Number | Name | Date | Kind |
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3986200 | Allison | Oct 1976 | |
4214478 | Lauterbach | Jul 1980 | |
4304130 | Peter et al. | Dec 1981 | |
4412449 | Eiermann et al. | Nov 1983 | |
4472239 | Johnson et al. | Sep 1984 | |
4501144 | Higashi et al. | Feb 1985 | |
4511878 | Shimada et al. | Apr 1985 | |
4548078 | Bohrer et al. | Oct 1985 | |
4581928 | Johnson | Apr 1986 | |
4600934 | Aine et al. | Jul 1986 |
Entry |
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Fabrication of Novel 3-D Microstructures by Anisotropic Etching of (100) & (110) Silicon, IEEE Transactions on Electron Devices, vol. ED-25, No. 10 (10/78), Ernest Bassous. |