COMPOSITION FOR FORMING COLORED SILICA-BASED COATING

Abstract

Compositions for forming colored silica-based coatings are provided that are adapted for forming colored layers in order to conceal pattern shapes made on semiconductor elements. The compositions for forming colored silica-based coatings comprise a siloxane polymer, a colorant and a solvent. The siloxane polymer is preferably a ladder-type siloxane polymer.

Description

Claims

1. A composition for forming colored silica-based coatings, comprising a siloxane polymer, a colorant and a solvent.

2. The composition according to claim 1, wherein the siloxane polymer comprises a hydrolysis product and/or a partial condensate of at least one silane compound expressed by the formula (1) below: RnSiX4-n  (1)in which each R represents independently a hydrogen atom or a monovalent organic group, X represents a hydrolyzable group, n is an integer of 0 to 2 and plural Rs may be identical or different from each other.

3. The composition according to claim 1, wherein the siloxane polymer is a ladder-type siloxane polymer.

4. The composition according to claim 1, wherein the group expressed by the formula below is attached to an Si atom of the siloxane polymer.

5. The composition according to claim 3, wherein the ladder-type siloxane polymer contains constitutional units expressed by formulas (a) and (b).

6. The composition according to claim 1, wherein the colorant is a black pigment.

7. The composition according to claim 1, wherein the solvent contains at least one selected from the group consisting of propyleneglycol monomethyletheracetate, 3-methoxybutylacetate, n-butanol, methylethylketone, acetone, butylacetate and propyleneglycol dimethylether.

8. The composition according to claim 1, wherein the composition further comprises a dispersant.