Patent Grant
11249318
The present application is directed to apparatus and methods for coupling an output beam from a laser or other optical source to an input of a hi-tech optical system.
Lasers and light-emitting diodes (LEDs) can provide intense radiation at one or more selectable wavelengths that is (are) useful for hi-tech optical systems, such as optical communication systems, bioanalytical systems, medical devices, material processing systems, and defense systems. The output from a laser or LED may be collimated or uncollimated, and the radiation may be pulsed or continuous wave. In some cases, short optical pulses (e.g., optical pulses less than about 1 nanosecond) may be produced by lasers or LEDs and provided to a hi-tech optical system.
Some hi-tech optical systems can include precision optical devices to which the output from the laser or LED must be coupled. One example of a precision optical device is an integrated optical waveguide on a chip. Typically, a spatial mode profile of a beam output from the laser or LED is not well-matched to a spatial mode profile of a fundamental mode, for example, that is supported by the waveguide. Accordingly, one or more optical components may be needed to improve the match between the spatial mode profiles of the beam and receiving optical component of the optical system to which the beam is coupled.
Some embodiments relate to a beam-shaping and steering assembly comprising a first optical component arranged to transform a first transverse beam shape of an input beam into a second transverse beam shape of a second beam; a second optical component arranged to rotate the second transverse beam shape about an optical axis of the second beam; and a third optical component arranged to adjust one of: a first position or a first directional angle of an output beam at a target location.
Some embodiments relate to a method of coupling a beam from an optical source to a receiving optical component of a system. The method may comprise acts of receiving, by a beam-shaping and steering assembly, the beam from the optical source; transforming, with the beam-shaping and steering assembly, a first transverse beam shape of the beam to a second transverse beam shape of an output beam; positioning, with the beam-shaping and steering assembly, the output beam on the receiving optical component; and adjustably rotating, with the beam-shaping and steering assembly, the second transverse beam shape.
Some embodiments relate to an optical system for coupling a beam of radiation to an apparatus, the optical system comprising three rotary actuators; and three optical components coupled respectively to the three rotary actuators, wherein each rotary actuator has a drive shaft that rotates about a shaft axis to move an optical component of the three optical components, wherein the shaft axes of the three rotary actuators are essentially parallel to a same plane, and wherein actuation of the three optical components by the three rotary actuators alters the beam in three different degrees of freedom.
Some embodiments relate to an optical system for coupling a beam of radiation to an apparatus, the optical system comprising a first optical component supported in an adjustable mount; and a first actuator coupled to the adjustable mount, wherein movement of the first optical component by the first actuator rotates a transverse shape and polarization of an exit beam that exits the first optical component, wherein the rotation of the transverse shape and polarization are about an optical axis that runs centrally along the exit beam.
Some embodiments relate to an optical system for altering a beam of radiation, the optical system may comprise a first optical component supported by an adjustable mount that is configured to rotate the first optical component about a first axis; a rotary actuator having a drive shaft that rotates about a second axis that is not parallel to the first axis; a cam arm connected to the drive shaft; a bearing connected to the cam arm; and a curved surface connected to the adjustable mount, wherein the bearing runs across the curved surface when the rotary actuator is actuated to rotate the first optical component.
Some embodiments relate to an optical beam-steering apparatus comprising a first rotary actuator arranged to rotate a first optical window; a second rotary actuator arranged to rotate a second optical window; and a lens; wherein rotation of the first optical window adjusts a lateral position of an optical beam at a target location and rotation of the second optical window adjusts an incident angle of the beam at the target location without changing the lateral position by more than 10 microns.
Some embodiments relate to an optical beam-steering apparatus comprising three rotatable transparent optical windows arranged to adjust three parameters of an output beam from the beam-steering apparatus in three orthogonal degrees of freedom.
The foregoing and other aspects, implementations, acts, functionalities, features and, embodiments of the present teachings can be more fully understood from the following description in conjunction with the accompanying drawings.
The skilled artisan will understand that the figures, described herein, are for illustration purposes only. It is to be understood that in some instances various aspects of the invention may be shown exaggerated or enlarged to facilitate an understanding of the invention. In the drawings, like reference characters generally refer to like features, functionally similar and/or structurally similar elements throughout the various figures. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the teachings. The drawings are not intended to limit the scope of the present teachings in any way.
The features and advantages of the present invention will become more apparent from the detailed description set forth below when taken in conjunction with the drawings. When describing embodiments in reference to the drawings, directional references (“above,” “below,” “top,” “bottom,” “left,” “right,” “horizontal,” “vertical,” etc.) may be used. Such references are intended merely as an aid to the reader viewing the drawings in a normal orientation. These directional references are not intended to describe a preferred or only orientation of features of an embodied device. A device may be embodied using other orientations.
The technology described herein relates to apparatus and methods for coupling optical beams from lasers or light-emitting diodes to hi-tech systems that include precision optical components. A hi-tech system can include one or more precision optical components (e.g., integrated optical waveguide, integrated optical coupler, integrated optical modulator, an optical diffractive element, an optical fiber, etc.) and may further include mechanical components, micromechanical components, electrical circuitry, microfluidic components, microelectromechanical components, bio-microelectromechanical components and/or bio-optoelectronic components. A low-profile, compact, beam-shaping and steering assembly is described that includes five automated adjustments of beam parameters, according to some embodiments. The assembly can also include manual or automated adjustments for beam focus and beam shape. In some implementations, the assembly can be used to couple a round beam from a laser to a linear array of integrated optical waveguides on a bio-optoelectronic chip, and provide nearly uniform power coupling at high efficiency into the plurality of waveguides. The uniformity of coupling across the waveguides can be adjusted by automated manipulation of an optical component in the beam-shaping and steering assembly.
The beam-shaping and steering assembly can be incorporated into portable instrumentation (e.g., time-of-flight imaging instruments, bioanalytical instruments that utilize lifetime-resolved fluorescent detection, genetic sequencing instruments, optical coherence tomography instruments, medical instruments, etc.) to provide precise and stable optical coupling between a compact optical source and precision optical devices of a compact, hi-tech system. The beam-shaping and steering assembly may reduce the effects of vibrations, temperature variations, and manufacturing variations on optical coupling between the optical source and hi-tech system. Examples of optical sources for such embodiments are described in U.S. patent application Ser. No. 15/161,088 filed on May 20, 2016 and titled “Pulsed Laser and Bioadvanced System,” and U.S. patent application No. 62/435,688 filed on Dec. 16, 2016 and titled “Compact Mode-Locked Laser Module,” which are incorporated herein by reference. Such instrumentation may be readily portable and produced at appreciably lower cost than is the case for conventional instrumentation requiring large optical sources and large optical coupling components. High portability can make such instruments more useful for research, development, clinical use, field deployment, military, and commercial applications.
The inventors have recognized and appreciated that optical sources such as pulsed lasers and LEDs are potentially more useful when the laser or LED and its driving circuitry can output power levels in excess of 100 milliwatts and be made very compact in size, e.g., about the size of an A4 sheet of paper or less with a thickness of about 40 mm or less. When made compact, such optical sources can be incorporated into portable, hi-tech instruments that may be used in, but not limited to, the fields of medical diagnostics, optical communications, massively parallel sample analysis for pharmaceutical development, genetic sequencing, or protein analysis, for example. The term “optical” may be used to refer to ultra-violet, visible, near-infrared, and short-wavelength infrared spectral bands.
The inventors have further recognized and appreciated that it can be advantageous to manufacture such optical sources as a module that can be easily swapped into and out of a portable hi-tech instrument. Such plug-and-play capability can minimize down-time of the instrument, and allow a single source to be used in different instruments. The inventors have further recognized that lasers and LEDs generally have output beams with different beam parameters (e.g., beam size, beam shape, beam collimation, beam direction, transverse beam profile) and hi-tech systems that receive an optical beam can have different requirements for the received beam parameters.
To accommodate differences in beam parameters between an optical source and a hi-tech system, the inventors have conceived of beam-shaping and steering apparatus and associated methods, which are described in further detail below. The beam-shaping and steering apparatus is a compact assembly (e.g., less than half the size of a sheet of A4 paper and less than 40 mm thickness) that can be incorporated into an instrument to adapt an output beam from an optical source to conform to acceptable beam parameters for a hi-tech system to which the optical source is to be coupled. In the following description, embodiments of beam-shaping and steering apparatus are described in connection with a genetic sequencing instrument, which is but one example of a “hi-tech” instrument. It should be appreciated, however, that beam-shaping and steering apparatus of the described embodiments may be used with other types of instruments, whether they include hi-tech or advanced optical technology or not.
In embodiments, a hi-tech instrument 1-100 may comprise an optical source 1-110 mounted within or otherwise coupled to the instrument, as depicted in
The instrument 1-100 may include a beam-shaping and steering assembly 1-150 and a hi-tech system 1-160. The beam-shaping and steering assembly 1-150 may include one or more optical components (e.g., lens, mirror, optical filter, beam-shaping optic, attenuator) and be configured to operate on and/or deliver optical pulses 1-122 (or a continuous-wave beam) from the optical source 1-110 to the hi-tech system 1-160.
According to some embodiments, a hi-tech system may direct, collect, and analyze optical signals using optical components, detectors, electronics, and communications hardware. For example, the hi-tech system 1-160 may include optical components that are arranged to direct the optical pulses to at least one sample that is to be analyzed, receive one or more optical signals (e.g., fluorescence, backscattered radiation) from the at least one sample, and produce one or more electrical signals representative of the received optical signals. In some embodiments, the hi-tech system 1-160 may include one or more photodetectors and signal-processing electronics (e.g., one or more microcontrollers, one or more field-programmable gate arrays, one or more microprocessors, one or more digital signal processors, logic gates, etc.) configured to process the electrical signals from the photodetectors. The hi-tech system may also include data transmission hardware configured to transmit and receive data to and from external devices via a data communications link (not shown). In some embodiments, the hi-tech system 1-160 may be configured to receive a bio-optoelectronic chip 1-140, which holds one or more samples to be analyzed. Data signals for sample analysis may be processed partially on chip and/or transmitted to an external processor for analysis. Additionally, data signals indicative of optical coupling to the chip 1-140 and/or sample wells may be provided in real time to the beam-shaping and steering assembly 1-150 to maintain adequate optical coupling in real time during sample analysis, according to some embodiments.
Although the optical pulses 1-122 are depicted as having a single transverse optical mode, in some embodiments, the output from the optical source 1-110 may be multimodal. For example, a transverse output beam profile may have multiple intensity peaks and minima due to multimodal operation of the optical source. In some embodiments, a multimodal output may be homogenized (e.g., by diffusing optics) by one or more optical components in the beam-shaping and steering assembly 1-150. In some implementations, a multimodal output may be coupled to a plurality of fibers or waveguides in the hi-tech system 1-160. For example, each intensity peak of a multimodal output may be coupled to a separate waveguide, or group of waveguides, that connects to the bio-optoelectronic chip 1-140. Allowing an optical source to operate in a multimode state may enable higher output powers from the optical source. In some implementations, the optical source 1-110 may produce pulses 1-122 having other transverse beam profiles such as, but not limited to, top-hat beam profiles, doughnut beam profiles, and line-shaped beam profiles. Such beam profiles may be produced with optical elements having patterned or graded coatings, diffractive optical elements, binary optical elements, axicon lenses, graded-refractive index elements, or a combination of two or more of these optical elements.
For some embodiments, the hi-tech instrument may be configured to receive a removable, packaged, bio-optoelectronic chip 1-140. The chip may include a plurality of reaction chambers, integrated optical components arranged to deliver optical excitation energy to the reaction chambers, and integrated photodetectors arranged to detect fluorescent emission or other optical emission from the reaction chambers. In some implementations, the chip 1-140 may be disposable, whereas in other implementations the chip may be reusable. When the chip is received by the instrument, it may be in electrical and optical communication with the optical source 1-110 and in electrical and/or optical communication with the hi-tech system 1-160. In some embodiments, the bio-optoelectronic chip may be mounted (e.g., via a socket connection) within the system on an electronic circuit board (not shown), such as a printed circuit board (PCB), which may include additional instrument electronics. For example, a PCB on which the bio-optoelectronic chip 1-140 is mounted may include circuitry configured to provide electrical power, one or more clock signals, and control signals to the bio-optoelectronic chip 1-140, and signal-processing circuitry arranged to receive signals representative of emission detected from the reaction chambers on the chip. The PCB may also include circuitry configured to receive feedback signals relating to optical coupling and power levels of the optical pulses 1-122 coupled into waveguides of the bio-optoelectronic chip 1-140. In some embodiments, the PCB may include circuitry configured to provide drive signals to the beam-shaping and steering assembly 1-150 to alter beam parameters for better coupling to the bio-optoelectronic chip 1-140. In some cases, the drive signals may be produced for open-loop control of beam parameters, e.g., adjusted by a user. In some embodiments, the drive signals may be produced as part of a closed-loop feedback control system, e.g., to maintain alignment and/or coupling efficiency of an optical beam. Data returned from the bio-optoelectronic chip may be processed in part or entirely by data-processing circuits in the instrument 1-100, although data may be transmitted via a network connection to one or more remote data processors for data processing, in some implementations.
The output pulses 1-122 may be separated by regular intervals T, according to some embodiments. In some embodiments (e.g., for mode-locked lasers), T may be determined by a round-trip travel time of pulses within a laser cavity of the optical source 1-110. According to some embodiments, the pulse-separation interval T may be between about 1 ns and about 30 ns. In some cases, the pulse-separation interval T may be between about 5 ns and about 20 ns, corresponding to a laser-cavity length between about 0.7 meter and about 3 meters. In some embodiments, a beam-shaping and steering assembly 1-150 may additionally change a pulse length of the optical pulses (e.g., by using frequency-dispersive elements such as gratings and/or optical fibers, diffractive optical elements, or a ring-down cavity). In some embodiments, a beam-shaping and steering assembly may additionally change the pulse-separation interval T (e.g., by splitting the beam received from the optical source 1-110 into different optical paths, adding different delays in the different optical paths, and recombining the optical paths to interleave pulses from the different paths). In some cases, the pulse-separation interval T may not be regular, and the beam-shaping and steering assembly 1-150 may perform its beam-shaping and steering functions regardless of the pulse-separation interval.
For embodiments in which optical pulses 1-122 excite fluorescent emission in a plurality of reaction chambers that is subsequently detected and analyzed in parallel, a desired pulse-separation interval T may be determined by a combination of factors: for example, the number of reaction chambers, fluorescent emission characteristics, and the speed of detection and data-handling circuitry for reading data from the reaction chambers. The inventors have recognized and appreciated that different fluorophores may be distinguished by their different fluorescent decay rates or temporal emission probability curves. Accordingly, there needs to be sufficient pulse-separation interval T to collect adequate statistics for the selected fluorophores that can be used to distinguish between their different emission characteristics. Additionally, if the pulse-separation interval T is too short, the data handling circuitry cannot keep up with the large amount of data being collected by the large number of reaction chambers. The inventors have recognized and appreciated that a pulse-separation interval T between about 5 ns and about 20 ns is suitable for fluorophores that have decay rates up to about 2 ns and for handling data from between about 60,000 and 10,000,000 reaction chambers.
According to some implementations, a beam-shaping and steering module 1-150 may receive output pulses from the optical source 1-110 and be configured to alter at least three beam parameters for improved coupling of a beam from the optical source 1-110 to the hi-tech system 1-160. Beam parameters that may be altered by a beam-shaping and steering module 1-150 include, but are not limited to: beam position at a target location in the hi-tech system, beam direction or incident angles at a target location in the hi-tech system, beam shape, beam collimation, beam rotation about an optical axis of the beam, beam polarization and polarization orientation, beam spectral components, transverse intensity profile of the beam, average beam power, pulse duration, and pulse-separation time.
Referring to a bio-analytic embodiment depicted in
Each waveguide 1-312 may include a tapered portion 1-315 or other optical features below the reaction chambers 1-330 to equalize optical power coupled to the reaction chambers along the waveguide. A reducing taper may force more optical energy outside the waveguide's core, increasing coupling to the reaction chambers and compensating for optical losses along the waveguide, including losses for light coupling into the reaction chambers. A second grating coupler 1-317 may be located at an end of each waveguide to direct optical energy to an integrated photodiode 1-324. The integrated photodiode may detect an amount of power coupled down a waveguide and provide a detected signal to feedback circuitry that controls the beam-shaping and steering module 1-150, for example.
The reaction chambers 1-330 may be aligned with the tapered portion 1-315 of the waveguide and recessed in a tub 1-340. There may be time-binning photodetectors 1-322 located on the semiconductor substrate 1-305 for each reaction chamber 1-330. A metal coating and/or multilayer coating 1-350 may be formed around the reaction chambers and above the waveguide to prevent optical excitation of fluorophores that are not in the reaction chambers (e.g., dispersed in a solution above the reaction chambers). The metal coating and/or multilayer coating 1-350 may be raised beyond edges of the tub 1-340 to reduce absorptive losses of the optical energy in the waveguide 1-312 at the input and output ends of each waveguide.
According to some embodiments, there may be a plurality of rows of waveguides, reaction chambers, and time-binning photodetectors on the bio-optoelectronic chip 1-140 so that massively parallel analyses of samples can be carried out. For example, there may be 128 rows, each having 512 reaction chambers, for a total of 65,536 reaction chambers in some implementations. Other implementations may include fewer or more reaction chambers per row, fewer or more rows of waveguides, and may include other layout configurations. In some cases, there may be hundreds or even thousands of rows of waveguides. Optical power from the optical source 1-110 may be distributed to the multiple waveguides via one or more integrated star couplers or multi-mode interference couplers, or by any other means, located between an optical coupler to the chip 1-140 and the plurality of waveguides.
The inventors have discovered that in some cases problems can arise when trying to couple power from an optical source 1-110 efficiently to a large plurality of integrated optical waveguides 1-312. In order to provide sufficient power to each waveguide and reaction chamber 1-330 for a large number of reaction chambers, the average power in the input beam rises proportionally with the increase in number of reaction chambers. For some integrated optical waveguide systems (such as a silicon-nitride waveguide core/silicon-dioxide cladding), high average powers can cause temporal changes in the loss of the waveguide and therefore cause appreciable power instabilities in the reaction chambers over time. Time-dependent loss in integrated optical waveguides at high average powers has been measured by the inventors, and example results are plotted in
Insertion loss was measured as a function of time for three identical lengths of, single-mode waveguides having a silicon-nitride core. The initial average power levels coupled into the three waveguides was 0.5 mW, 1 mW, and 2 mW. The plot of
Further details of an embodiment of a hi-tech system 1-160 are described in connection with
When a labeled nucleotide or nucleotide analog 1-610 is incorporated into a growing strand of complementary nucleic acid, as depicted in
According to some embodiments, a hi-tech system 1-160 that is configured to analyze samples based on fluorescent emission characteristics may detect differences in fluorescent lifetimes and/or intensities between different fluorescent molecules, and/or differences between lifetimes and/or intensities of the same fluorescent molecules in different environments. By way of explanation,
A second fluorescent molecule may have a decay profile that is exponential, but has a measurably different lifetime TB, as depicted for curve B in
The inventors have recognized and appreciated that differences in fluorescent emission lifetimes can be used to discern between the presence or absence of different fluorescent molecules and/or to discern between different environments or conditions to which a fluorescent molecule is subjected. In some cases, discerning fluorescent molecules based on lifetime (rather than emission wavelength, for example) can simplify aspects of a hi-tech instrument 1-100. As an example, wavelength-discriminating optics (such as wavelength filters, dedicated detectors for each wavelength, dedicated pulsed optical sources at different wavelengths, and/or diffractive optics) may be reduced in number or eliminated when discerning fluorescent molecules based on lifetime. In some cases, a single pulsed optical source operating at a single characteristic wavelength may be used to excite different fluorescent molecules that emit within a same wavelength region of the optical spectrum but have measurably different lifetimes. A hi-tech system that uses a single pulsed optical source, rather than multiple sources at different wavelengths, to excite and discern different fluorescent molecules emitting in a same wavelength region can be less complex to operate and maintain, more compact, and may be manufactured at lower cost.
Although hi-tech systems based on fluorescent lifetime analysis may have certain benefits, the amount of information obtained by a hi-tech system and/or detection accuracy may be increased by allowing for additional detection techniques. For example, some hi-tech systems 1-160 may additionally be configured to discern one or more properties of a sample based on fluorescent wavelength and/or fluorescent intensity.
Referring again to
For a single molecule or a small number of molecules, however, the emission of fluorescent photons occurs according to the statistics of curve B in
In cases where emission intensities from the reaction chambers are low or where characterization of a sample depends upon intensity values from the reaction chambers, it is beneficial that the power delivered to the reaction chambers remains stable over time. For example, if the power delivered to the reaction chambers decreases by 3 dB (see
The inventors have conceived of apparatus and methods for coupling an output beam from and optical source to a hi-tech system. The apparatus (referred to as a “beam-shaping and steering assembly”) can be assembled at moderate cost using a single, low-profile chassis (e.g., less than 35 mm in height) that supports all optical and mechanical components for automating dynamic adjustments to multiple beam parameters. The beam-shaping and steering assembly may measure less than 140 mm on its longest side and have a thickness less than 35 mm, in some embodiments. Because of its compact size, the assembly may be mounted in a portable hi-tech instrument that includes an optical source 1-110 and a hi-tech system 1-160, such as the portable DNA sequencing instrument described above. Other applications include, but are not limited to, uses for plate readers, gel scanners, polymerase chain-reaction (PCR) machines, fluorescence sorters, and microarray assays.
Because of its ability to adjust multiple beam parameters, the beam-shaping and steering assembly 1-150 can relieve the optical source and hi-tech system of specialized components needed for beam shaping and steering. The beam-shaping and steering assembly 1-150 can also accommodate manufacturing and assembly variations in the optical source and hi-tech system, as well as reduce the sensitivity of beam coupling to environmental factors such as temperature changes and vibrations. In some embodiments, a beam-shaping and steering assembly can handle pulsed optical beams with average powers up to 2 Watts with pulse durations as short as 10 picoseconds. The assembly may also be used to address time-dependent waveguide loss in a hi-tech system, such as the genetic sequencing system described above.
One approach to reducing the effects of time-dependent waveguide loss is to reduce the length of integrated waveguides used on a chip. In some cases though, appreciable lengths of waveguides may be needed to route optical signals to the reaction chambers. Alternatively or additionally, the intensity of radiation coupled into the waveguides may be reduced. The inventors have recognized and appreciated that the time-dependent waveguide loss may be most problematic where a beam from an optical source 1-110 is coupled first into a single waveguide of an integrated optical circuit and then redistributed among many waveguides. At the coupling region, the intensity may be very high and cause rapid changes in waveguide loss.
To reduce time-dependent waveguide loss at the coupling region, the inventors have conceived of a sliced grating coupler 2-100, of which a simplified illustration is shown in
In some embodiments, a beam from the optical source 1-110 may be shaped (or produced by the optical source) so that it extends in a ±X direction to essentially match an accepted large-area beam profile for a grating coupler having a length L. The large-area beam profile may have a beam length or first waist in the ±X direction (measured between 1/e2 intensity values) that approximately matches the length L for the grating and a beam width or second waist in the Y direction (measured between 1/e2 intensity values) that approximately matches a width of the grating. For example, the extended beam 2-112 may have a shape as depicted by the dashed ellipse in
The inventors have discovered that it is unexpectedly difficult to obtain a uniform coupling of power into the plurality of waveguides 2-120 with the sliced grating coupler 2-100 and beam arrangement depicted in
The inventors have conceived of an approach to coupling a wide beam to a plurality of waveguides that provides adjustments for improving uniformity of power levels coupled to the waveguides, reduces the sensitivity of coupling to the beam's transverse intensity profile and to beam displacement. The approach is illustrated in
During operation, the roll angle ϕ and the beam displacement in the X and Y directions can be adjusted to obtain and maintain uniform coupling of power across the plurality of waveguides 2-120. To compensate for a beam 2-122 that has an asymmetric intensity profile in the X direction, the position of the beam may be adjusted in the ±X and/or ±Y directions to improve coupling uniformity across the waveguides 2-120. For example, if the intensity of the beam in the +X direction is greater than the intensity of the beam in the −X direction, then the beam may be moved in the −X direction to help equalize powers coupled into the waveguides. Additionally or alternatively, the beam may be moved in the +Y direction (for the angle shown) so that a portion of the beam in the +X direction moves in the +Y direction off the grating 2-110 and reduces the amount of power coupled to the tapered ends 2-122 in the +X direction while a portion of the beam in the −X direction moves onto the grating 2-110 and increases the amount of power coupled to the tapered ends 2-122 in the −X direction. If a beam 2-122 has a symmetric intensity profile in the X direction, then adjustments in the ±Y directions, ±X directions, and/or ±ϕ directions, for example, can be made to improve uniformity and/or efficiency of coupling power into the waveguides. In some implementations, adjustments to other beam parameters (e.g., incident angle, beam size, polarization) may be made additionally or alternatively to improve coupling efficiency and/or uniformity.
With regard to describing beam angles and directions, the +Z may is used to indicated the direction of travel of an optical beam. X and Y directions may be referred to as “transverse” or “lateral” directions. The X direction may be used to indicate a horizontal direction and the Y direction may be used to indicate a vertical direction. A rotation of the beam about the Z axis may be referred to as “roll” and indicated by the symbol ϕ. A rotation about the X axis may be referred to as “pitch” and indicated by the symbol θx. A rotation about the Y axis may be referred to as “yaw” and indicated by the symbol θy.
Although adjustments to ±X and ±Y directions may be performed using actuated turning mirrors or optical windows, for example, adjustments to beam size and beam roll or rotation (±ϕ) are not straightforward. For example, adjustments to beam size and beam rotation may couple to and affect other beam parameters, such as beam position. The inventors have also recognized and appreciated that adjustments to the beam's incident angle (pitch and yaw angles) on the grating without displacing the beam can be useful to improve coupling efficiency to the waveguides and to accommodate manufacturing variations in the optical source 1-110 and receiving optics of the hi-tech system 1-160. The inventors have further recognized and appreciated that a beam quality from the beam-shaping and steering assembly should be high (e.g., an M2 value less than 1.5), so that efficient coupling can be achieved to optical components of a hi-tech system 1-160, in some cases. The inventors have appreciated that providing beam size, position, incident angle, and rotation adjustments with automated controls for multiple beam parameters along with a compact and stable assembly for in-field use is a difficult challenge.
An example of a beam-shaping and steering module 1-150 is depicted in
The chassis and cover may be formed or assembled from metal and/or a low-thermal-expansion composite. In some cases, the chassis and cover may be machined or cast from a single piece of aluminum. When the chassis 2-210 is fabricated from a single piece of material, elements that hold optical components within the beam-shaping and steering assembly and/or the optical components themselves may be accurately aligned with respect to each other by registering the elements and/or components to alignment features machined into the chassis or alignment pins placed in the chassis. The chassis 2-210 may be in any suitable shape to house the optical components of the beam-shaping and steering module 1-150, and may be configured mount to a frame or chassis of an instrument in which the optical source 1-110 is incorporated.
The inventors have recognized and appreciated that the beam-shaping and steering module's chassis 2-210 can additionally provide support to at least a region of a printed circuit board (PCB) 2-290 of a hi-tech system 1-160 on which a device with a receiving optical component, such as an analytic chip (e.g., a bio-optoelectronic chip 1-140), may be mounted as depicted in
According to some embodiments, the chassis 2-210 and entire beam-steering assembly 1-150 can mount to an instrument's chassis or frame 2-212 such that the chassis' orientation can be adjusted with respect to the instrument's chassis or frame 2-212. For example, a three-point mounting scheme can be used where three mechanical mounts 2-214 each provide independent height adjustment of the chassis 2-210. By independently adjusting height with these mounts 2-214, one or more angles (e.g., pitch and roll angles) of the chassis 2-210 with respect to an input beam 2-205 can be adjusted in addition to overall height. In some cases, slots 2-203 (shown in
In some embodiments, actuators of a beam-shaping and steering module 1-150 may comprise one or more stepper motors (five in the illustrated embodiment, 2-221, 2-222, 2-223, 2-224, 2-225) arranged to actuate optical components of the beam-shaping and steering module. To reduce height of the beam-shaping and steering module, the actuators may be mounted such that their shafts lie approximately in a same plane, as depicted in the drawing. In some implementations, one or more stepper motors may have shafts that are orthogonal to the plane or at other orientations. In some cases, one or more stepper motors may be fabricated in part on a PCB that can attach to the beam-shaping and steering module, as depicted in the example of
According to some embodiments and referring again to
According to some implementations, the turning mirror 2-234 may be dichroic, such that it passes one or more wavelengths in a first wavelength range, and reflects one or more wavelengths in a second wavelength range. For example, a dichroic-coated turning mirror 2-234 may pass a fundamental wavelength in the infrared wavelength region from an optical source 1-110 to a beam dump and/or photodetector (not shown) and reflect a frequency-doubled wavelength in the visible spectral range to a bio-optoelectronic chip 1-140. In other implementations, the turning mirror 2-234 may have a reflective coating for a single characteristic wavelength, and not be dichroic. In such implementations, separation of wavelengths in the input beam may be achieved with other optical components (e.g., interference filter, pellicle, prism) in the beam-shaping and steering assembly.
In embodiments, a turning mirror 2-234 can be mounted on an adjustable mount 2-246, which can be adjusted by a set screw 2-247, for example. Such an adjustment may be in only one degree of freedom. For example, adjusting set screw 2-247 can coarsely adjust an elevation angular direction of the beam 2-350 through the optical windows 2-231, 2-232, 2-235, 2-237 and lens 2-233. In some cases, turning mirror 2-234 can be mounted to the chassis 2-210 with a non-adjustable mounting arrangement.
According to some embodiments and referring to both
The effects on a focused optical beam at a substrate surface 2-340 due to translating the optical beam 2-350 in the beam-shaping and steering module 1-150 can be understood from
Lateral translations of the optical beam 2-350 by rotating optics 2-231, 2-232 located before the focusing lens 2-233 results in changing the incident angles (pitch and yaw angles) of the focused beam at the surface 2-340 without appreciably changing the beam's (X, Y) location at the surface 2-340. For example, rotation of the first optical window 2-231 about its axis of rotation can displace the optical beam in the ±X directions at the focusing lens 2-233. Such movement of the optical beam at the focusing lens will change an incident angle θy or yaw (not shown in
By automating motion of one or more of the optical windows 2-231, 2-232, 2-235, 2-237, continuous scanning of the output beam may be performed in one or multiple degrees of freedom. For the embodiment depicted in
In some embodiments, there may be a turning mirror (not shown in
In some implementations, the focusing lens 2-233 may be a singlet lens having a focal length between 5 centimeters and 1 meter. Alternatively, the focusing lens 2-233 may be one of a pair of relay lenses, where the other lens may be located inside or outside of the beam-shaping and steering assembly 1-150. In some embodiments, lens 2-233 may be a zoom lens. The position, magnification, and/or demagnification of the focusing lens 2-233 may be controlled manually (e.g., by a user operating a positioner (not shown) on which the lens is mounted) or may be controlled automatically via an actuator so that dynamic adjustments may be made to the lens' position, magnification, and/or demagnification. In some implementations, the lens 2-233 may be installed in a fixed lens mount that is positioned at the time of manufacture or positioned by a user.
Adjustments to beam shape and beam rotation can be achieved with optical prisms, according to some embodiments. In some implementations, an anamorphic prism pair 2-252 may be used to compress or expand one dimension of an input optical beam's transverse intensity profile. With reference to
Although a pair of cylindrical lenses may be used in some implementations to expand or compress an optical beam, the inventors found that the resulting beam shape is highly sensitive to alignment of the lens pair. For example, if the cylindrical lens pair is rotated about the optical axis of the beam by an amount as small as 1 degree, then the resulting beam shape rotates by more than five times this amount.
According to some embodiments, the anamorphic prism pair 2-252 may be aligned at the time of manufacture. For example, the prisms may register to machined aligning features and/or pins (not shown) formed or mounted in the chassis 2-210. In some implementations, the prisms may register to machined features and/or pins formed or mounted in an intermediate plate 2-250 that can register to aligning features on the chassis 2-210 and be attached to the chassis 2-210. In some cases, the orientation of the intermediate plate 2-250 may be adjustable within the chassis for fine tuning of the prism pair (e.g., for factory alignment). In some cases, each prism of the anamorphic prism pair 2-252 may be individually adjustable (e.g., mounted on a rotary positioner). Additionally or alternatively, the intermediate plate 2-250 could include a rotational adjustment or be mounted on a rotary positioner. The orientation of the prism pair, or each individual prism of the pair, may be automated with one or two stepper motors in some embodiments. The inventors have recognized and appreciated that the anamorphic prism pair can be adjusted manually at time of manufacture to flexibly adapt a beam shape from an optical source to a hi-tech system for a suitably wide variety of beam shapes, and quality of coupling to the hi-tech system can be handled dynamically with automated beam rotation, displacement, and incident angle adjustments provided by other optical components in the beam-shaping and steering assembly 1-150.
An anamorphic prism pair 2-252 can provide additional benefits to the beam-shaping and steering assembly 1-150. A first benefit is that it can provide spatial separation of optical beams at different wavelengths. In some implementations, an input beam 2-205 to the assembly may comprise multiple frequencies (e.g., a fundamental frequency or wavelength from a laser and a second harmonic frequency or frequency-doubled wavelength output from a nonlinear optical element in the laser beam path). The anamorphic prism pair 2-252 can refract the two different wavelengths in different directions, as depicted by the dashed and solid lines in
Additionally, the beam shape is unaffected by the position of the input beam in the X and Y directions, provided the beam is not clipped by an edge of either prism in the prism pair 2-252. In this regard, the beam shape has reduced sensitivity to vibration, thermal expansion, and/or machining variations that would displace the prism pair relative to the input beam. For example, the incoming optical beam 2-205 may displace up to ±3 mm in the X or Y directions without affecting the elliptical beam shape after the prism pair 2-252. Immunity of beam shape to X and Y displacements is not possible when a crossed pair of cylindrical lenses is used in the assembly 1-150 to reshape the input beam 2-205.
Other implementations relating to beam shaping may be employed. According to some implementations, the anamorphic prism pair 2-252 may be used or arranged in reverse, such that it can transform an elliptical beam into a round beam. This may be useful for converting a transverse beam profile from a diode laser from an elongated shape to a more round shape, for example. In some embodiments, conversion of beam shape may not be required so that an anamorphic prism pair 2-252 is not used, and one or more turning mirrors may be installed in place of the anamorphic prism pair 2-252. In such embodiments the image rotation prism 2-254 may be used to rotate polarization of the input beam. In some cases, a Galilean beam expander may be used instead of the anamorphic prism pair to resize (magnify or demagnify) an input beam of any shape. According to some embodiments, one or more polarization rotators (half-wave plate) or transformer (quarter wave plate, polarizing film) may be installed in the beam-shaping and steering assembly at any suitable location to operate on polarization of the input beam. A polarization rotator or polarization transformer may be rotated manually (by a user) or automatically (by an actuator).
Rotation of the transverse beam shape and polarization can be achieved using an image rotation prism 2-254, according to some embodiments. In some embodiments, a beam exiting the anamorphic prism pair 2-252 may pass centrally through the rotation prism that is rotated about an axis of rotation that is approximately parallel to the optical axis of an optical beam entering the prism. Rotation of the prism can rotate the optical beam's transverse shape and its polarization about its optical axis exiting the prism. In this manner, an optical beam with an elliptical transverse beam shape (as depicted in
In some implementations, an image rotation prism 2-254 can be mounted in a rotation assembly having a cradle 2-410 that rotates about an axis of rotation, which is parallel to the optical beam's Z axis in the illustration of
The cradle 2-410 may include a machined recess in which the image rotation prism 2-254 may be mounted, so that a center of the image rotation prism is concentric with the axis of rotation of the cradle. The machined recess may comprise one or more alignment faces or pins that are aligned to be approximately parallel to a planned optical beam path in the beam-shaping and steering assembly 1-150 when assembled. During assembly, the image-rotation prism 2-254 may be aligned by registering the prism to one or more of the alignment faces or pins and securing the prism in the cradle with any suitable fastening means. Additionally, rods that support the bearings 2-420 may be aligned in parallel to machined features in the chassis 2-210, so that a central axis of the rotation prism approximately coincides with an axis of rotation of the cradle 2-410 and with a planned optical beam path through the beam-shaping and steering assembly 1-150. Accordingly, an input beam 2-205 aligned approximately to a planned optical beam path through the assembly will have its shape (transverse intensity profile) rotated with minimal change in beam displacement and beam direction.
The inventors have also recognized and appreciated that it is beneficial to have a low-profile shape of the beam-shaping and steering assembly 1-150. This can be difficult when the same type of actuator (e.g., a rotary stepper motor) is used to operate on all moveable optical components within the assembly. Use of a same type of actuator can be beneficial in terms of reduced complexity, reduced number of different parts, volume discount cost, and ease of interchangeability. However, optical components in the assembly 1-150 utilize rotation about orthogonal axes. For example and referring again to
To maintain an overall low profile of the beam-shaping and steering assembly, mechanical linkages 2-242, 2-244 may be used that allow all rotary actuators to be mounted such that their drive shafts all lie in approximately a same plane or in approximately parallel planes. An example mechanical linkage 2-242 (which does not require gears, pulleys, or sprockets) that allows such mounting of rotary actuators is depicted in
The inventors have recognized and appreciated that the rotational movement of the lever arm 2-540 about the second axis of rotation and the circular trajectory of the bearing 2-520 will normally lead to a nonlinear change in angle of the optical component 2-231 due to a change in angle of the actuator's drive shaft 2-530. According to some embodiments, a curved surface 2-545 may be formed on the lever arm that compensates for the nonlinearities. When a curved surface is employed on the lever arm 2-540, there may be a linear or approximately linear relation between a change in angle of the rotary drive shaft 2-530 and a change in angle of the optical component 2-231 over an extended range of motion of the optical component compared to the case when the contact surface of the lever arm 2-540 is flat. A curvature of the curved surface 2-545 can be engineered to provide a linearized relation for a desired application. Using a curved surface 2-545 can increase the useful range of linearized output (e.g., rotary motion of optical window 2-231) resulting from rotary motion of the rotary actuator. For example, the output may remain linear to within ±5% error over a rotation of 30 degrees about the bearing 2-550. In some implementations, the output may remain linear to within ±2% error over a rotation of 30 degrees about the bearing 2-550. As one example, the lever arm 2-434 of the cradle 2-410, shown in
As another example, a curved surface 2-545 can be engineered to provide a linearized displacement of an optical beam that passes through an optical window 2-231 that is rotated by the mechanical linkage depicted in
Optical components (e.g., anamorphic prisms 2-252, dove prism 2-254, turning mirror 2-234, and optical windows) that are used in the beam-shaping and steering assembly 1-150 may be of moderate or high optical quality. In some embodiments, the optical components may have a surface quality of 40-20 (scratch, dig) or better for surfaces through which the optical beam passes or is reflected from. The flatness of these surfaces may be as high as ¼ of a wavelength at 633 nm or less. Anti-reflection (AR) coatings may be applied to surfaces that the optical beam passes through. The AR coating may be narrowband in some embodiments, or may be broadband in other embodiments. If beams of two wavelengths pass through a surface (e.g., fundamental and second harmonic optical beams), then a dichroic AR coating may be applied to the surface. In some implementations, any coatings used on the optics may be high power coatings, so that the beam-shaping and steering assembly can be used for optical sources that produce output beam powers up to 100 Watts.
An advantageous aspect of the beam-shaping and steering module 1-150 is that incident-angle adjustments to θx and θy (referring to
According to some embodiments, an automated alignment procedure may be used to align the optical beam from an optical source 1-110 to a waveguide coupler (e.g., sliced grating coupler 2-100) in a hi-tech system 1-160. An alignment procedure may comprise executing a spiral search for the grating coupler 2-100, as depicted in
Other methods and apparatus may be used to search for the quad detector 1-320 and align the focused beam 2-350 to the grating coupler 2-100. In some embodiments, the sensitivity of the quad detector 1-320 can be improved to expand the range over which the optical beam may be detected. For example, signals from the quad detector with the optical beam power at a high power (e.g., fully on) may be compared against signals from the quad detector with the optical beam power at a low setting (e.g., off). Additionally, the signals may be integrated over longer periods of time to improve the location-detection sensitivity of the quad detector, when the optical beam may be located at an appreciable distance from the quad detector.
In some embodiments, light scattering elements 2-630 can be fabricated on the chip 1-140 around the quad detector 1-320. When the focused beam is misaligned and at a peripheral location away from the quad detector, the scattering elements may scatter light from the focused beam towards the quad detector 1-320. The detected scattered light may then indicate a position of the beam.
In some implementations, a narrow, linear scattering element (e.g., a trench or rib, an array of posts or divots, not shown) or a line detector, similar in width to the anticipated focused beam size, may be placed through the center of or to the side of the quad detector (or in any suitable orientation with respect to the quad detector), and extend significantly beyond opposite edges of the quad detector (e.g., to a distance greater than a reasonable expectation of initial beam offset error). Since the orientation of this element or detector is known by design, the focused beam 2-350 can first be scanned in a direction perpendicular to the element until the beam strikes the element or detector and is positively detected, either by scatter to the quad detector 1-320, or directly by the line detector. Then, the beam may be scanned in the other direction to find the quad detector 1-320.
According to some embodiments, an optical beam may be initially expanded at the surface 2-340 of the chip 1-140 (e.g., defocusing the beam by moving lens 2-233 with an actuator, inserting a defocusing lens in the beam path, or using other means). The footprint of the beam on the chip may then be greatly increased (e.g., by a factor of 10 or more) so that any scanning process can use larger steps between beam positions when searching for the quad detector 1-320 (e.g., larger offsets between radial loops on a spiral scan). This and the foregoing alternative searching methods may reduce the search time associated with aligning the focused beam 2-350 to the grating coupler 2-100.
After alignment, the focused optical beam may be maintained actively in an aligned position. For example, an (X, Y) position of the beam determined after the initial alignment with respect to the quad detector 1-320 may be actively maintained using feedback from the quad detector and activation of the actuators 2-223 and 2-224 to maintain the beam in an approximately fixed location. In some embodiments, incident angles of the optical beam at the surface may not be adjusted after an initial alignment to optimize power coupled into the waveguide. Additionally, an amount of power coupled into the waveguides may be maintained at approximately a constant level throughout measurements.
According to some embodiments, power delivered to the waveguides 2-120 may be maintained at approximately constant levels by using feedback to control optical components of the beam-shaping and steering assembly 1-150 and/or optical or other components within the optical source 1-110. For example, one or more photodiode 1-324 signals from photodiodes arranged to receive light from one or more of the waveguides may be monitored by a signal processor to evaluate power levels coupled to the waveguides. Control signals may be produced in response to detected changes in power levels at the waveguides, and the control signals may be applied to actuators in the beam-shaping and steering assembly and/or optical source. With regard to an optical source comprising a laser that produces a frequency-doubled output beam using a frequency-doubling crystal, a control signal may be applied to an actuator that controls an orientation of a half-wave plate in the optical source. Rotation of the half wave plate may change the polarization of optical pulses entering the frequency-doubling crystal, and therefor change the conversion efficiency to and power of the frequency-doubled wavelength. This could control optical power without affecting stability of the optical source or having to misalign the optical beam with respect to the grating coupler 2-100.
Example circuitry for beam alignment and power stabilization is depicted in
In some embodiments, control circuitry may comprise one or a combination of the following elements: analog and digital circuitry, an ASIC, an FPGA, a DSP, a microcontroller, and a microprocessor. The control circuitry 2-730 may be configured to process signals received from the one or more waveguide photodiodes to determine a level of optical power in each waveguide. Control circuitry 2-730 may be further configured to process received signals from the quad detector 1-320 to determine an (X, Y) location of the optical beam with respect to the quad detector. In some implementations, the control circuitry 2-730 is configured to detect power coupled into each waveguide, and provide a control signal to the actuators to move the optical beam such that power is equalized in the waveguides or has a highest uniformity across the waveguides.
A position of the optical beam in the X direction may be determined, for example, by control circuitry 2-730 adapted to execute the following algorithm:
Sx=[(VQ1+VQ4)−(VQ2+VQ3)]/VT
where Sx is a normalized signal level corresponding to the x direction, VQn is a signal level (e.g., voltage) received from the nth photodiode of the quad detector, and VT is a total signal level received by summing the signal from all four photodiodes. Additionally, a position of the optical beam in the Y direction may be determined, for example, using the following algorithm:
Sy=[(VQ3+VQ4)−(VQ1+VQ2)]/VT.
An average power coupled into all waveguides on the chip 1-140 may be determined by summing signals from all of the photodiodes 1-324 arranged to detect power in each of the waveguides on the chip.
Control signals may be generated by control circuitry 2-730 responsive to a detected beam position in X and Y and responsive to power levels detected in one or more waveguides 2-120. The control signals may be provided as digital signals over one or more communication links (SM1, SM2, . . . SM5) to actuators of the beam-shaping and steering module 1-150 and over one or more communication links WP to actuators or controls of the optical source system 1-110 (e.g., an actuator arranged to rotate a half-wave plate or beam attenuator, a control for applying electrical power to a diode optical source). The control signals may be applied to stabilize power and/or improve optical coupling between the optical source 1-110 and hi-tech system 1-160.
As may be appreciated from the foregoing description, the beam-shaping and steering assembly 1-150 may advantageously not include some beam-shaping and steering components that would significantly increase cost. Such components include electro-optical and thermo-optic components, phased array or beam-combining components, and micro-electrical-mechanical systems. According to some embodiments, all parts of a beam-shaping and steering assembly 1-150 may be manufactured using standard machining and molding capabilities.
Although use of the beam-shaping and steering assembly is described primarily for coupling to a sliced grating coupler, it may be used to couple an optical beam to other optical systems such as, but not limited to, an optical fiber, a two-dimensional fiber array, an integrated optical waveguide via butt coupling, one or more microfluidic channels, a prism coupler, or an optical system arranged to excite surface plasmons.
Some embodiments of a beam-shaping and steering assembly 1-150 may include sensors and circuitry (neither shown in
In some embodiments, one or more photodiodes, one or more imaging arrays, and/or one or more quad detectors may be incorporated in the beam-shaping and steering assembly 1-150 to monitor characteristics of the optical beam 2-350 at one or more locations within the assembly. Characteristics that could be monitored include, but are not limited to, power in a fundamental beam, power in a second harmonic beam, output beam position, output beam pointing direction, output beam shape, and output beam pointing angle. For example, a photodiode can be used to monitor an amount of energy in the fundamental beam or another beam at a beam dump 2-260 when beams of different wavelengths are separated. A second photodiode could monitor an amount of power in a second harmonic beam of fundamental beam that leaks through a turning mirror (e.g., mirror 2-234) or reflects from a facet of an optical window 2-231, 2-232, 2-235, 2-237 or lens 2-233, or other optical component within the assembly 1-150. In some cases, a photodiode can be mounted in a cover placed over the chassis 2-210 or in the chassis base to receive a facet reflection from and optical window. In some cases, optical power from a fundamental and/or second harmonic beam can be used to evaluate health of an optical source (e.g., stability of a mode-locked laser that provides and input beam 2-205). In embodiments, a signal generated from a photodiode that detects a mode-locked laser beam can be used to generate a clock signal that is phase locked to in time to pulse arrival times at the photodiode.
A quad detector or imaging array could be used to monitor the location and/or presence of one or more stray reflected beams from a facet of an optical component within the beam-shaping and steering assembly or from an optical component located downstream of the assembly. As an example and referring to
Signals from the electrical, thermal, and optical sensor(s) may be provided to signal processing logic (e.g., a microcontroller and/or logic chips) on a PCB that is provided with the beam-shaping and steering assembly 1-150 to determine whether the beam-shaping and steering assembly is operating stably and as expected and to produce error signals if the assembly is malfunctioning. In some implementations, the PCB may be mounted to the chassis 2-210 of the beam-shaping and steering assembly, though in other embodiments, the PCB may be located elsewhere and connect to the sensors, actuators, and any other electronics within the assembly 1-150 via a multi-wire cable.
Embodiments of the described technology include at least the configurations and methods set forth in (1) through (51) below.
(1) A beam-shaping and steering assembly comprising a first optical component arranged to transform a first transverse beam shape of an input beam into a second transverse beam shape of a second beam; a second optical component arranged to rotate the second transverse beam shape about an optical axis of the second beam; and a third optical component arranged to adjust one of: a first position or a first directional angle of an output beam at a target location.
(2) The beam-shaping and steering assembly of configuration (1), wherein displacements of the input beam of up to ±3 mm through the first optical component do not change the second transverse beam shape.
(3) The beam-shaping and steering assembly of configurations (1) or (2), wherein the first optical component comprises an anamorphic prism pair.
(4) The beam-shaping and steering assembly of any one of configurations (1) through (3), further comprising a beam dump, wherein the first optical component spatially separates optical wavelengths in the input beam and the beam dump is located to receive an output from the first optical component at a first wavelength.
(5) The beam-shaping and steering assembly of configuration (4), further comprising a turning mirror arranged to receive the second beam having a second wavelength and direct the second beam to the third optical component.
(6) The beam-shaping and steering assembly of any one of configurations (1) through (5), wherein the second optical component comprises a dove prism.
(7) The beam-shaping and steering assembly of any one of configurations (1) through (6), wherein the third optical component comprises an optical window.
(8) The beam-shaping and steering assembly of any one of configurations (1) through (7), further comprising a chassis supporting the first optical component, the second optical component, and the third optical component, wherein the chassis is mounted in an instrument comprising a printed circuit board (PCB) on which is mounted a device having a receiving optical component that receives the second beam, wherein a region of the PCB containing the device attaches to the chassis to reduce motion of the device with respect to the beam-shaping and steering assembly.
(9) The beam-shaping and steering assembly of any one of configurations (1) through (8), further comprising a fourth optical component arranged to adjust one of: a second position or a second directional angle of the output beam at the target location.
(10) The beam-shaping and steering assembly of configuration (9), wherein first effects on the output beam at the target location caused by adjustments to the fourth optical component have essentially no effect on second effects on the output beam at the target location caused by adjustments to the third optical component and vice versa.
(11) The beam-shaping and steering assembly of configurations (9) or (10), further comprising a first actuator coupled to the third optical component; and a second actuator coupled to the fourth optical component, wherein the first actuator and the second actuator each include a rotary drive shaft that are essentially parallel to a same plane.
(12) The beam-shaping and steering assembly of configuration (11), wherein the rotary drive shafts of the first actuator and the second actuator are essentially parallel.
(13) The beam-shaping and steering assembly of configurations (11) or (12), wherein changes to the output beam at the target location effected by the third optical component are in a dimension that is essentially orthogonal to changes to the output beam at the target location effected by the fourth optical component.
(14) The beam-shaping and steering assembly of any one of configurations (1) through (13), wherein the third optical component is arranged to adjust the first directional angle of the output beam at the target location, the beam-shaping and steering assembly further comprising a fourth optical component arranged to adjust a second directional angle of the output beam at the target location; a fifth optical component arranged to adjust the first position of the output beam at the target location; and a sixth optical component arranged to adjust a second position of the output beam at the target location.
(15) The beam-shaping and steering assembly of configuration (14), further comprising a focusing lens arranged such that the third and fourth optical components are disposed on a first side of the focusing lens and the fifth and sixth optical components are disposed on a second side of the focusing lens.
(16) The beam-shaping and steering assembly of configurations (14) or (15), wherein the first directional angle is a pitch angle of the output beam at the target location; the second directional angle is a yaw angle of the output beam at the target location; the first position is an X-direction position of the output beam at the target location; and the second position is a Y-direction position of the output beam at the target location, the X-direction and Y-direction being orthogonal.
(17) The beam-shaping and steering assembly of any one of configurations (1) through (16), wherein the second transverse beam shape is substantially elliptical and the first transverse beam shape is substantially circular.
(18) A method of coupling a beam from an optical source to a receiving optical component of a system, the method comprising acts of receiving, by a beam-shaping and steering assembly, the beam from the optical source; transforming, with the beam-shaping and steering assembly, a first transverse beam shape of the beam to a second transverse beam shape of an output beam; positioning, with the beam-shaping and steering assembly, the output beam on the receiving optical component; and adjustably rotating, with the beam-shaping and steering assembly, the second transverse beam shape.
(19) The method of (18), wherein the rotating is performed by rotating an optical component made from a single piece of material.
(20) The method of (18) or (19), wherein the first transverse beam shape is round and the second transverse beam shape is elliptical.
(21) The method of any one of (18) through (20), further comprising changing, with the beam-shaping and steering assembly, one or both of an incident angle and a position of the output beam on the receiving optical component.
(22) The method of any one of (18) through (21), wherein rotation of an optical window is used to adjust incident angle of the output beam on the receiving optical component.
(23) The method of any one of (18) through (22), wherein a transverse size of the output beam is between 10% and 35% larger than a coupling region of the receiving optical component and is oriented at a roll angle with respect to the receiving optical component.
(24) The method of (23), further comprising adjusting a position of the output beam at the receiving optical component to compensate for an asymmetry of intensity in the second transverse beam shape.
(25) The method of any one of (18) through (24), wherein the receiving optical component comprises a sliced grating coupler configured to couple the output beam to a plurality of waveguides.
(26) The method of (25), further comprising adjusting, with the beam-shaping and steering assembly, a uniformity of power coupled to the plurality of waveguides.
(27) An optical system for coupling a beam of radiation to an apparatus, the optical system comprising three rotary actuators; and three optical components coupled respectively to the three rotary actuators, wherein each rotary actuator has a drive shaft that rotates about a shaft axis to move an optical component of the three optical components, wherein the shaft axes of the three rotary actuators are essentially parallel to a same plane, and wherein actuation of the three optical components by the three rotary actuators alters the beam in three different degrees of freedom.
(28) The optical system of configuration (27), wherein couplings between the three optical components and the three rotary actuators do not include gears, pulleys, or sprockets.
(29) The optical system of configurations (27) or (28), wherein at least two of the three optical components are transparent optical windows and at least two of the drive shafts are essentially parallel.
(30) The optical system of any one of configurations (27) through (29), wherein the three rotary actuators have essentially a same size and structure.
(31) The optical system of any one of configurations (27) through (30), wherein movement of a first optical component of the three optical components by a first rotary actuator of the three rotary actuators rotates the transverse beam shape at a location exiting the first optical component about an optical axis that runs centrally along the beam exiting the first optical component.
(32) The optical system of configuration (31), wherein movement of the first optical component rotates the beam at the target location about an optical axis that runs centrally along the focused beam with essentially no lateral displacement of the focused beam at the target location.
(33) The optical system of any one of configurations (27) through (32), further comprising a lens to focus the beam to a target location in the apparatus, wherein movement of two optical components of the three optical components by two rotary actuators of the three rotary actuators alters incident angles of the focused beam at the target location with essentially no lateral displacement of the focused beam at the target location.
(34) The optical system of configuration (33), further comprising a fourth optical component coupled to a fourth rotary actuator having a drive shaft that rotates about a shaft axis to move the fourth optical component; and a fifth optical component coupled to a fifth rotary actuator having a drive shaft that rotates about a shaft axis to move the fifth optical component, wherein the shaft axes of the fourth and fifth rotary actuators are essentially parallel to the same plane.
(35) The optical system of configuration (34), wherein the shaft axes of the three rotary actuators and fourth and fifth rotary actuators lie essentially in the same plane.
(36) The optical system of configurations (34) or (35), wherein the optical system has a height no greater than 40 mm.
(37) The optical system of any one of configurations (34) through (36), wherein movement of the fourth and fifth optical components laterally translate the focused beam at the target location in two degrees of freedom with essentially no changes in incident angles of the beam at the target location.
(38) The optical system of any one of configurations (27) through (37), further comprising a beam-shaping component configured to convert a received round beam shape to an elongated beam shape.
(39) The optical system of configuration (38), wherein the beam-shaping component is further configured to spatially separate different radiation wavelengths in the beam.
(40) An optical system for coupling a beam of radiation to an apparatus, the optical system comprising a first optical component supported in an adjustable mount; and a first actuator coupled to the adjustable mount, wherein movement of the first optical component by the first actuator rotates a transverse shape and polarization of an exit beam that exits the first optical component, wherein the rotation of the transverse shape and polarization are about an optical axis that runs centrally along the exit beam.
(41) The optical system of configuration (40), wherein the first optical component is made of a single piece of material that is aligned so that the beam is incident centrally along an axis of rotation of the first optical component.
(42) The optical system of configurations (40) or (41), further comprising a second optical component arranged to transform a first transverse beam shape of the beam into a second transverse beam shape of a second beam and to spatially separate wavelengths in the beam; and a beam dump arranged to receive a spatially separated wavelength from the beam.
(43) The optical system of any one of configurations (40) through (42), further comprising an additional optical component arranged to adjust a directional angle of the exit beam.
(44) The optical system of configuration (43), wherein the additional optical component is a transparent optical window.
(45) An optical system for altering a beam of radiation, the optical system comprising a first optical component supported by an adjustable mount that is configured to rotate the first optical component about a first axis; a rotary actuator having a drive shaft that rotates about a second axis that is not parallel to the first axis; a cam arm connected to the drive shaft a bearing connected to the cam arm; and a curved surface connected to the adjustable mount, wherein the bearing runs across the curved surface when the rotary actuator is actuated to rotate the first optical component.
(46) The optical system of configuration (45), wherein the curved surface is shaped to linearize a change in a parameter of an optical beam passing through the optical component due to rotation of the cam arm by the drive shaft.
(47) An optical beam-steering apparatus comprising a first rotary actuator arranged to rotate a first optical window; a second rotary actuator arranged to rotate a second optical window; and a lens, wherein rotation of the first optical window adjusts a lateral position of an optical beam at a target location and rotation of the second optical window adjusts an incident angle of the beam at the target location without changing the lateral position by more than 10 microns.
(48) The optical beam-steering apparatus of configuration (47), wherein a rotary drive shaft of the first rotary actuator is essentially parallel to a rotary drive shaft of the second rotary actuator.
(49) An optical beam-steering apparatus comprising three rotatable transparent optical windows arranged to adjust three parameters of an output beam from the beam-steering apparatus in three orthogonal degrees of freedom.
(50) The optical beam-steering apparatus of configuration (49), further comprising three rotary actuators configured to rotate the three rotatable transparent optical windows, wherein drive shafts of the three rotary actuators are essentially parallel to a same plane.
(51) The optical beam-steering apparatus of configuration (50), wherein the drive shafts are essentially parallel to each other.
Having thus described several aspects of several embodiments of a beam-shaping and steering assembly, it is to be appreciated that various alterations, modifications, and improvements will readily occur to those skilled in the art. Such alterations, modifications, and improvements are intended to be part of this disclosure, and are intended to be within the spirit and scope of the invention. While the present teachings have been described in conjunction with various embodiments and examples, it is not intended that the present teachings be limited to such embodiments or examples. On the contrary, the present teachings encompass various alternatives, modifications, and equivalents, as will be appreciated by those of skill in the art.
For example, embodiments may be modified to include more or fewer optical components in the beam-shaping and steering assembly than described above. Moreover, optical configurations may differ from those shown with some beam-shaping and steering assemblies have more or fewer turns or folds in an optical path passing through the assembly.
While various inventive embodiments have been described and illustrated, those of ordinary skill in the art will readily envision a variety of other means and/or structures for performing the function and/or obtaining the results and/or one or more of the advantages described, and each of such variations and/or modifications is deemed to be within the scope of the inventive embodiments described. More generally, those skilled in the art will readily appreciate that all parameters, dimensions, materials, and configurations described are meant to be examples and that the actual parameters, dimensions, materials, and/or configurations will depend upon the specific application or applications for which the inventive teachings is/are used. Those skilled in the art will recognize, or be able to ascertain using no more than routine experimentation, many equivalents to the specific inventive embodiments described. It is, therefore, to be understood that the foregoing embodiments are presented by way of example only and that, within the scope of the appended claims and equivalents thereto, inventive embodiments may be practiced otherwise than as specifically described and claimed. Inventive embodiments of the present disclosure may be directed to each individual feature, system, system upgrade, and/or method described. In addition, any combination of two or more such features, systems, and/or methods, if such features, systems, system upgrade, and/or methods are not mutually inconsistent, is included within the inventive scope of the present disclosure.
Further, though some advantages of the present invention may be indicated, it should be appreciated that not every embodiment of the invention will include every described advantage. Some embodiments may not implement any features described as advantageous. Accordingly, the foregoing description and drawings are by way of example only.
All literature and similar material cited in this application, including, but not limited to, patents, patent applications, articles, books, treatises, and web pages, regardless of the format of such literature and similar materials, are expressly incorporated by reference in their entirety. In the event that one or more of the incorporated literature and similar materials differs from or contradicts this application, including but not limited to defined terms, term usage, described techniques, or the like, this application controls.
The section headings used are for organizational purposes only and are not to be construed as limiting the subject matter described in any way.
Also, the technology described may be embodied as a method, of which at least one example has been provided. The acts performed as part of the method may be ordered in any suitable way. Accordingly, embodiments may be constructed in which acts are performed in an order different than illustrated, which may include performing some acts simultaneously, even though shown as sequential acts in illustrative embodiments.
All definitions, as defined and used, should be understood to control over dictionary definitions, definitions in documents incorporated by reference, and/or ordinary meanings of the defined terms.
Numerical values and ranges may be described in the specification and claims as approximate or exact values or ranges. For example, in some cases the terms “about,” “approximately,” and “substantially” may be used in reference to a value. Such references are intended to encompass the referenced value as well as plus and minus reasonable variations of the value. For example, a phrase “between about 10 and about 20” is intended to mean “between exactly 10 and exactly 20” in some embodiments, as well as “between 10±δ1 and 20±δ2” in some embodiments. The amount of variation δ1, δ2 for a value may be less than 5% of the value in some embodiments, less than 10% of the value in some embodiments, and yet less than 20% of the value in some embodiments. In embodiments where a large range of values is given, e.g., a range including two or more orders of magnitude, the amount of variation δ1, δ2 for a value could be as high as 50%. For example, if an operable range extends from 2 to 200, “approximately 80” may encompass values between 40 and 120 and the range may be as large as between 1 and 300. When only exact values are intended, the term “exactly” is used, e.g., “between exactly 2 and exactly 200.” The term “essentially” is used to indicate that values are the same or at a target value or condition to within ±3%.
The term “adjacent” may refer to two elements arranged within close proximity to one another (e.g., within a distance that is less than about one-fifth of a transverse or vertical dimension of a larger of the two elements). In some cases there may be intervening structures or layers between adjacent elements. In some cases adjacent elements may be immediately adjacent to one another with no intervening structures or elements.
The indefinite articles “a” and “an,” as used in the specification and in the claims, unless clearly indicated to the contrary, should be understood to mean “at least one.”
The phrase “and/or,” as used in the specification and in the claims, should be understood to mean “either or both” of the elements so conjoined, i.e., elements that are conjunctively present in some cases and disjunctively present in other cases. Multiple elements listed with “and/or” should be construed in the same fashion, i.e., “one or more” of the elements so conjoined. Other elements may optionally be present other than the elements specifically identified by the “and/or” clause, whether related or unrelated to those elements specifically identified. Thus, as a non-limiting example, a reference to “A and/or B”, when used in conjunction with open-ended language such as “comprising” can refer, in one embodiment, to A only (optionally including elements other than B); in another embodiment, to B only (optionally including elements other than A); in yet another embodiment, to both A and B (optionally including other elements); etc.
As used in the specification and in the claims, “or” should be understood to have the same meaning as “and/or” as defined above. For example, when separating items in a list, “or” or “and/or” shall be interpreted as being inclusive, i.e., the inclusion of at least one, but also including more than one, of a number or list of elements, and, optionally, additional unlisted items. Only terms clearly indicated to the contrary, such as “only one of” or “exactly one of,” or, when used in the claims, “consisting of,” will refer to the inclusion of exactly one element of a number or list of elements. In general, the term “or” as used shall only be interpreted as indicating exclusive alternatives (i.e. “one or the other but not both”) when preceded by terms of exclusivity, such as “either,” “one of,” “only one of,” or “exactly one of.” “Consisting essentially of,” when used in the claims, shall have its ordinary meaning as used in the field of patent law.
As used in the specification and in the claims, the phrase “at least one,” in reference to a list of one or more elements, should be understood to mean at least one element selected from any one or more of the elements in the list of elements, but not necessarily including at least one of each and every element specifically listed within the list of elements and not excluding any combinations of elements in the list of elements. This definition also allows that elements may optionally be present other than the elements specifically identified within the list of elements to which the phrase “at least one” refers, whether related or unrelated to those elements specifically identified. Thus, as a non-limiting example, “at least one of A and B” (or, equivalently, “at least one of A or B,” or, equivalently “at least one of A and/or B”) can refer, in one embodiment, to at least one, optionally including more than one, A, with no B present (and optionally including elements other than B); in another embodiment, to at least one, optionally including more than one, B, with no A present (and optionally including elements other than A); in yet another embodiment, to at least one, optionally including more than one, A, and at least one, optionally including more than one, B (and optionally including other elements); etc.
In the claims, as well as in the specification above, all transitional phrases such as “comprising,” “including,” “carrying,” “having,” “containing,” “involving,” “holding,” “composed of,” and the like are to be understood to be open-ended, i.e., to mean including but not limited to. Only the transitional phrases “consisting of” and “consisting essentially of” shall be closed or semi-closed transitional phrases, respectively.
The claims should not be read as limited to the described order or elements unless stated to that effect. It should be understood that various changes in form and detail may be made by one of ordinary skill in the art without departing from the spirit and scope of the appended claims. All embodiments that come within the spirit and scope of the following claims and equivalents thereto are claimed.
This application is a Divisional of U.S. patent application Ser. No. 15/842,720, filed Dec. 14, 2017 and titled “Compact Beam Shaping and Steering Assembly, which claims priority to U.S. Provisional Application No. 62/435,679, filed Dec. 16, 2016 and titled “Compact Beam Shaping and Steering Assembly,” each of which is incorporated by reference in its entirety.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4034949 | Hoesterey | Jul 1977 | A |
| 4118109 | Crawford | Oct 1978 | A |
| 4295226 | Dombrowski | Oct 1981 | A |
| 4850686 | Morimoto | Jul 1989 | A |
| 5108179 | Myers | Apr 1992 | A |
| 5196709 | Berndt et al. | Mar 1993 | A |
| 5471515 | Fossum et al. | Nov 1995 | A |
| 5627853 | Mooradian et al. | May 1997 | A |
| 5674743 | Ulmer | Oct 1997 | A |
| 5822472 | Danielzik et al. | Oct 1998 | A |
| 5854651 | Kessler | Dec 1998 | A |
| 5961924 | Reichert et al. | Oct 1999 | A |
| 6185235 | Cheng et al. | Feb 2001 | B1 |
| 6205266 | Palen | Mar 2001 | B1 |
| 6355420 | Chan | Mar 2002 | B1 |
| 6393035 | Weingarten et al. | May 2002 | B1 |
| 6437345 | Bruno-Raimondi et al. | Aug 2002 | B1 |
| 6473250 | Chapman | Oct 2002 | B1 |
| 6545759 | Hartman | Apr 2003 | B1 |
| 6618423 | Dekorsky et al. | Sep 2003 | B1 |
| 6716394 | Jensen et al. | Apr 2004 | B2 |
| 6787308 | Balasubramanian et al. | Sep 2004 | B2 |
| 6825921 | Modlin et al. | Nov 2004 | B1 |
| 6834064 | Paschotta et al. | Dec 2004 | B1 |
| 6847450 | Richard | Jan 2005 | B2 |
| 6917726 | Levene et al. | Jul 2005 | B2 |
| 7052847 | Korlach et al. | May 2006 | B2 |
| 7170050 | Turner et al. | Jan 2007 | B2 |
| 7175811 | Bach et al. | Feb 2007 | B2 |
| 7179654 | Verdonk et al. | Feb 2007 | B2 |
| 7394841 | Konttinen et al. | Jul 2008 | B1 |
| 7426322 | Hyde | Sep 2008 | B2 |
| 7595883 | El Gamal et al. | Sep 2009 | B1 |
| 7738086 | Shepard et al. | Jun 2010 | B2 |
| 7742510 | Essaian et al. | Jun 2010 | B2 |
| 7820983 | Lundquist et al. | Oct 2010 | B2 |
| 7834329 | Lundquist et al. | Nov 2010 | B2 |
| 7838847 | Lundquist et al. | Nov 2010 | B2 |
| 7873085 | Babushkin et al. | Jan 2011 | B2 |
| 7968702 | Wegener et al. | Jun 2011 | B2 |
| 7981604 | Quake | Jul 2011 | B2 |
| 8053742 | Lundquist et al. | Nov 2011 | B2 |
| 8207509 | Lundquist et al. | Jun 2012 | B2 |
| 8274040 | Zhong et al. | Sep 2012 | B2 |
| 8278728 | Murshid | Oct 2012 | B2 |
| 8279901 | Karavitis | Oct 2012 | B2 |
| 8465699 | Fehr et al. | Jun 2013 | B2 |
| 8471219 | Lundquist et al. | Jun 2013 | B2 |
| 8471230 | Zhong et al. | Jun 2013 | B2 |
| 8501406 | Gray et al. | Aug 2013 | B1 |
| 8502169 | Rigneault et al. | Aug 2013 | B2 |
| 8618507 | Lundquist et al. | Dec 2013 | B1 |
| 8865077 | Chiou et al. | Oct 2014 | B2 |
| 8953651 | Karavitis | Feb 2015 | B2 |
| 9029802 | Lundquist et al. | May 2015 | B2 |
| 9054479 | Karavitis | Jun 2015 | B2 |
| 9157864 | Fehr et al. | Oct 2015 | B2 |
| 9222123 | Zhong et al. | Dec 2015 | B2 |
| 9222133 | Lundquist et al. | Dec 2015 | B2 |
| 9223084 | Grot et al. | Dec 2015 | B2 |
| 9318867 | Pronin et al. | Apr 2016 | B2 |
| 9325148 | Karavitis | Apr 2016 | B2 |
| 9372308 | Saxena et al. | Jun 2016 | B1 |
| 9587276 | Lundquist et al. | Mar 2017 | B2 |
| 9606060 | Chen et al. | Mar 2017 | B2 |
| 9617594 | Rothberg et al. | Apr 2017 | B2 |
| 9658161 | Saxena et al. | May 2017 | B2 |
| 9666748 | Leobandung | May 2017 | B2 |
| 9719138 | Zhong et al. | Aug 2017 | B2 |
| 9765395 | Goldsmith | Sep 2017 | B2 |
| 9946017 | Saxena et al. | Apr 2018 | B2 |
| 10018764 | Grot et al. | Jul 2018 | B2 |
| 10090429 | Leobandung | Oct 2018 | B2 |
| 10138515 | Fehr et al. | Nov 2018 | B2 |
| 10246742 | Rothberg et al. | Apr 2019 | B2 |
| 10280457 | Zhong et al. | May 2019 | B2 |
| 10283928 | Rothberg et al. | May 2019 | B2 |
| 10310178 | Saxena et al. | Jun 2019 | B2 |
| 10487356 | Lundquist et al. | Nov 2019 | B2 |
| 10551624 | Rothberg et al. | Feb 2020 | B2 |
| 10578788 | Grot et al. | Mar 2020 | B2 |
| 10605730 | Rothberg et al. | Mar 2020 | B2 |
| 10655172 | Rank et al. | May 2020 | B2 |
| 10712433 | Carothers | Jul 2020 | B2 |
| 10724090 | McCaffrey et al. | Jul 2020 | B2 |
| 10741990 | Rothberg et al. | Aug 2020 | B2 |
| 20010050821 | Bickleder et al. | Dec 2001 | A1 |
| 20020182716 | Weisbuch et al. | Dec 2002 | A1 |
| 20030058904 | Krainer et al. | Mar 2003 | A1 |
| 20030151053 | Sun et al. | Aug 2003 | A1 |
| 20030169784 | Sutter et al. | Sep 2003 | A1 |
| 20030174992 | Levene et al. | Sep 2003 | A1 |
| 20030179786 | Kopf | Sep 2003 | A1 |
| 20040047387 | Bunting et al. | Mar 2004 | A1 |
| 20040169842 | Dosluoglu et al. | Sep 2004 | A1 |
| 20040257140 | Bergmann et al. | Dec 2004 | A1 |
| 20060000814 | Gu et al. | Jan 2006 | A1 |
| 20060029110 | Cho et al. | Feb 2006 | A1 |
| 20060269190 | Kim et al. | Nov 2006 | A1 |
| 20080130099 | Harter | Jun 2008 | A1 |
| 20090180500 | Babushkin et al. | Jul 2009 | A1 |
| 20090225799 | Hasegawa | Sep 2009 | A1 |
| 20100021180 | Uemura et al. | Jan 2010 | A1 |
| 20100065726 | Zhong et al. | Mar 2010 | A1 |
| 20100173394 | Colston et al. | Jul 2010 | A1 |
| 20100245354 | Rousso et al. | Sep 2010 | A1 |
| 20100254022 | O'Shaughnessy | Oct 2010 | A1 |
| 20100255487 | Beechem et al. | Oct 2010 | A1 |
| 20100327762 | Yang | Dec 2010 | A1 |
| 20110136201 | Mao et al. | Jun 2011 | A1 |
| 20110165652 | Hardin et al. | Jul 2011 | A1 |
| 20110206070 | Karavitis | Aug 2011 | A1 |
| 20110206071 | Karavitis | Aug 2011 | A1 |
| 20110206072 | Karavitis | Aug 2011 | A1 |
| 20110206073 | Karavitis | Aug 2011 | A1 |
| 20110236983 | Beechem et al. | Sep 2011 | A1 |
| 20120039345 | Fan et al. | Feb 2012 | A1 |
| 20120081040 | Ku | Apr 2012 | A1 |
| 20120282391 | Palmaz et al. | Nov 2012 | A1 |
| 20130071849 | Kong et al. | Mar 2013 | A1 |
| 20130116153 | Bowen et al. | May 2013 | A1 |
| 20140286364 | Pronin et al. | Sep 2014 | A1 |
| 20150293021 | Finkelstein et al. | Oct 2015 | A1 |
| 20150355469 | Oguri et al. | Dec 2015 | A1 |
| 20160002088 | Mizumura et al. | Jan 2016 | A1 |
| 20160084761 | Rothberg et al. | Mar 2016 | A1 |
| 20160231549 | Bosworth et al. | Aug 2016 | A1 |
| 20160238532 | Freudiger et al. | Aug 2016 | A1 |
| 20160336709 | Manni | Nov 2016 | A1 |
| 20160341664 | Rothberg et al. | Nov 2016 | A1 |
| 20160344156 | Rothberg et al. | Nov 2016 | A1 |
| 20160369332 | Rothberg et al. | Dec 2016 | A1 |
| 20170146479 | Levine et al. | May 2017 | A1 |
| 20170160541 | Carothers | Jun 2017 | A1 |
| 20180115136 | Delfyett et al. | Apr 2018 | A1 |
| 20180173000 | Rothberg et al. | Jun 2018 | A1 |
| 20180175582 | Rothberg et al. | Jun 2018 | A1 |
| 20190249240 | Rothberg et al. | Aug 2019 | A1 |
| 20190292590 | Zhong et al. | Sep 2019 | A1 |
| 20190383737 | Rothberg et al. | Dec 2019 | A1 |
| 20200158640 | Rothberg et al. | May 2020 | A1 |
| 20200220317 | Rothberg et al. | Jul 2020 | A1 |
| 20200335933 | Rothberg et al. | Oct 2020 | A1 |
| 20200393616 | Schmid et al. | Dec 2020 | A1 |
| 20210218218 | Bellos et al. | Jul 2021 | A1 |
| 20210277463 | Rothberg et al. | Sep 2021 | A1 |
| Number | Date | Country |
|---|---|---|
| 1242884 | Jan 2000 | CN |
| 101572380 | Nov 2009 | CN |
| 101636886 | Jan 2010 | CN |
| 101915752 | Dec 2010 | CN |
| 101938081 | Jan 2011 | CN |
| 102832536 | Dec 2012 | CN |
| 103502471 | Jan 2014 | CN |
| 103765704 | Apr 2014 | CN |
| 203774604 | Aug 2014 | CN |
| 104078839 | Oct 2014 | CN |
| 104201547 | Dec 2014 | CN |
| 104518419 | Apr 2015 | CN |
| 106029904 | Oct 2016 | CN |
| 10 2009 036273 | Feb 2011 | DE |
| 0472318 | Feb 1992 | EP |
| 0542480 | May 1993 | EP |
| 0601714 | Jun 1994 | EP |
| 1681356 | Jul 2006 | EP |
| 2182523 | May 2010 | EP |
| 3296783 | Mar 2018 | EP |
| 2329206 | Nov 2009 | ES |
| S63-17581 | Jan 1988 | JP |
| H05-243660 | Sep 1993 | JP |
| H05-275780 | Oct 1993 | JP |
| H05-283766 | Oct 1993 | JP |
| H07-221374 | Aug 1995 | JP |
| H08-506664 | Jul 1996 | JP |
| H08-340154 | Dec 1996 | JP |
| H10-3022 | Jan 1998 | JP |
| H11-505370 | May 1999 | JP |
| 2000-155052 | Jun 2000 | JP |
| 2001-25102 | Jan 2001 | JP |
| 2001-077449 | Mar 2001 | JP |
| 2001-142035 | May 2001 | JP |
| 2002-239773 | Aug 2002 | JP |
| 2002-368313 | Dec 2002 | JP |
| 2003-500861 | Jan 2003 | JP |
| 2003-168840 | Jun 2003 | JP |
| 2004-520709 | Jul 2004 | JP |
| 2004-363419 | Dec 2004 | JP |
| 2005-512086 | Apr 2005 | JP |
| 2005-524051 | Aug 2005 | JP |
| 2006-48885 | Feb 2006 | JP |
| 2007-511079 | Apr 2007 | JP |
| 2007-520735 | Jul 2007 | JP |
| 2008-28379 | Feb 2008 | JP |
| 2009-122493 | Jun 2009 | JP |
| 2009-277754 | Nov 2009 | JP |
| 2010-103291 | May 2010 | JP |
| 2010-204006 | Sep 2010 | JP |
| 2011-119393 | Jun 2011 | JP |
| 2011-518445 | Jun 2011 | JP |
| 2012-32183 | Feb 2012 | JP |
| 2012-98299 | May 2012 | JP |
| 2010-074198 | Aug 2012 | JP |
| 2012-242626 | Dec 2012 | JP |
| 2013-104876 | May 2013 | JP |
| 2013-518302 | May 2013 | JP |
| 2013-520848 | Jun 2013 | JP |
| 2014-150210 | Aug 2014 | JP |
| 2014-531777 | Nov 2014 | JP |
| 2015-015337 | Jan 2015 | JP |
| 2015-501415 | Jan 2015 | JP |
| 2016-502290 | Jan 2016 | JP |
| 590565 | Jun 2006 | KR |
| 200909794 | Mar 2009 | TW |
| 201440942 | Nov 2014 | TW |
| WO 9418218 | Aug 1994 | WO |
| WO 0211252 | Feb 2002 | WO |
| WO 03021212 | Mar 2003 | WO |
| WO 2005073407 | Aug 2005 | WO |
| WO 2008087253 | Jul 2008 | WO |
| WO 2011091316 | Jul 2011 | WO |
| WO 2011153962 | Dec 2011 | WO |
| WO 2012133292 | Apr 2012 | WO |
| WO 2014107294 | Jul 2014 | WO |
| WO 2016187564 | Nov 2016 | WO |
| Entry |
|---|
| International Search Report and Written Opinion for International Application No. PCT/US2017/066348 dated May 4, 2018. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2017/066348 dated Mar. 8, 2018. |
| Hale, Fibre Optic Sensors using Adiabatically Tapered Single Mode Fibres. Dissertation submitted to the University of Cambridge. Feb. 1994. 209 pages. |
| Mogensen et al., A Microfluidic Device with an Integrated Waveguide Beam Splitter for Velocity Measurements of Flowing Particles by Fourier Transformation. Analytical Chemistry. Sep. 15, 2003;75(18):4931-4936. |
| Taitt et al., Evanescent wave fluorescence biosensors. Biosens Bioelectron. Jun. 2005;20(12):2470-87. Epub Dec. 8, 2004. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2020/030345 dated Aug. 13, 2020. |
| International Search Report and Written Opinion for International Application No. PCT/US2020/030345 dated Oct. 19, 2020. |
| Taillaert et al., Grating couplers for coupling between optical fibers and nanophotonic waveguides. Japanese Journal of Applied Physics. 2006;45(8A):6071-7. |
| PCT/US2020/030345, Aug. 13, 2020, Invitation to Pay Additional Fees. |
| PCT/US2020/030345, Oct. 19, 2020, International Search Report and Written Opinion. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2016/033576 dated Aug. 24, 2016. |
| International Search Report and Written Opinion for International Application No. PCT/US2016/033576 dated Nov. 4, 2016. |
| International Preliminary Report on Patentability for International Application No. PCT/US2016/033576 dated Nov. 30, 2017. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2016/033585 dated Sep. 21, 2016. |
| International Search Report and Written Opinion for International Application No. PCT/US2016/033585 dated Nov. 11, 2016. |
| International Preliminary Report on Patentability for International Application No. PCT/US2016/033585 dated Nov. 30, 2017. |
| International Preliminary Report on Patentability for International Application No. PCT/US2017/066348 dated Jun. 27, 2019. |
| International Search Report and Written Opinion for International Application No. PCT/US2017/066878 dated Mar. 15, 2018. |
| International Preliminary Report on Patentability for International Application No. PCT/US2017/066878 dated Jun. 27, 2019. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2019/037354 dated Sep. 25, 2019. |
| International Search Report and Written Opinion for International Application No. PCT/US2019/037354 dated Nov. 19, 2019. |
| International Preliminary Report on Patentability for International Application No. PCT/US2019/037354 dated Dec. 24, 2020. |
| Invitation to Pay Additional Fees for International Application No. PCT/US2021/013320 dated May 10, 2021. |
| International Search Report and Written Opinion for International Application No. PCT/US2021/013320 dated Jul. 1, 2021. |
| [No Author Listed] Semiconductor Components Industries, LLC, MC10EP05, MC100EP05. 3.3V/5V ECL 2-input differential and/nand. Aug. 2008. 11 Pages. |
| Araki et al., An ultraviolet nanosecond light pulse generator using a light emiting diode for test of photodetectors. Rev. Sci. Instr. Mar. 1997;68:1364-8. |
| Binh et al., A simple sub-nanosecond ultraviolet light pulse generator with high repetition rate and peak power. Rev. Sci. Instr. 2013;84:083102.1-083102.5. |
| Champak et al., Ultrafast pulse generation in a mode-locked Erbium chip waveguide laser. Opt. Express 24. 2016. 8 pages. |
| Huang et al., Gene expression analysis with an integrated CMOS microarray by time-resolved fluorescence detection. Biosensors and Bioelectronics. 2012;26(5):2660-5. |
| Huang et al., Slab-coupled Optical Waveguide Lasers Emerge from a Multimode Sea. www.photonics.com, Oct. 2006. 10 Pages. |
| Kwon et al., Ultrashort stretched-pulse L-band laser using carbon-nanotube saturable absorber. Opt. Express 23, 7779-7785. 2015. |
| Lu et al., Terahertz Microchip for Illicit Drug Detection. IEEE Photonics Technology Letters. 2006;18(21):2254-6. |
| Pfeufer et al., A ddT ddA ddG ddC Length-sorted strands fow through a capillary Detector Final output Focused laser beam Fluorescence Fluorescently teminated oligonucleotides Original DNA strand Genetics/DNA Sequencing. 2015;24-7. |
| Sauer et al., Time-Resolved Identification of Individual Mononucleotide Molecules in Aqueous Solution with Pulsed Semiconductor Lasers. Bioimaging, Institute of Physics. 1998;6(1):14-24. |
| Uhring et al., A low-cost high-repetition-rate picosecond laser diode pulse generator. Optical Sensing II. 2004;5452:583-90. |
| Villafana-Rauda et al., Dynamics of a Q-switched Nd: YVO4/Cr: YAG laser under periodic modulation. Results in Physics. Mar. 1, 2019;12:908-13. |
| Zhang et al., Square-wave pulse with ultra-wide tuning range in a passively mode-locked fiber laser. Optics letters. Apr. 15, 2012;37(8):1334-6. |
| U.S. Appl. No. 16/751,135, filed Jan. 23, 2020, Rothberg et al. |
| U.S. Appl. No. 16/277,113, filed Feb. 15, 2019, Rothberg et al. |
| U.S. Appl. No. 16/362,830, filed Mar. 25, 2019, Rothberg et al. |
| U.S. Appl. No. 16/442,206, filed Jun. 14, 2019, Rothberg et al. |
| PCT/US2017/066348, May 4, 2018, International Search Report and Written Opinion. |
| PCT/US2017/066348, Mar. 8, 2018, Invitation to Pay Additional Fees. |
| U.S. Appl. No. 15/161,088, filed May 20, 2016, Rothberg et al. |
| U.S. Appl. No. 15/255,624, filed Sep. 2, 2016, Rothberg et al. |
| U.S. Appl. No. 15/161,067, filed May 20, 2016, Rothberg et al. |
| U.S. Appl. No. 15/842,720, filed Dec. 14, 2017, Rothberg et al. |
| U.S. Appl. No. 15/844,469, filed Dec. 15, 2017, Rothberg et al. |
| U.S. Appl. No. 16/916,277, filed Jun. 30, 2020, Rothberg et al. |
| U.S. Appl. No. 16/861,399, filed Apr. 29, 2020, Schmid et al. |
| Number | Date | Country | |
|---|---|---|---|
| 20200124864 A1 | Apr 2020 | US |
| Number | Date | Country | |
|---|---|---|---|
| 62435679 | Dec 2016 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 15842720 | Dec 2017 | US |
| Child | 16721611 | US |
