Number | Name | Date | Kind |
---|---|---|---|
1972054 | Moller | Aug 1934 | |
2709365 | Piety | May 1955 | |
3149941 | Barnitz et al. | Sep 1964 | |
3251225 | Luft | May 1966 | |
3559482 | Baker et al. | Feb 1971 | |
3971247 | Rodder | Jul 1976 | |
4041757 | Baker et al. | Aug 1977 | |
4222277 | Kurtz et al. | Sep 1980 | |
4471647 | Jerman et al. | Sep 1984 | |
4491024 | Miller, Jr. | Jan 1985 |
Entry |
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Angell et al., "Silicon Micromechanical Devices" in Scientific America, 4/83, pp. 44-55. |