CONDITIONING ASSEMBLY AND DRESSING DEVICE THEREOF

Abstract

A conditioning assembly and a dressing device thereof are provided. The dressing device includes a metallic porous structural body, a plurality of abrasive particles, and a brazing filler metal. The plurality of abrasive particles are dispersed and embedded onto the metallic porous structural body, and each of the abrasive particles is partially exposed on the metallic porous structural body. The brazing filler metal fills and penetrates into the metallic porous structural body, and the brazing filler metal bonds with the metallic porous structural body and the plurality of abrasive particles. The materials that constitute the metallic porous structural body and the brazing filler metal have at least one common constituent element.

Description

FIELD OF THE DISCLOSURE

The present disclosure relates to a conditioning assembly and a dressing device thereof, and more particularly to a conditioning assembly and a dressing device thereof suitable for dressing polishing pads.

BACKGROUND OF THE DISCLOSURE

In the chemical-mechanical polishing (CMP) process or high-precision polishing processes, polishing pads are typically used in conjunction with polishing liquids to polish surfaces of processed objects such as semiconductor wafers, optical components or glass. Generally, the surfaces of the polishing pads are conditioned by a conditioner that use abrasive layers to remove waste remaining on the polishing pads during the polishing process, thereby restoring the roughness of the polishing pads to maintain the stability of the polishing quality.

In the existing process of making the abrasive layers, a plurality of abrasive particles are fixed onto a working surface of a substrate with brazing filler metals through high-temperature brazing. However, since the brazing filler metals boil and vaporize at a high temperature of about 1000° C., the abrasive particles are affected by the boiling of the brazing filler metals to constantly move or flip, thereby resulting in inconsistent heights at which the abrasive particles are fixed on the working surface, and affecting the quality and efficiency of the conditioner. In addition, during the cooling process of high-temperature brazing, the different thermal expansion coefficients of the materials (i.e. the abrasive particles, the brazing filler metals, and the substrate) can easily cause cracks in the brazing filler metals, causing the abrasive particles to fall off or the processed object (e.g., the wafer) to be scratched during the dressing process of the polishing pad.

In addition, in the related art, high molecular polymers, such as epoxy resin, are also used to bind abrasive particles to the substrate. However, the materials that compose the epoxy resin, the substrate (e.g., stainless steel), and the abrasive particles (e.g., diamonds) are different and have low compatibility. Therefore, during the bonding process or the polishing process after bonding, the abrasive particles can easily fall off due to insufficient bonding force, so as to affect the polishing quality and shortening the service life of the conditioner.

SUMMARY OF THE DISCLOSURE

In response to the above-referenced technical inadequacies, the present disclosure provides a conditioning assembly and a dressing device thereof, which can maintain consistent heights at which the abrasive particles are fixed on the working surface, and can also enhance the structural strength and extend the service life.

In order to solve the above-mentioned problems, one of the technical aspects adopted by the present disclosure is to provide a dressing device, which includes a metallic porous structural body, a plurality of abrasive particles, and a brazing filler metal. The plurality of abrasive particles are dispersed and embedded onto the metallic porous structural body, and each of the abrasive particles is partially exposed on the metallic porous structural body. The brazing filler metal fills and penetrates into the metallic porous structural body, and the brazing filler metal bonds with the metallic porous structural body and the plurality of abrasive particles. The materials that constitute the metallic porous structural body and the brazing filler metal have at least one common constituent element.

In order to solve the above-mentioned problems, another one of the technical aspects adopted by the present disclosure is to provide a conditioning assembly, which includes a base body and a dressing device. The dressing device is disposed on the base body.

Therefore, in the conditioning assembly and the dressing device thereof provided by the present disclosure, by virtue of “the brazing filler metal filling and penetrating into the metallic porous structural body, and the brazing filler metal bonding with the metallic porous structural body and the plurality of abrasive particles,” and “the materials that constitute the metallic porous structural body and the brazing filler metal having at least one common constituent element,” the heights of the abrasive particles fixed on the metallic porous structural body can be consistent, the abrasive particles can prevent cracks from occurring after brazing, the structural strength of the dressing device can be strengthened, and the service life of the dressing device can be extended.

These and other aspects of the present disclosure will become apparent from the following description of the embodiment taken in conjunction with the following drawings and their captions, although variations and modifications therein may be affected without departing from the spirit and scope of the novel concepts of the disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The described embodiments may be better understood by reference to the following description and the accompanying drawings, in which:

FIG. 1 is a schematic view of a dressing device according to an embodiment of the present disclosure;

FIG. 2 is schematic view of a conditioning assembly according to the embodiment of the present disclosure;

FIG. 3 and FIG. 4 are schematic views of steps S11 to S15 of a manufacturing method of the conditioning assembly according to the embodiment of the present disclosure;

FIG. 5 and FIG. 6 are schematic views of steps S10 to S14 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure;

FIG. 7 is a flowchart of steps S1 to S4 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure;

FIG. 8 is a flowchart of steps S11 to S15 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure;

FIG. 9 is a flowchart of steps S10 to S14 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure; and

FIG. 10 is a scanning electron microscope photograph of a partial area of the dressing device according to the embodiment of the present disclosure.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

The present disclosure is more particularly described in the following examples that are intended as illustrative only since numerous modifications and variations therein will be apparent to those skilled in the art. Like numbers in the drawings indicate like components throughout the views. As used in the description herein and throughout the claims that follow, unless the context clearly dictates otherwise, the meaning of “a,” “an” and “the” includes plural reference, and the meaning of “in” includes “in” and “on.” Titles or subtitles can be used herein for the convenience of a reader, which shall have no influence on the scope of the present disclosure.

The terms used herein generally have their ordinary meanings in the art. In the case of conflict, the present document, including any definitions given herein, will prevail. The same thing can be expressed in more than one way. Alternative language and synonyms can be used for any term(s) discussed herein, and no special significance is to be placed upon whether a term is elaborated or discussed herein. A recital of one or more synonyms does not exclude the use of other synonyms. The use of examples anywhere in this specification including examples of any terms is illustrative only, and in no way limits the scope and meaning of the present disclosure or of any exemplified term. Likewise, the present disclosure is not limited to various embodiments given herein. Numbering terms such as “first,” “second” or “third” can be used to describe various components, signals or the like, which are for distinguishing one component/signal from another one only, and are not intended to, nor should be construed to impose any substantive limitations on the components, signals or the like.

Embodiments

Reference is made to FIG. 1. FIG. 1 is a schematic view of a dressing device according to an embodiment of the present disclosure. The present disclosure provides a dressing device M, which includes a metallic porous structural body 1, a plurality of abrasive particles 2, and a brazing filler metal 3. The plurality of abrasive particles 2 are dispersed and embedded onto the metallic porous structural body 1, and each of the abrasive particles 2 is partially exposed on the metallic porous structural body 1.

For example, the materials that constitute the metallic porous structural body 1 include nickel, iron, copper, titanium, stainless steel, nickel alloy, iron alloy, copper alloy, or titanium alloy. Moreover, the metallic porous structural body 1 can be a mesh structure, a foam structure, a fiber structure or a fin structure. In another preferred embodiment, the materials that constitute the metallic porous structural body 1 can be made of nickel or an alloy thereof with a foamed structure, such as foamed nickel. In other embodiments, the materials that constitute the metallic porous structural body 1 can also be made of foamed titanium, foamed stainless steel, or nickel fiber. In addition, the metallic porous structural body 1 can be a single-layer structure or a multi-layer structure, but the present disclosure is not limited thereto.

The manufacturing method of the metallic porous structural body 1 is not limited in the present disclosure. For example, the metallic porous structural body 1 can be produced by powder metallurgy, hot extrusion, molten metal method, electroplating, electrochemical deposition, or casting. Outer surfaces (e.g., a first surface 11 and a second surface 12 as shown in FIG. 1) and interior of the metallic porous structural body 1 have a plurality of through holes 10, and the plurality of abrasive particles 2 are embedded into the plurality of through holes 10. A quantity of the through holes 10 is not limited in the present disclosure. In addition, average apertures of the through holes 10 range from 50 μm to 500 μm.

The plurality of through holes 10 are distributed inside the metallic porous structural body 1 and on the outer surfaces (i.e., the first surface 11 and the second surface 12) of the metallic porous structural body 1. At least part of the through holes 10 are interconnected with each other to form at least one channel, and the at least one channel can extend from the outer surfaces to the interior.

The brazing filler metal 3 fills and penetrates into the metallic porous structural body 1, bonding with the metallic porous structural body 1 and the plurality of abrasive particles 2. The material of the brazing filler metal 3 includes metal alloy, preferably, for example, nickel-based alloy (BNi-2). In addition, it should be noted that the brazing filler metal 3 penetrates into the metallic porous structural body 1 in a molten state, and then is cooled and solidified to bond with the abrasive particles 2 and the metallic porous structural body 1. The abrasive particles 2 can include, for example, single crystal diamond, polycrystalline diamond, polycrystalline diamond (PCD), CVD diamond, diamond, cubic boron nitride (cBN) particles, silicon carbide particles, or any combination thereof. The brazing filler metal 3 can be a mixture of resin and solder pieces, solder paste, or solder powder. The form of the brazing filler metal 3 is not limited in the present disclosure.

In the present disclosure, the material that constitute the metallic porous structural body 1 (e.g., foamed nickel) and the material that constitute the brazing filler metal 3 (e.g., nickel-based alloy) have at least one common constituent element. Therefore, the metallic porous structural body 1 and the brazing filler metal 3 have high compatibility and good wettability. The brazing filler metal 3 that penetrates into the metallic porous structural body 1 can achieve a good bonding effect with the metallic porous structural body 1, and the thermal expansion coefficient of the metallic porous structural body 1 are similar to that of the brazing filler metal 3. Furthermore, the brazing filler metal 3 generally contains active metal elements such as titanium (Ti), chromium (Cr), vanadium (V), zirconium (Zr), molybdenum (Mo), tungsten (W). In the present disclosure, the brazing filler metal 3 is BNi-2 nickel-based filler metal, which has chemical composition that includes nickel (Ni), chromium (Cr), boron (B), and silicon (Si). The brazing filler metal 3 can chemically react with the metallic porous structural body 1 and the abrasive particles 2 to form intermetallic compounds (IMC), enhancing interfacial bonding strength and thereby strengthening chemical bonding between the metallic porous structural body 1 and the brazing filler metal 3.

In the related art, the brazing filler metal can form the intermetallic compounds when being combined with the abrasive particles. The intermetallic compounds have high hardness and brittleness. However, the intermetallic compounds are easy to crack during the brazing process due to significant differences in the thermal expansion coefficients. To address the problems in the related art, in the present disclosure, the metallic porous structural body 1 is added into the dressing device M, and the brazing filler metal 3 is selected to have at least one common constituent element (with similar thermal expansion coefficients) with the metallic porous structural body 1, so as to facilitate chemical bonding between the brazing filler metal 3 and the metallic porous structural body 1, thereby preventing the brazing filler metal 3 from cracking and causing the abrasive particles 2 to peel off, and further enhancing the structural strength of the dressing device M.

Furthermore, the nickel-based filler metal has better wettability and adhesion, which can effectively secure diamonds onto the metallic porous structural body 1, forming reliable chemical bonding between the metal and diamonds at high temperatures and achieving strong adhesion. In addition, the nickel-based filler metal has excellent corrosion resistance and wear resistance, which can enhance the bonding strength between the diamonds and the metallic porous structural body 1, maintaining stability at a wide temperature range.

Moreover, the plurality of abrasive particles 2 embedded into the plurality of through holes 10 are partially covered by the metallic porous structural body 1. As shown in FIG. 1, between one of the abrasive particles 2 and corresponding one of the through holes 10 in which it is embedded, the abrasive particle 2 has a maximum cross-sectional area 2A that is parallel to the first surface 11 of the metallic porous structural body 1, and a cross-sectional area 10A of a space occupied by the through hole 10 is less than the maximum cross-sectional area 2A. Specifically, a widest part of the abrasive particle 2 (i.e., a part with the maximum cross-sectional area 2A) is embedded within the metallic porous structural body 1, causing the metallic porous structural body 1 to cover the abrasive particle 2, thereby enhancing the bonding strength between the abrasive particle 2 and the metallic porous structural body 1.

The metallic porous structural body 1 of the present disclosure is a compressed metallic porous structural body that includes a plurality of overlapping pore regions (not shown in the figures) inside. Therefore, the metallic porous structural body 1 (i.e., the compressed metallic porous structural body) has a porosity after compression, referred to as a compressed porosity. The compressed porosity is defined as a volume ratio of the plurality of overlapping pore regions to the metallic porous structural body 1 without any through holes (i.e., the through holes are filled by the material of the metallic porous structural body 1). In a preferred embodiment, the compressed porosity is less than 50%. Through the design of the compressed porosity of the metallic porous structural body 1 being less than 50%, capillary phenomenon can occur within the metallic porous structural body 1, allowing the brazing filler metal 3 to penetrate into the metallic porous structural body 1 through the plurality of through holes 10 via capillary action and fill the interior of the metallic porous structural body 1 to bond with the abrasive particles 2, such that the abrasive particles 2 are firmly bonded to the metallic porous structural body 1, and the abrasive particles 2 do not fall off during the subsequent use of the dressing device M and reduces the risk of cracking of the brazing filler metal 3 due to thermal stress.

Typically, an uncompressed metallic porous structural body has a higher porosity. Generally, a metallic porous structural body with 110 PPI (PPI refers to an average number of the pores per inch of length) has a porosity of about 80% to 95%. Excessively high porosity indicates that the metallic porous structural body has too many through holes and that the apertures of the through holes are too large, resulting in the solid structural part of the metallic porous structural body being too sparse. Therefore, if the abrasive particles are to be secured in the metallic porous structural body, the abrasive particles are likely to fall directly into the interior of the metallic porous structural body instead of being secured on the surface of the metallic porous structural body. In other words, the metallic porous structural body such as foamed nickel with excessively high porosity is unsuitable for securing the abrasive particles. Instead, the metallic porous structural body need to be compressed.

Uncompressed foamed nickel is taken as an example of the metallic porous structural body. The uncompressed foamed nickel is assumed to have an initial thickness of 2 mm and an initial porosity Ø of 95%. If the foamed nickel with an initial thickness h of 2 mm is compressed to a compressed thickness h′ of 0.2 mm, the compressed porosity Ø′ of the compressed foamed nickel can be calculated as follows.

A cross-sectional area A′ of the foamed nickel is assumed to remain unchanged before and after compression. A volume compression ratio (a volume ratio of the uncompressed foamed nickel to the compressed foamed nickel) is calculated as follows: (V′/V)=(A′×h′)/(A′×h)=(0.2/2)=0.1.

Therefore, the total volume V′ of the compressed foamed nickel is 10% of the total volume V of the uncompressed foamed nickel.

On the other hand, the total volume V of the uncompressed foamed nickel includes a volume of the pores Vp and a volume Vs of the solid part, and Vp and Vs meet the following relationships: Vp=Ø×V=0.95×V; and Vs=V−Vp=V−0.95V=0.05V.

Therefore, the total volume V′ of the compressed foamed nickel is 10% of the total volume V of the uncompressed foamed nickel, which can be expressed as: V′=0.1V.

During the compression process, a volume Vs' of the solid part of the compressed foamed nickel remains unchanged, which is the same as a volume Vs of the solid part of the uncompressed foamed nickel. Therefore, a volume Vp′ of the pores of the compressed foamed nickel is calculated as follows: Vp′=V′−Vs'=0.1V−0.05V=0.05V.

The compressed foamed nickel has a compressed porosity Ø′, calculated as follows: Ø′=Vp′/V′=0.05V/0.1V=0.5.

Therefore, when the thickness of the foamed nickel is compressed from 2 mm to 0.2 mm, the porosity is reduced to 50%.

Through the structural design of the metallic porous structural body 1, the heights of the exposed portions of the plurality of abrasive particles 2 can be maintained consistently when the plurality of abrasive particles 2 are fixed in the through holes 10 of the metallic porous structural body 1, allowing the metallic porous structural body 1 to have a grinding surface of uniform height. Specifically, the portions of the abrasive particles 2 exposed outside the metallic porous structural body 1 jointly form the grinding surface. Each of the abrasive particle 2 has a cutting tip 2T, and a vertical height difference between any two cutting tips 2T does not exceed 20 μm.

In addition, in the present disclosure, a flatness of the surface of the metallic porous structural body 1 is less than 50 μm. The definition of the flatness of the surface of the metallic porous structural body 1 is an average height difference between ten highest points on the surface. When the flatness exceeds 50 μm, the range of coverage of the abrasive particles 2 embedded in the through holes 10 by the metallic porous structural body 1 varies by too much, such that the height of the exposed portions of the abrasive particles 2 is difficult to control, which affects the quality of the grinding structural member M.

Reference is made to FIG. 2. FIG. 2 is schematic view of a conditioning assembly according to the embodiment of the present disclosure. The present disclosure provides a conditioning assembly D, which includes a base body 4 and a grinding structural member M that is disposed on the base body 4. The materials that constitute the base body include stainless steel, metal alloy, ceramic material, or engineering plastic (e.g., polyimide (PI) or polypropylene (PP)). In a preferred embodiment, the base body 4 is made of stainless steel, such as SUS316 or SUS304, both of which contain a certain proportion of nickel. In other words, the material constituting the base body 4 (e.g., stainless steel) has at least one common constituent element with the materials constituting the metallic porous structural body 1 (e.g., foamed nickel) and the brazing filler metal 3 (e.g., nickel-based alloy), thereby having similar thermal expansion coefficients to enhance the structural stability of the conditioning assembly D and reduce the risk of the metallic porous structural body 1 detaching from the base body 4. Furthermore, the conditioning assembly D further includes an adhesive 5. The adhesive 5 is disposed between the base body 4 and the grinding structural member M to bond them together.

The specific size or implementation of the conditioning assembly D is not limited in the present disclosure. For example, the conditioning assembly D can be used as a single unit as a conditioner. Alternatively, in another embodiment, a quantity of the conditioning assembly D can be multiple, which are arranged separately on a base (not shown in the figures) to form a conditioner. Alternatively, in another embodiment, the multiple conditioning assemblies D can be arranged around a center of the base to form a modular conditioner. Alternatively, in another embodiment, the multiple conditioning assemblies D can also be arranged in a matrix on the base to form a modular conditioner.

The adhesive 5 can be, for example, a brazing filler metal or a polymer adhesive (e.g., epoxy resin). When the adhesive 5 is the brazing filler metal and melts, a part of the brazing filler metal penetrates into the metallic porous structural body 1 via capillary action, while another part of the brazing filler metal is used to bond the base body 4 and the grinding structural member M. Furthermore, when the base body 4, the metallic porous structural body 1, and brazing filler metal 3 have the same constituent elements, the advantages are provided as follows:

• • (1) The same constituent elements allow for better compatibility between the brazing filler metal 3 and the base body 4, facilitating more uniform fusion welding and better welding results, reducing the occurrence of cracks or crystallization after welding.
  • (2) The same constituent elements can promote atomic diffusion at the welding interface between the brazing filler metal 3 and the base body 4, enhancing welding strength and stability.

On the other hand, in the embodiment of the adhesive 5 being a polymer adhesive, when the grinding structural member M is bonded to the base body 4 through the adhesive 5 by an external pressure, the polymer adhesive can reduce the occurrence of thermal deformation in the base body 4, further enhancing the structural stability of the conditioning assembly D. It should be noted that a melting point of the metallic porous structural body 1 is at least 100° C. higher than a melting point of the brazing filler metal 3, preventing the brazing filler metal 3 from changing the composition ratio when penetrating the metallic porous structural body 1, and ensuring that the rigidity of the metallic porous structural body 1 can be retained during the brazing process, so as to prevent the occurrence of cracks.

Reference is further made to FIGS. 1, 2, and 7. FIG. 7 is a flowchart of steps S1 to S4 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure. The present disclosure provides a method for manufacturing a conditioning assembly, which includes at least steps S1, S2, S3, and S4:

In step S1, a plurality of abrasive particles 2 are embedded into a surface of a metallic porous structural body 1, and each of the abrasive particles 2 is partially exposed on the surface (i.e., the first surface 11).

In step S2, a brazing filler metal 3 is disposed on another surface of the metallic porous structural body 1 (i.e., the second surface 12).

In step S3, a brazing process is performed to melt the brazing filler metal 3, causing it to penetrate into the metallic porous structural body 1 and bond with the metallic porous structural body 1 and the plurality of abrasive particles 2 to form a grinding structural member M.

In step S4, a base body 4 and an adhesive 5 are provided, and the adhesive 5 is used to bond the base body 4 and the grinding structural member M.

Reference is made to FIGS. 3, 4, and 8. FIG. 3 and FIG. 4 are schematic views of steps S11 to S15 of a manufacturing method of the conditioning assembly according to the embodiment of the present disclosure, and FIG. 8 is a flowchart of steps S11 to S15 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure. The step S1 of the plurality of abrasive particles 2 being embedded into the surface of the metallic porous structural body 1 further includes steps S11, S13, and S15, which are as follows:

In step S11, the plurality of abrasive particles 2 are disposed on the surface of the metallic porous structural body 1.

In step S13, a rigid platform 6 with a plurality of grooves 60 is provided to cover the plurality of abrasive particles 2, such that the plurality of abrasive particles 2 are disposed in the plurality of grooves 60, respectively.

In step S15, the rigid platform 6 and the metallic porous structural body 1 are extruded with each other, such that the plurality of abrasive particles 2 is pressed into the metallic porous structural body 1, and the metallic porous structural body 1 is compressed and deformed.

Specifically, in FIG. 3, the plurality of abrasive particles 2 are laid on the first surface 11 of the metallic porous structural body 1 (i.e., part K1 in FIG. 3), and the metallic porous structural body 1 is a deformable porous mesh structure or a foamed structure. The material and structural composition details of the metallic porous structural body 1 have been described earlier and are not repeated herein. Then, the rigid platform 6 is provided to cover the plurality of abrasive particles 2 (i.e., parts K2 and K3 in FIG. 3), and the plurality of abrasive particles 2 is disposed on a carrier P. A surface of the rigid platform 6 has a plurality of protruding portions 61, and the plurality of grooves 60 are formed between the plurality of protruding portions 61. The number of grooves 60 corresponds to the number of abrasive particles 2. The material of the protruding portions 61 can be, for example, metal, ceramic, or deformable polymer materials, and the present disclosure is not limited thereto.

In addition, the way of forming the grooves 60 and the protruding portions 61 is not limited in the present disclosure. For example, the protruding portions 61 can be added to the surface of the rigid platform 6 by using spacers, and cavities formed through the spacers are the grooves 60. Alternatively, the protruding portions 61 can be directly processed from the surface of the rigid platform 6 to form the grooves 60, and protrusions on both sides of the grooves 60 are the protruding portions 61. When the rigid platform 6 covers the plurality of abrasive particles 2, the plurality of abrasive particles 2 are respectively disposed in the plurality of grooves 60 (each of the grooves 60 can only accommodate one abrasive particle 2).

In another embodiment, a flat structure (not shown in the figures) that is made of a deformable polymer material can be placed on the surface of the rigid platform 6. The flat structure faces the plurality of abrasive particles 2. When the rigid platform 6 presses the plurality of abrasive particles 2 into the plurality of through holes 10 of the metallic porous structural body 1, the protruding portions 61 abut against the plurality of abrasive particles 2 and are compressed. During compression, the flat structure is extruded by the cutting tips 2T of the abrasive particles 2 to be deformed and to form the plurality of grooves 60, and the protrusions on both sides of the grooves 60 form the protruding portions 61.

In FIG. 4, the rigid platform 6 is pressed down to compress the metallic porous structural body 1, a part of the plurality of abrasive particles 2 is pressed into the plurality of through holes 10 of the metallic porous structural body 1, while another part of the plurality of abrasive particles 2 remains exposed. In other words, the metallic porous structural body 1 can secure the abrasive particles 2 through the plurality of through holes 10. The compressed metallic porous structural body 1 has an overlapping porosity of less than 50% and a thickness of less than 2 mm. Furthermore, the height difference between any two abrasive particles 2 does not exceed 20 μm. Therefore, the plurality of abrasive particles 2 are nearly of equal height.

Furthermore, in the present disclosure, the depth of the grooves 60 can be adjusted by changing the height of the protruding portions 61. The depth of the groove 60 is the height of the exposed parts of the plurality of abrasive particles 2, and the exposed parts of the plurality of abrasive particles 2 constitute the grinding surface of the conditioning assembly D. After the plurality of abrasive particles 2 are disposed on the first surface 11 of the compressed metallic porous structural body 1, a layer of brazing filler metal 3 is disposed on the second surface 12 of the compressed metallic porous structural body 1, and the compressed metallic porous structural body 1 is placed in a vacuum furnace for brazing. As shown in FIG. 4, the brazing filler metal 3 is placed downward for sintering.

The brazing filler metal 3 during the brazing process, whether positioned above or below the metallic porous structural body 1, is not limited in the present disclosure. For example, in FIG. 4, the brazing filler metal 3 is placed below the metallic porous structural body 1 or the abrasive particles 2. In other embodiments, the brazing filler metal 3 can be placed above the metallic porous structural body 1 or the abrasive particles 2. As shown in FIG. 6, the brazing filler metal 3 is placed facing upward for sintering. Whether the brazing filler metal 3 is above or below the metallic porous structural body 1, since the metallic porous structural body 1 is in a vacuum environment inside the vacuum furnace, the brazing filler metal 3 can melt and penetrate into the metallic porous structural body 1 through the plurality of through holes 10 via capillary action.

The arrangement of the abrasive particles 2 and the protruding portions 61 are not limited in the present disclosure. For example, in part K2 of FIG. 3, the positions of the abrasive particles 2 and the protruding portions 61 can be swapped. That is, the abrasive particles 2 are disposed on the rigid platform 6, and a viscous material (such as spray adhesive or double-sided tape) can be provided on the surface of the rigid platform 6 for allowing the abrasive particles 2 to adhere to the surface of the rigid platform 6. Moreover, the protruding portions 61 are disposed on the first surface 11 of the metallic porous structural body 1, allowing the grooves 60 to form between the protruding portions 61 that are located on the metallic porous structural body 1.

The abrasive particles 2 and the protruding portions 61 can be arranged on a same carrier. For example, in part K2 of FIG. 3, the protruding portions 61 can be disposed on the rigid platform 6, while the abrasive particles 2 are disposed in the grooves 60 between the protruding portions 61. A viscous material (such as spray adhesive or double-sided tape) can be provided inside of the grooves 60 for allowing the abrasive particles 2 to adhere in the grooves 60. Alternatively, the protruding portions 61 are disposed on the first surface 11 of the metallic porous structural body 1, and the abrasive particles 2 are disposed in the grooves 60 between the protruding portions 61, and viscous materials are disposed in the grooves 60.

The sequence of movement between the rigid platform 6 and the metallic porous structural body 1 is not limited in the present disclosure. For example, the rigid platform 6 is moved downward to compress the metallic porous structural body 1. Alternatively, the rigid platform 6 remains stationary, while the metallic porous structural body 1 moves upward, extruding the abrasive particles 2 into the grooves 60 of the rigid platform 6, causing the abrasive particles 2 to be embedded into the metallic porous structural body 1, and resulting in the compression and deformation of the metallic porous structural body 1. Furthermore, the positioning relationship in a vertical direction between the rigid platform 6 and the metallic porous structural body 1 is not limited in the present disclosure. For example, the positions of the rigid platform 6 and the metallic porous structural body 1 can be swapped in a top-bottom direction.

Then, as shown in FIGS. 1 and 2, during the brazing process, the metallic porous structural body 1 is in the vacuum environment, and is compressed to have an overlapping porosity of less than 50%. Therefore, the melted brazing filler metal 3 penetrates into the metallic porous structural body 1 through the plurality of through holes 10 via capillary action and fills the interior of the metallic porous structural body 1 to bond with the abrasive particles 2, such that the abrasive particles 2 are firmly bonded to the metallic porous structural body 1, and the abrasive particles 2 do not fall off during the subsequent use of the dressing device M and reduces the risk of cracking of the brazing filler metal 3 due to thermal stress.

However, the aforementioned description for the steps S11 to S15 is merely an example, and is not meant to limit the scope of the present disclosure.

Reference is made to FIGS. 5, 6, and 9. FIG. 5 and FIG. 6 are schematic views of steps S10 to S14 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure, and FIG. 9 is a flowchart of steps S10 to S14 of the manufacturing method of the conditioning assembly according to the embodiment of the present disclosure. The step S1 of the plurality of abrasive particles 2 being embedded into the surface of the metallic porous structural body 1 further includes steps S10, S12, and S14, which are as follows:

In step S10, a rigid platform 6 with grooves 60 is provided, and the plurality of abrasive particles 2 are disposed in the grooves 60, respectively.

In step S12, the metallic porous structural body 1 is disposed on the plurality of abrasive particles 2.

In step S14, the rigid platform 6 and the metallic porous structural body 1 are extruded with each other, such that the plurality of abrasive particles 2 are embedded into the metallic porous structural body 1, and the metallic porous structural body 1 is compressed and deformed.

Specifically, as shown in part R1 of FIG. 5, the plurality of abrasive particles 2 are disposed in the grooves 60 of the rigid platform 6, respectively. The grooves 60 can be provided a viscous material, such as spray adhesive or double-sided tape, allowing the abrasive particles 2 to adhere in the grooves 60. Then, as shown in parts R2 and R3 in FIG. 5, the metallic porous structural body 1 is disposed on the plurality of abrasive particles 2. In FIG. 6, a carrier P is provided to press down and compress the metallic porous structural body 1, such that the metallic porous structural body 1 is compressed and deformed, and the plurality of abrasive particles 2 are embedded into the plurality of through holes 10 of the metallic porous structural body 1. Similarly, the height difference between any two abrasive particles 2 does not exceed 20 μm. Therefore, the plurality of abrasive particles 2 are nearly of equal height.

More specifically, in steps S10 to S14, the plurality of abrasive particles 2 are disposed in the grooves 60 of the rigid platform 6 and are then pressed into the metallic porous structural body 1. Furthermore, the plurality of abrasive particles 2 are disposed on the second surface 12 of the metallic porous structural body 1. Afterward, a layer of brazing filler metal 3 is disposed on the first surface 11 of the metallic porous structural body 1, and the metallic porous structural body 1 is then placed in a vacuum furnace for the brazing process.

Similarly, the arrangement of the abrasive particles 2 and the protruding portions 61 are not limited in the present disclosure. For example, in part R2 of FIG. 5, the abrasive particles 2 and the protruding portions 61 are disposed on the second surface 12 of the metallic porous structural body 1. That is, the protruding portions 61 are disposed on the second surface 12 of the metallic porous structural body 1, and the abrasive particles 2 are disposed in the grooves 60 between the protruding portions 61. Moreover, viscous materials are placed in the grooves 60.

Furthermore, the abrasive particles 2 and the protruding portions 61 can be disposed on different carriers. For example, in part R2 of FIG. 5, the abrasive particles 2 are disposed on the rigid platform 6, and the surface of the rigid platform 6 can be provided a viscous material, such as spray adhesive or double-sided tape, allowing the abrasive particles 2 to adhere to the surface of the rigid platform 6. Moreover, the protruding portion 61 are disposed on the second surface 12 of the metallic porous structural body 1, allowing the grooves 60 to form in the metallic porous structural body 1. Alternatively, the abrasive particles 2 are disposed on the second surface 12 of the metallic porous structural body 1, and a viscous material can be provided on the second surface 12. The protruding portion 61 are disposed on the rigid platform 6, allowing the grooves 60 to form between the protruding portions 61 of the rigid platform 6.

In the various embodiments mentioned above, the way in which the heads of the abrasive particles 2 (i.e., the cutting tips 2T of the abrasive particles 2 in FIG. 2) are aligned on the same plane and then pressed into the metallic porous structural body 1 is called a flush-height alignment method. In addition, the way in which the bottoms of the abrasive particles 2 (i.e., the cutting tips 2T of the abrasive particles 2 are not at a same height at the beginning in part R1 of FIG. 5) are aligned on a same plane and then pressed into the metallic porous structural body 1 is called a baseline flush-height alignment method.

Then, as shown in FIGS. 1 and 2, during the brazing process, the metallic porous structural body 1 is in the vacuum environment, and the metallic porous structural body 1 has been compressed to have an overlapping porosity of less than 50%. Therefore, the melted brazing filler metal 3 can penetrate into the metallic porous structural body 1 through the plurality of through holes 10 via capillary action and fill the interior of the metallic porous structural body 1 to bond with the abrasive particles 2, such that the abrasive particles 2 are firmly bonded to the metallic porous structural body 1.

In the present disclosure, the abrasive particles 2 are pressed into the deformable metallic porous structural body 1, such that the plurality of abrasive particles 2 are firmly embedded in the plurality of through holes 10 of the metallic porous structural body 1, and the metallic porous structural body 1 can further wrap the abrasive particles 2. Moreover, the rigid platform 6 with the protruding portions 61 and the grooves 60 are utilized to adjust the height of the exposed portions of the abrasive particles 2, ensuring that the heights of the exposed portions of the plurality of abrasive particles 2 remain consistent (i.e., the vertical height difference between any two cutting tips 2T does not exceed 20 μm).

During the high-temperature brazing process, the melted brazing filler metal 3 bonds with the metallic porous structural body 1 and the plurality of abrasive particles 2 to form the dressing device M. Through the structural design of the metallic porous structural body 1, the melted brazing filler metal 3 can be prevented from boiling during the high-temperature brazing process, causing the abrasive particles 2 to move or flip, thereby leading to uneven heights of the abrasive particles 2 (i.e., excessive height differences among the exposed portions of the abrasive particles 2).

In the embodiments mentioned above, the abrasive particles 2 are disposed on the uncompressed metallic porous structural body 1 and then pressed together. However, the present disclosure is not limited thereto. In other embodiments, the deformable metallic porous structural body 1 can be compressed, and then the abrasive particles 2 can be embedded onto the metallic porous structural body 1. As such, the metallic porous structural body 1 has been compressed and lacks elasticity, the abrasive particles 2 are embedded onto the metallic porous structural body 1, such that the metallic porous structural body 1 is deformed to wrap around the abrasive particles.

Reference is made to FIG. 10. FIG. 10 is a scanning electron microscope photograph of a partial area of the dressing device according to the embodiment of the present disclosure. The microscopic photograph in FIG. 10 was taken by a digital microscope from Keyence (model VHX-2000) at a magnification of 200 times after the conditioning assembly D was completed. The digital microscope captured the front view to obtain the image shown in FIG. 10. As shown in FIG. 10, the metallic porous structural body 1 has a plurality of through holes 10 that are interconnected, and the plurality of abrasive particles 2 are firmly embedded into the through holes 10.

Beneficial Effects of the Embodiments

In the conditioning assembly D and the dressing device M thereof provided by the present disclosure, by virtue of “the brazing filler metal 3 filling and penetrating into the metallic porous structural body 1, and the brazing filler metal 3 bonding with the metallic porous structural body 1 and the plurality of abrasive particles 2,” and “the materials that constitute the metallic porous structural body 1 and the brazing filler metal 3 having at least one common constituent element,” the heights of the abrasive particles 2 fixed on the metallic porous structural body 1 can be consistent, the abrasive particles 2 can prevent cracks from occurring after brazing, the structural strength of the dressing device M can be strengthened, and the service life of the dressing device M can be extended.

In the present disclosure, chemical bonding can be generated between the brazing filler metal 3 and the abrasive particles 2. The material constituting the base body 4 (e.g., stainless steel) has at least one common constituent element with the materials constituting the metallic porous structural body 1 (e.g., foamed nickel) and the brazing filler metal 3 (e.g., nickel-based alloy), thereby having similar thermal expansion coefficients to enhance the structural stability of the conditioning assembly D and reduce the risk of the metallic porous structural body 1 detaching from the base body 4.

Through the design of the compressed porosity of the metallic porous structural body 1 being less than 50%, capillary phenomenon can occur within the metallic porous structural body 1, allowing the brazing filler metal 3 to penetrate into the metallic porous structural body 1 through the plurality of through holes 10 via capillary action and fill the interior of the metallic porous structural body 1 to bond with the abrasive particles 2, such that the abrasive particles 2 are firmly bonded to the metallic porous structural body 1, and the abrasive particles 2 do not fall off during the subsequent use of the dressing device M and reduces the risk of cracking of the brazing filler metal 3 due to thermal stress.

During the high-temperature brazing process, the melted brazing filler metal 3 bonds with the metallic porous structural body 1 and the plurality of abrasive particles 2 to form the dressing device M. Through the structural design of the metallic porous structural body 1, the heights of the exposed portions of the plurality of abrasive particles 2 can remain consistent, resulting in a grinding surface with a uniform height on the metallic porous structural body 1. Moreover, through the structural design of the metallic porous structural body 1, the melted brazing filler metal 3 can be prevented from boiling during the high-temperature brazing process, which prevents the abrasive particles 2 from moving or flipping.

The foregoing description of the exemplary embodiments of the disclosure has been presented only for the purposes of illustration and description and is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching.

The embodiments were chosen and described in order to explain the principles of the disclosure and their practical application so as to enable others skilled in the art to utilize the disclosure and various embodiments and with various modifications as are suited to the particular use contemplated. Alternative embodiments will become apparent to those skilled in the art to which the present disclosure pertains without departing from its spirit and scope.

Claims

1. A dressing device, comprising: a metallic porous structural body;a plurality of abrasive particles dispersed and embedded onto the metallic porous structural body, wherein each of the abrasive particles is partially exposed on the metallic porous structural body; anda brazing filler metal that fills and penetrates into the metallic porous structural body and that bonds with the metallic porous structural body and the plurality of abrasive particles;wherein materials that constitute the metallic porous structural body and the brazing filler metal have at least one common constituent element.

2. The dressing device according to claim 1, wherein intermetallic compounds are formed between the brazing filler metal and the metallic porous structural body, and between the brazing filler metal and the plurality of abrasive particles.

3. The dressing device according to claim 1, wherein the materials that constitute the metallic porous structural body include nickel, iron, copper, nickel alloy, iron alloy, copper alloy, titanium alloy, foamed nickel, foamed titanium, or foamed stainless steel.

4. The dressing device according to claim 1, wherein the metallic porous structural body is a compressed structure with a porosity of less than 50%.

5. The dressing device according to claim 1, wherein a melting point of the metallic porous structural body is at least 100° C. higher than a melting point of the brazing filler metal.

6. The dressing device according to claim 1, wherein the flatness of the metallic porous structural body is less than 50 μm.

7. A conditioning assembly, comprising: a base body; andthe dressing device according to claim 1, wherein the dressing device is disposed on the base body.

8. The conditioning assembly according to claim 7, wherein materials that constitute the base body include stainless steel, metal alloy, ceramic material, or engineering plastic.

9. The conditioning assembly according to claim 7, further comprising an adhesive disposed between the base body and the dressing device, wherein the adhesive is used to bond the base body and the dressing device.

10. The conditioning assembly according to claim 9, wherein the adhesive is another brazing filler metal or polymer adhesive.