A portion of the disclosure of this patent document contains material which is subject to copyright protection. This patent document may show and/or describe matter which is or may become trade dress of the owner. The copyright and trade dress owner has no objection to the facsimile reproduction by anyone of the patent disclosure as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright and trade dress rights whatsoever.
This disclosure relates to radio frequency filters using acoustic wave resonators, and specifically to filters for use in communications equipment.
A radio frequency (RF) filter is a two-port device configured to pass some frequencies and to stop other frequencies, where “pass” means transmit with relatively low signal loss and “stop” means block or substantially attenuate. The range of frequencies passed by a filter is referred to as the “pass-band” of the filter. The range of frequencies stopped by such a filter is referred to as the “stop-band” of the filter. A typical RF filter has at least one pass-band and at least one stop-band. Specific requirements on a passband or stop-band depend on the specific application. For example, a “pass-band” may be defined as a frequency range where the insertion loss of a filter is better than a defined value such as 1 dB, 2 dB, or 3 dB. A “stop-band” may be defined as a frequency range where the rejection of a filter is greater than a defined value such as 20 dB, 30 dB, 40 dB, or greater depending on application.
RF filters are used in communications systems where information is transmitted over wireless links. For example, RF filters may be found in the RF front-ends of cellular base stations, mobile telephone and computing devices, satellite transceivers and ground stations, IoT (Internet of Things) devices, laptop computers and tablets, fixed point radio links, and other communications systems. RF filters are also used in radar and electronic and information warfare systems.
RF filters typically require many design trade-offs to achieve, for each specific application, the best compromise between performance parameters such as insertion loss, rejection, isolation, power handling, linearity, size and cost. Specific design and manufacturing methods and enhancements can benefit simultaneously one or several of these requirements.
Performance enhancements to the RF filters in a wireless system can have broad impact to system performance. Improvements in RF filters can be leveraged to provide system performance improvements such as larger cell size, longer battery life, higher data rates, greater network capacity, lower cost, enhanced security, higher reliability, etc. These improvements can be realized at many levels of the wireless system both separately and in combination, for example at the RF module, RF transceiver, mobile or fixed sub-system, or network levels.
High performance RF filters for present communication systems commonly incorporate acoustic wave resonators including surface acoustic wave (SAW) resonators, bulk acoustic wave (BAW) resonators, film bulk acoustic wave resonators (FBAR), and other types of acoustic resonators. However, these existing technologies are not well-suited for use at the higher frequencies and bandwidths proposed for future communications networks.
The desire for wider communication channel bandwidths will inevitably lead to the use of higher frequency communications bands. Radio access technology for mobile telephone networks has been standardized by the 3GPP (3rd Generation Partnership Project). Radio access technology for 5th generation mobile networks is defined in the 5G NR (new radio) standard. The 5G NR standard defines several new communications bands. Two of these new communications bands are n77, which uses the frequency range from 3300 MHz to 4200 MHz, and n79, which uses the frequency range from 4400 MHz to 5000 MHz. Both band n77 and band n79 use time-division duplexing (TDD), such that a communications device operating in band n77 and/or band n79 use the same frequencies for both uplink and downlink transmissions. Bandpass filters for bands n77 and n79 must be capable of handling the transmit power of the communications device.
The Unlicensed National Information Infrastructure (U-NII) band, as defined by the United States Federal Communications Commission, is the portion of the radio frequency spectrum from 5.15 GHz to 7.125 GHz. The U-NII band is used by wireless local area networks (WLANs) and by many wireless Internet service providers. U-NII consists of eight ranges. Portions of U-NII-1 through U-NII-4 are used for 5 GHz WLANs based on the Institute of Electrical and Electronic Engineers (IEEE) Standard 802.11a and newer standards (commonly referred to as 5 GHz Wi-Fi®). U-NII-5 though U-NII-8 are allocated for 6 GHz WLANs based on the Institute of Electrical and Electronic Engineers (IEEE) Standard 802.11ax (commonly referred to a 6 GHz Wi-Fi). The U-NII frequency ranges also require high frequency and wide bandwidth bandpass filters.
The Transversely-Excited Film Bulk Acoustic Resonator (XBAR) is an acoustic resonator structure for use in microwave filters. The XBAR is described in U.S. Pat. No. 10,491,291, titled TRANSVERSELY EXCITED FILM BULK ACOUSTIC RESONATOR. An XBAR resonator comprises an interdigital transducer (IDT) formed on a thin floating layer, or diaphragm, of a single-crystal piezoelectric material. The IDT includes a first set of parallel fingers, extending from a first busbar and a second set of parallel fingers extending from a second busbar. The first and second sets of parallel fingers are interleaved. A microwave signal applied to the IDT excites a shear primary acoustic wave in the piezoelectric diaphragm. XBAR resonators provide very high electromechanical coupling and high frequency capability. XBAR resonators may be used in a variety of RF filters including band-reject filters, band-pass filters, duplexers, and multiplexers. XBARs are well suited for use in filters for communications bands with frequencies above 3 GHz.
Throughout this description, elements appearing in figures are assigned three-digit or four-digit reference designators, where the two least significant digits are specific to the element and the one or two most significant digit is the figure number where the element is first introduced. An element that is not described in conjunction with a figure may be presumed to have the same characteristics and function as a previously-described element having the same reference designator.
Description of Apparatus
It is desirable for a communications device to be able to concurrently use more than one portion of the U-NII spectrum. However, concurrent use, or coexistence of two or more portions of the spectrum requires a corresponding number of filters to distinguish between the portions. Each filter would be required to pass a respective portion of the spectrum while blocking the other portions. Such filters are called “coexistence filters” in this patent.
Realizable RF filters transition between pass-bands and stop-bands over a finite frequency range. The unallocated frequency range between U-NII-4 and U-NII-5 is, at most, 50 MHz, which is much smaller than the transition frequency range for coexistence filters having an acceptable size and cost for a portable communications device. Unallocated frequency range U-NII-2B covers 120 MHz. Additionally, the upper 10 MHz of range U-NII-2A and the lowest 10 MHz of U-NII-2C are not used by WLAN channels defined by IEEE Standard 802.11. The total un-used spectrum of 140 MHz is sufficient for coexistence filters to allow concurrent operation of WLANs in the U-NII-1/U-NII-2A spectrum and WLANs in the U-NII-2C to U-NII-8 spectrum.
The communications device 200 includes a U-NII-1 to U-NII-2A transceiver (transmitter/receiver) 210 coupled to an antenna 225 via a U-NII-1 to U-NII-2A coexistence filter 220. The U-NII-1 to U-NII-2A transceiver 210 includes a transmitter, a receiver, and a transmit/receive switch to select which of the transmitter and receiver is connected to the coexistence filter 220 at any given time. The U-NII-1 to U-NII-2A transceiver 210 typically also includes one or more digital processors performing processing functions such as digital signal processing and media access control functions. The U-NII-1 to U-NII-2A coexistence filter 220 is configured to pass (i.e. transmit with acceptably low loss) the U-NII-1 to U-NII-2A frequency spectrum and stop (i.e., adequately attenuate) the U-NII-2C to U-NII-8 frequency spectrum.
The communications device 200 also includes a U-NII-2C to U-NII-8 transceiver (transmitter/receiver) 230 coupled to an antenna 245 via a U-NII-2C to U-NII-8 coexistence filter 240. The U-NII-2C to U-NII-8 transceiver 230 includes a transmitter, a receiver, and a transmit/receive switch to select which of the transmitter and receiver is connected to the coexistence filter 240 at any given time. The U-NII-2C to U-NII-8 transceiver 230 typically also includes one or more digital processors performing processing functions such as digital signal processing and media access control functions. The U-NII-2C to U-NII-8 coexistence filter 240 is configured to pass (i.e. transmit with acceptably low loss) the U-NII-2C to U-NII-8 frequency spectrum and stop (i.e., adequately attenuate) the U-NII-1 to U-NII-2A frequency spectrum.
In some applications the antennas 225, 245 may be a common antenna, in which case the coexistence filters 220, 240 perform the function of a diplexer. In some applications, processing functions required by the transceivers 210, 230 may be performed by a common processor.
The solid curve 310 is a plot of idealized characteristics of a U-NII-1 to U-NII-2A coexistence filter. The U-NII-1 to U-NII-2A coexistence filter has a pass-band from less than 5.15 GHz to 5.34 GHz and a stop-band from 5.48 GHz to greater than 7.125 GHz. In this example, the input/output transfer function (S2,1) of the filters is required to be greater than −3 dB in the pass-band and less than −50 dB in the stop-band. These requirements are exemplary and specific applications may have other requirements.
The dashed curve 320 is a plot of idealized characteristics of a U-NII-2C to U-NII-8 coexistence filter. The U-NII-2C to U-NII-8 coexistence filter has a pass-band from 5.48 GHz to at least 7.125 GHz and a stop-band from 5.34 GHz to less than 5.15 GHz. In this example, the input/output transfer function (S2,1) of the filters is required to be greater than −3 dB in the pass-band and less than −50 dB in the stop-band. These requirements are exemplary and specific applications may have other requirements.
The width of the pass-band of the U-NII-2C to U-NII-8 coexistence filter is 1645 MHz, which is 26% of its center frequency of 6300 MHz. A bandpass filter with 26% fractional bandwidth may be implemented using transversely-excited film bulk acoustic resonators (XBARs). For example, co-pending patent application Ser. No. 17/189,246, titled SPLIT-LADDER BAND N77 FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS, describes an XBAR bandpass filter with 24% fractional bandwidth for 5G NR band n77. A similar filter may be shifted in frequency and optimized for the U-NII-2C to U-NII-8 coexistence filter.
Portable communications devices are increasingly using multiple-input multiple-output (MIMO) radio architectures to increase communications bandwidth. MIMO radios use multiple receive channels and/or multiple transmit channels within a common frequency band. MIMO radios are commonly described as M×N, where M is the number of receive channels and N is the number of transmit channels. For example, the communications device of
The U-NII-1 to U-NII-2A radio 410 includes a U-NII-1 to U-NII-2A transmit/receive (TRX) processor 412 and four channels. Each channel includes a respective U-NII-1 to U-NII-2A RF front end (RFFE) 415A, 415B, 415C, 415D coupled to a respective antenna 425A, 425B, 425C, 425D via a respective U-NII-1 to U-NII-2A coexistence filter (CF) 420A, 420B, 420C, 420D. The U-NII-1 to U-NII-2A transmit/receive (TRX) processor 412 may include, for example, various processors and processing functions such as one or more digital signal processors and a processor performing a media access control (MAC) function. Each U-NII-1 to U-NII-2A RF front end (RFFE) 415A, 415B, 415C, 415D may include a power amplifier, a low noise amplifier, a transmit/receive switch, and D/A and A/D converters.
The U-NII-2C to U-NII-8 radio 430 includes a U-NII-2C to U-NII-8 TRX processor 432 and four channels. Each channel includes a respective U-NII-2C to U-NII-8 RF front end 435A, 435B, 435C, 435D coupled to a respective antenna 445A, 445B, 445C, 445D via a respective U-NII-2C to U-NII-8 coexistence filter 440A, 440B, 440C, 440D. The U-NII-2C to U-NII-8 transmit/receive (TRX) processor 432 may include, for example, various processors and processing functions such as one or more digital signal processors and a processor performing a media access control (MAC) function. Each U-NII-2C to U-NII-8 RF front end 435A, 435B, 435C, 435D may include a power amplifier, a low noise amplifier, a transmit/receive switch, and D/A and A/D converters.
In some applications some or all of the antennas 425A-D, 445A-D may be common to both the U-NII-1 to U-NII-2A and U-NII-2C to U-NII-8 transceivers, in which case the respective coexistence filters 420A-D, 440A-D act as diplexers. In some applications, processing functions required by the transceivers 410, 430 may be performed, at least in part, by one or more common processors. In radio configurations, such as 4×2 MIMO, where some channels are only used for reception, the corresponding RFFE will not include a power amplifier or A/D converter.
Throughout this description, the embodiments and examples shown should be considered as exemplars, rather than limitations on the apparatus and procedures disclosed or claimed. Although many of the examples presented herein involve specific combinations of method acts or system elements, it should be understood that those acts and those elements may be combined in other ways to accomplish the same objectives. With regard to flowcharts, additional and fewer steps may be taken, and the steps as shown may be combined or further refined to achieve the methods described herein. Acts, elements and features discussed only in connection with one embodiment are not intended to be excluded from a similar role in other embodiments.
As used herein, “plurality” means two or more. As used herein, a “set” of items may include one or more of such items. As used herein, whether in the written description or the claims, the terms “comprising”, “including”, “carrying”, “having”, “containing”, “involving”, and the like are to be understood to be open-ended, i.e., to mean including but not limited to. Only the transitional phrases “consisting of” and “consisting essentially of”, respectively, are closed or semi-closed transitional phrases with respect to claims. Use of ordinal terms such as “first”, “second”, “third”, etc., in the claims to modify a claim element does not by itself connote any priority, precedence, or order of one claim element over another or the temporal order in which acts of a method are performed, but are used merely as labels to distinguish one claim element having a certain name from another element having a same name (but for use of the ordinal term) to distinguish the claim elements. As used herein, “and/or” means that the listed items are alternatives, but the alternatives also include any combination of the listed items.
This patent claims priority from provisional patent application 63/249,572, filed Sep. 29, 2021, entitled RECEIVER WITH U-NII-2C THRU U-NII-8 BAND PASS FILTER.
| Number | Name | Date | Kind |
|---|---|---|---|
| 5274345 | Gau | Dec 1993 | A |
| 5446330 | Eda et al. | Aug 1995 | A |
| 5552655 | Stokes et al. | Sep 1996 | A |
| 5726610 | Allen et al. | Mar 1998 | A |
| 5853601 | Krishaswamy | Dec 1998 | A |
| 6377140 | Ehara et al. | Apr 2002 | B1 |
| 6516503 | Ikada et al. | Feb 2003 | B1 |
| 6540827 | Levy et al. | Apr 2003 | B1 |
| 6570470 | Maehara et al. | May 2003 | B2 |
| 6707229 | Martin | Mar 2004 | B1 |
| 6710514 | Ikada et al. | Mar 2004 | B2 |
| 6833774 | Abbott et al. | Dec 2004 | B2 |
| 7345400 | Nakao et al. | Mar 2008 | B2 |
| 7463118 | Jacobsen | Dec 2008 | B2 |
| 7535152 | Ogami et al. | May 2009 | B2 |
| 7684109 | Godshalk et al. | Mar 2010 | B2 |
| 7728483 | Tanaka | Jun 2010 | B2 |
| 7868519 | Umeda | Jan 2011 | B2 |
| 7941103 | Iwamoto et al. | May 2011 | B2 |
| 7965015 | Tai et al. | Jun 2011 | B2 |
| 8278802 | Lee et al. | Oct 2012 | B1 |
| 8294330 | Abbott et al. | Oct 2012 | B1 |
| 8344815 | Yamanaka et al. | Jan 2013 | B2 |
| 8816567 | Zuo et al. | Aug 2014 | B2 |
| 8829766 | Milyutin et al. | Sep 2014 | B2 |
| 8932686 | Hayakawa et al. | Jan 2015 | B2 |
| 9093979 | Wang | Jul 2015 | B2 |
| 9112134 | Takahashi | Aug 2015 | B2 |
| 9130145 | Martin et al. | Sep 2015 | B2 |
| 9148121 | Inoue | Sep 2015 | B2 |
| 9219466 | Meltaus et al. | Dec 2015 | B2 |
| 9276557 | Nordquist et al. | Mar 2016 | B1 |
| 9369105 | Li et al. | Jun 2016 | B1 |
| 9425765 | Rinaldi | Aug 2016 | B2 |
| 9525398 | Olsson | Dec 2016 | B1 |
| 9640750 | Nakanishi et al. | May 2017 | B2 |
| 9748923 | Kando et al. | Aug 2017 | B2 |
| 9762202 | Thalmayr et al. | Sep 2017 | B2 |
| 9780759 | Kimura et al. | Oct 2017 | B2 |
| 9837984 | Khlat et al. | Dec 2017 | B2 |
| 10079414 | Guyette et al. | Sep 2018 | B2 |
| 10187039 | Komatsu et al. | Jan 2019 | B2 |
| 10200013 | Bower et al. | Feb 2019 | B2 |
| 10211806 | Bhattacharjee | Feb 2019 | B2 |
| 10284176 | Solal | May 2019 | B1 |
| 10491192 | Plesski et al. | Nov 2019 | B1 |
| 10601392 | Plesski et al. | Mar 2020 | B2 |
| 10637438 | Garcia et al. | Apr 2020 | B2 |
| 10644674 | Takamine | May 2020 | B2 |
| 10756697 | Plesski et al. | Aug 2020 | B2 |
| 10790802 | Yantchev et al. | Sep 2020 | B2 |
| 10797675 | Plesski | Oct 2020 | B2 |
| 10812048 | Nosaka | Oct 2020 | B2 |
| 10819309 | Turner et al. | Oct 2020 | B1 |
| 10826462 | Plesski et al. | Nov 2020 | B2 |
| 10868510 | Yantchev et al. | Dec 2020 | B2 |
| 10868512 | Garcia et al. | Dec 2020 | B2 |
| 10868513 | Yantchev | Dec 2020 | B2 |
| 10911017 | Plesski | Feb 2021 | B2 |
| 10911021 | Turner et al. | Feb 2021 | B2 |
| 10911023 | Turner | Feb 2021 | B2 |
| 10917070 | Plesski et al. | Feb 2021 | B2 |
| 10917072 | McHugh et al. | Feb 2021 | B2 |
| 10985726 | Plesski | Apr 2021 | B2 |
| 10985728 | Plesski et al. | Apr 2021 | B2 |
| 10985730 | Garcia | Apr 2021 | B2 |
| 10992282 | Plesski et al. | Apr 2021 | B1 |
| 10992283 | Plesski et al. | Apr 2021 | B2 |
| 10992284 | Yantchev | Apr 2021 | B2 |
| 10998877 | Turner et al. | May 2021 | B2 |
| 10998882 | Yantchev et al. | May 2021 | B2 |
| 11003971 | Plesski et al. | May 2021 | B2 |
| 11114996 | Plesski et al. | Sep 2021 | B2 |
| 11114998 | Garcia et al. | Sep 2021 | B2 |
| 11139794 | Plesski et al. | Oct 2021 | B2 |
| 11143561 | Plesski | Oct 2021 | B2 |
| 11146231 | Plesski | Oct 2021 | B2 |
| 11146232 | Yandrapalli et al. | Oct 2021 | B2 |
| 11146238 | Hammond et al. | Oct 2021 | B2 |
| 11146244 | Yantchev | Oct 2021 | B2 |
| 11159207 | Seok | Oct 2021 | B2 |
| 11165407 | Yantchev | Nov 2021 | B2 |
| 11171629 | Turner | Nov 2021 | B2 |
| 11356127 | Hasnain | Jun 2022 | B2 |
| 20020079986 | Ruby et al. | Jun 2002 | A1 |
| 20020130736 | Mukai | Sep 2002 | A1 |
| 20020158714 | Kaitila et al. | Oct 2002 | A1 |
| 20020189062 | Lin et al. | Dec 2002 | A1 |
| 20030080831 | Segovia Fernandez et al. | May 2003 | A1 |
| 20030199105 | Kub et al. | Oct 2003 | A1 |
| 20040041496 | Imai et al. | Mar 2004 | A1 |
| 20040100164 | Murata | May 2004 | A1 |
| 20040261250 | Kadota et al. | Dec 2004 | A1 |
| 20050185026 | Noguchi et al. | Aug 2005 | A1 |
| 20050218488 | Matsuo | Oct 2005 | A1 |
| 20050264136 | Tsutsumi et al. | Dec 2005 | A1 |
| 20060152107 | Tanaka | Jul 2006 | A1 |
| 20060179642 | Kawamura | Aug 2006 | A1 |
| 20070182510 | Park | Aug 2007 | A1 |
| 20070188047 | Tanaka | Aug 2007 | A1 |
| 20070194863 | Shibata et al. | Aug 2007 | A1 |
| 20070267942 | Matsumoto et al. | Nov 2007 | A1 |
| 20080246559 | Ayazi | Oct 2008 | A1 |
| 20100019866 | Hara et al. | Jan 2010 | A1 |
| 20100064492 | Tanaka | Mar 2010 | A1 |
| 20100123367 | Tai et al. | May 2010 | A1 |
| 20110018389 | Fukano et al. | Jan 2011 | A1 |
| 20110018654 | Bradley et al. | Jan 2011 | A1 |
| 20110109196 | Goto et al. | May 2011 | A1 |
| 20110278993 | Iwamoto | Nov 2011 | A1 |
| 20120286900 | Kadota et al. | Nov 2012 | A1 |
| 20120326809 | Tsuda | Dec 2012 | A1 |
| 20130127551 | Yamanaka | May 2013 | A1 |
| 20130234805 | Takahashi | Sep 2013 | A1 |
| 20130271238 | Onda | Oct 2013 | A1 |
| 20130278609 | Stephanou et al. | Oct 2013 | A1 |
| 20130321100 | Wang | Dec 2013 | A1 |
| 20140130319 | Iwamoto | May 2014 | A1 |
| 20140145556 | Kadota | May 2014 | A1 |
| 20140151151 | Reinhardt | Jun 2014 | A1 |
| 20140152145 | Kando et al. | Jun 2014 | A1 |
| 20140173862 | Kando et al. | Jun 2014 | A1 |
| 20140225684 | Kando et al. | Aug 2014 | A1 |
| 20150042417 | Onodera et al. | Feb 2015 | A1 |
| 20150165479 | Lasiter et al. | Jun 2015 | A1 |
| 20150319537 | Perois et al. | Nov 2015 | A1 |
| 20150333730 | Meltaus et al. | Nov 2015 | A1 |
| 20150365067 | Hori et al. | Dec 2015 | A1 |
| 20160028367 | Shealy | Jan 2016 | A1 |
| 20160087187 | Burak | Mar 2016 | A1 |
| 20160182009 | Bhattacharjee | Jun 2016 | A1 |
| 20170063332 | Gilbert et al. | Mar 2017 | A1 |
| 20170179225 | Kishimoto | Jun 2017 | A1 |
| 20170179928 | Raihn et al. | Jun 2017 | A1 |
| 20170214381 | Bhattacharjee | Jul 2017 | A1 |
| 20170214387 | Burak et al. | Jul 2017 | A1 |
| 20170222617 | Mizoguchi | Aug 2017 | A1 |
| 20170222622 | Solal et al. | Aug 2017 | A1 |
| 20170370791 | Nakamura et al. | Dec 2017 | A1 |
| 20180005950 | Watanabe | Jan 2018 | A1 |
| 20180026603 | Iwamoto | Jan 2018 | A1 |
| 20180033952 | Yamamoto | Feb 2018 | A1 |
| 20180041191 | Park | Feb 2018 | A1 |
| 20180062615 | Kato et al. | Mar 2018 | A1 |
| 20180062617 | Yun et al. | Mar 2018 | A1 |
| 20180123016 | Gong | May 2018 | A1 |
| 20180191322 | Chang et al. | Jul 2018 | A1 |
| 20180278227 | Hurwitz | Sep 2018 | A1 |
| 20190068164 | Houlden et al. | Feb 2019 | A1 |
| 20190123721 | Takamine | Apr 2019 | A1 |
| 20190131953 | Gong | May 2019 | A1 |
| 20190273480 | Lin et al. | Sep 2019 | A1 |
| 20190348966 | Campanella-Pineda | Nov 2019 | A1 |
| 20190379351 | Miyamoto et al. | Dec 2019 | A1 |
| 20190386635 | Plesski et al. | Dec 2019 | A1 |
| 20190386636 | Plesski et al. | Dec 2019 | A1 |
| 20200007110 | Konaka et al. | Jan 2020 | A1 |
| 20200021272 | Segovia Fernandez et al. | Jan 2020 | A1 |
| 20200036357 | Mimura | Jan 2020 | A1 |
| 20200235719 | Yantchev et al. | Jul 2020 | A1 |
| 20200259480 | Pensala | Aug 2020 | A1 |
| 20200313645 | Caron | Oct 2020 | A1 |
| 20200350891 | Turner | Nov 2020 | A1 |
| 20210013859 | Turner et al. | Jan 2021 | A1 |
| 20210328574 | Garcia | Oct 2021 | A1 |
| Number | Date | Country |
|---|---|---|
| 2016017104 | Feb 2016 | WO |
| 2018003273 | Jan 2018 | WO |
| Entry |
|---|
| Tho Nguyen, New Rules for Unlicensed National Information Infrastructure (U-NII) Bands KDB 789033, KDB 644545., Oct. 22, 2014, Office of Engineering and Technology Laboratory Division FCC (Year: 2014). |
| A. C. Guyette, “Theory and Design of Intrinsically Switched Multiplexers With Optimum Phase Linearity,” in IEEE Transactions on Microwave Theory and Techniques, vol. 61, No. 9, pp. 3254-3264, Sep. 2013, doi: 10.1109/TMTT.2013.2274963. Sep. 2013. |
| Acoustic Properties of Solids ONDA Corporation 592 Weddell Drive, Sunnyvale, CA 94089, Apr. 11, 2003, pp. 5 (Year 2003). 2003. |
| Bahreyni, B. Fabrication and Design of Resonant Microdevices Andrew William, Inc. 2018, NY (Year 2008). 2008. |
| Buchanan “Ceramic Materials for Electronics” 3rd Edition, first published in 2004 by Marcel Dekker, Inc. pp. 496 (Year 2004). 00 Jan. 2004. |
| Ekeom, D. & Dubus, Bertrand & Volatier, A . . . (2006). Solidly mounted resonator (SMR) FEM-BEM simulation. 1474-1477. 10.1109/ULTSYM.2006.371. |
| G. Manohar, “Investigation of Various Surface Acoustic Wave Design Configurations for Improved Sensitivity.” Doctoral dissertation, University of South Florida, USA, Jan. 2012, 7 pages. |
| Kadota et al. “5.4 Ghz Lamb Wave Resonator on LiNbO3 Thin Crystal Plate and Its Application,” published in Japanese Journal of Applied Physics 50 (2011) 07HD11. (Year: 2011) 2011. |
| M. Kadota, S. Tanaka, “Wideband acoustic wave resonators composed of hetero acoustic layer structure,” Japanese Journal of Applied Physics, vol. 57, No. 7S1. Published Jun. 5, 2018. 5 pages. |
| Material Properties of Tibtech Innovations, © 2018 Tibtech Innovations (Year 2018). 2018. |
| Merriam Webster, dictionary meaning of the word “diaphragm”, since 1828, Merriam Webster (Year: 1828) 1828. |
| Mizutaui, K. and Toda, K., “Analysis of lamb wave propagation characteristics in rotated Ycut Xpropagation LiNbO3 plates.” Electron. Comm. Jpn. Pt. 1, 69, No. 4 (1986): 47-55. doi:10.1002/ecja.4410690406. |
| Moussa et al. Review on Triggered Liposomal Drug Delivery with a Focus on Ultrasound 2015, Bentham Science Publishers, pp. 16 (Year 2005) 2005. |
| Namdeo et al. “Simulation on Effects of Electrical Loading due to Interdigital Transducers in Surface Acoustic Wave Resonator”, published in Procedia Engineering 64 ( 2013) of Science Direct pp. 322-330 (Year: 2013) 2013. |
| Naumenko et al., “Optimal orientations of Lithium Niobate for resonator SAW filters”, 2003 IEEE Ultrasonics Symposium—pp. 2110-2113. (Year: 2003). |
| R. Olsson III, K. Hattar et al. “A high electromechanical coupling coefficient SH0 Lamb wave lithiumniobate micromechanical resonator and a method for fabrication” Sensors and Actuators A: Physical, vol. 209, Mar. 1, 2014, pp. 183-190. |
| Rodriguez-Madrid et al., “Super-High-Frequency SAW Resonators on AIN/Diamond”, IEEE Electron Device Letters, vol. 33, No. 4, Apr. 2012, pp. 495-497. Year: 2012) 2012. |
| Safari et al. “Piezoelectric for Transducer Applications” published by Elsevier Science Ltd., pp. 4 (Year: 2000). 2020. |
| Santosh, G. , Surface acoustic wave devices on silicon using patterned and thin film ZnO, Ph.D. thesis, Feb. 2016, Indian Institute of technology Guwahati, Assam, India Feb. 2016. |
| Sorokin et al. Study of Microwave Acoustic Attenuation in a Multi-frequency Bulk Acoustic Resonator Based on a Synthetic Diamond Single Crystal Published in Acoustical Physics, vol. 61, No. 6, 2015 pp. 675 (Year 2015) 00 Jan. 2015. |
| T. Takai, H. Iwamoto, et al., “I.H.P.Saw Technology and its Application to Microacoustic Components (Invited).” 2017 EEE International Ultrasonics Symposium, Sep. 6-9, 2017. pp. 1-8. |
| USPTO/ISA, International Search Report and Written Opinion for PCT Application No. PCT/US2019/036433 dated Aug. 29, 2019. |
| USPTO/ISA, International Search Report and Written Opinion for PCT Application No. PCT/US2019/058632 dated Jan. 17, 2020. |
| USPTO/ISA, International Search Report and Written Opinion for PCT Application No. PCT/US2020/45654 dated Oct. 29, 2020. |
| USPTO/ISA, International Search Report and Written Opinion for PCT Application No. PCT/US2021/024824 dated Jul. 27, 2021, 9 total pages. |
| USPTO/ISA, International Search Report and Written Opinion for PCT Application No. PCT/US2021/048505 dated Dec. 1, 2021, 11 total pages. |
| Y. Yang, A. Gao et al. “5 GHZ Lithium Niobate MEMS Resonators With High FOM of 153”, 2017 IEEE 30th International Conference in Micro Electro Mechanical Systems (MEMS). Jan. 22-26, 2017. pp. 942-945. |
| Y. Yang, R. Lu et al. “Towards Ka Band Acoustics: Lithium Niobat Asymmetrical Mode Piezoelectric MEMS Resonators”, Department of Electrical and Computer Engineering University of Illinois at Urbana-Champaign, May 2018. pp. 1-2. |
| Yanson Yang, Ruochen Lu, Songbin Gong, High Q Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation, Journal of Microelectromechanical Systems, vol. 29, No. 2, Apr. 2020. Apr. 2, 2020. |
| Yu-Po Wong, Luyan Qiu, Naoto Matsuoka, Ken-ya Hashimoto, Broadband Piston Mode Operation for First-order Antisymmetric Mode Resonators, 2020 IEEE International Ultrasonics Symposium, Sep. 2020. Sep. 2020. |
| Zou, Jie “High-Performance Aluminum Nitride Lamb Wave Resonators for RF Front-End Technology” University of California, Berkeley, Summer 2015, pp. 63 (Year 2015) 00 Jan. 2015. |
| Number | Date | Country | |
|---|---|---|---|
| 20230094810 A1 | Mar 2023 | US |
| Number | Date | Country | |
|---|---|---|---|
| 63249572 | Sep 2021 | US |