The present invention relates to monolithic arrays of semiconductor optical devices, such as arrays of semiconductor lasers fabricated on single substrates.
There are a large number of applications for monolithic arrays of semiconductor lasers, for example for use in telecommunications systems, medical applications, laser cutting or welding systems or for use in print heads using optical energy to activate print or other media.
Typically, such semiconductor laser arrays are formed with arrays of parallel laser elements on a single monolithic substrate, each laser element being capable of generating a separately controllable output. In many cases, this means that each laser element must have separate drive contacts and associated bond pads to which an external wire bond can be made in order that each laser element can be independently controlled.
It is desirable that the bond pads provide good electrical communication with their respective drive contacts, and it is also desirable that the electrical characteristics of this electrical communication are as consistent as possible across all laser elements in the array. It is also desirable that the metallization layers used to form the bond pads, the drive contacts and the connections therebetween have as little impact as possible on the ability to cleave the arrays of laser elements in optimum positions.
It is an object of the present invention to offer improvements in some or all of the above aspects.
According to another aspect, the present invention provides a monolithic laser array comprising:
Embodiments of the present invention will now be described by way of example and with reference to the accompanying drawings in which:
The present specification generally refers to arrays of ‘semiconductor lasers’ or ‘laser elements’. It is intended that these expressions also encompass any other semiconductor optical devices that can generate a coherent or non-coherent optical output from a facet thereof and which are suitable for formation in monolithic arrays of devices.
In many applications, it is necessary to provide a large number of parallel lasers in an array. In a single monolithic laser array, it may be disadvantageous to fabricate more than a few tens of lasers on each substrate for several reasons.
Firstly, the yield falls with increasing number of laser elements, making large arrays significantly more expensive. Secondly, the larger the array, the greater the difficulties in maintaining consistent output performance from each laser in the array, e.g. because of temperature profiles across the array.
Thus, it is often preferred to fabricate smaller arrays (e.g. of sixteen laser elements) and then to mount multiple arrays onto a single carrier. This presents a number of problems relating to alignment of the arrays so that the laser optical outputs from adjacent arrays are very precisely positioned relative to one another. This is important, particularly though not exclusively, in printing applications where the laser element output beams are used to create visible markings on print media, because the human eye is very sensitive to small irregularities in the spacing of dots in an otherwise regular array of dots. Thus, individual arrays of lasers must be precisely registered to one another.
With reference to
The drive contact metallization 24 (i.e. that portion which extends over an active portion of the optical waveguide 23) is electrically connected to, by continuous metallization, a first bond pad area 25 off-waveguide and located near one edge of the array. The first bond pad area is for making wire bond attachments in accordance with normal wire bond techniques. A second bond pad area 26 is included off-waveguide but on the opposite side of the waveguide 23 to the first bond pad area 25. It will be noted that the second bond pad area 26 of the laser element 21-2 effectively encroaches onto the rectangular semiconductor area otherwise occupied by the adjacent laser element 21-3.
Each laser element also includes an alignment fiducial 27 disposed proximal to the output end of the laser element 21 which includes a visible alignment edge in two orthogonal directions, to enable accurate positioning of the laser element and array relative to other components on a substrate or other optical system.
The point of the first and second bond pad areas 25, 26 for each laser 21 is to facilitate cleave of the substrate on which the laser elements 21 are formed at a position very close to the axis of optical waveguide 23 at both lateral edges 10, 11 of the array. This means that the right-most laser element 21-16 at the right hand lateral edge 11 maintains a complete contact metallization area 24-16 leading to a useable first bond pad area 25-16. Note that the second bond pad area 26 for that laser element 21-16 has been lost in the cleave.
Looking at the left hand lateral edge 10 of the array, it can be seen that the left-most laser element 21-1 at the left hand lateral edge 10 maintains a complete contact metallization area 24-1 leading to a useable second bond pad area 26-1. Note that the first bond pad area 25 for that laser element has been lost in the cleave.
This configuration enables the cleave to be as close as possible to the laser waveguide axis at both lateral edges 10, 11 of the array so that adjacent arrays can be mounted very close to one another, thereby maintaining laser element spacing both intra- and inter-array. In other words, the pitch between laser elements can be maintained constant across multiple monolithic arrays.
Thus, it can be seen that the principal feature of the laser arrays of
There can be potential disadvantages with both of these approaches.
Firstly, the extent of electrical communication between the bond pad area 25, 25a, 26, 26a and the drive contact metallization region 24, 24a may be somewhat variable depending on whether the first or second bond pad area is used for any given laser element 21. This can give rise to slight variations in electrical performance of lasers across the array, e.g. arising from different capacitance and electrical resistance.
Secondly, particularly in the case of
With reference to
A monolithic semiconductor laser array 30 comprises sixteen laser elements 31-1, 31-2 . . . 31-16 each having an optical output facet 32 such that sixteen parallel output beams may be provided. Each laser element 31 comprises an optical waveguide 33 extending along the optical axis of the laser, only the passive portion of which is visible, the active portion being concealed beneath a layer of metallization 34 which forms the drive contact for the laser. The waveguide 33 may be a ridge waveguide in which case the drive contact metallization 34 extends over and along the ridge, creating a visible profile in the metallization as shown in
The drive contact 34 may extend substantially along the entire length of the waveguide (as shown) or may extend only partly along the length of the waveguide, i.e. over one or more portions of the waveguide.
In every second one of the laser elements (i.e. even numbered elements 31-2, 31-4, . . . 31-16), the drive contact metallization 34 (i.e. that portion which extends over an active portion of the optical waveguide 33) is electrically connected, by contiguous metallization, to bond pad areas 35 off-waveguide and extending laterally away from their respective waveguides 33 on the left hand side as shown in
In the other laser elements (i.e. odd numbered elements 31-1, 31-3, . . . 31-15), the drive contact metallization 34 is electrically connected, by contiguous metallization, to bond pad areas 36 off-waveguide and extending laterally away from their respective waveguides 33 on the right hand side as shown in
Thus, it will be seen that the laser elements 31 are arranged in pairs of adjacent laser elements (e.g. 31-3, 31-4) with each laser element of a pair having its bond pad area 35 or 36 extending laterally towards the other laser element of the pair and occupying a respective portion of the substrate surface 46 between the laser elements of the pair. The substrate surface 47 between pairs of laser elements is substantially free of bond pad metallization to form an enhanced cleave area extending over the length of the array between the first end 40 and the second end 41 of the array in the direction of the optical axes (z-direction).
In common with the array shown in
Like with the arrangements of
It also ensures that a bond pad area 35 or 36 is available for each laser element even at the extreme lateral edges 44, 45 (
It will be seen that, although the arrays can now only be cleaved between alternate pairs of adjacent laser elements, the benefit of this slight restriction on cleave position is that the cleave can take place without dissecting any metallized area of bond pad 35, 36 or drive contact 34, avoiding the problems associated therewith discussed above.
Furthermore, it can be seen that the electrical characteristics of the connection between bond pad areas 35, 36 and respective drive contact areas 34 (which are preferably contiguous along the entire length of the drive contact, as shown) are the same for left-handed bond pads 35 and for right-handed bond pads 36.
A significant number of modifications and variations can be made to the arrangements of
Preferably, the complementary shapes have the same surface area as each other to enhance electrical similarity (e.g. sheet resistivity, electrical resistance and capacitance). This helps in ensuring an optimum consistency of electrical characteristics for electrical conduction from a wire bond to the drive contact.
More preferably, the two complementary shapes are exactly the same shape as one another but rotated through 180 degrees, i.e. having 180 degree rotational symmetry. By making the two complementary shapes identical to one another in this manner, the electrical similarity of adjacent laser elements in each pair is maximised. However, the complementary shapes need not be identical or even of the same area if sufficient electrical similarity can otherwise be achieved for any given application.
The two complementary shapes can be any suitable shape, including interdigitated structures such as crenellations which offer multiple bond pad positions.
Further, it will be recognised that if complete flexibility in cleave positions across the monolithic array is not required, then only some of the laser elements need be paired in the manner shown in
In exemplary configurations for laser print heads, a 125 micron pitch laser element to laser element is sought, and the bond pad areas 35, 36 may be typically up to about 60% of that pitch (e.g. 75 microns wide) adjacent to the drive contact portion which is approximately the width of the waveguide. This allows a width of substrate surface 47 between adjacent pairs of laser elements of approximately 70% of the pitch (e.g. 80 to 100 microns) in which one or more cleaves can take place. Appropriate cutting or lapping of the lateral edges 40, 41 of the cleaved arrays 30 (or, alternatively, performing more than one cleave through the substrate area 47) enables the 125 micron pitch to be easily maintained between adjacent arrays 30 mounted on a common substrate and also allows a useful margin for variability in the cleave process. The spacing between adjacent bond pad areas 35, 36 of a laser element pair can be made very small, e.g. the width of the intra-pair substrate region 46 can be as little as a few microns, and typically 10 to 20% of the laser pitch.
In preferred arrangements, the width of substrate surface between adjacent pairs of lasers which is free of bond pad or drive contact metallization lies between 50 and 90% of the pitch of the laser element spacing. In practice, the width of substrate surface between adjacent pairs of lasers which is free of bond pad or drive contact metallization can be up to 100% of the waveguide-to-waveguide (e.g. ridge-to-ridge) spacing if the drive contact metallization does not extend off or beyond the ridge or buried waveguide.
The laser elements described above are formed using ridge waveguides in which the metallization extends over and off the ridge, but it will be recognised that other types of waveguides such as buried heterostructure waveguides without a ridge may also be used.
As discussed above, the gap between adjacent arrays 30 can be critical in some applications, where any gap which increases the laser pitch between arrays is to be avoided.
Typical thermal printing requirements are for 203 dpi (dots per inch) or 8 dots per mm which means that lasers in the array must be at 125 microns pitch. Other standard pitches are also widely used, such as 250 dpi, 300 dpi, 600 dpi and 1200 dpi. The laser arrays described in connection with
Other embodiments are intentionally within the scope of the accompanying claims.
Number | Date | Country | Kind |
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0704944.8 | Mar 2007 | GB | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/GB2008/000932 | 3/17/2008 | WO | 00 | 1/19/2010 |