This application claims priority to prior application JP 2005-116515, the disclosure of which is incorporated herein by reference.
The present invention relates to a connector suitable for connecting a semiconductor integrated circuit element, such as a microprocessor and an application specific integrated circuit (ASIC), and to a method of manufacturing the connector.
With the advancement of the semiconductor processing technology, the integration degree of the semiconductor Integrated circuit element, such as the microprocessor and the ASIC, has been increasingly improved every year. Accordingly, the number of input-output terminals of the semiconductor integrated circuit element tends to be increased. In particular, to mount a semiconductor integrated circuit element having a large number of the input output terminals on a wiring board, the Ball Grid Array (BGA) technique has been commonly used in recent years. According to the BGA technique, a semiconductor integrated circuit element is mounted on a wiring board, and the wiring board is faced by another wiring board which has input-output terminals including a plurality of solder balls. The respective solder balls are joined to corresponding pads provided on another wiring board by soldering. Currently, a frequently used pitch size between solder balls is in an approximate range of from 1 mm to 2.5 mm. If the number of the input-output terminals is increased, however, the size of the wiring board including a BGA is increased. Further, the number of the solder balls is also increased. As a result, soldering of the solder balls to the wiring board becomes difficult.
An example of this type of connecter is described in Japanese Unexamined Patent Application Publication (JP-A) No. 2001-23750. The connector will now be described with reference to
The connector includes a multilayer tube 34 of a cylindrical shape, a plurality of ring grooves 35 formed parallel to one another on a metal thin film 33 which covers a surface of the multilayer tube 34, and conductive plated layers 36 which cover respective parts of the metal thin film 33 divided by the respective ring grooves 35. The conductive plated layers 36 are interposed between a liquid crystal display 37 and a thin electronic circuit board 38. The conductive plated layers 36 are made in contact with a plurality of electrodes 37a of the liquid crystal display 37 and with a plurality of electrodes 38a of the electronic circuit board 38, respectively, and then are compressed and deformed. Thereby, the liquid crystal display 37 electrically communicates with the electronic circuit board 38.
The multilayer tube 34 has a two-layer structure, including an insulating resilient elastomer 31 of a hollow cylindrical shape, and the metal thin film 33 of a cylindrical shape formed on an outer circumferential surface of the resilient elastomer 31 by such techniques as sputtering, dry plating, wet plating, and dipping.
The thus configured connector, however, requires the resilient elastomer 31, the metal thin film 33, the ring grooves 35 formed parallel to one another on the metal thin film 33, and the conductive plated layers 36 covering the metal thin film 33, and thus has a complicated structure.
Another example of this type of connector is described in Japanese Unexamined Patent Application Publication No. 2001-176580. The connector will now be described with reference to
As illustrated in
The chip carrier 42 and the printed circuit board 56 are positioned, with the interposer 44 being interposed therebetween. Each of the connect buttons 48 forms an electrically connection between the corresponding contact pads 51 and 55. The connect buttons 48 are resilient and thus allow a certain degree of non-flatness of the electronic components, while maintaining a good electrical connection between the contact pads 51 and 55 which are arranged in the land grid arrays.
As illustrated in
As illustrated in
However, the conductive mesh or the continuous metal is not formed on an end face of the insulating layer 54. Therefore, the shielding layer 57 fails to shield the end face of the insulating layer 54.
Another example of this type of connector is described in Japanese Unexamined Patent Application Publication No. 2002-75567. The connector will now be described with reference to
As illustrated in
The electronic circuit board 60 is a printed board, for example, having a surface on which a plurality of flat electrodes 61 are juxtaposed. Meanwhile, the electronic connection member 70 is an LSI or a semiconductor package, for example, having a rear surface on which a plurality of flat electrodes 71 are juxtaposed. The upper end portion 87 and the lower end portion 88 of each of the resilient connections 89 are connected to the corresponding electrode 61 of the electronic circuit board 60 and to the corresponding electrode 71 of the electronic connection member 70, respectively.
To have the resilient connections 89 absorb a warpage or a swell of the components provided on opposite sides thereof with a small load, however, the resilient connections 89 need to be reduced in thickness. Reduction in thickness of the resilient connections 89, however, makes manufacturing of the resilient connections 89 difficult, and also makes assembly of the resilient connections 89 complicated.
Another example of this type of connector is described in Japanese Unexamined Patent Application Publication No. 2003-272789. The connector will now be described with reference to
As illustrated in
However, to fix the conductive rubbers 91 in the through-holes 93, each of the through-holes 93 needs to be larger in diameter than the corresponding conductive rubber 91. Therefore, housing capacity of a space between the through-holes 93 for housing wiring patterns is decreased.
Another conventional art example of this type of connector will now be described with reference to
An anisotropic conductive sheet 101 includes a thin sheet 102 formed of a silicone rubber, and a multitude of conductive wires 103 embedded in the sheet 102 to pierce through a front surface and a rear surface of the sheet 102 such that the conductive wires 103 do not contact one another.
The respective conductive wires 103 connect a wiring board 104 to a semiconductor integrated circuit element 105.
Further, the anisotropic conductive sheet 101 of this conventional art needs to be applied with a large load to absorb the warpage or the swell of surfaces of components which contact a front surface and a rear surface of the anisotropic conductive sheet 101.
It is therefore an object of the present invention to provide a connector resiliently deformable with a small load, high in density, simple in structure, and advantageous in having a shielding function, and also to provide a method of manufacturing the connector.
Other objects of the present invention will become clear as the description proceeds.
According to an aspect of the present invention, there is provided a connector comprising a support member being of a plate shape and having a front surface and a rear surface and a plurality of electrodes each piercing through the support member to have projections which project from the front surface and the rear surface, respectively, each of the electrodes comprising a component of a column shape formed of a resilient material and a metal thin film formed on a surface of the component.
According to another aspect of the present invention, there is provided a method of manufacturing a connector, comprising forming a first metal thin film on a surface of a resilient member to form a metal covering member, the metal covering member including a bottom plate portion and a multitude of electrode portions standing on a surface of the bottom plate portion, covering the surface of the bottom plate portion with a film such that the multitude of electrode portions extend through the film, forming a support member on the film such that the support member and the bottom plate portion sandwich the film and that the multitude of electrode portions project from the support member, cutting to remove only the bottom plate portion from the support member, the film, and the multitude of electrode portions such that the film and cut surfaces of the multitude of electrode portions are exposed, covering the film and the cut surfaces with a second metal thin film, and removing the film.
FIGS. 9 to 15B are diagrams illustrating a method of manufacturing a plate member which is an intermediate product obtained in a process of manufacturing the connector according to the first embodiment;
With reference to
In
Each of the electrodes 2 includes projections 2a and 2b, which project from a front surface 3a and a rear surface 3b of the support member 3, respectively. The front surface 3a and the rear surface 3b are parallel to each other. Each of the electrodes 2 further includes a component 4 of a column shape (e.g., a cylindrical column or a rectangular column) formed of a resilient material, such as a rubber and a gel, and a metal thin film 5 formed on a surface of the component 4.
With reference to FIGS. 9 to 17B, a method of manufacturing the above-described connector will now be described.
A mold 6 shown in
Then, as a resilient material, a silicone rubber 9 in a fluid state is poured into the mold 6 to be molded. In this process, the silicone rubber 9 is flowed into the holes 8 and is also formed into a layer of a certain thickness on a surface of the mold 6. Thereby, as illustrated in
After the silicone rubber 9 has sufficiently hardened, as illustrated in
Then, as illustrated in
The molded resilient member having the surface on which the metal thin film 10 is formed is hereinafter referred to as a metal covering member 11. The metal covering member 11 is in such a shape that a multitude of electrode portions 11b stand on a surface of a bottom plate portion 11a.
As illustrated in
Then, as illustrated in
After the support member 3 has been formed, only the bottom plate portion 11a of the metal covering member 11 is cut and removed. Thereby, a plate member 13 as illustrated in
Further, as illustrated in
Finally, as illustrated in
With reference to
In
In
In the above cases, even if flatness of a contact surface between the electrodes 2 of the connector 1 and the wiring board 15 or between the electrodes 2 of the connector 1 and the LGA 16 or the BGA 19 is not ensured due to such factors as a warpage or a swell of the wiring board 15, the LGA 16, or the BGA 19, and variation in height between the pads 17 of the wiring board 15, the pads 18 of the LGA 16, and the solder balls 20 of the BGA 19, the respective electrodes 2 are independently compressed, and thus electrical connection is ensured.
The connector 1 can be used in place of soldering to connect a semiconductor integrated circuit element, such as a microprocessor and an ASIC, to a wiring board. Further, the connector 1 can be easily attached and detached, and thus is suitable to be used in a test apparatus of such a semiconductor integrated circuit element.
With reference to
The respective electrodes 2 of the connector 1 are bent. With the electrodes 2 thus bent, the electrodes 2 are deformed not only by simple compression but also by bending. Accordingly, the electrodes 2 can further flexibly respond to the variation in flatness of the contact surface.
While the present invention has thus far been described in connection with a few embodiments thereof, it will readily be possible for those skilled in the art to put this invention into practice in various other manners.
Number | Date | Country | Kind |
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2005-116515 | Apr 2005 | JP | national |