Collimator for use in a physical vapor deposition (PVD) chamber

Abstract

Description

FIG. 1 is a top isometric view of collimator for a physical vapor deposition chamber, according to one embodiment of the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left elevation view thereof.

FIG. 8 is a right elevation view thereof.

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3.

FIG. 10 is a top isometric view of collimator for a physical vapor deposition chamber, according to another embodiment of the novel design.

FIG. 11 is a bottom isometric view thereof.

FIG. 12 is a top plan view thereof.

FIG. 13 is a bottom plan view thereof.

FIG. 14 is a front elevation view thereof.

FIG. 15 is a back elevation view thereof.

FIG. 16 is a left elevation view thereof.

FIG. 17 is a right elevation view thereof; and,

FIG. 18 is a cross sectional view taken along line 18-18 in FIG. 12.

The dashed lines in FIGS. 10-18 represent unclaimed environment and form no part of the claimed design.

Claims

We claim the ornamental design for a collimator for use in a physical vapor deposition (PVD) chamber, as shown and described.