Patent Application
20140362425
1. Field of the Invention
The present invention is directed in general to semiconductor devices and methods for manufacturing same. In one aspect, the present invention relates to the fabrication of semiconductor devices or integrated circuits with optical micro-electro-mechanical systems (MEMS) circuits and devices.
2. Description of the Related Art
In information systems, data signal information is communicated between devices and circuits using different types of signal connections. With electrical conductor-based connections, such as conventional wires or through silicon vias (TSVs), there are power and bandwidth constraints imposed by the power requirements and physical limitations of such conductor-based connections. For example, stacked die modules have been proposed to provide high density information systems, but the power consumption and associated heat dissipation requirements for communicating data signals between stacked die modules using conductor-based connections can limit the achievable density. In addition, the bandwidth of such stacked die modules is limited by the number and inductance of TSVs and other conductor-based connections for such die stacks. To overcome such limitations, optical communication systems have been developed as a way of communicating at higher bandwidths with reduced power. With such optical communication systems, a monochromatic, directional, and coherent laser light beam is modulated to encode information for transfer to other devices or circuits of the system, typically by transferring modulated light signals along an optical fiber or waveguide path. Unfortunately, there are alignment challenges with using optical waveguides to transfer optical information between different integrated circuit (IC) chips in a system in terms of cost, complexity, and control requirements. These challenges arise from the tight alignment tolerances required to meet information transmission requirements and other use factors that can disrupt alignment during device operation. Attempts have been made to overcome these challenges by using external mirrors or deflectors to optically transfer information across free-space between different IC chips present their own difficulties, costs, and control requirements. For example, the optical transmitter, deflector structures, and the optical receiver not only impose additional costs and complexity, but must also be aligned to ensure a desired level of information transmission. In addition, alignment errors can be introduced by the system assembly process, as well as vibration (e.g., dropping) or temperature changes during use. For example, components of an optical link may become misaligned if a cell phone or notebook computer is dropped on a surface. Furthermore, the cost for designing and assembling components that are precisely aligned may be cost prohibitive. Finally, control circuits and external signal deflection structures can increase the overall system complexity, thereby reducing possible signal bandwidth between different IC chips. As a result, the existing solutions for transferring modulated light signals along optical waveguide paths and between different IC chips make the implementation of high bandwidth optical interconnects extremely difficult at a practical level.
The present invention may be understood, and its numerous objects, features and advantages obtained, when the following detailed description is considered in conjunction with the following drawings, in which:
It will be appreciated that for simplicity and clarity of illustration, elements illustrated in the drawings have not necessarily been drawn to scale. For example, the dimensions of some of the elements are exaggerated relative to other elements for purposes of promoting and improving clarity and understanding. Further, where considered appropriate, reference numerals have been repeated among the drawings to represent corresponding or analogous elements.
In this disclosure, improved high density, low power, high performance information systems, methods, and apparatus are described that address various problems in the art where various limitations and disadvantages of conventional solutions and technologies will become apparent to one of skill in the art after reviewing the remainder of the present application with reference to the drawings and detailed description provided herein. In selected embodiments, a high density, low power, high performance information system, method and apparatus are described in which integrated optical communications are provided in and between stacked semiconductor die devices by providing MEMS optical beam waveguides with two-dimensional alignment and controlled feedback to adjust beam alignment. In the context of the present disclosure, an “optical beam” refers to an unmodulated light beam (directly from a light source, such as a laser, with no signal) or a modulated light beam (carrying a signal), where “light” can refer to any portion of the electromagnetic spectrum, whether visible or not. In addition, a “MEMS optical beam waveguide” refers to a physical structure for directing an optical beam, and includes a MEMS cantilever beam containing an optical waveguide. In embodiments where horizontal and vertical die stacks are incorporated on a system substrate, optical connections between different die stacks are providing by including deflectable MEMS optical beam waveguides with multiple deflection electrodes positioned on and around the MEMS optical beam waveguides to provide two-dimensional deflection for aligning communications over an optical link between two die without external deflection. A plurality of bias voltages for the deflection electrodes at each MEMS optical beam waveguide may be generated to control optical beam alignment by calibrating and continually adjusting digital MEMS optical beam waveguide deflection values using a feedback signal (FB) which characterizes the degree of optical beam alignment. In selected embodiments, the die stacks may include side-by-side processor die stack and memory die stack modules which are connected perpendicularly to each other using an optical crossbar arrangement to provide point-to-point optical signals at the processor-memory interface so that each processor die can communicate with any memory die in adjacent memory die stack modules and with any processor die in adjacent processor die stack modules. Of course, it will be appreciated that the die stack modules are not limited to processor or memory die stacks, and may be formed with any desired die for other uses, so there may be other embodiments with other uses for the structures described herein. The deflectable MEMS optical beam waveguides may be used to provide different optical communication functions, including providing point-to-point optical communications between two die without external deflection, providing optical waveguide crossover within a die, providing optical redundancy within a die to replace a defective optical circuit with a redundant optical circuit, and/or providing a die edge optical redundancy circuit for replacing a defective optical element with a redundant or spare optical element. By providing a replacement optical path which avoids or bypasses a failed circuit element or MEMS optical beam waveguide, the replacement optical path(s) may be defined by programming a pair of MEMS optical beam waveguide optical switches to shift around the defective circuit element or MEMS optical beam waveguide, thereby improving die and stack yield.
Various illustrative embodiments of the present invention will now be described in detail with reference to the accompanying figures. While various details are set forth in the following description, it will be appreciated that the present invention may be practiced without these specific details, and that numerous implementation-specific decisions may be made to the invention described herein to achieve the device designer's specific goals, such as compliance with process technology or design-related constraints, which will vary from one implementation to another. While such a development effort might be complex and time-consuming, it would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure. For example, selected aspects are depicted with reference to simplified cross sectional drawings of a semiconductor device without including every device feature or geometry in order to avoid limiting or obscuring the present invention. In addition, selected aspects are depicted with reference to simplified circuit diagram depictions without including every device circuit detail in order to avoid limiting or obscuring the present invention. Such descriptions and representations are used by those skilled in the art to describe and convey the substance of their work to others skilled in the art. Some portions of the detailed descriptions provided herein are also presented in terms of algorithms and instructions that operate on data that is stored in a computer memory. In general, an algorithm refers to a self-consistent sequence of steps leading to a desired result, where a “step” refers to a manipulation of physical quantities which may, though need not necessarily, take the form of optical, electrical, or magnetic signals capable of being stored, transferred, combined, compared, and otherwise manipulated. It is common usage to refer to these signals as bits, values, elements, symbols, characters, terms, numbers, or the like. These and similar terms may be associated with the appropriate physical quantities and are merely convenient labels applied to these quantities. Unless specifically stated otherwise as apparent from the following discussion, it is appreciated that, throughout the description, discussions using terms such as “processing” or “computing” or “calculating” or “determining” or “displaying” or the like, refer to the action and processes of a computer system, hardware circuit, or similar electronic device, that manipulates and transforms data represented as physical (electronic) quantities within the computer system's registers and memories into other data similarly represented as physical quantities within the computer system memories or registers or other such information storage, transmission or display devices. In addition, although specific example materials are described herein, those skilled in the art will recognize that other materials with similar properties can be substituted without loss of function. It is also noted that, throughout this detailed description, certain materials will be formed and removed to fabricate the MEMS optical beam waveguides and associated control circuits. Where the specific procedures for forming or removing such materials are not detailed below, conventional techniques to one skilled in the art for growing, depositing, removing or otherwise forming such layers at appropriate thicknesses shall be intended. Such details are well known and not considered necessary to teach one skilled in the art of how to make or use the present invention.
Turning now to
With the disclosed information system 100, a high density, low power, high performance packaging arrangement of die stack modules uses optical MEMs devices to provide optical communication links between die stacks in a subsystem, and between subsystems. For example, in a first subsystem 10, a microprocessor unit (MPU) die stack module 15 is formed with TSVs, copper pillars, flip chip bumps (not shown) to provide vertical signal and power conductors for the MPU die stack module 15. In addition, each MPU die may include optical MEMS devices, such as optical beam waveguides and optical feed-throughs (not shown), for sending and/or receiving lateral optical beam signals 6, 7 to adjacent die stack modules.
Once mounted on the system substrate board 5, the processor die stack modules (e.g., 15, 25, 35, 45, 55, and 65) and memory die stack modules (e.g., 11-14 and 16-19) may be connected through conductors (not shown) in the substrate board 5 to connection pads 1-4 for electrical and/or optical connection to external systems. In addition, the die stack modules may be implemented with both horizontal and vertical die stacks to facilitate optical signal communication between multiple die stacks of microprocessors and memory die. For example, by orienting the central MPU die stack module (e.g., 15) as a horizontal die stack and orienting the memory die stack modules (e.g., 11-14, 16-19) as vertical die stacks, the MPU and memory die stack modules are perpendicular to each other. This orientation enables each processor die in the MPU die stack module 15 to communicate with each of the memory die in the adjacent memory die stack modules 14, 16 using direct optical signals 6. And by including optical feed-throughs in the memory die stack modules (e.g., 12-14 and 16-18), the central MPU die stack module (e.g., 15) can communicate through a memory die stack module to one or more non-adjacent memory die stacks using feed-through optical signals 6. In similar fashion, by including optical feed-throughs in the processor die stack modules (e.g., 25, 35, 45, and 55), each processor in a central MPU die stack module can communicate with every other processor in the system using feed-through optical signals 7. In support of the optical signal communications, each processor and memory die in the die stack modules may be formed to integrate both transistor circuitry for implementing information handling operations, and optical circuitry for transmitting and/or receiving optical signal information via one or more waveguides terminating in MEMS optical beam waveguides at the die edge of the processor and memory die. By integrating multiple die stack modules with an optical communication system, the resulting communication system 100 provides higher density and bandwidth due to the replacement of electrical conductors (and associated inductances) with optical interconnects to provide a low cost, low power, high bandwidth stacked die assembly.
To illustrate a fabrication assembly of an example stacked die assembly, reference is now made to
The depicted stacked die assembly also includes a plurality of memory die stacks (e.g., 130, 140, 160, and 170) positioned on opposite sides of the central processor die stack 150. On the left of the central processor die stack 150, a first memory die stack 130 includes a plurality of memory die 131, 132, 133 which are horizontally oriented and stacked together, and a second memory die stack 140 includes a plurality of memory die 141, 142, 143 which are horizontally oriented and stacked together. And to the right of the central processor die stack 150, a third memory die stack 160 includes a plurality of memory die 161, 162, 163, 164 which are horizontally oriented and stacked together, and a fourth memory die stack 170 includes a plurality of memory die 171, 172, 173 which are horizontally oriented and stacked together. Though two memory stacks are shown on each side, it will be appreciated that additional or fewer memory die stacks may be used. As shown in the enlarged view of the example memory die stack 160 in
To facilitate die-to-die signal connections within each die stack, each die may include optical TSV structures and angled mirror structures (e.g., 45 degree mirror structures) for deflecting optical signals from a first die to one or more additional die in the die stack. For additional details on semiconductor processing steps that may be used to fabricate the waveguide beams, optical TSV structures, and angled mirror structures, reference is now made to U.S. patent application Ser. No. ______ (entitled “Optical Backplane Mirror” and filed herewith) which is incorporated by reference as if fully set forth herein. Though described with reference to selected optical backplane die embodiments, it will be appreciated that the fabrication process steps described in the “Optical Backplane Mirror” application can also be used to form optical TSV structures, and angled mirror structures in each die.
In other embodiments, the die in the die stacks 130, 140, 150, 160, 170, such as the processor die 151 or memory die 161, may be formed as a composite of two separately manufactured die. In these embodiments, the first die includes electrical components that are formed using standard semiconductor transistor fabrication technology, and the second die includes optical components, such a waveguides, modulators and laser sources, that are formed using primarily optical fabrication technology. By separately fabricating the composite die using different fabrication technologies, the manufacturing cost of processor die and the memory die can be reduced, thus allowing for a lower cost of system 100. In selected embodiments, the first and second composite die could be combined before stacking so the die stacks would be an assembly of composite die. In other embodiments, the electrical and optical die would remain separate until combined into the die stack modules.
In the illustrated die stack assembly shown in
Turning now to
Once attached to the system board 101, point-to-point optical communications can be used to communicate between individual processor die and memory die in the stacked die assembly. For example, the processor die stack module 150 may communicate with the adjacent memory die stacks 140, 160 using point-to-point optical beam signals 183, 184, respectively. And by using optical feed-throughs in the memory die stacks 140, 160 formed with waveguides in the die that are connected to MEMS optical beam waveguides at each die edge, the processor die stack module 150 may communicate with the non-adjacent memory die stacks 130, 170 using point-to-point optical beam signals 182, 185.
Given the perpendicular orientation of the processor and memory die, each laterally disposed processor die (e.g., 151) may be disposed to provide point-to-point optical communications with each of the plurality of vertically disposed memory die (e.g., 161-164) in the adjacent memory die stack (e.g., 160). To this end, the optical MEMS waveguide beams 156 on the die edge of processor die 151 may be divided into groups, with each group of MEMS waveguide beams assigned to a different memory die. To illustrate this grouping, reference is now made to
With the disclosed crossbar alignment, the die interface region defined by the intersection of the processor and memory die may include a plurality of optical MEMS waveguide beams (e.g., 191) at the processor die edge and a corresponding plurality of optical MEMS waveguide beams (e.g., 111) at the memory die edge. As a result, multiple optical beams can be exchanged at the vertical die/horizontal die interface region. With spacing between adjacent MEMS waveguide beams on a die edge approaching 7-10 microns, the required angle for beam alignment becomes small. In addition, each group of optical MEMS waveguide beams at a vertical die/horizontal die interface region may include one or more unmodulated beams, one or more feed-through unmodulated optical beams, one or more processor to memory optical beams, and/or one or more feed-through modulated optical beams.
In addition to the perpendicular orientation of the processor and memory die stacks, the ability to maintain point-to-point optical communications between the processor and memory die stacks can be impaired by a number of factors, such as the lateral stack spacing and any difference in die thickness or height between the processor and memory die. Unmitigated, these factors can impose significant beam angle requirements for the optical beam signals 183, 184 to and from the processor die stack 150. To reduce the beam angle requirements, a die stack spacing of approximately 100 mm to 200 mm may be used between stacked die modules. In addition, the height of the memory die stack modules relative to the processor die stack may be adjusted by forming TSV spacers below each memory die stack module to raise the memory die stacks and improve beam angle to the processor die.
An approach for achieving precise alignment for point-to-point optical communication signals is to use deflectable MEMS optical waveguide beams. While optical MEMS devices have been used to provide moving waveguides, such devices typically use a single continuous electrode alongside the waveguide beam to provide one-dimensional control over movement, and often use external mirror to deflect the optical signal. To overcome limitations associated with such conventional approaches, there is disclosed herein an optical MEMS waveguide beam with multiple deflection electrodes to provide two-dimensional deflection for alignment of point-to-point optical interconnects. In particular and as illustrated in
As shown in the enlarged view of
In selected embodiments, separate electrodes may be along the sides of the beam allows different voltages to be applied at different points along the beam. In this way, different electrode-induced deflection forces can be applied along the length of the MEMS waveguide beam structure 193, 194 to increase or decrease the deflection force applied to different sections thereof. For example, by increasing the deflection voltages along the length of the MEMS waveguide beam structure, the amount of deflection increases along its length. However, to reduce the risk of stress fractures at the base of the MEMS waveguide beam structure, the deflection voltages applied to at least a first electrode at the base of the MEMS waveguide beam structure may have opposite polarity to the deflection voltages applied to the electrodes at the end of the MEMS waveguide beam structure, thereby reducing the deflection stress at the base.
By integrating a MEMS beam with optical waveguide and two-dimensional deflection control, a high performance packaging arrangement is provided which uses separate electrodes along the sides of an enclosed optical beam to limit dispersion of light from within the beam and to provide alignment control that may be used to provide optical communication between die stacks in a plurality of communication subsystems. An example of such a packaging arrangement is illustrated in
To enable optical communication, the die stacks in the first subsystem (e.g., 213-217) include a plurality of optical die edge MEMS waveguide beams 231-234 having two-dimensional alignment control to provide the central processor die stack (e.g. 215) with optical die-to-die communication with or through adjacent memory die stacks (e.g., 213-214, 216-217). Likewise, the die stacks in the second subsystem (e.g., 218-222) include a plurality of optical die edge MEMS waveguide beams 235-238 having two-dimensional alignment control to provide the central processor die stack 220 with optical die-to-die communication with or through adjacent memory die stacks 218-219, 221-222. (If any additional memory die stacks are included in either subsystem, the memory die stacks 217-218 are shown as having optical die edge MEMS waveguide beams 240, 241.) Finally, optical communication between subsystems is provided by including a plurality of optical die edge MEMS waveguide beams 239 at each processor die stack 215, 220 to enable two-dimensional alignment control for optical die-to-die communication therebetween.
To illustrate an example fabrication sequence for forming integrated circuit optical MEMS waveguide beams, reference is now made to
Referring first to
Though the bottom gate electrode structure 325 is shown as being a single electrode, additional patterning steps could be used during the formation of the initial stack to define different layers of oxide and nitride and/or silicon so that the removal of the thin pad oxide layer 302 exposes a plurality of silicon regions in the substrate 301 that are separated by nitride and/or oxide regions. For example, the substrate 301 could be covered with oxide layers having different thicknesses, including a thin oxide layer (where the bottom electrode is to be formed) and a thicker oxide layer (where the bottom electrode will not be formed). In other embodiments, the separate bottom gate electrodes may be formed by selectively doping the intended bottom electrode regions in the silicon substrate 301 prior to stack formation instead of forming silicide layers 325. Alternatively, shallow trench isolation (STI) regions could be formed in the silicon substrate 301 prior to stack formation to leave silicon regions in the substrate 310 only where the intended bottom electrode regions are located. While these additional processing steps add an extra overlay step to ensure that the waveguides are formed correctly over the future bottom electrodes, the geometries are sufficiently large that this should not be a problem.
As described herein, the lateral deflection of the MEMS optical beam waveguide 328, 304, 314 is caused by the electric fields that result from the application of the deflection bias voltages to the cantilevered silicon beam 328 and one or more of the lateral deflection electrodes 305E/323, 305E/324 which laterally push or pull the cantilevered silicon beam 328, depending on the polarity of the applied lateral deflection bias voltages. In similar fashion, vertical deflection of the MEMS optical beam waveguide 328, 304, 314 is caused by the electric fields that result from the application of the deflection bias voltages to the cantilevered silicon beam 328 and one or more of the vertical deflection electrodes (e.g., top electrode structures 318-320 or bottom gate electrode structures 325) which vertically push or pull the cantilevered silicon beam 328, depending on the polarity of the applied vertical deflection bias voltages. By supplying the deflectable MEMS optical beam waveguide with a potential as a first deflection bias voltage, like deflection bias voltages (e.g., both positive or both negative) on a lateral or vertical deflection electrode and the deflectable MEMS optical beam waveguide will repel or push the beam away from the deflection electrode on the cavity wall with the like voltage. Conversely, opposite deflection bias voltages (e.g., opposite polarity voltages) on a lateral or vertical deflection electrode and the deflectable MEMS optical beam waveguide will pull or attract the beam toward the deflection electrode on the cavity wall with the opposite potential to that of the beam. From a circuit point of view, it is efficient to selectively supply only positive deflection bias voltages to the deflectable MEMS optical beam waveguide and on one or more deflection electrodes on the cavity wall(s) opposite the desired direction(s) of deflection, though any desired bias voltage polarity scheme may be used to achieve the desired deflection control. For example, with selected multi-electrode embodiments, a negative deflection bias voltage may be applied to a deflection electrode on one side opposite the direction of desired deflection and nearest the base of a positively charged deflectable MEMS optical beam waveguide to reduce the stress that would otherwise be concentrated near the base of the deflectable MEMS optical beam waveguides (by creating a force in the opposite direction to the forces deflecting the beam), thereby distributing the deflection stress more evenly along the beam. In other embodiments, the shape of the deflected beam could be closely controlled by using combinations of positive and negative deflection bias voltages on the deflection electrodes on the same cavity wall. In yet other embodiments, the deflection electrodes on opposite sides of the cavity could be selectively biased so that deflection electrodes on one side of the cavity are biased to attract, while deflection electrodes on the other side of the cavity are biased to repel. This technique could be used to reduce the maximum deflection bias voltage necessary to deflect the beam to address situations the maximum deflection bias voltage is near or above the breakdown voltage of the transistors of electrode voltage generation circuit.
As will be appreciated, the various processing steps used in the fabrication sequence for forming integrated circuit optical MEMS waveguide beams may be performed separately or concurrently with other processing steps used to form other structures in the integrated circuit die. For example, the electrode silicide layer 325 may be formed with silicide formation processing steps that are separate from silicide formation of transistor gate or contact regions. Alternatively, the electrode silicide layer 325 and silicided transistor gate or contact regions may be formed with the same silicide formation processing steps.
To illustrate another example fabrication sequence for forming integrated circuit optical MEMS waveguide beams, reference is now made to
Referring first to
To illustrate another example fabrication sequence for forming integrated circuit optical MEMS waveguide beams, reference is now made to
Referring first to
By providing a MEMS optical beam waveguide with multiple deflection electrodes positioned on and around the length of the waveguide, each deflection electrode may be connected to a separate bias voltage to provide different amounts of deflection along the optical beam path. In selected embodiments, larger voltages may be applied to deflection electrodes that are located further from the connection of the optical beam waveguide to the supporting substrate, thereby increasing the deflection along the beam path. An example implementation is illustrated in
As will be appreciated, other deflection bias voltage generators may be used to separately control the different deflection electrodes positioned on and around the length of the waveguide driver. The ability to separately control the applied deflection bias voltages can reduce the risk of stress fractures at the base of the MEMS waveguide beam structure by applying deflection voltages to at least a first electrode at the base of the MEMS waveguide beam structure having the opposite polarity to the deflection voltages applied to the electrodes at the end of the MEMS waveguide beam structure. Referring now to
The depicted shared bias driver circuit 540 may be used to control multiple MEMS waveguide beam structures to program compensation for a beam offset resulting from stresses induced during manufacturing. In operation, the bias driver 540 may be digitally programmed to generate a plurality of specified deflection voltages at nodes 561-564 which are coupled to top and side deflection electrodes (not shown). For example, the bias driver 540 generates a first lateral or X-deflection voltage at charging capacitor 551 for a first MEMS optical beam waveguide (Beam A) at a first node 561, and generates a second lateral or X-deflection voltage at charging capacitor 553 for a second MEMS waveguide beam (Beam B) at a second node 563. In addition, the bias driver 540 generates a first vertical or Y-deflection voltage at charging capacitor 552 for the first MEMS waveguide beam (Beam A) at a third node 562, and a second vertical or Y-deflection voltage at charging capacitor 554 for the second MEMS waveguide beam (Beam B) at a fourth node 564, and so on.
To generate the lateral or X-deflection voltages, the shared bias driver circuit 540 includes a plurality of digital counters or registers for storing lateral digital voltage values. For example, a first lateral digital voltage value (Ax) for the first MEMS waveguide beam is stored at register/counter 541 by control logic 545, and a second lateral digital voltage value (Bx) for the second MEMS optical beam waveguide is stored at register/counter 543 by control logic 545. With the applicable control logic 545, the stored lateral digital voltage values from registers 541, 543 are converted at DAC circuit 546 to first and second lateral or X-deflection voltages, respectively, which are supplied by control switch 549 to first and second nodes 561, 563. Though not shown, the first lateral or X-deflection voltage at node 561 may be supplied to lateral deflection electrodes at a first MEMS optical waveguide beam (Beam A) and the second lateral or X-deflection voltage at node 563 may be supplied to lateral deflection electrodes at a second MEMS optical waveguide beam (Beam B).
In similar fashion, the shared bias driver circuit 540 generates the vertical or Y-deflection voltages from vertical digital voltage values that are stored in a plurality of digital counters or registers. For example, a first vertical digital voltage value (Ay) for the first MEMS optical beam waveguide is stored at register/counter 542 by control logic 547, and a second vertical digital voltage value (By) for the second MEMS optical beam waveguide is stored at register/counter 544 by control logic 547. With the applicable control logic 547, the stored lateral digital voltage values from registers 542, 544 are converted at DAC circuit 548 to first and second vertical or Y-deflection voltages, respectively, which are supplied by control switch 550 to third and fourth nodes 562, 564. Though not shown, the first vertical or Y-deflection voltage at node 562 may be supplied to a top (and/or bottom) deflection electrode at a MEMS optical beam waveguide (Beam A), and the second vertical or Y-deflection voltage at node 564 may be supplied to a top (and/or bottom) deflection electrode at a second MEMS optical beam waveguide (Beam B).
By generating different vertical and lateral deflection voltages from digital voltage values stored in dedicated control registers 541-544 using control logic in a shared circuit arrangement 540, each of the separate top and side electrodes may be separately biased with any arbitrary deflection voltage. In this way, the deflection voltages supplied to the top and side electrodes may be increased or decreased along the length of the respective MEMS beam waveguide. Alternatively, the bias driver 540 may supply different deflection bias voltages to reduce the risk of stress fractures at the base of the MEMS optical waveguide beam structure by applying a deflection voltage to at least a first electrode at the base of the MEMS waveguide beam structure that has an opposite polarity to the deflection voltages applied to the electrodes at the end of the MEMS optical beam waveguide structure.
With the shared circuit arrangement 540, such as shown in
Over time, the X and Y MEMS beam plate voltages may be adjusted as required to reflect changes in the beam alignment requirements, such as may be introduced by vibration (e.g., dropping) or temperature changes during use. To this end, an optical signal or an optical dummy signal may periodically be communicated from a transmitting MEMS optical waveguide beam to a corresponding receiving MEMS optical beam waveguide beam to generate feedback (FB) for the control logic 545, 547 for use in (re)calibrating the MEMS optical beam waveguide beams to achieve MEMS optical beam waveguide alignment. In response to the feedback signal, the control logic 545, 547 adjusts the DAC counter values and/or otherwise updates the values stored in the pair of X and Y deflection control registers (e.g., 541, 542) for the beam. In this way, the control logic 545, 547 can retrieve and use the adjusted final X and Y deflection values from the X and Y deflection control registers during the next beam alignment/capacitor restore cycle.
As described hereinabove, there is provided an improved MEMS optical beam waveguides with enclosed sides to limit light dispersion and with two-dimensional alignment and controlled feedback to adjust beam alignment to make the integration of the die-to-die optical communication easier. While the MEMS optical beam waveguides and surrounding electrode structures may be used in a controlled feedback system as part of an information handling system, it will be appreciated that the controllable optical beam waveguides may be used with any embodiments where controlled movement of an optical beam waveguide is desired, such as sensor communication systems, automotive sensor and control systems, etc. A first example application is illustrated in
Reference is now made to
By generating and applying the proper deflection bias voltages to the upper and lower deflection electrodes 605u, 605d at die 601, the MEMS optical beam waveguide 602 is deflected within the cavity 603 to point down toward die 616, thereby directing the optical signal 621 from the MEMS optical beam waveguide 602. At the receiving die 616, the appropriate deflection bias voltages are applied to the upper and lower deflection electrodes 620u, 620d to deflect the MEMS optical beam waveguide 617 to be aligned for reception of the optical signal 621. In this way, the multiple deflection electrodes 604-605, 619-620 positioned on and around the MEMS optical beam waveguides 602, 617 may be used to provide two-dimensional deflection for aligning communications between two die without external deflection along with controlled feedback to adjust beam alignment as described hereinabove.
In similar fashion, deflection bias voltages may be applied to the upper and lower deflection electrodes 615u, 615d at die 611 to deflect the MEMS optical beam waveguide 632 within the cavity 633 to point down toward die 606, thereby directing the optical signal 622 from the MEMS optical beam waveguide 612. At the receiving die 606, the appropriate deflection bias voltages are applied to the upper and lower deflection electrodes 610u, 610d to deflect the MEMS optical beam waveguide 607 to be aligned for reception of the optical signal 622. In this way, the multiple deflection electrodes 614-615. 609-610 positioned on and around the MEMS optical beam waveguides 612, 607 may be used to provide two-dimensional deflection for aligning communications between two die without external deflection along with controlled feedback to adjust beam alignment. Once alignment of MEMS optical beam waveguide pairs 602, 617 and 612, 607 is achieved, each MEMS optical beam waveguide is capable of bidirectional communication. In addition to facilitating die-to-die signal connections, other applications are possible with the improved MEMS optical beam waveguides disclosed herein. For example, the MEMS optical beam waveguides can be used internally within a die to provide an optical waveguide crossover communication path as between potentially conflicting structures within the optical waveguide plane. An example crossover application is illustrated in
To accomplish crossover signal routing, the pair of MEMS optical beam waveguides 632, 637 are disposed on opposite sides of the intersection cavity 643 so that the MEMS optical beam waveguides 632, 637 may be deflected within their respective cavities 633, 638 by application of one or more deflection bias voltages to the deflection electrodes 634-635, 639-640 positioned around each cavity 633, 638. By appropriate control of the pattern and etch processes applied to the conductor layer (e.g. the metal 1 (M1) layer), the deflection electrodes 635u, 640u and reflection surface layer 636 may be formed from the same material layer, provided that the position and width of the reflection surface layer 636 are chosen to provide the required reflection of the optical signal 642. In operation, deflection bias voltages are applied to the upper and lower deflection electrodes 635u, 635d to deflect the MEMS optical beam waveguide 632 within the cavity 633 to point up toward the reflection surface layer 636, thereby directing the optical signal 642 from the MEMS optical beam waveguide 632 to be reflected back toward the MEMS optical beam waveguide 637. Likewise, appropriate deflection bias voltages are applied to the upper and lower deflection electrodes 640u, 640d to deflect the MEMS optical beam waveguide 637 to be aligned for reception of the reflected optical signal 642. In this way, the multiple deflection electrodes 634-635, 639-640 positioned on and around the MEMS optical beam waveguides 632, 637 may be used to provide two-dimensional deflection for building an optical waveguide crossover using the same technology as an ordinary beam switch. To prevent signal degradation from optical signal interaction with the waveguide 641, the MEMS optical beam waveguides 632, 637 are always in a deflected position when the waveguides are functional.
In addition to crossover signal routing, the pair of MEMS optical beam waveguides 632, 637 may be disposed to selectively switch signals to and from the waveguide 641. For example, if the waveguide 641 includes a deflection mirror structure (e.g., a 45 degree mirror for perpendicularly deflecting optical signals), one or more of the MEMS optical beam waveguides 632, 637 may be deflected by application of appropriate deflection bias voltages at the deflection electrodes to deflect the MEMS optical beam waveguide (e.g., 632) to point toward the deflection mirror structure (not shown) in the waveguide 641, thereby perpendicularly deflecting the transmitted optical signal. Similarly, an optical signal transmitted from the deflection mirror structure (not shown) in the waveguide 641 may be received at a MEMS optical beam waveguide by applying appropriate deflection bias voltages at the deflection electrodes to deflect the MEMS optical beam waveguide (e.g., 637) to point toward the deflection mirror structure (not shown) in the waveguide 641.
The MEMS optical beam waveguides disclosed herein may also be used for other switching-related applications for internal die signal connections and/or die-to-die signal connections. For example, the MEMS optical beam waveguides can be used to provide optical redundancy switch functionality within a die to deselect defective optical/circuit elements and replace them with spare optical/circuit elements. An example optical redundancy switch application is illustrated in
In the event that the optical circuit 657 (or either of the associated first optical waveguides 656, 658) is determined to be defective, the appropriate deflection bias voltages may be applied to the deflection electrodes 654L/654R and 664L/664R to deflect the switched pair of MEMS optical beam waveguides 652, 662 to a second position (indicated with dashed lines) to communicate optical signals to and from a second redundant optical circuit 660 via second optical waveguides 659, 661 associated with the second optical circuit 660. In this way, the multiple deflection electrodes 654-655, 664-665 positioned on and around the switched pair of MEMS optical beam waveguides 652, 662 may be used to deselect a defective optical/circuit element 657 and replace it with a spare or redundant circuit element 660.
To provide additional details of selected embodiments for implementing optical redundancy switch functionality, reference is now made to
In a first or “normal” switching configuration for the optical redundancy circuit 670 shown in
The optical redundancy circuit 670 may also be configured in a second or “replacement” switching configuration by providing bias voltages to configure the first optical switch 673 into a second switch position (e.g., by switching a cantilevered MEMS optical beam waveguide in the switch 673) for communicating optical signals to an optical waveguide receiving port for a redundant optical circuit 675, such as a modulator, receiver, etc. In similar fashion, the second optical switch 676 receives bias voltages which configure the switch 676 into a second switch position for receiving optical signals from an optical waveguide transmit port at the redundant optical circuit 675. In the second switching configuration for the optical switches 673, 676, the electric fields generated from the application of the bias voltages to deflection plates deflect the MEMS optical beam waveguides as described herein, causing the switches 673, 676 to switch substitute the redundant optical circuit 675.
The disclosed optical redundancy switch functionality may also be used in other embodiments to provide die edge replacement of defective MEMS I/O beam deflector or aligner ports with redundant MEMS I/O beam deflector or aligner ports. When an optical link between two MEMS optical waveguide beams is determined to defective, one or both of the MEMS optical waveguide beams may be defective. Rather than providing testing to determine the exact nature of the link failure, it is more cost effective for both MEMS optical waveguide beams may be replaced. To provide example details of selected die edge replacement embodiments, reference is now made to
For example, the optical redundancy circuit 682-686 in the first die 680 may include an optical switch 684 which is connected to a pair of beam deflectors 685, 686. In selected embodiments, the optical switch 684 and beam deflectors 685, 686 may be implemented as MEMS optical beam waveguides with two-dimensional beam deflection and feedback control substantially as described herein. Upon detecting that one of the beam deflectors (e.g., deflector 685 or deflector 695) is defective, the optical switch 684 switches from a first position to an alternate position to re-route the signal communication path to effectively deselect the defective beam deflector and substitute the replacement die edge MEMS I/O beam deflector (e.g., 686). The control of the optical switch 684 (as well as beam deflectors 685, 686) may be controlled by programming one or more electrical fuse circuits 682 to generate beam deflection control signals for the beam plate voltage generator 683 which supplies one or more bias voltages to deflection plates (not shown) in the optical switch 684 (as well as beam deflectors 685, 686) to control switching behavior. Correspondingly, the optical redundancy circuit 692-696 in the second die 690 may include an optical switch 694 which is connected to a pair of beam deflectors 695, 696 which may be implemented as MEMS optical beam waveguides with two-dimensional beam deflection and feedback control. Upon detecting a defect in one of the MEMS optical beam waveguide deflectors (e.g., deflector 685 or deflector 695), the optical switch 694 switches from a first position to an alternate position to effectively deselect the defective beam deflector and substitute the replacement die edge MEMS I/O beam deflector (e.g., 696). Again, the control of the optical switch 694 (and beam deflectors 695, 696) may be controlled by programming one or more electrical fuse circuits 692 to generate beam deflection control signals for the beam plate voltage generator 693 which supplies bias voltage(s) to deflection plates (not shown) to control switching behavior of the optical switch 694 (as well as beam deflectors 685, 686). In some embodiments, MEMS optical beam waveguide deflectors are replaced in pairs (e.g., 685,695 or 686,696) to minimize deflections since it is difficult to detect which MEMS optical beam waveguide of a pair is defective.
In yet other replacement embodiments, the disclosed optical redundancy switch functionality may be used to provide die edge replacement to shift a plurality of die edge optical MEMS I/O beam deflector or aligner ports around a defective optical MEMS I/O beam deflector or aligner port by using a spare optical MEMS I/O beam deflector or aligner port on each die. To provide example details of such replacement embodiments, reference is now made to
For example, the optical redundancy circuit 702-710 in the first die 710 may include a plurality of optical switches 702-705, each of which is connected to a pair of beam deflectors 706-710 which include a plurality of normally-used beam deflectors 706-709 and a replacement beam deflector 710. In the depicted connection configuration, each optical switch (e.g., 703) is connected in a “normal” configuration to a first beam deflector (e.g., 707) and is connected in a “switched” configuration to a second beam deflector (e.g. 708) which may be adjacent to the first beam deflector. In selected embodiments, the optical switches 702-705 and beam deflectors 706-710 may be implemented as MEMS optical beam waveguides with two-dimensional beam deflection and feedback control substantially as described herein. Correspondingly, the optical redundancy circuit 722-730 in the second die 720 may include a plurality of optical switches 722-725, each of which is connected to a pair of beam deflectors 726-730 which include a plurality of normally-used beam deflectors 726-729 and a replacement beam deflector 730. As illustrated, each optical switch (e.g. 723) is connected in a “normal” configuration to a first beam deflector (e.g., 727) and is connected in a “switched” configuration to a second beam deflector (e.g., 728) which may be adjacent to the first beam deflector. Upon detecting that one of the beam deflectors (e.g. deflector 707) is defective (as indicated with left-to-right crosshatching), the associated optical switch (e.g., 703) and all “downstream” optical switches (e.g., 704-705) in the first die 700 are switched from a first position to an alternate position to re-route the signal communication path, thereby effectively deselecting the defective beam deflector 707 and sequentially substituting the adjacent beam deflectors 708-710. A corresponding reconfiguration of switches in the second die 720 is also made to switch the corresponding optical switch (e.g., 723) and all “downstream” optical switches (e.g., 724-725) from a first position to an alternate position to re-route the signal communication path, thereby effectively deselecting the beam deflector 727 corresponding to the defective beam deflector 707 and sequentially substituting the adjacent beam deflectors 728-730. As a result, the spare beam deflectors 710, 730 (as indicated with left-to-right crosshatching) are used in the switched mode. The corresponding reconfiguration of switches on the second die 720 may be accomplished using any desired technique, such as sending one or more control signals (not shown) to any switch using the defective beam deflector 707 (and to any downstream switches at the second die 720) to provide notification of the changed port pin location. Though not shown, the control of the optical switches 702-705, 722-725 (as well as beam deflectors 706-710, 726-730) may be controlled by supplying bias voltages to the deflection plates in the optical switches and beam deflectors under control of programmed fuse circuits (not shown) to control switching behavior.
Turning now to
At step 803, the plurality of aligned die stacks are attached to the system board. While any desired attachment mechanism may be used, the attachment may be accomplished by positioning and reflowing solder ball or flip chip arrays to connect the die stacks to the system board. Once attached, the die stacks form one or subsystems that are separated from one another by specified die stack spacing requirements, alone or in combination with alignment spacers to raise selected die stacks (e.g., memory die stacks) in relation to other die stacks (e.g., processor die stacks). In addition, heat spreader and/or heat sink structures may be positioned and attached to dissipate heat from the plurality of attached die stacks.
At step 804, direct optical communication links are established between adjacent die stacks. As described herein, the direct optical communication links may be established by applying one or more deflection voltages to a plurality of deflection electrodes that are positioned around each deflectable MEMS optical beam waveguide. The resulting electric fields between the electrodes and waveguides will deflect the MEMS optical beam waveguides for a given optical signal into alignment with one another.
At step 805, the deflection voltages for the plurality of deflection electrodes may be updated over time using controlled feedback signals to maintain alignment between associated deflectable MEMS waveguide beams. While the controlled feedback signals can be generated with any desired mechanism, in selected embodiments, the feedback signal may be generated by tracking the quality or signal strength of the optical signal exchanged between associated deflectable MEMS waveguide beams. If the detected signal quality or strength falls above or below specified triggers or thresholds, the deflection voltages may be adjusted using a sweeping pattern to adjust the alignment of the deflectable MEMS waveguide beams to improve the detected signal quality or strength.
Once aligned, the optical feed-throughs and deflectable MEMS waveguide beams are used to communicate optical signal information between and through adjacent die stacks at step 806. At this point, controlled feedback may be provided return to step 805 to update the deflection voltages for continually adjusting the two-dimensional alignment of the deflectable MEMS waveguide beams. At step 807, the process ends.
By now it should be appreciated that there is provided herein a die stack system and associated methods of operation and fabrication. In the disclosed die stack system, first and second, adjacent die stack modules are affixed to a system board. The first die stack module may include a first plurality of stacked die, each of which has one or more deflectable transmit/receive MEMS optical beam waveguides at a die edge and a plurality of deflection electrodes positioned to align each deflectable transmit/receive MEMS optical beam waveguide to provide a direct optical link to another die in the second die stack module. In similar fashion, the second die stack module may include a second plurality of stacked die, each of which has one or more deflectable receive/transmit MEMS optical beam waveguides at a die edge and a plurality of deflection electrodes positioned to align each deflectable receive/transmit MEMS optical beam waveguide to provide an optical link to a die in another die stack module, such as the first die stack module. Each of the die in the first and/or second die stack module may also include an optical feed-through for communicating optical signal information through said die. In selected embodiments, the first die stack module may be formed with a plurality of stacked processor die (e.g., horizontally stacked processor die) and the second die stack module may be formed with a plurality of stacked memory die (e.g. vertically stacked memory die), where each processor die in the first die stack module is rotated by 90 degrees to be perpendicular to each memory die in the second die stack module. Each processor die in the first die stack module may include, for each memory die in the second die stack module, a plurality of deflectable transmit/receive MEMS optical beam waveguides at the processor die edge which may be aligned with deflection electrodes at the processor die to establish point-to-point optical links with a corresponding plurality of deflectable receive/transmit MEMS optical beam waveguides at each memory die. In addition, the die stack system may include one or more additional memory die stack modules affixed to the system board, where each additional memory die stack module includes a plurality of stacked memory die, each having a deflectable receive/transmit MEMS optical beam waveguide at a die edge and a plurality of deflection electrodes positioned to align the deflectable receive/transmit MEMS optical beam waveguide to provide an optical link to an adjacent die. The die stack system may also include one or more additional processor die stack modules affixed to the system board, where each additional processor die stack module includes a plurality of stacked processor die, each having a deflectable receive/transmit MEMS optical beam waveguide at a die edge and a plurality of deflection electrodes positioned to align the deflectable receive/transmit MEMS optical beam waveguide to provide an optical link to an adjacent die. In the die stack system, the first and/or second die stack modules may include optical circuitry in which a laser transmitter generates a laser beam which is modulated with signal information to generate optical signal information which transmitted on an optical beam waveguide to a deflectable receive/transmit MEMS optical beam waveguide at the die edge.
In another form, there is provided a multiple die communication system, apparatus and method for manufacturing and operating same. As disclosed, a first die (e.g. a processor die) is provided that is fixed to a substrate with a lateral orientation, where the first die includes a first optical waveguide beam (e.g., a deflectable optical MEMS waveguide beam) formed at a lateral die edge of the first die. In addition, a second die (e.g., a memory die) is provided that is fixed to the substrate with a vertical orientation that rotated ninety degrees from the lateral orientation, where the second die includes a second optical waveguide beam formed at a lateral die edge of the second die. Once affixed to the substrate, the first optical waveguide beam is located for providing a direct optical link to the second optical waveguide beam. In this way, a direct optical link is established between the first and second die by deflecting a first deflectable optical MEMS waveguide beam at the first die into alignment with a second deflectable optical MEMS waveguide beam at the second die. To assist with establishing optical links between the first and second die, a plurality of deflection electrodes are positioned around each optical waveguide beam in the first die and second die. In such embodiments, a first bias driver generates one or more bias voltages for application to the plurality of deflection electrodes positioned around the first optical waveguide beam to deflect the first optical waveguide beam. In addition, a second bias driver generates one or more bias voltages for application to the plurality of deflection electrodes positioned around the second optical waveguide beam so that the first optical waveguide beam is deflected into alignment with the second optical waveguide beam. In selected embodiments, a third die may be affixed to the second die to form a first die stack module (e.g., a memory die stack module), where the third die comprises a third optical waveguide beam formed at a lateral die edge of the third die, and where the first die (e.g., a processor die) further comprises an additional optical waveguide beam located at the lateral die edge of the first die to provide a direct optical link to the third optical waveguide beam of the third die. In establishing a direct optical link between the first and second die, a laser beam may be generated with a laser transmitter at the first die, and the laser beam may be modulated with signal information to generate optical signal information which transmitted on an optical beam waveguide through the first die to the first deflectable optical MEMS waveguide beam for direct transmission to the second deflectable optical MEMS waveguide beam at the second die.
In yet another form, there is provided a multiple die stack computer system and method for manufacturing and operating same. As disclosed, the multiple die stack computer system includes first die stack and a plurality of additional die stacks which are configured and positioned for optical communication with the first die stack. In the first die stack, a plurality of microprocessor die are provided, each microprocessor die including a first plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams formed at a lateral die edge of each microprocessor die. The plurality of additional die stacks each include a plurality of memory die, where each memory die includes a second plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams formed at a lateral die edge of each memory die. In selected embodiments, the plurality of additional die stacks may include a first memory die stack and a second memory die stack. The first memory die stack includes a first plurality of memory die, each having a first plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams formed at a lateral die edge of each memory die, where the first memory die stack is positioned adjacent to the first die stack to provide direct point-to-point optical links between the first die stack and the first memory die stack. The second memory die stack includes a second plurality of memory die, each having deflectable optical MEMS waveguide beams formed at a lateral die edge of each memory die, where the second memory die stack is positioned adjacent to the first memory die stack to provide direct point-to-point optical links between first memory die stack and the second memory die stack and to communicate with the first die stack using the first plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams in the first memory die stack. As assembled, the plurality of microprocessor die in the first die stack are oriented perpendicularly from the plurality of memory die in the plurality of additional die stacks so that each processor die can establish direct point-to-point optical links with each of the plurality of memory die in an adjacent die stack by separately deflecting one or more deflectable optical MEMS waveguide beams at the processor die into alignment with corresponding deflectable optical MEMS waveguide beams at each of the plurality of memory die. In the multiple die stack computer system, a plurality of deflection electrodes are positioned around each of the deflectable optical MEMS waveguide beams, where the plurality of deflection electrodes positioned around each of deflectable optical MEMS waveguide beam are connected to receive one or more bias voltages to deflect said deflectable optical MEMS waveguide beam. The multiple die stack computer system may also include a second processor die stack formed with a plurality of microprocessor die, each having a first plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams formed at a lateral die edge of each microprocessor die, where the second die stack is positioned adjacent to the first die stack to provide direct point-to-point optical links between the first die stack and the second die stack. In addition, the multiple die stack computer system may include a plurality of memory die stacks, each comprising a plurality of memory die having a plurality of optical feed-through beams connected to deflectable optical MEMS waveguide beams formed at a lateral die edge of each memory die, where the plurality of microprocessor die in the second die stack are oriented perpendicularly from the plurality of memory die in the plurality of memory die stacks so that each processor die in the second die stack can establish direct point-to-point optical links with each of the plurality of memory die in an adjacent memory die stack
Although the described exemplary embodiments disclosed herein are directed to various high density, low power, high performance information systems with integrated optical communications using deflectable MEMS optical beam waveguides with two-dimensional alignment and controlled feedback to adjust beam alignment and methods for making same, the present invention is not necessarily limited to the example embodiments which illustrate inventive aspects of the present invention that are applicable to a wide variety of fabrication processes and/or structures. Thus, the particular embodiments disclosed above are illustrative only and should not be taken as limitations upon the present invention, as the invention may be modified and practiced in different but equivalent manners apparent to those skilled in the art having the benefit of the teachings herein. For example, while the communication system die stack features are described with example semiconductor process details for implementing various processor and memory die stack embodiments, this is merely for convenience of explanation and not intended to be limiting and persons of skill in the art will understand that the principles taught herein apply to other semiconductor processing steps and/or different types of integrated circuit devices. As a result, the various references to a processor die will be understood by those skilled in the art to refer to any processor, microprocessor, microcontroller, digital signal processor, audio processor, or other defined logic circuit and any combination thereof. Likewise, the various references to a memory die will be understood by those skilled in the art to refer to any memory die, such as DRAM, Flash, SRAM, MRAM, or other defined memory circuit and any combination thereof, and may also refer to a memory controller. Moreover, the thicknesses, materials, and processing details for the described layers may deviate from the disclosed examples. In addition, the terms of relative position used in the description and the claims, if any, are interchangeable under appropriate circumstances such that embodiments of the invention described herein are, for example, capable of operation in other orientations than those illustrated or otherwise described herein. The term “coupled.” as used herein, is defined as directly or indirectly connected in an electrical or non-electrical manner. Accordingly, the foregoing description is not intended to limit the invention to the particular form set forth, but on the contrary, is intended to cover such alternatives, modifications and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims so that those skilled in the art should understand that they can make various changes, substitutions and alterations without departing from the spirit and scope of the invention in its broadest form.
Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, the benefits, advantages, solutions to problems, and any element(s) that may cause any benefit, advantage, or solution to occur or become more pronounced are not to be construed as a critical, required, or essential feature or element of any or all the claims. As used herein, the terms “comprises,” “comprising.” or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
U.S. patent application Ser. No. ______, entitled “Optical Wafer and Die Probe Testing,” by inventors Michael B. McShane, Perry H. Pelley, and Tab A. Stephens, Attorney Docket No. DN30544TK, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Die Stack with Optical TSVS.” by inventors Perry H. Pelley, Tab A. Stephens, and Michael B. McShane, Attorney Docket No. DN30660TK, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Integration of a MEMS Beam with Optical Waveguide and Deflection in Two Dimensions,” by inventors Tab A. Stephens, Perry H. Pelley, and Michael B. McShane. Attorney Docket No. FS40407ZR, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Method and Apparatus for Beam Control with Optical MEMS Beam Waveguide,” by inventor Perry H. Pelley, Attorney Docket No. FS40412ZR, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Optical Redundancy,” by inventors Perry H. Pelley, Tab A. Stephens, and Michael B. McShane, Attorney Docket No. FS40413NH, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Optical Backplane Mirror,” by inventors Tab A. Stephens. Perry H. Pelley, and Michael B. McShane, Attorney Docket No. FS40415TP, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety. U.S. patent application Ser. No. ______, entitled “Optical Die Test Interface,” by inventors Michael B. McShane, Perry H. Pelley, and Tab A. Stephens, Attorney Docket No. FS40417TK, filed on even date herewith, describes exemplary methods and systems and is incorporated by reference in its entirety.
