Claims
- 1. A continuous process for simultaneously coating many individual fibers gathered in a bundle with a layer of silicon which may be present as the carbide, oxide, nitride, or plasma polymer with carbon and hydrogen or in elementary form by means of radio-frequency sputtering wherein during said process the individual fibers which initially are gathered in close contact within the bundle are passed in the direction of their length in the absence of mechanical spreading through a radio-frequency sputtering zone wherein the fibers of the bundle are caused to repel each other and a substantially homogeneous coating of said silicon is deposited on the surfaces of the individual fibers of the bundle.
- 2. A process as claimed in claim 1 wherein silicon carbide is removed from an alpha-SiC cathode by bombardment with ions and deposited on the fibers.
- 3. A process as claimed in claim 1 wherein silicon is removed from a silicon cathode by bombardment with ions, forms silicon carbide or a silicon-carbon-hydrogen plasma polymer by reaction with a hydrocarbon in an inert-gas plasma, and as such is deposited on the fibers.
- 4. A process as claimed in claim 1 wherein the coating is carried out with two cathodes offset by 180.degree. or three cathodes offset by 120.degree..
- 5. A process as claimed in claim 1 wherein one or more bundles of fibers are taken off spools, led through the sputtering zone and coated, and wound onto other spools.
- 6. A process as claimed in claim 1 wherein sputtering is carried out with a frequency greater than 10 kHz and preferably greater than 10 MHz.
- 7. A process as claimed in claim 1 wherein sputtering is carried out in a magnetic focussing field.
- 8. A process as claimed in claim 1 wherein fibers made from carbon, glass, silicon carbide, aluminum oxide, boron, steel, or polymers are coated.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3706218 |
Feb 1987 |
DEX |
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Parent Case Info
This application is a continuation of application Ser. No. 155,700, filed Feb. 16, 1988 abandoned.
US Referenced Citations (8)
Foreign Referenced Citations (1)
Number |
Date |
Country |
60-119222 |
Jun 1985 |
JPX |
Continuations (1)
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Number |
Date |
Country |
Parent |
155700 |
Feb 1988 |
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