Collimator for a physical vapor deposition (PVD) chamber

Abstract

Description

FIG. 1 is a top isometric view of collimator for a physical vapor deposition (PVD) chamber showing our new design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof; and,

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3.

The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design. The dot-dash broken lines are for the purpose of illustrating the indications of the cross-section and form no part of the claimed design.

Claims

The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.