) between the surface of the object to be cleaned W and a contaminant. Due to the fine gas bubbles having different temperatures acting on the same position, a repeated temperature change (temperature oscillation) occurs at the interface contour. The temperature oscillation causes detachment at the interface. Fine gas bubbles penetrate into the inside from the contour accompanying the progress of detachment. In this way, the contaminant becomes detached from the surface of the object to be cleaned W. The contaminant is separated from the object to be cleaned W. By virtue of such temperature oscillation, the cleaning liquid 43 exhibits a remarkably better cleaning effect than ever before without necessarily utilizing the energy of collapsing gas bubbles.
The first gas bubble generating device 54 has a supply port 54a opening in the liquid 53. The first gas bubble generating device 54 shoots out fine gas bubbles into the liquid 53 via the supply port 54a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 54a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the first gas bubble generating device 54 shoots out a first fine gas bubble group formed from gas at a first temperature. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 56a is connected to the first gas bubble generating device 54. The gas source 56a supplies gas to the first gas bubble generating device 54. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. A temperature regulating device 57a is connected to the gas source 56a. The temperature regulating device 57a regulates the temperature of the gas of the gas source 56a. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 57a (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the first temperature is supplied from the gas source 56a to the first gas bubble generating device 54.
Similarly, the second gas bubble generating device 55 has a supply port 55a opening in the liquid 53. The second gas bubble generating device 55 shoots out fine gas bubbles into the liquid 53 via the supply port 55a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 55a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the second gas bubble generating device 55 shoots out a second fine gas bubble group formed from a gas at a second temperature that is lower than the first temperature. The diameter of the gas may not only be equal to but may also be smaller than or larger than that of the first gas bubble generating device 54. The average diameter of the second fine gas bubble group is preferably smaller than the average diameter of the first fine gas bubble group. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 56b is connected to the second gas bubble generating device 55. The gas source 56b supplies gas to the second gas bubble generating device 55. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first gas bubble generating device 54. A temperature regulating device 57b is connected to the gas source 56b. The temperature regulating device 57b regulates the temperature of the gas of the gas source 56b. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 57b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, the gas at the second temperature is supplied from the gas source 56b to the second gas bubble generating device 55.
The cleaning device 51 includes a holding mechanism 58. The holding mechanism 58 has a holder 58a that is immersed in the cleaning liquid within the cleaning tank 52. The holder 58a holds an object to be cleaned W. The holding mechanism 58 may drive the holder 58a in the cleaning liquid so as to move the object to be cleaned W in the cleaning liquid or may hold the object to be cleaned W in the cleaning liquid in a stationary state. In this way, the object to be cleaned W is exposed to the cleaning liquid.
When the cleaning device 51 operates, a first fine gas bubble group 59a and a second fine gas bubble group 59b are each shot out toward the object to be cleaned W. As a result, a cleaning liquid including in the liquid 53 the first fine gas bubble group 59a formed from the gas at the first temperature and the second fine gas bubble group 59b formed from the gas at the second temperature is produced. The first fine gas bubble group 59a and the second fine gas bubble group 59b thus shot out collide with the object to be cleaned W. Fine gas bubbles having different temperatures make contact one after another with the border (interface contour) between the surface of the object to be cleaned W and a contaminant. Due to the fine gas bubbles having different temperatures acting on the same position, a repeated temperature change occurs at the interface contour (temperature oscillation). The temperature oscillation causes detachment at the interface. Fine gas bubbles penetrate into the inside from the contour accompanying the progress of detachment. In this way, the contaminant becomes detached from the surface of the object to be cleaned W. The contaminant is separated from the object to be cleaned W. By virtue of such temperature oscillation, the cleaning liquid exhibits a remarkably better cleaning effect than ever before without necessarily utilizing the energy of collapsing gas bubbles. The temperature of the liquid 53 may be set freely to be at least the second temperature but no greater than the first temperature. When the liquid 53 is for example pure water or an aqueous solution, the temperature of the liquid 53 is desirably set at no greater than 80 degrees Celsius. If the temperature of the pure water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
A temperature regulating device 65a is connected to the cleaning tank 62. The temperature regulating device 65a regulates the temperature of the preliminary cleaning liquid 63 within the cleaning tank 62. When regulating the temperature in this way, thermal energy is applied to the preliminary cleaning liquid 63 from the temperature regulating device 65a (or the liquid is deprived thereof). Thermal energy (either plus or minus) may be transferred to the preliminary cleaning liquid 63 by any method. Here, the thermal energy is in equilibrium between the first fine gas bubble group 64 and the liquid in the preliminary cleaning liquid 63. Therefore, the temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the preliminary cleaning liquid 63. Here, the temperature of the preliminary cleaning liquid 63 is maintained at a first temperature by virtue of the temperature regulating device 65a. The first temperature is desirably set at no greater than 80 degrees Celsius. When the liquid is for example pure water or an aqueous solution, if the temperature of the pure water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
A gas bubble generating device 66 is connected to the cleaning tank 62. The gas bubble generating device 66 has a supply port 66a opening in the preliminary cleaning liquid 63. The gas bubble generating device 66 shoots out fine gas bubbles into the preliminary cleaning liquid 63 via the supply port 66a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 66a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the gas bubble generating device 66 shoots out a second fine gas bubble group 67 formed from a gas at a second temperature that is lower than the first temperature. The diameter of the gas may not only be equal to but may also be smaller than or larger than that of the first fine gas bubble group 64 included in the preliminary cleaning liquid 63. The average diameter of the second fine gas bubble group 67 is preferably smaller than the average diameter of the first fine gas bubble group 64. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 68 is connected to the gas bubble generating device 66. The gas source 68 supplies gas to the gas bubble generating device 66. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first fine gas bubble group 64. A temperature regulating device 65b is connected to the gas source 68. The temperature regulating device 65b regulates the temperature of the gas of the gas source 68. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 65b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the second temperature is supplied from the gas source 68 to the gas bubble generating device 66.
The cleaning device 61 includes a holding mechanism 58. The holding mechanism 58 has a holder 58a immersed in the cleaning liquid within the cleaning tank 62. The holder 58a holds an object to be cleaned W. The holding mechanism 58 may drive the holder 58a in the cleaning liquid so as to move the object to be cleaned W in the cleaning liquid or may hold the object to be cleaned W in the cleaning liquid in a stationary state. In this way, the object to be cleaned W is exposed to the cleaning liquid.
When carrying out cleaning, the cleaning tank 62 is filled with the preliminary cleaning liquid 63. The temperature of the preliminary cleaning liquid 63 is maintained at the first temperature. Here, the object to be cleaned W is immersed in the preliminary cleaning liquid 63. When the cleaning device 61 operates, the second fine gas bubble group 67 formed from the gas at the second temperature is shot out toward the object to be cleaned W. As a result, a cleaning liquid including in the liquid the first fine gas bubble group 64 formed from the gas at the first temperature and the second fine gas bubble group 67 formed from the gas at the second temperature is produced. The temperature of the liquid may be set freely to be at least the second temperature but no greater than the first temperature. The first fine gas bubble group 64 caught up in the second fine gas bubble group 67 thus shot out and the second fine gas bubble group 67 collide with the object to be cleaned W. The fine gas bubbles having different temperatures make contact one after another with the border (interface contour) between a contaminant and the surface of the object to be cleaned W. Due to the fine gas bubbles having different temperatures acting on the same position, a repeated temperature change occurs at the interface contour (temperature oscillation). The temperature oscillation causes detachment at the interface. Fine gas bubbles penetrate into the inside from the contour accompanying the progress of detachment. In this way, the contaminant becomes detached from the surface of the object to be cleaned W. The contaminant is separated from the object to be cleaned W. By virtue of such temperature oscillation, the cleaning liquid exhibits a remarkably better cleaning effect than ever before without necessarily utilizing the energy of collapsing gas bubbles. In the above, the first fine gas bubble group 64 formed from the gas at the first temperature is present in the preliminary cleaning liquid 63 in advance, and the second fine gas bubble group 67 formed from the gas at the second temperature, which is lower than the first temperature, is shot out into the preliminary cleaning liquid 63; conversely, the second fine gas bubble group 67 formed from the gas at the second temperature may be present in the preliminary cleaning liquid 63 in advance, and the first fine gas bubble group 64 formed from the gas at the first temperature may be shot out into the preliminary cleaning liquid 63.
A first liquid tank 75a is connected to the first liquid supply device 72a. The first preliminary cleaning liquid is supplied from the first liquid tank 75a to the first liquid supply device 72a. A first gas bubble generating device 76 is connected to the first liquid tank 75a. The first gas bubble generating device 76 has a supply port 76a opening in a liquid 77a. The liquid 77a may employ not only pure water but also a liquid that uses water or an organic solvent as a solvent and has an electrolyte, a surfactant, a gas, etc. dissolved therein. The first gas bubble generating device 76 shoots out fine gas bubbles into the liquid 77a via the supply port 76a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 76a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the first gas bubble generating device 76 shoots out a first fine gas bubble group formed from a gas at a first temperature. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 78a is connected to the first gas bubble generating device 76. The gas source 78a supplies gas to the first gas bubble generating device 76. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. A temperature regulating device 79a is connected to the gas source 78a. The temperature regulating device 79a regulates the temperature of the gas of the gas source 78a. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 79a (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the first temperature is supplied from the gas source 78a to the first gas bubble generating device 76.
In this arrangement, a temperature regulating device may be connected to the first liquid tank 75a. The thermal energy is in equilibrium between the first fine gas bubble group and the liquid in the first preliminary cleaning liquid. The temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the first preliminary cleaning liquid. The temperature of the first preliminary cleaning liquid may be maintained at the first temperature by virtue of the temperature regulating device.
Similarly, a second liquid tank 75b is connected to the second liquid supply device 72b. The second preliminary cleaning liquid is supplied from the second liquid tank 75b to the second liquid supply device 72b. A second gas bubble generating device 81 is connected to the second liquid tank 75b. The second gas bubble generating device 81 has a supply port 81a opening in a liquid 77b. The liquid 77b may employ not only pure water but also a liquid that uses water or an organic solvent as a solvent and has an electrolyte, a surfactant, a gas, etc. dissolved therein. The second gas bubble generating device 81 shoots out fine gas bubbles into the liquid 77b via the supply port 81a. The fine gas bubbles include microbubbles and nanobubbles. The fine gas bubbles may be a collection of gas bubbles having an average diameter of no greater than a defined value. The diameter of the gas bubbles may be set based on the diameter of a fine hole provided in the supply port 81a. The diameter of the fine hole is set at no greater than 50 μm. The diameter of the gas bubbles may preferably be no greater than 1 μm. Here, the second gas bubble generating device 81 shoots out the second fine gas bubble group formed from the gas at the second temperature, which is higher than the first temperature. The diameter of the gas bubbles may not only be equal to but may also be smaller than or larger than that of the first gas bubble generating device 76. The average diameter of the second fine gas bubble group is preferably smaller than the average diameter of the first fine gas bubble group. The concentration of gas bubbles having a diameter of no greater than 1 μm is desirably 1×106 or greater per milliliter.
A gas source 78b is connected to the second gas bubble generating device 81. The gas source 78b supplies gas to the second gas bubble generating device 81. The gas is not limited to air, nitrogen, hydrogen, etc. and may be any type of gas. The type of gas may be the same as or different from that of the first gas bubble generating device 76. A temperature regulating device 79b is connected to the gas source 78b. The temperature regulating device 79b regulates the temperature of the gas of the gas source 78b. When regulating the temperature in this way, thermal energy is applied to the gas from the temperature regulating device 79b (or the gas is deprived thereof). Thermal energy (either plus or minus) may be transferred to the gas by any method. Here, gas at the second temperature is supplied from the gas source 78b to the second gas bubble generating device 81.
In this arrangement, a temperature regulating device may be connected to the second liquid tank 75b. The thermal energy is in equilibrium between the second fine gas bubble group and the liquid in the second preliminary cleaning liquid. The temperature of the gas included in individual fine gas bubbles can be considered to be equal to a temperature measured as the second preliminary cleaning liquid. The temperature of the second preliminary cleaning liquid may be maintained at the second temperature by virtue of the temperature regulating device.
When carrying out cleaning, the object to be cleaned W is set in the holder 58a. When the cleaning device 71 operates, a first preliminary cleaning liquid 82a and a second preliminary cleaning liquid 82b are made to shoot out from the first spout pipe 73a and the second spout pipe 73b respectively toward the object to be cleaned W. The first preliminary cleaning liquid 82a and the second preliminary cleaning liquid 82b are mixed and splashed over the object to be cleaned W. As a result, a cleaning liquid including in the liquid the first fine gas bubble group formed from the gas at the first temperature and the second fine gas bubble group formed from the gas at the second temperature is produced in the liquid. The first fine gas bubble group and the second fine gas bubble group collide with the object to be cleaned W. The fine gas bubbles having different temperatures make contact one after another with the border (interface contour) between the surface of the object to be cleaned W and a contaminant. Due to the fine gas bubbles having different temperatures acting on the same position, a repeated temperature change occurs at the interface contour (temperature oscillation). The temperature oscillation causes detachment at the interface. Fine gas bubbles penetrate into the inside from the contour accompanying the progress of detachment. In this way, the contaminant becomes detached from the surface of the object to be cleaned W. The contaminant is separated from the object to be cleaned W. By virtue of such temperature oscillation, the cleaning liquid exhibits a remarkably better cleaning effect than ever before without necessarily utilizing the energy of collapsing gas bubbles. The temperature of the liquid may be set freely to be at least the second temperature but no greater than the first temperature. When the liquid is for example pure water or an aqueous solution, the temperature of the liquid is desirably set at no greater than 80 degrees Celsius. If the temperature of the pure water or the aqueous solution exceeds 80 degrees Celsius, the gas bubbles cannot maintain a high numerical density in a stable manner.
In all of the above embodiments, a combination of microbubbles and nanobubbles can be used as the first fine gas bubble group and the second fine gas bubble group. That is, either of the first fine gas bubble group and the second fine gas bubble group may employ microbubbles, and the other may employ nanobubbles. Due to the difference in the amount of thermal energy included in individual gas bubbles, the nanobubbles generate a gentle temperature change at the interface between the object to be cleaned W and a contaminant, and the microbubbles generate a rapid temperature change at the interface between the object to be cleaned W and a contaminant. The rapid temperature change causes rapid expansion of the object or rapid compression of the object, thus accelerating detachment of the contaminant.
The present inventors carried out verification in accordance with the cleaning device 51 related to the fifth embodiment described above. In the verification, temperature conditions were examined for the liquid 53, the first fine gas bubble group 59a and the second fine gas bubble group 59b. The liquid 53 employed pure water. For the examination, the liquid tank 52 was filled with 50 L of pure water. The temperature (=TL) of the pure water was regulated. Atmosphere (air) was supplied to the first gas bubble generating device 54 from the gas source 56a. The temperature (first temperature T1) of the air was regulated. The amount of fine gas bubbles was set at on the order of 1×106 per milliliter. The diameter of the fine gas bubbles was set at approximately 500 nm. A film having pores with a diameter of 500 nm was used when forming the fine gas bubbles. The first fine gas bubble group 59a was continuously shot out over 10 minutes.
Atmosphere (air) was supplied to the second gas bubble generating device 55 from the gas source 56b. The temperature (second temperature T2) of the air was regulated. The amount of fine gas bubbles was set at on the order of 1×106 per milliliter. The diameter of the fine gas bubbles was set at approximately 500 nm. A film having pores with a diameter of 500 nm was used when forming the fine gas bubbles. The second fine gas bubble group 59b was continuously shot out over 10 minutes.
The holder 58a employed a basket. A machine component was mounted on the basket as the object to be cleaned W. Swarf became attached to the surface of the machine component together with oil at the time of cutting machining. After carrying out cleaning for 10 minutes, the amount of swarf and the amount of oil remaining on the surface of the machine component were measured. When measuring the amount of swarf, the machine component cleaned as above was subjected to high pressure cleaning. Swarf thus washed away was collected on a filter paper. The weight [milligrams] of swarf thus collected was measured using an electronic balance. On the other hand, when measuring the amount of oil, the cleaned machine component was immersed in a solvent. The concentration [ppm] of oil dissolved in the solvent was measured.
When examining the temperature conditions, six types of conditions were set as follows.
In Condition 1 to Condition 5, a temperature difference of 10 degrees Celsius was set between the first temperature T1 and the second temperature T2. In Condition 1 the liquid temperature TL was set to be lower than the first temperature T1 and the second temperature T2. In Condition 2 the liquid temperature TL was set to be higher than the first temperature T1 and the second temperature T2. In Condition 3 the liquid temperature TL was set to be lower than the first temperature T1 but higher than the second temperature T2. In Condition 4 the liquid temperature TL was set equal to the second temperature T2, which was lower than the first temperature T1. In Condition 5 the liquid temperature TL was set equal to the first temperature T1, which was higher than the second temperature T2. In Condition 6 a temperature difference of 40 degrees Celsius was set between the first temperature T1 and the second temperature T2. In Condition 6 the liquid temperature TL was set to be lower than the first temperature T1 but higher than the second temperature T2. In Condition 1 and Condition 6 the first temperature T1 was set at the highest air temperature among all of the conditions. In Condition 2 and Condition 6 the second temperature T2 was set at the lowest air temperature among all of the conditions.
When examining the temperature conditions, the present inventors set three types of Comparative conditions. In all of the Comparative conditions the first temperature T1, the second temperature T2, and the liquid temperature TL were set equal.
From the results of examination, as shown in
As shown in
Subsequently, the present inventors examined the relationship between the cleaning effect and the amount of gas bubbles (gas bubble density) of the gas bubble groups 59a and 59b. Similarly to the above, examination was carried out in accordance with the cleaning device 51 related to the fifth embodiment described above. Temperature conditions of Condition 3 above were set. That is, the temperature (=TL) of pure water was set at 40 degrees Celsius. The air temperature (first temperature T1) of the first gas bubble generating device 54 was set at 45 degrees Celsius. The air temperature (second temperature T2) of the second gas bubble generating device 55 was set at 35 degrees Celsius. Apart from the amount of fine gas bubbles (gas bubble density), the above conditions were set. For gas bubble density 1, the amounts of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b were set at on the order of 1×106 per milliliter as in Condition 3 described above. For gas bubble density 2, the amounts of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b were set at on the order of 5×106 per milliliter. For gas bubble density 3, the amounts of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b were set at on the order of 1×107 per milliliter.
As shown in
Subsequently, the present inventors examined the relationship between the cleaning effect and the average diameter (size) of gas bubbles. Similarly to the above, examination was carried out in accordance with the cleaning device 51 related to the fifth embodiment. The temperature conditions of Condition 3 described above were set. That is, the temperature (=TL) of pure water was set at 40 degrees Celsius. The air temperature (first temperature T1) of the first gas bubble generating device 54 was set at 45 degrees Celsius. The air temperature (second temperature T2) of the second gas bubble generating device 55 was set at 35 degrees Celsius. The amount of fine gas bubbles (gas bubble density) was set at on the order of 1×106 per milliliter similarly to Condition 3. In addition, apart from the diameter of the fine gas bubbles, the above conditions were set. For gas bubble diameter 1 the average diameter of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b was set at on the order of 500 nm similarly to Condition 3 above. For gas bubble diameter 2 the average diameter of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b was set at 200 nm. For gas bubble diameter 3 the average diameter of fine gas bubbles of both the first fine gas bubble group 59a and the second fine gas bubble group 59b was set at 50 nm. For gas bubble diameter 4 the average diameter of fine gas bubbles of the first fine gas bubble group 59a was set at 1000 nm, and the average diameter of fine gas bubbles of the second fine gas bubble group 59b was set at 50 nm. That is, high temperature microbubbles and low temperature nanobubbles were used as a combination. For gas bubble diameter 5 the average diameter of fine gas bubbles of the first fine gas bubble group 59a was set at 50 nm, and the average diameter of fine gas bubbles of the second fine gas bubble group 59b was set at 1000 nm. In other words, low temperature microbubbles and high temperature nanobubbles were used as a combination.
As shown in
| Number | Date | Country | Kind |
|---|---|---|---|
| 2016-103624 | May 2016 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2017/019072 | 5/22/2017 | WO | 00 |
