Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass

Information

  • Patent Grant
  • D664170
  • Patent Number
    D664,170
  • Date Filed
    Friday, March 4, 2011
    13 years ago
  • Date Issued
    Tuesday, July 24, 2012
    12 years ago
Abstract
Description

This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.



FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.



FIG. 2 is a top plan view of the cleaning plate of FIG. 1.



FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1.



FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1.



FIG. 5 is a side perspective view of the cleaning plate of 1; and,



FIG. 6 is an enlarged partial view of FIG. 3.


The broken lines in the figures form no part of the claimed design.


Claims
  • The ornamental design for a cleaning plate for inducing turbulent flow of a processing chamber cleaning glass, as shown.
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Foreign Referenced Citations (1)
Number Date Country
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