Number | Date | Country | Kind |
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150/91 | Jan 1991 | CHX |
Number | Name | Date | Kind |
---|---|---|---|
4714660 | Gates Jr. | Dec 1987 | |
4753854 | Gavrilov et al. | Jun 1988 | |
4842710 | Freller et al. | Jun 1989 |
Entry |
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Quinto et al., "High Temperature Microhardness of Hard Coatings Produced by Physical and Chemical Vapor Deposition", Thin Solid Films, 153 (1987) pp. 19-36. |
Beensh Marchwicka et al., "Structure of Thin Films Prepared by Cosputtering of Titanium and Aluminum or Titanium and Silicon", Thin Solid Films, 82 (1981) pp. 313-320. |