Composite seal member for semiconductor production apparatus

Abstract

Description

1. Composite seal member for semiconductor production apparatus

1.1 : Perspective

1.2 : Front

1.3 : Back

1.4 : Left

1.5 : Right

1.6 : Top

1.7 : Bottom

1.8 : Cross-sectional

1.9 : Partial enlargement of cross-sectional view 1.8

1.10 : Reference

The present article is a composite seal member for semiconductor production apparatuses, such as chemical vapor deposition apparatuses and dry etching apparatuses; as illustrated in the reproduction 1.10, the article is composed of a first component formed of rubber occupying a major part of the article and a second component formed of a synthetic resin, and is to be inserted into the groove of a semiconductor production apparatus; the semiconductor production apparatus itself forms no part of the claimed design; the reproduction 1.8 shows a transverse cross-sectional front view taken along the horizontal center of the reproduction 1.6; and the reproduction 1.9 is an enlarged view showing a left end portion of the cross-sectional view 1.8.

The broken lines shown in Reproduction 1.10 are for the purposes of illustrating environmental structure and form no part of the claimed design.

Claims

The ornamental design for a composite seal member for semiconductor production apparatus, as shown and described.