Patent Grant
12032205
Embodiments described herein relate to manufacturing of optical waveguides and, in particular, to co-manufacturing of silicon-on-insulator (“SOP”) waveguides and silicon nitride (“SiN”) waveguides in hybrid photonic integrated circuits, optical systems, and switching networks.
A photonic integrated circuit may be selected to replace a semiconductor integrated circuit to reduce power consumption and improve performance. A photonic integrated circuit includes a number of optical waveguides configured to direct light to, and between, one or more passive or active optical circuits, photonic circuits, delay loops, input/output facets, and so on. An optical waveguide can be formed from a number of materials, including crystalline silicon (“Si” or “SOI” waveguides) and silicon nitride (“SiN” waveguides), each of which has advantages and disadvantages in both performance and manufacturability.
Some conventional systems, typically referred to as “hybrid photonic systems,” incorporate both SOI waveguides and SiN waveguides to leverage advantageous properties of each. However, conventional processes used to manufacture SOI waveguides, semiconductor switching structures, and SiN waveguides are typically thermally incompatible. As a result, conventional hybrid photonic systems are formed utilizing low-temperature methods, such as plasma enhanced chemical vapor deposition, to form SiN waveguides, resulting in low-performance SiN waveguides.
Embodiments described herein take the form of a method of manufacturing a hybrid photonic system. An example method includes the operations of: receiving a starting substrate with a layer of silicon formed on an insulating layer; forming a silicon structure from the layer of silicon, the silicon structure defining a silicon waveguide and a top surface; burying the silicon structure in a first oxide layer; forming a silicon nitride (which may be abbreviated “SiN” herein) layer on the first oxide layer; defining a SiN waveguide from the SiN layer; burying the SiN waveguide in a second oxide layer; optionally annealing at least a portion of the second oxide layer; trenching (and/or otherwise etching) through at least the first oxide layer and/or other dielectric layers to expose the top surface of the silicon structure; implanting the top (silicon) surface with an implant, activating the implant; disposing a third oxide layer over at least the top surface; defining a via through the third oxide layer; and conductively coupling through the via to the top surface of the silicon structure.
Some embodiments described herein take the form of a method of manufacturing a hybrid photonic system including the operations of: defining a silicon structure on an oxide layer (which may be thermal oxide or deposited oxide), the silicon structure defining a first silicon waveguide and a second silicon waveguide; burying the silicon structure in a first oxide layer; annealing the first oxide layer; forming a SiN layer on the first oxide layer, the SiN layer defining an etch stop layer above the first silicon waveguide and a SiN waveguide above the second silicon waveguide; burying the SiN layer in a second oxide layer; annealing the second oxide layer (and/or other oxide portions of the stack); disposing a lithographic mask over the second silicon waveguide and the SiN waveguide; selectively etching/trenching the annealed oxide layer(s) to expose the etch stop layer; removing the etch stop layer, trenching through a portion of the (annealed) first oxide layer below the etch stop layer to expose a top surface of the silicon structure (which may be adjacent to the first silicon waveguide); and performing a temperature-sensitive operation (or more than one operation) with the top surface of the silicon structure.
Some embodiments described herein take the form of a method of manufacturing a hybrid photonic system including the operations of: forming a silicon structure defining a silicon waveguide; disposing a first oxide layer around the silicon waveguide; annealing the first oxide layer to define a first cladding; polishing the first cladding to define a planar surface; forming a SiN waveguide on the planar surface above the silicon waveguide, separated from the silicon waveguide by a thickness of the first cladding; disposing a second oxide layer around the SiN waveguide and the silicon waveguide; annealing the second oxide layer to define a second cladding; trenching through a portion of the first cladding and the second cladding to expose a top surface of the silicon structure adjacent to the silicon waveguide; and defining a semiconductor circuit into the top surface.
Reference will now be made to representative embodiments illustrated in the accompanying figures. It should be understood that the following descriptions are not intended to limit this disclosure to one included embodiment. To the contrary, the disclosure provided herein is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the described embodiments, and as defined by the appended claims.
The use of the same or similar reference numerals in different figures indicates similar, related, or identical items.
The use of cross-hatching or shading in the accompanying figures is generally provided to clarify the boundaries between adjacent elements and also to facilitate legibility of the figures. Accordingly, neither the presence nor the absence of cross-hatching or shading conveys or indicates any preference or requirement for particular materials, material properties, element proportions, element dimensions, commonalities of similarly illustrated elements, or any other characteristic, attribute, or property for any element illustrated in the accompanying figures.
Additionally, it should be understood that the proportions and dimensions (either relative or absolute) of the various features and elements (and collections and groupings thereof) and the boundaries, separations, and positional relationships presented therebetween, are provided in the accompanying figures merely to facilitate an understanding of the various embodiments described herein and, accordingly, may not necessarily be presented or illustrated to scale, and are not intended to indicate any preference or requirement for an illustrated embodiment to the exclusion of embodiments described with reference thereto.
Embodiments described herein relate to manufacturing of photonic elements and, in particular, to systems and methods for co-manufacturing silicon nitride (“SiN”) waveguides and crystalline silicon waveguides for hybrid photonic systems (e.g., systems and/or circuits including both SiN waveguides and silicon waveguides) in a single manufacturing process. The method(s) of fabrication described herein result in nanoscale or microscale optical and/or electrical structures that exhibit dramatically improved optical and electrical performance over conventionally-produced hybrid photonic systems.
More specifically, embodiments described herein can be leveraged to produce hybrid photonic systems and circuits, and associated semiconductor electronics, that include (1) silicon waveguides having annealed claddings and (2) annealed SiN waveguides (and claddings), without risking damage to any semiconductor electronics or temperature-sensitive components (e.g., metallizations, implants, semiconductor switches and traces, and so on) that would otherwise be damaged or vaporized by the high temperatures required to anneal claddings and/or SiN depositions. As such, a hybrid photonic system produced according to methods described herein can leverage substantially improved optical performance (e.g., low propagation loss) from annealed SiN waveguides (and claddings) for overall improved device performance.
More specifically, embodiments described herein manufacture a hybrid photonic system or, more particularly, photonic elements thereof, in a three-phase process. A first phase of the manufacturing process comprises defining one or more silicon structures that are configured to operate as silicon waveguides and/or are configured to provide a substrate for further complementary metal oxide semiconductor (“CMOS”) manufacturing operations, such as those that may be employed to define one or more semiconductor switches. A second phase of the manufacturing process buries the result of the first phase below a cladding that may be annealed at high temperature (because the silicon structure has not yet been processed to include any temperature-sensitive processes, structures, or regions). The second phase also defines one or more SiN waveguide layers which also may be annealed and/or buried within an annealed cladding. The third phase of the manufacturing process trenches into the result of the second phase in order to expose a surface of the silicon structure formed in the first phase. Through this trench, one or more CMOS or other low-temperature or temperature-sensitive operations can be performed. Thereafter, the exposed region can be passivated by disposing an oxide layer thereupon and, in many cases, defining one or more vias through the oxide layer so as to conductively couple to one or more portions of an electrical circuit defined during the third phase. As a result of this manufacturing technique, both high-temperature processing operations (that improve optical performance) and low-temperature processing operations (that define optoelectronic or thermo-optic circuits) can be performed to the same substrate.
In addition, as may be appreciated, because many processes described herein are non-bonding processes, relative alignment between different waveguides (and, in particular, transitions between waveguides of different materials) can be well-controlled. As a result, losses at transitions between waveguides are also reduced compared against hybrid photonic circuits produced or manufactured via bonding processes.
These foregoing and other embodiments are discussed below with reference to
In particular,
The example photonic element 100 includes multiple waveguides and a thermo-optic heating element. It may be appreciated, however, that this is merely one simplified example of a component of a photonic integrated circuit, such as described herein. Any suitable photonic, electrical, or thermo-optical structure can be formed by leveraging the method described herein.
The photonic element 100 includes two heating elements, one of which is identified as the electrically conductive heater 102. The electrically conductive heater 102 (which may be defined at least in part by a discrete layer of material (or combinations of materials), such as shown, and/or may be defined at least in part) is a member of a pair of electrically conductive heaters that flank a silicon optical waveguide 104. The silicon optical waveguide 104 is implemented as a rib waveguide, but this is not required of all embodiments. In other examples, other waveguide types and constructions may be used.
The silicon optical waveguide 104 is disposed below a cladding 106 that may be formed from a silicon oxide, such as silicon dioxide. The cladding 106 and the silicon optical waveguide 104 cooperate to transit light (e.g., infrared light) through the silicon optical waveguide 104. The photonic element 100 and, in particular, the silicon optical waveguide 104, is disposed on an oxide region 108 of a bulk silicon wafer 110. The oxide region 108 may be thermal oxide and/or deposited oxide. The oxide region 108 may be annealed and/or may extend over one or more layers of the photonic element 100 so as to encapsulate and/or bury those layers. For simplicity of illustration, the layers of the photonic element 100 are shown without such cladding, encapsulation, passivation or potting, but it may be appreciated that, in certain embodiments, the oxide region 108 may encompass a larger volume than illustrated.
As a result of this construction, when an electrical current is applied through the pair of electrically conductive heaters, the index of refraction of the silicon optical waveguide 104 will change, resulting in a phase shift in light passing through the silicon optical waveguide 104. In this manner, current control of the pair of electrically conductive heaters results in fine control over a phase of light passing through the silicon optical waveguide 104.
In some constructions, the silicon optical waveguide 104 can be a branch of a Mach-Zehnder interferometer (“MZI”). More particularly, light passing through a waveguide can be divided along two paths, one of which transits the silicon optical waveguide 104. Thereafter, the light may be combined. Any phase difference between the two branches manifests as interference, either constructive (in-phase) or destructive (out-of-phase). In this manner, by electrically controlling current through the silicon optical waveguide 104 (and thus controlling heat generated by the pair of electrically conductive heaters), a variable photonic switch is created.
It may be readily appreciated by a person of skill in the art that such a switch may be a portion of a logical gate or some other higher-order photonic or electrical circuit.
In many cases, an MZI switch, such as described herein, can be formed with and/or can be optically coupled to one or more other optical waveguides that, in turn, are portions of other optical switches or photonic circuits. For example, an MZI switch may be optically coupled to one or more delay lines.
As known to a person of skill in the art, silicon waveguides and silicon nitride waveguides exhibit different properties and may be desirable in different circumstances. For example, a SiN waveguide may be selected for power handling reasons, low-loss reasons, larger transparency windows (e.g., ability to guide visible and infrared light), input/output coupling, and so on. A silicon waveguide may be selected for its high refractive index, narrow transparency window, or for other properties such as electrical or thermal properties. Accordingly, generally and broadly, it may be appreciated that a photonic circuit such as described herein may be desirably designed with both silicon waveguides and SiN waveguides.
To illustrate this possibility, the embodiment shown in
As may be appreciated, a transition such as shown is highly sensitive to misalignment and, as noted above, forming the (annealed) SiN waveguide 114 using conventional methods may result in damage to other portions or components of the photonic element 100, such as one or both of the pair of electrically conductive heaters. To account for these and other problems exhibited by conventional manufacturing methods, a method of manufacturing a photonic structure including annealed SiN waveguides, silicon structures, and silicon waveguides, such as shown in
More broadly, it may be appreciated that these foregoing embodiments depicted in
Thus, it is understood that the foregoing and following descriptions of specific embodiments are presented for the limited purposes of illustration and description. These descriptions are not targeted to be exhaustive or to limit the disclosure to the precise forms recited herein. To the contrary, it will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
For example, it may be appreciated that a thermo-optical heater is merely one example photonic circuit element that may be manufactured according to methods described herein. Other example circuits that can be manufactured according to methods described herein include transitions, input facets/input couplings, output facets/output couplings, delay lines, and so on. This foregoing list is not exhaustive; more generally, it is appreciated that the methods described herein provide a framework for leveraging beneficial optical properties of both SiN and silicon waveguides. Thus, any photonic circuit, element, or waveguide that includes silicon portions and SiN portions can be manufactured by suitably modifying methods as described herein.
For simplicity of description and illustration,
A person of skill in the art will readily appreciate that implementations of the methods described herein may be used to manufacture any photonic circuit, electro-photonic circuit, thermo-optic circuit, or any combinations thereof, of any suitable complexity leveraging any suitably sized die.
More broadly, the simplified examples provided herein are merely presented to illustrate manufacturing techniques that, in turn, can be applied to manufacture portions or entireties of active or passive electronics and/or photonics integrated circuits of any suitable complexity. The following cross sections are merely examples, and should not be construed as limiting the methods disclosed herein to only the precise forms described in reference to the following described figures.
More generally, these figures depict progressive cross sections corresponding to intermediate stages of manufacture of silicon portions of an example optoelectric structure. The cross-section may be taken through line A-A of
In particular,
More specifically,
The cross section 200 depicts a bulk silicon layer 202 that may be any suitable thickness. Formed onto and/or into the bulk silicon layer 202 is an oxide layer 204, which may comprise silicon dioxide (SiO2) The oxide layer 204 can be formed by any suitable process or technique, whether active or passive. The oxide layer 204 may be a thermal oxide and/or a deposited oxide. In other cases, certain regions of the oxide layer 204 may be thermal oxide whereas other regions may be deposited. In some cases, a multi-layer process may be used to form the oxide layer 204. For example, a thermal oxide may be formed into the bulk silicon layer 202 after which one or more deposited oxide layers may be disposed, grown, or otherwise formed.
One example process or technique by which the oxide layer 204 may be formed includes placing the bulk silicon layer 202 in a furnace to form a thermal oxide layer. The furnace may be a vertical furnace or a horizontal furnace; any suitable furnace or orientation may be used. The oxide layer 204 can be formed in a layer of uniform thickness or, in some cases, the oxide layer 204 may be formed to a particular desired profile.
The oxide layer 204 is shown as extending across an entire width of the bulk silicon layer 202, but it may be appreciated that this is not required of all embodiments. For example, in some embodiments, the oxide layer 204 is formed in a pattern over the bulk silicon layer 202 (and/or into the bulk silicon layer 202), for example by leveraging a local oxidation technique. As with other layers of material described herein, the oxide layer 204 can be formed to any suitable thickness. One example thickness is on the order of 2-10 micrometers. In other cases, a thinner or a thicker layer of the oxide layer 204 may be formed. In many cases, a thickness of the oxide layer 204 is determined based on an optical property of the oxide layer 204 at the selected thickness. In other words, a thickness of the oxide layer 204 may be determined so that the oxide layer 204 can provide mechanical support and/or optical functionality to other layers of the optoelectric structure.
Disposed over the oxide layer 204 is a silicon layer 206. The silicon layer 206 can be amorphous or crystalline and may be formed using any suitable process or technique, which may be known to a person of skill in the art. Example processes can include seed methods, chemical vapor deposition, sputtering, wafer bonding, and so on.
In other cases, the silicon layer 206 and the oxide layer 204 can be formed in the same or similar processes. For example, the bulk silicon layer 202 can be subjected to an oxygen implantation technique and thereafter annealed or otherwise exposed to high temperature. In this process, the oxide layer 204 may separate the bulk silicon layer 202 from the silicon layer 206 to define the three-layer stack-up shown in
As with other layers, depositions, formations, or features described herein, the silicon layer 206 is shown as extending across an entire width of the bulk silicon layer 202 and the oxide layer 204, but it may be appreciated that this is not required of all embodiments. For example, in some embodiments, the silicon layer 206 is formed in a pattern over the oxide layer 204 (and/or into the oxide layer 204 or the bulk silicon layer 202). As with other layers of material described herein, the silicon layer 206 can be formed to any suitable thickness. One example thickness is on the order of 200-500 nanometers. In other cases, a thinner or a thicker layer of the silicon layer 206 may be formed. In many cases, a thickness of the silicon layer 206 is determined based on an optical or electrical property of the silicon layer 206 at the selected thickness. In other words, a thickness of the silicon layer 206 may be determined so that the silicon layer 206 can provide preferred or ideal optical or electrical performance properties of the optoelectronic device or any electrical components (such as, but not limited to, CMOS, Bipolar transistors, and so on).
In some cases, although not necessarily required of all embodiments, the silicon layer 206 may be doped to introduce or reduce charge carriers in the silicon layer 206. More simply, the silicon layer 206 with a suitable dopant may be either an n-type semiconductor or a p-type semiconductor. For simplicity of description, the embodiments that follow contemplate the silicon layer 206 as a p-type semiconductor, but it may be appreciated that this is not required of all embodiments and other implementations may prefer different dopants, dopant concentrations, and so on.
The foregoing examples are not exhaustive of all manufacturing methods that may be employed to obtain a silicon layer, such as the silicon layer 206, disposed over an insulator, such as the oxide layer 204. This structure, as may be known to a person of skill in the art, may be referred to as a “Silicon on Insulator” or “SOT” structure. Accordingly, more generally and broadly,
In view of the foregoing,
The oxide layer 208 is an insulating layer, also referred to as a dielectric layer. In many examples, the oxide layer 208 is formed as an oxide layer (e.g., SiO2) over the silicon layer 206 that, in turn, is formed over the oxide layer 204. In some cases, the oxide layer 208 is formed into the silicon layer 206, whereas in other layers, the oxide layer 208 is disposed onto the silicon layer 206.
The oxide layer 208 can be formed by a thermal growth process, chemical vapor deposition, or by any suitable process or technique.
As with other layers, depositions, formations, or features described herein, the oxide layer 208 is shown as extending across an entire width of the bulk silicon layer 202 (not shown, see
As with other layers of material described herein, the oxide layer 208 can be formed to any suitable thickness. One example thickness is on the order of 100-500 nanometers. In other cases, a thinner or a thicker layer of the oxide layer 208 may be formed. In many cases, a thickness of the oxide layer 208 is determined based on a mechanical or dielectric property of the oxide layer 208 at the selected thickness. In other words, a thickness of the oxide layer 208 may be determined so that the oxide layer 208 can provide mechanical, manufacturing, or electrical/dielectric support to other layers of the example optoelectric structure, whether such support is required for use in field or whether such support is required for subsequent manufacturing processes.
In many cases, after the lithographic mask 210 is disposed on the surface of the oxide layer 208, it may be developed or otherwise cured by exposing the lithographic mask 210 and/or the entire stack-up to a curing condition dependent upon one or more properties of the lithographic mask 210 itself.
After, and/or as a portion of curing, the lithographic mask 210 may be exposed to light such as ultraviolet light, or a focused beam of electrons, after which a particular pattern may be defined onto the oxide layer 208. In some cases, subsequent cleaning of the lithographic mask 210 may be required or preferred, in particular to remove any unnecessary portions of the lithographic mask 210.
In the illustrated embodiment, the lithographic mask 210 is a positive photoresist, but this may not be required of all embodiments. In other cases and other configurations, negative photoresist patterns may be used.
The lithographic mask 210 may be configured for use with a lithographic process, such as photolithography (configured to operate in either ultraviolet or visible light or any suitable band of light). In such examples, the lithographic mask 210 may be a photoresist layer disposed using a suitable technique.
The lithographic mask 210 can be formed by any suitable process. As with other layers, depositions, formations, or features described herein, the lithographic mask 210 is shown as extending in a particular defined pattern across a majority of a width of the stack-up, but it may be appreciated that this is not required of all embodiments. In some cases, the lithographic mask 210 may define a localized pattern.
In addition, as with other layers of material described herein, the lithographic mask 210 can be formed to any suitable thickness, which may vary from process to process. One example thickness is on the order of 100-500 nanometers. In other cases, a thinner or a thicker layer of the lithographic mask 210 may be formed.
For simplicity of description and illustration, the result of the etch process shown in
More broadly, in view of the foregoing, any suitable etching process suitable for use with the lithographic mask 210 may be used. In some cases, a hydrofluoric etch may be performed. In other cases, a buffered etch (e.g., “BOE” or “buffered oxide etch”) process may be performed. In yet other cases, laser etching, ablation, or mechanical etching may be suitable. A person of skill in the art may readily appreciate that suitable etching processes may differ from implementation to implementation and embodiment to embodiment.
The etch process may be terminated and/or stopped once a desired depth is achieved. As noted above, the termination of the etch may be defined, at least in part, by a selectivity of the etchant or etching process.
In other cases, the etch process may be stopped once that process has etched through an entirety or majority of the oxide layer 208 (e.g., to a particular depth). In other cases, the etch process may be selective in that it is reactive only with the material of the oxide layer 208.
Regardless of the process (or process characteristics, such as etchant, duration, temperature, pressure, and so on) selected to leverage the pattern defined by the lithographic mask 210 to etch through the oxide layer 208, once the etch is completed, a hardmask layer 212 may be defined. More specifically, once the oxide layer 208 is patterned according to the lithographic mask 210, it may be referred to as the hardmask layer 212.
Thereafter, as shown in
As shown in
In some embodiments, removal of the lithographic mask 210 as shown in
As with other etching processes described and referenced herein, the second etching operation, a result of which is shown in
For simplicity of description and illustration, the result of the etch process shown in
In more simple terms, the etch of
More broadly in view of the foregoing, any suitable etching process suitable for use with the pattern defined by the hardmask layer 212 may be used. A person of skill in the art may readily appreciate that suitable etching processes may differ from implementation to implementation and embodiment to embodiment. The etch process may be terminated and/or stopped once a desired depth is achieved. As noted above, the termination of the etch may be defined, at least in part, by a selectivity of the etchant or etching process and/or a duration, pressure, temperature, or other property of the etching process.
Regardless of the process (or process characteristics, such as etchant, duration, temperature, pressure, and so on) selected to leverage the pattern defined by the hardmask layer 212 to etch through the silicon layer 206, once the etch is completed, a patterned silicon layer 214 may be defined. More specifically, once the silicon layer 206 is patterned according to the hardmask layer 212, it may be referred to as the patterned silicon layer 214.
As noted above, features of the patterned silicon layer 214 may vary from embodiment to embodiment and photonic/electrical design to design. More specifically, it may be appreciated that the features shown and/or defined into the patterned silicon layer 214 as shown in these figures is not required of all embodiments. In other cases, more or fewer features of varying dimensions may be formed.
In this example, two primary features are formed into the patterned silicon layer 214, both of which are discussed in greater detail below with reference to subsequent manufacturing steps. Broadly, a set of features is defined as a set of three features on a left side of the patterned silicon layer 214 (with reference to the orientation of the patterned silicon layer 214 as shown in
Next, as shown in
As shown in
These foregoing embodiments depicted in
Thus, it is understood that the foregoing and following descriptions of specific embodiments are presented for the limited purposes of illustration and description. These descriptions are not targeted to be exhaustive or to limit the disclosure to the precise forms recited herein. To the contrary, it will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
For example, it may be appreciated that the initial silicon oxide layer, the oxide layer 208, serves several purposes. Initially, the oxide layer 208 serves as a hardmask layer protecting silicon layers disposed below the oxide layer 208 (e.g., the silicon layer 206) thereby ensuring that the finished/polished surface of the silicon layer 206 (or other dielectric or functional layers) is not affected or roughened by etching steps. In addition, the oxide layer 208 permits and fosters the use of misalignment tolerant manufacturing processes. For example, by using the oxide layer 208 as a hardmask, proper alignment of subsequently-disposed photoresist and/or other lithographic masks may not be required.
For example, it may be appreciated that some of the foregoing steps may not be required of all embodiments. For example, the third etch process described in relation to
The process described in reference to
More generally, a person of skill in the art may appreciate the process described in reference to
More generally, as with
In particular,
More specifically,
As with other layers described herein, the oxide layer 302 is shown as extending across an entire width of the starting substrate, but it may be appreciated that this is not required of all embodiments. For example, in some embodiments, the oxide layer 302 is formed in a pattern, for example by leveraging a local oxidation, masking, or deposition technique. As with other layers of material described herein, the oxide layer 302 can be formed to any suitable thickness. One example thickness is on the order of 800-1000 nanometers. In other cases, a thinner or a thicker layer of the oxide layer 302 may be formed. In many cases, a thickness of the oxide layer 302 is determined based on a mechanical or optical property of the oxide layer 302 at the selected thickness. In other words, a thickness of the oxide layer 302 may be determined so that the oxide layer 302 can provide optical property support to other layers of the optoelectric structure, whether such support is required for use in field or whether such support is required for subsequent manufacturing processes.
The oxide layer 302, and its various regions or areas however independently or simultaneously formed, can be selectively or entirely annealed or otherwise densified, thereby defining a silica cladding 304 that encapsulates and/or otherwise encloses one or more silicon features, such as a thermo-optic silicon structure 306 and a silicon waveguide 308.
As noted above, in some examples, the oxide layer 302 can be selectively annealed. For example, the oxide layer 302 may be annealed over the silicon waveguide 308 such that a dense or annealed portion of the oxide layer 302 defining the silica cladding 304 encloses only the silicon waveguide. In other cases, the reverse may be preferred; the oxide layer 302 can be densified over the thermo-optic silicon structure 306.
For simplicity of description and illustration, the silica cladding 304 as depicted and described herein may be annealed without selectivity; the entire oxide layer identified as the oxide layer 302 may be annealed at a material-specific temperature, for a desired or designed time period to achieve a particular post-anneal material property, optical characteristic, or other property.
As noted above, the silicon waveguide 308 and the thermo-optic silicon structure 306 can take any suitable shape or structure. It may be appreciated that the embodiment as shown is merely one example.
As shown in
After polishing, the silica cladding 304 can be used as a substrate surface to receive a SiN layer 310, such as shown in
As with other layers described herein, the SiN layer 310 is shown as extending across an entire width of the starting substrate and the silica cladding 304, but it may be appreciated that this is not required of all embodiments. For example, in some embodiments, the SiN layer 310 is formed in a pattern, for example, by leveraging a lithographic masking or other local deposition technique. As with other layers of material described herein, the SiN layer 310 can be formed to any suitable thickness. One example thickness is on the order of 80-150 nanometers. In other cases, a thinner or a thicker layer of the SiN layer 310 may be formed. In many cases, a thickness of the SiN layer 310 is determined based on an optical or photonic property of the SiN layer 310 at the selected thickness.
As shown in
In many cases, after the lithographic mask 312 is disposed on the surface of the SiN layer 310 (which may, optionally, be pre-treated to facilitate deposition of the lithographic mask 312; in some cases, the surface of the SiN layer 310 may be polished prior to deposition of the lithographic mask 312), it may be developed or otherwise cured by exposing the lithographic mask 312 and/or the entire stack-up to a curing condition dependent upon one or more properties of the lithographic mask 312 itself.
After, and/or as a portion of curing, the lithographic mask 312 may be exposed to light such as ultraviolet light after which a particular pattern may be defined onto the SiN layer 310. In some cases, subsequent cleaning of the lithographic mask 312 may be required or preferred, in particular to remove any uncured, undeveloped, or otherwise unnecessary portions of the lithographic mask 312.
In the illustrated embodiment, the lithographic mask 312 is a negative photoresist, but this may not be required of all embodiments. In other cases and other configurations, positive photoresist patterns may be used.
The lithographic mask 312 may be configured for use with a lithographic process, such as photolithography (configured to operate in either ultraviolet or visible light or any suitable band of light). In such examples, the lithographic mask 312 may be a photoresist layer disposed using a suitable technique.
As noted above, the lithographic mask 312 can be formed by any suitable process. As with other layers, depositions, formations, or features described herein, the lithographic mask 312 is shown as extending in a particular defined pattern across a majority of a width of the stack-up, but it may be appreciated that this is not required of all embodiments. In some cases, the lithographic mask 312 may define a localized pattern only.
In addition, as with other layers of material described herein, the lithographic mask 312 can be formed to any suitable thickness, which may vary from process to process. One example thickness is on the order of 50-400 nanometers. In other cases, a thinner or a thicker layer of the lithographic mask 312 may be formed.
For simplicity of description and illustration, as with other embodiments presented herein, the result of the etch process shown in
More broadly in view of the foregoing, any suitable etching process suitable for use with the lithographic mask 312 may be used. In some cases, a wet etch can be performed, such as a phosphoric acid etch. In other cases, a buffered etch process may be performed. In yet other cases, laser etching, ablation, or mechanical etching may be suitable. A person of skill in the art may readily appreciate that suitable etching processes may differ from implementation to implementation and embodiment to embodiment.
The etch process may be terminated and/or stopped once a desired depth is achieved. In other cases, such as shown, the SiN layer 310 is etched entirely through, stopping at the silica cladding 304. As noted above, the termination of the etch may be defined, at least in part, by a selectivity of the etchant or etching process. More specifically, the etchant or technique may be selective in that it is reactive only with the material of the SiN layer 310.
Regardless of the process (or process characteristics, such as etchant, duration, temperature, pressure, and so on) selected to leverage the pattern defined by the lithographic mask 312 to etch through the SiN layer 310, once the etch is completed, a set of SiN structures may be defined. More specifically, once the SiN layer 310 is patterned according to the lithographic mask 312, a SiN waveguide 314 may be formed along with a SiN etch-stop layer 316. Thereafter, as shown in
Once the lithographic mask 312 is removed, and the SiN waveguide 314 and the SiN etch-stop layer 316 are defined (and optionally annealed or otherwise hardened or post-processed in some manner) over the thermo-optic silicon structure 306 and the silicon waveguide 308, another oxide layer can be added over, and/or grown from, the silica cladding 304, thereby extending the silica cladding 304 over the SiN waveguide 314 and the SiN etch-stop layer 316, such as shown in
Once deposited, the extended region of the silica cladding 304 may be annealed or densified.
Thereafter, as shown in
With reference to
Once the SiN etch-stop layer 316 has served its purpose to serve as a highly-accurate etch stop layer guiding the foregoing described etching process, the SiN etch-stop layer 316 may be optionally removed, such as shown in
These foregoing embodiments depicted in
Thus, it is understood that the foregoing and following descriptions of specific embodiments are presented for the limited purposes of illustration and description. These descriptions are not targeted to be exhaustive or to limit the disclosure to the precise forms recited herein. To the contrary, it will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
For example, it may be appreciated that some of the foregoing steps may not be required of all embodiments. Generally and broadly, the process described in reference to
More generally, as with preceding described embodiments, these figures depict progressive cross sections corresponding to intermediate stages of manufacture of silicon nitride portions of an example optoelectric structure. In some cases, the operations shown in
In particular,
More specifically,
As shown in
In many examples, (see, e.g.,
In some cases, the etch may be a wet etch although this is merely one example and other etching processes may be suitable.
As shown in
As may be appreciated by a person of skill in the art, an application of current through the first conductive region 418 and the second conductive region 420 generates heat in a controllable and predictable manner. This thermal energy may conduct, at least in part, to a central region of the thermo-optic silicon structure 406, defining a silicon waveguide 422. As may be known to a person of skill in the art, a silicon waveguide introduces a phase shift in light passing therethrough if heated. Thus, in this manner, the thermo-optic silicon structure 406 comprises two electrically-controllable heaters (e.g., the first conductive region 418 and the second conductive region 420) flanking the silicon waveguide 422. By applying a current through the first conductive region 418 and the second conductive region 420, precise control of phase of any light passing through the silicon waveguide 422 can be achieved.
The first conductive region 418 and the second conductive region 420 are shown as having different widths and/or other dimensions, but this is not required (or preferred) in some embodiments. In some cases, the dimensions of the first conductive region 418 and the second conductive region 420 may be preferably identical.
Once the first conductive region 418 and the second conductive region 420 are formed/defined into the thermo-optic silicon structure 406, another silicon dioxide layer or other insulating layer can be disposed over the stack-up. For example, as shown in
The oxide layer can have any suitable thickness. In some examples, the oxide layer is 300-600 nm thick, but this is merely an example. In addition, as with other examples, the oxide layer may extend across the entire stack-up or may be selectively/locally disposed.
After the oxide layer is disposed over the substrate, a lithographic mask 424 can be disposed over the substrate, such as shown in
Following deposition of the lithographic mask 424, at least a portion of the silica cladding 402 exposed by the pattern defined by the lithographic mask may be etched to expose at least a portion of both the first conductive region 418 and the second conductive region 420, such as shown in
The exposed portions of the first conductive region 418 and the second conductive region 420 can be thereafter metallized so as to form electrical connections to the first conductive region 418 and the second conductive region 420 from an upper surface of the silica cladding 402.
In order to form contacts to conductively couple to the first conductive region 418 and the second conductive region 420, a metal layer 426 (see, e.g.,
The metal layer 426 can be formed in any suitable manner from any suitable electrically conductive material. In some embodiments, the metal layer 426 may be sputtered whereas, in other cases, the metal layer 426 may be disposed via chemical vapor deposition or evaporation. Example metals include aluminum, gold, platinum, titanium, tungsten, and so on or any alloys thereof. In some examples, different metals may be used as contacts for the first conductive region 418 and the second conductive region 420. It may be appreciated that these foregoing examples are not exhaustive of the various methods by which a contact can be formed to conductively couple to either or both the first conductive region 418 and the second conductive region 420.
The metal layer 426 is shown as extending across an entire width of the silica cladding 402, but it may be appreciated that this is not required of all embodiments. For example, in some embodiments, the metal layer 426 is formed in a pattern over the silica cladding 402 (and/or into the silica cladding 402), for example by leveraging a local deposition technique. As with other layers of material described herein, the metal layer 426 can be formed to any suitable thickness. One example thickness is on the order of 1-10 micrometers. In other cases, a thinner or a thicker layer of the metal layer 426 may be formed.
In many cases, a thickness of the metal layer 426 is determined based on an electrical property or mechanical property of the metal layer 426 at the selected thickness (e.g., contact resistance, and so on). In other words, the thickness and/or layout of the metal layer 426 may be determined so that the metal layer 426 can provide mechanical or electrical support or functionality to other layers of the optoelectric structure, whether such support is required for use in field or whether such support is required for subsequent manufacturing processes.
The metal layer 426 can be divided or patterned to define two or more contacts, so that the first conductive region 418 and the second conductive region 420 are not conductively coupled. In particular, as shown in
These foregoing embodiments depicted in
Thus, it is understood that the foregoing and following descriptions of specific embodiments are presented for the limited purposes of illustration and description. These descriptions are not targeted to be exhaustive or to limit the disclosure to the precise forms recited herein. To the contrary, it will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
For example, generally and broadly, it may be appreciated that the optoelectronic component depicted in
As such, generally and broadly, the method(s) of manufacturing described in reference to
Furthermore, although the embodiments described above reference manufacturing steps for a thermo-optic silicon structure, it may be appreciated that this is merely one electronic structure that may be defined using the steps and methods described herein. In particular, it may be appreciated that any suitable electronics manufacturing operations can occur within the trenches formed after formation of annealed SiN waveguides and annealed claddings. Conventional complementary metal oxide semiconductor fabrication methods may be used to define any suitable digital, analog, or optical circuitry, fan-out, fan-in, multi-layer or single-layer circuitry, and so on.
In addition, trenching as described above with reference to
Similarly, it may be appreciated that the orientation of the various waveguides depicted is merely one example. In other cases, other waveguides may be formed including but not limited to ridge waveguides, buried waveguides, diffused waveguides, rib waveguides, slot waveguides, trip-loaded waveguides, anti-resonant reflecting optical waveguides, waveguide tapers, waveguide transitions, and so on.
In addition, it may be appreciated that the optical and electrical structures described herein need not follow rectilinear paths, such as shown in
For example,
More generally,
In view of the foregoing, a person of skill in the art may readily appreciate that the manufacturing techniques described herein can be leveraged to co-manufacture different structures that have different thermal tolerance. For example, CMOS structures or other electronic structures can be manufactured after high-temperature processes, such as annealing processes and others, are performed.
The foregoing method corresponds, generally and broadly, to the iterative fabrication steps presented and described in reference to
In some further examples, the first substrate of method 700 can be bonded to the second substrate before an annealing process. Once bonded, the combined substrates may be annealed together, after which a trenching operation can be performed such as described above with reference to
These foregoing embodiments depicted in
Thus, it is understood that the foregoing and following descriptions of specific embodiments are presented for the limited purposes of illustration and description. These descriptions are not targeted to be exhaustive or to limit the disclosure to the precise forms recited herein. To the contrary, it will be apparent to one of ordinary skill in the art that many modifications and variations are possible in view of the above teachings.
As used herein, the phrase “at least one of” preceding a series of items, with the term “and” or “or” to separate any of the items, modifies the list as a whole, rather than each member of the list. The phrase “at least one of” does not require selection of at least one of each item listed; rather, the phrase allows a meaning that includes at a minimum one of any of the items, and/or at a minimum one of any combination of the items, and/or at a minimum one of each of the items. By way of example, the phrases “at least one of A, B, and C” or “at least one of A, B, or C” each refer to only A, only B, or only C; any combination of A, B, and C; and/or one or more of each of A, B, and C. Similarly, it may be appreciated that an order of elements presented for a conjunctive or disjunctive list provided herein should not be construed as limiting the disclosure to only that order provided.
One may appreciate that although many embodiments are disclosed above, that the operations and steps presented with respect to methods and techniques described herein are meant as exemplary and accordingly are not exhaustive. One may further appreciate that alternate step order or fewer or additional operations may be required or desired for particular embodiments.
Although the disclosure above is described in terms of various exemplary embodiments and implementations, it should be understood that the various features, aspects, and functionality described in one or more of the individual embodiments are not limited in their applicability to the particular embodiment with which they are described, but instead can be applied, alone or in various combinations, to one or more of the embodiments of the invention, whether or not such embodiments are described and whether or not such features are presented as being a part of a described embodiment. Thus, the breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments but is instead defined by the claims herein presented.
A photonic circuit or optical circuit such as described herein can be incorporated into any suitable computing device or computing resource. As used herein, the term “computing resource” (along with other similar terms and phrases, including, but not limited to, “computing device” and “computing network”) refers to any physical and/or virtual electronic device or machine component, or set or group of interconnected and/or communicably coupled physical and/or virtual electronic devices or machine components, suitable to execute or cause to be executed one or more arithmetic or logical operations on digital data.
Example computing resources contemplated herein include, but are not limited to: single or multi-core processors; single or multi-thread processors; purpose-configured co-processors (e.g., graphics processing units, motion processing units, sensor processing units, and the like); volatile or non-volatile memory; application-specific integrated circuits; field-programmable gate arrays; input/output devices and systems and components thereof (e.g., keyboards, mice, trackpads, generic human interface devices, video cameras, microphones, speakers, and the like); networking appliances and systems and components thereof (e.g., routers, switches, firewalls, packet shapers, content filters, network interface controllers or cards, access points, modems, and the like); embedded devices and systems and components thereof (e.g., system(s)-on-chip, Internet-of-Things devices, and the like); industrial control or automation devices and systems and components thereof (e.g., programmable logic controllers, programmable relays, supervisory control and data acquisition controllers, discrete controllers, and the like); vehicle or aeronautical control devices systems and components thereof (e.g., navigation devices, safety devices or controllers, security devices, and the like); corporate or business infrastructure devices or appliances (e.g., private branch exchange devices, voice-over internet protocol hosts and controllers, end-user terminals, and the like); personal electronic devices and systems and components thereof (e.g., cellular phones, tablet computers, desktop computers, laptop computers, wearable devices); personal electronic devices and accessories thereof (e.g., peripheral input devices, wearable devices, implantable devices, medical devices and so on); and so on. It may be appreciated that the foregoing examples are not exhaustive.
This application is a continuation of, and claims priority under 35 U.S.C. § 120 to, U.S. patent application Ser. No. 17/177,798, filed Feb. 17, 2021, and titled “Co-Manufacturing of Silicon-on-Insulator Waveguides and Silicon Nitride Waveguides for Hybrid Photonic Integrated Circuits,” which claims the benefit of U.S. Provisional Patent Application No. 63/063,916, filed Aug. 10, 2020, and titled “Novel Hybrid Photonic Platform Integration Scheme,” the contents of each of which are incorporated herein by reference as if fully enclosed herein.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4608569 | Dickey, Jr. et al. | Aug 1986 | A |
| 5377289 | Johnson | Dec 1994 | A |
| 5444864 | Smith | Aug 1995 | A |
| 5578845 | Yoshiyuki et al. | Nov 1996 | A |
| 5699176 | Cohen | Dec 1997 | A |
| 5701371 | Ishida | Dec 1997 | A |
| RE35736 | Powell | Feb 1998 | E |
| 5757312 | Szmurlo | May 1998 | A |
| 5867293 | Kotten | Feb 1999 | A |
| 5904546 | Wood et al. | May 1999 | A |
| 6359714 | Imajo | Mar 2002 | B1 |
| 6373909 | Lindquist | Apr 2002 | B2 |
| 6507728 | Watanabe | Jan 2003 | B1 |
| 6539204 | Marsh | Mar 2003 | B1 |
| 6567648 | Ahn | May 2003 | B1 |
| 6567649 | Souissi | May 2003 | B2 |
| 6745018 | Zehavi | Jun 2004 | B1 |
| 6751447 | Jin | Jun 2004 | B1 |
| 6760454 | Shreve | Jul 2004 | B1 |
| 6771931 | Waltho | Aug 2004 | B2 |
| 6778319 | Chavez-Pirson | Aug 2004 | B2 |
| 6873639 | Zhang | Mar 2005 | B2 |
| 6907093 | Blount | Jun 2005 | B2 |
| 6999639 | Tsarev | Feb 2006 | B2 |
| 7020396 | Izadpanah | Mar 2006 | B2 |
| 7058368 | Nicholls | Jun 2006 | B2 |
| 7064697 | Taylor et al. | Jun 2006 | B2 |
| 7085497 | Tiemann | Aug 2006 | B2 |
| 7116484 | Nemoto | Oct 2006 | B2 |
| 7123676 | Gebara | Oct 2006 | B2 |
| 7130289 | Kuan et al. | Oct 2006 | B2 |
| 7204647 | Ohm | Apr 2007 | B2 |
| 7355993 | Adkins | Apr 2008 | B2 |
| 7366244 | Gebara | Apr 2008 | B2 |
| 7446601 | LeChevalier | Nov 2008 | B2 |
| 7496257 | Levner | Feb 2009 | B2 |
| 7509054 | Calabro et al. | Mar 2009 | B2 |
| 7566634 | Beyne et al. | Jul 2009 | B2 |
| 7650080 | Yap | Jan 2010 | B2 |
| 7660531 | Lee | Feb 2010 | B2 |
| 7672643 | Loh | Mar 2010 | B2 |
| 7680368 | Welch et al. | Mar 2010 | B2 |
| 7711329 | Aparin | May 2010 | B2 |
| 7720029 | Orava | May 2010 | B2 |
| 7729431 | Gebara | Jun 2010 | B2 |
| 7756480 | Loh | Jul 2010 | B2 |
| 7778611 | Asai | Aug 2010 | B2 |
| 7809047 | Kummetz | Oct 2010 | B2 |
| 7826808 | Faulkner | Nov 2010 | B2 |
| 7853195 | Higgins | Dec 2010 | B2 |
| 7869527 | Vetter | Jan 2011 | B2 |
| 7876867 | Filipovic | Jan 2011 | B2 |
| 7907895 | Shinagawa | Mar 2011 | B2 |
| 7917177 | Bauman | Mar 2011 | B2 |
| 8036606 | Kenington | Oct 2011 | B2 |
| 8055235 | Gupta et al. | Nov 2011 | B1 |
| 8078130 | Fudge | Dec 2011 | B2 |
| 8081946 | Fudge | Dec 2011 | B2 |
| 8098779 | Komninakis et al. | Jan 2012 | B2 |
| 8155605 | Hwang | Apr 2012 | B2 |
| 8170487 | Sahota et al. | May 2012 | B2 |
| 8233872 | Nagai | Jul 2012 | B2 |
| 8249540 | Gupta | Aug 2012 | B1 |
| 8270843 | Nakamoto | Sep 2012 | B2 |
| 8299555 | Su et al. | Oct 2012 | B2 |
| 8320504 | Peng | Nov 2012 | B2 |
| 8331509 | Wang | Dec 2012 | B2 |
| 8351874 | Dent | Jan 2013 | B2 |
| 8477871 | Neumann | Jul 2013 | B2 |
| 8521090 | Kim | Aug 2013 | B2 |
| 8526903 | Gudem | Sep 2013 | B2 |
| 8565681 | Kim | Oct 2013 | B2 |
| 8600200 | Rakich et al. | Dec 2013 | B1 |
| 8618966 | Kanter | Dec 2013 | B2 |
| 8682170 | Prucnal | Mar 2014 | B2 |
| 8693810 | Suarez et al. | Apr 2014 | B2 |
| 8730786 | Wang | May 2014 | B2 |
| 8781030 | Peng | Jul 2014 | B2 |
| 8785332 | Johnson et al. | Jul 2014 | B2 |
| 8805298 | McCallister | Aug 2014 | B2 |
| 8845854 | Lei et al. | Sep 2014 | B2 |
| 8867928 | Piehler | Oct 2014 | B2 |
| 8872583 | Lee | Oct 2014 | B2 |
| 8971712 | Fan et al. | Mar 2015 | B2 |
| 8977223 | Gupta | Mar 2015 | B1 |
| 9020307 | Ishikawa | Apr 2015 | B2 |
| 9077440 | Wyville | Jul 2015 | B2 |
| 9100099 | Loh | Aug 2015 | B2 |
| 9106453 | Wang | Aug 2015 | B2 |
| 9160386 | Rimini | Oct 2015 | B2 |
| 9178635 | Ben-Shlomo | Nov 2015 | B2 |
| 9184902 | Khojastepour | Nov 2015 | B2 |
| 9195052 | Long | Nov 2015 | B2 |
| 9214718 | Mow | Dec 2015 | B2 |
| 9224650 | Lei et al. | Dec 2015 | B2 |
| 9252857 | Negus | Feb 2016 | B2 |
| 9253003 | Harel | Feb 2016 | B1 |
| 9257811 | Gao | Feb 2016 | B2 |
| 9258052 | George | Feb 2016 | B2 |
| 9268092 | Jarecki, Jr. | Feb 2016 | B1 |
| 9312895 | Gupta | Apr 2016 | B1 |
| 9344125 | Kpodzo | May 2016 | B2 |
| 9344139 | Sjoland | May 2016 | B2 |
| 9385268 | Minamiru et al. | Jul 2016 | B2 |
| 9391667 | Sundstrom | Jul 2016 | B2 |
| 9438288 | Feld | Sep 2016 | B2 |
| 9450623 | Weissman | Sep 2016 | B2 |
| 9490963 | Choi | Nov 2016 | B2 |
| 9503134 | Sadek et al. | Nov 2016 | B2 |
| 9520983 | Choi et al. | Dec 2016 | B2 |
| 9520985 | Choi | Dec 2016 | B2 |
| 9571205 | Suarez | Feb 2017 | B1 |
| 9589812 | Takahashi et al. | Mar 2017 | B2 |
| 9602149 | Tanzi | Mar 2017 | B1 |
| 9608718 | Monsen | Mar 2017 | B2 |
| 9651652 | Kpodzo et al. | May 2017 | B2 |
| 9667404 | Sjoland | May 2017 | B2 |
| 9696492 | Cox | Jul 2017 | B1 |
| 9698913 | Foster | Jul 2017 | B2 |
| 9703046 | Paquet | Jul 2017 | B2 |
| 9703056 | Neelakantan et al. | Jul 2017 | B2 |
| 9712233 | Deng | Jul 2017 | B1 |
| 9722713 | Tanzi | Aug 2017 | B2 |
| 9723612 | Stapleton | Aug 2017 | B2 |
| 9726821 | Murray et al. | Aug 2017 | B2 |
| 9735056 | Takahashi et al. | Aug 2017 | B2 |
| 9748906 | Stewart | Aug 2017 | B2 |
| 9768852 | Ling | Sep 2017 | B2 |
| 9774364 | Shih | Sep 2017 | B2 |
| 9775123 | Harel | Sep 2017 | B2 |
| 9793943 | Sjoland | Oct 2017 | B2 |
| 9793992 | Hino | Oct 2017 | B2 |
| 9807700 | Harel | Oct 2017 | B2 |
| 9831898 | Pratt | Nov 2017 | B2 |
| 9847258 | Rohleder et al. | Dec 2017 | B2 |
| 9871552 | Din | Jan 2018 | B2 |
| 9885806 | Steinhardt | Feb 2018 | B2 |
| 9885825 | Kopp | Feb 2018 | B2 |
| 9887862 | Zhou et al. | Feb 2018 | B2 |
| 9900044 | Sjoland | Feb 2018 | B2 |
| 9923593 | Andersson | Mar 2018 | B2 |
| 9923708 | Khandani | Mar 2018 | B2 |
| 9948377 | Kim et al. | Apr 2018 | B1 |
| 9960805 | Wyville | May 2018 | B2 |
| 9960850 | Daniel | May 2018 | B2 |
| 9967014 | Park et al. | May 2018 | B1 |
| 9973282 | Welch | May 2018 | B2 |
| 9997363 | Ono et al. | Jun 2018 | B2 |
| 10009120 | Ranson | Jun 2018 | B2 |
| 10027465 | Sjoland | Jul 2018 | B2 |
| 10031246 | Zhou | Jul 2018 | B2 |
| 10038471 | Chang | Jul 2018 | B2 |
| 10041028 | Sim et al. | Aug 2018 | B2 |
| 10064217 | Rajagopal et al. | Aug 2018 | B2 |
| 10084506 | Sjoland | Sep 2018 | B2 |
| 10110306 | Jain et al. | Oct 2018 | B2 |
| 10177836 | Hong | Jan 2019 | B2 |
| 10187158 | Kikuchi | Jan 2019 | B2 |
| 10191217 | Boutami | Jan 2019 | B2 |
| 10257746 | Jain et al. | Apr 2019 | B2 |
| 10284367 | Le Ngoc | May 2019 | B1 |
| 10321357 | Jain et al. | Jun 2019 | B1 |
| 10325861 | Miccoli | Jun 2019 | B2 |
| 10341028 | Kanter | Jul 2019 | B2 |
| 10356782 | Negus | Jul 2019 | B2 |
| 10367584 | Rakich | Jul 2019 | B2 |
| 10418775 | Gao | Sep 2019 | B2 |
| 10439287 | Ashrafi | Oct 2019 | B2 |
| 10491313 | Jain | Nov 2019 | B2 |
| 10656350 | Chen et al. | May 2020 | B2 |
| 10663663 | Painchaud | May 2020 | B2 |
| 10673519 | Hong | Jun 2020 | B2 |
| 10727945 | Nguyen et al. | Jul 2020 | B1 |
| 10754091 | Nagarajan | Aug 2020 | B1 |
| 10873877 | Jain et al. | Dec 2020 | B2 |
| 11032005 | Vishwanath et al. | Jun 2021 | B2 |
| 11032737 | Jain et al. | Jun 2021 | B2 |
| 11215755 | Liu et al. | Jan 2022 | B2 |
| 11330591 | Raghothaman et al. | May 2022 | B2 |
| 11469821 | Jain et al. | Nov 2022 | B2 |
| 20030161637 | Yamamoto | Aug 2003 | A1 |
| 20040151238 | Masenten | Aug 2004 | A1 |
| 20040264610 | Marro | Dec 2004 | A1 |
| 20070020884 | Wang | Jan 2007 | A1 |
| 20110065408 | Kenington | Mar 2011 | A1 |
| 20110065409 | Kenington | Mar 2011 | A1 |
| 20110134810 | Yamamoto et al. | Jun 2011 | A1 |
| 20130295980 | Reuven | Nov 2013 | A1 |
| 20140169236 | Choi | Jun 2014 | A1 |
| 20140177660 | Elmaanaoui | Jun 2014 | A1 |
| 20160103341 | Long | Apr 2016 | A1 |
| 20170176780 | Levy et al. | Jun 2017 | A1 |
| 20180006795 | Raaf | Jan 2018 | A1 |
| 20180248627 | Daniel | Aug 2018 | A1 |
| 20190198999 | Ashrafi | Jun 2019 | A1 |
| 20200209476 | Mattis et al. | Jul 2020 | A1 |
| 20200304253 | Choi et al. | Sep 2020 | A1 |
| 20200305159 | Raghothaman et al. | Sep 2020 | A1 |
| 20210036779 | Nguyen et al. | Feb 2021 | A1 |
| 20210088724 | Liu et al. | Mar 2021 | A1 |
| 20210126669 | Roberts et al. | Apr 2021 | A1 |
| 20210153073 | Hardik et al. | May 2021 | A1 |
| 20210297156 | Jain et al. | Sep 2021 | A1 |
| 20210336050 | Mattis et al. | Oct 2021 | A1 |
| 20220263529 | Kokel et al. | Aug 2022 | A1 |
| Number | Date | Country |
|---|---|---|
| 101379718 | Mar 2009 | CN |
| 104484852 | Apr 2015 | CN |
| 3561561 | Oct 2019 | EP |
| 2139374 | Nov 1984 | GB |
| 2002214461 | Jul 2002 | JP |
| 2004048200 | Feb 2004 | JP |
| 2006301415 | Nov 2006 | JP |
| A 2011120120 | Jun 2011 | JP |
| A 2013110510 | Jun 2013 | JP |
| 2474056 | Jan 2013 | RU |
| WO 06072086 | Jul 2006 | WO |
| WO 07092767 | Aug 2007 | WO |
| WO 08036356 | Mar 2008 | WO |
| WO 12112357 | Aug 2012 | WO |
| WO 16118079 | Jul 2016 | WO |
| Entry |
|---|
| Chang et al., “Full-duplex spectrum sensing in cognitive radios using optical self-interference cancellation,” 2015 9th International Conference on Sensing Technology (ICST), IEEE, pp. 341-344, Dec. 8, 2015. |
| IBM, “Silicon Nanophotonic Packaging,” https://researcher.watson.ibm.com/researcher/view_group_subpage.php?id=5522, Jul. 2016. |
| Li et al., “Multimode silicon photonics,” Nanophotonics, vol. 8, No. 2, pp. 227-247, May 16, 2019. |
| Mothe et al., “Multichannel Microwave Photonics Signals Summation Device,” IEEE Photonics Technology Letters, vol. 3, No. 3, pp. 140-142, Feb. 1, 2011. |
| Velha et al., “Simultaneous data transmissions on engineered closely packed silicon-on-insulator waveguide arrays,” 19th International Conference on Transparent Optical Networks (ICTON), IEEE, pp. 1-4, Jul. 2, 2017. |
| Tang et al., “System limitations due to channel cross-coupling in a highly parallel polymer-based single-mode channel waveguide array,” Advances in Resistive Technology and Processing XVI, vol. 2042, 12 pages, Aug. 16, 1993. |
| Tartaret-Josniére et al., “Microwave Photonics Summation Device with up to 19 Input Signals in K and Ku Bands,” Journal of Lightwave Technology, vol. 34, No. 20, pp. 4715-4721, Oct. 15, 2016. |
| Yoo et al., “Heterogeneous 2D/3D photonic integrated microsystems,” Microsystems & Nanoengineering, 2, 16030, Aug. 2016. |
| Kwak, MyoungJun, “The Impact of Loop Filter in Phase Locked Loop,” Bachelor's Thesis Metropolia University of Applied Sciences, Feb. 19, 2019, 50 pages. |
| Lecture 150—Phase Noise—1 (Jun. 20, 2003), P.E. Allen 2003, 2 pages. |
| Mokhtari-Koushyar et al., “Nonlinear Distortions Induced by Coherent Combinations in Microwave Photonic Links,” 2019 IEEE, Global Communications Conference, Dec. 9-13, 2019, 6 pages. |
| Mokhtari-Koushyar et al., “Laser Diode Chirp Requirements in Wideband Analog Photonic Signal Processing,” 2020 IEEE, Optical fiber Communications Conference and Exhibition, Mar. 8-12, 2020, 3 pages. |
| Skyworks AN279, “Estimating Period Jitter from Phase Noise,” Skyworks Solutions, Inc., Sep. 21, 2021, 8 pages. |
| Amiri, I.S. et al., “W-Band OFDM Transmission for Radio-Over-Fiber Link Using Solitonic Millimeter Wave Generated by MRR” (Aug. 2014) IEEE Journal of Quantum Electronics 50(8): 622-628. |
| Amiri, I.S. et al., “2×2 MIMO-OFDM-RoF generation and transmission of double V-Band signals using a microring resonator system” (Dec. 12, 2015) Optical and Quantum Electronics, Springer US, NY vol. 48:1 1-15. |
| Blumenthal, D.J., “Photonic integration for UV to IR applications” (2020) APL Photonics 5: 020903 (12 pages). |
| Huffman, T.A. et al., “Integrated Resonators in an Ultralow Loss Si3N4/SiO2 Platform for Multifunction Applications” (Jul./Aug. 2018) IEEE Journal of Selected Topics in Quantum Electronics vol. 24, No. 4 (9 pages). |
| Quan et al., “A Novel Phase Noise Mitigation Method for Full-Duplex Transceivers” 2019 11th International Conference on Wireless Communications and Signal Processing (WCSP) IEEE Oct. 23, 2019 pp. 1-6. |
| Syrjälä et al., “Analysis of Oscillator Phase-Noise Effects on Self-Interference Cancellation in Full-Duplex OFDM Radio Transceivers” IEEE Transactions on Wireless Communications vol. 13, No. 6, pp. 2977-2990 Jun. 6, 2014. |
| Sahai et al., “Understanding the Impact of Phase Noise on Active Cancellation in Wireless Full-Duplex” Asilomar Conference on Signals, Systems and Computers Conference Record, IEEE Computer Society pp. 29-33 Nov. 12, 2012. |
| Zhu, D. et al., “Integrated photonics on thin-film lithium niobate” (Feb. 23, 2021) arxiv.org, Cornell University Library, 201 Olin Library Cornell University Ithaca, NY 14853 (94 pages). |
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