Claims
- 1. A process for producing a color-bearing textile product comprising the following sequential steps performed without opening a closed chamber:
- evacuating the interior of the closed chamber which contains a textile product and a target made of titanium;
- introducing a nitrogen-free inactive gas into the chamber;
- sputtering the target in an atmosphere of the inactive gas to form a titanium layer on the surface of the textile product;
- introducing nitrogen gas into the chamber; and
- sputtering the target in an atmosphere of both the inactive gas and nitrogen to form a titanium nitride layer on the titanium layer.
- 2. A process for producing a color-bearing textile product as claimed in claim 1, wherein the titanium nitride layer has such a thickness as permits light to pass therethrough.
- 3. A process for producing a color-bearing textile product as claimed in claim 2, wherein the inactive gas is argon.
- 4. A process for producing a color-bearing textile product as claimed in claim 3, wherein the pressure in the chamber is reduced to the order of 10.sup.-5 Torr during the evacuating step, is pressurized to in the range of 3-9.times.10.sup.-4 Torr during the inactive gas introducing step, and is pressurized to in the range of 6-9.times.10.sup.-4 Torr during the nitrogen introducing step.
- 5. A process for producing a color-bearing textile product as claimed in claim 3, wherein an applied voltage on sputtering is in the range of 400 to 550 V.
- 6. A process for producing a color-bearing textile product comprising the following sequential steps performed without opening a closed chamber;
- evacuating the interior of the closed chamber which contains a textile product and a target made of titanium, the pressure in the chamber being reduced to the order of 10.sup.-5 Torr;
- introducing argon gas into the chamber, and pressurizing the chamber to in the range of 3-9.times.10.sup.-4 Torr;
- sputtering the target in an argon atmosphere with an applied voltage in the range of 400 to 550 V to form a titanium layer on the surface of the textile product;
- introducing nitrogen gas into the chamber, and pressurizing the chamber to in the range of 6-9.times.10.sup.-4 Torr; and
- sputtering the target in a mixed atmosphere of argon and nitrogen with an applied voltage in the range of 400 to 550 V to form a titanium nitride layer on the titanium layer, the titanium nitride layer having such a thickness as permits light to pass therethrough.
Priority Claims (1)
Number |
Date |
Country |
Kind |
61-297240 |
Dec 1986 |
JPX |
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Parent Case Info
This is a division of application Ser. No. 07/122,437, filed Nov. 19, 1987.
US Referenced Citations (3)
Divisions (1)
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Number |
Date |
Country |
Parent |
122437 |
Nov 1987 |
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