Number | Date | Country | Kind |
---|---|---|---|
2000-013571 | Jan 2000 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5926702 | Kwon et al. | Jul 1999 | A |
5994721 | Zhong et al. | Nov 1999 | A |
6147729 | Kurauchi et al. | Nov 2000 | A |
6211939 | Satou et al. | Apr 2001 | B1 |
6287733 | Miyazaki et al. | Sep 2001 | B1 |
Number | Date | Country |
---|---|---|
62-250416 | Oct 1987 | JP |
63-173023 | Jul 1988 | JP |
403237432 | Oct 1991 | JP |
405311109 | Nov 1993 | JP |
407281195 | Oct 1995 | JP |
411142882 | May 1999 | JP |
Entry |
---|
Kim et al.; “Coplanar amorphous silicon thin film transistor fabricated by inductively coupled plasma chemical vapor deposition”; Journal of Applied Physics, vol. 84, No. 7, pp. 4006-4012 (1998). |