CONTAINER FOR STORING SEMICONDUCTOR DEVICE

Abstract

A container for storing semiconductor devices is revealed. The container includes a receiving body and a cover. The receiving body is disposed with at least one fastener and at least one driver therein. The fastener includes a rolling element that is in contact with the driver. When the driver is rotated, it drives the fastener to move in the receiving body. At least one fixing part of the fastener is moved toward at least one fastening part of the cover. The cover is fixed on the receiving body by the fixing part locked in the fastening part. Moreover, friction between the fastener and the driver is minimized by the rolling element which reduces contact area between the fastener and the driver so as to prevent production of contaminants in the container and protect semiconductor devices stored in the container from being polluted. Thus the container is of high cleanness.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a container, especially to a container for storing semiconductor devices.

2. Description of Related Art

Semiconductor chips whose linear width is smaller than 90 nm have been produced in wafer foundries or in semiconductor fabrication plants due to breakthroughs and developments in wafer fabrication techniques. More semiconductor devices per unit wafer are produced along with the minimized linear width and the increased integrated density. But the semiconductor devices with high integrated density are quite sensitive. Even a bit of contaminants such as particles, dust, organic materials, gas, volatiles, etc result in defects in the semiconductor devices, or static electricity and a short circuit that damage the semiconductor devices.

In general manufacturing processes of semiconductor devices, a clean room with a low level of air pollutants is used for protection of the semiconductor devices. After being produced, a protective container is required for pollution control of the semiconductor devices during transportation of the semiconductor devices.

To prevent damages to semiconductor devices occurred during transportation or storage, many techniques that focus on the improvement of container structure and fastening members in the container have been provided. In an operating system of a standardized mechanical interface, a machine pin is inserted into a driver of a fastening member in the container so as to open and close the container.

However, friction occurs between components of fastening members in the container. Thus not only operation of the fastening member is unstable but the container is not opened or closed smoothly. Even some contaminants are produced due to the friction and the semiconductor devices stored in the container get polluted.

In order to solve the above problems, there is a need to have a novel container for storing semiconductor devices that includes at least one fastening member having at least one fastener and at least one driver. A rolling element is mounted on the fastener for reducing contact area between the fastener and the driver and minimizing friction between the fastener and the driver. Thus no contaminants produced in the container and the semiconductor devices in the container will not be polluted. The container is of high cleanness.

SUMMARY OF THE INVENTION

Therefore it is a primary object of the present invention to provide a container for storing semiconductor devices that includes a fastening member having at least one fastener and at least one driver. The fastener is mounted with a rolling element in contact with the driver. Thus contact area between the fastener and the driver is reduced and friction between the fastener and the driver is minimized to prevent production of contaminants and protect the semiconductor devices in the container. The high cleanness of the container is attained. Moreover, the rolling element is moved along with rotation of the driver and friction between the fastener and the driver is effectively reduced. Thus the fastening member works well and the container is opened and closed smoothly.

In order to achieve the above objects, a container for storing semiconductor devices of the present invention includes a cover, a receiving body with at least one insertion hole on a side wall, and a driver. The receiving body consists of at least one fastener disposed therein. The fastener is composed of a fastening body, at least one fixing part, a driving part and a rolling element. The fixing part is arranged at one side of the fastening body and corresponding to the insertion hole of the receiving body while the driving part is disposed on the other side of the fastening body. The rolling part is mounted on the driving part. The driver is disposed in the receiving body, against the driving part and in contact with the rolling element of the fastener. The cover is covered over the receiving body that includes at least one fastening part at the side wall thereof. The fastening part is corresponding to the insertion hole. When the driver is rotated, it drives the fastener to move in the receiving body. The fixing part of the fastener is inserted through the insertion hole of the receiving body to be mounted on the fastening part of the cover. Thus the cover is fixed on the receiving body.

BRIEF DESCRIPTION OF THE DRAWINGS

The structure and the technical means adopted by the present invention to achieve the above and other objects can be best understood by referring to the following detailed description of the preferred embodiments and the accompanying drawings, wherein

FIG. 1 is an explosive view of a container of an embodiment according to the present invention;

FIG. 2 is partial explosive view of container of an embodiment according to the present invention;

FIG. 3 is another partial explosive view of container of an embodiment according to the present invention;

FIG. 4 is a perspective view of a driver of an embodiment according to the present invention;

FIG. 5 is a perspective view of a fastener assembled with a driver of an embodiment according to the present invention;

FIG. 6 is a perspective view of a receiving body of an embodiment according to the present invention;

FIG. 7 is a schematic drawing of an elastic element of an embodiment according to the present invention;

FIG. 8 is a partial explosive view of container of another embodiment according to the present invention;

FIG. 9 is a perspective view of a fastener assembled with a driver of another embodiment according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

For solving the problem of friction occurred between each component of the fastening member of the container that cause contamination of semiconductor stored in the container, a container for storing semiconductor devices of the present invention is provided.

Refer to FIG. 1, FIG. 2 and FIG. 3, a container for storing semiconductor devices 1 includes a cover 10, a receiving body, and a seal plate 112. At least one semiconductor device is loaded on an outer surface of the receiving body 111 and the cover 10 is disposed over the outer surface of the receiving body 111. The receiving body 111 is mounted with a fastening member therein and the seal plate 112 is against the fastening member for fixing the fastening member in the receiving body 111. The cover 10 is fixed on the receiving body 111 by the fastening member. Thus the container 1 is airtight and is free from external contaminants. Therefore the semiconductor device (such as photomask, wafer or others) will not be polluted. For further increasing air-tightness of the container 1, a seal 14 is set between the cover 10 and the receiving body 111 to prevent contaminants from entering the container 1. Thus a high level of cleanness is achieved in the container 1.

The receiving body 111 is composed of an inner surface 1111 and a side wall 1112 around a periphery of the inner surface 1111. Thus a receiving space is formed in the receiving body 111. The fastening member of this embodiment is mounted in the receiving space and is having two fasteners 121 and a driver 122. The two fasteners 121 are symmetrically arranged at the inner surface 1111 of the receiving body 111 and each fastener 121 consists of a fastening body 1211 and two fixing parts 1212 disposed on one side of the fastening body 1211. The side wall 1112 of the receiving body 111 is set with four insertion holes 1110 respectively corresponding to four fixing parts 1212 of the two fasteners 121. As to the cover 10, its sidewall is also arranged with four fastening parts 102 (as shown in FIG. 1) corresponding to the four insertion holes 1110 of the receiving body 111 respectively. Thus the four fixing parts 1212 of the two fasteners 121 are respectively passed through the four insertion holes 1110 of the receiving body 111 so as to fix the cover 10 on the receiving body 111. The fixing part 1212 is a convex part while the fastening part 102 corresponding to the fixing part 1212 is a slot in this embodiment. The fixing part 1212 and the fastening part 102 can also be in other forms that lock with each other.

Refer to FIG. 4, the driver 122 is disposed on the inner surface of the receiving body 111 and is between the two fasteners 121. Moreover, the inner surface of the receiving body 111 is arranged with a pivot part 1113 as shown in FIG. 3. The driver 122 consists of a driving body 1221 and a rotating shaft 1222 (as shown in FIG. 2). The driving body 1221 includes a first surface 12211 and a second surface 12212 while the rotating shaft 1222 is disposed on the first surface 12211 of the driving body 1221 and is pivotally connected to the pivot part 1113 (as shown in FIG. 3). Thus the driver 122 is rotatable in the receiving body 111. Moreover, a bearing 1114 is further disposed on the pivot part 1113 of the receiving body 111 and the rotating shaft 1222 is pivotally connected to the bearing 1114 for being pivotally connected to the pivot part 1113. The bearing 114 is used to reduce friction between the pivot part 1113 and the rotating shaft 1222 and allow the driver 122 rotating smoothly in the receiving body 111.

Refer to FIG. 2 ad FIG. 5, the driver 122 further includes two guiding members 1223, respectively is a projecting rod. The two guiding members 1223 project from the first surface 12211 of the driving body 1221 and respectively extend from the rotating shaft 1222 to a periphery of the driving body 1221. The other side of the fastening body 1211 of each fastener 121 is arranged with a driving part 1213. The driving parts 1213 of the two fasteners 121 are respectively located between the two guiding members 1223 of the driver while the two guiding members 1223 are against the corresponding driving part 1213 respectively.

The seal plate is fixed under the receiving body 111 and is against the second surface 12212 of the driving body 1221 of the driver 122 for fixing the driver 122 between the inner surface 1111 of the receiving body 111 and the seal plate 112. Thus the fastening member is fixed in the receiving body 111. In this embodiment, the rotating shaft 1222 is not directly fixed on the driver in the receiving body 111 so that a force opposite to the rotating shaft 1222 will not be generated around a periphery of the driver 122. And the driver 122 will not be affected by the force and become unstable during rotation.

Back to FIG. 3, there are two insert holes 1121 on the seal plate 112. In this embodiment, each insert hole 1121 is curved. The driving body 1221 of the driver 122 is arranged with two driving holes 1224. Each driving hole 1224 penetrates the driving body 1221 to the guiding member 1223, without penetrating the guiding member 1223. Thus the driving hole 1224 is a blind hole. The two insert holes 1121 of the seal plate 112 are corresponding to the two driving holes 1224 of the driver 122. When users want to rotate the driver 122, a pin 2 is inserted through the insert holes 1121, inserted into the driving holes 1224 and then moved within the inset holes 1121 for driving the driver 122 to rotate.

When the driver 122 is rotated, the two guiding members 1223 of the driver 122 push the two driving parts 1213 of the two fasteners 121 and the two fasteners 121 move horizontally within the receiving body 111. While the driver 122 being rotated counterclockwise, the two guiding members 1223 push the two driving parts 1213 of the two fasteners 121. Thus the two fasteners 121 move toward two sides of the receiving body 111 respectively and the fixing parts 1212 of each fastener 121 are moved to be locked in the fastening parts 102 of the cover 10. Ad the cover 10 is fastened on the receiving body 111. Once the driver 122 is rotated clockwise, the two guiding members 1223 push the two driving parts 1213 of the two fasteners 121 to move toward the center of the receiving body 111. Thus the fixing parts 1212 of each fastener 121 are released from the fastening parts 102 of the cover 10. Therefore the cover 10 and the receiving body 11 are separated from each other.

Still refer to FIG. 3, for linear movement of the fastener 121, the receiving body 111 is further mounted with two first stopping parts 1115. The two first stopping parts 115 are respectively located on two sides of the two fasteners 121 so as to move horizontally between the two stopping parts 1115. In other words, the stopping parts 115 are parallel to the movement direction of the fasteners 121. Furthermore, the receiving body 111 is further disposed with two first stopping parts 1116 respectively located on two sides of the driver 122. Two stopping members 1225 are disposed on a periphery of the driving body 1221 of the driver 122. The two stopping members 1225 are respectively located between the two second stopping parts 1116. Also refer to FIG. 6, when the driver 122 is rotated, the two stopping members 1225 of the driver 122 are respectively moved between the two second stopping parts 1116 so as to restrict the rotation angle of the driver 122. Moreover, two third stopping parts 1117 are arranged at the inner surface 1111 of the receiving body 111 and the fastening body 1211 of each fastener 121 is disposed with a positioning hole 1214. Each third stopping part 1117 is corresponding to the positioning hole 1214 so as to limit the position of the two fasteners 121 in the receiving body 111.

The receiving body further includes a plurality of supporting parts 1118 arranged between the two first stopping parts 1115 and under the two fasteners 121 for supporting the two fasteners 121. The supporting parts 1118 keep the two fasteners 121 away from the inner surface 1111 of the receiving body 111 and reduce contact area between the two fasteners 121 and the inner surface 1111 of the receiving body 111. Thus the friction force between the two fasteners 121 and the inner surface 1111 of the receiving body 111 is reduced. Therefore the two fasteners 121 move smoothly on the inner surface 1111 of the receiving body 111.

Refer to FIG. 2, FIG. 3, FIG. 4, and FIG. 5, the driver 122 is further disposed with two pressing parts 1226 each of which is a projecting block that projects from the first surface 12211 of the driving body 1221. The two pressing parts 1226 respectively are located between the two guiding members 1223. The pressing part 1225 includes a guiding surface 12261 and a positioning slot 12262. While the driver 122 being rotated counterclockwise, one side of the fastener 121 with the driving part 1213 is against the guiding surface 12261 of the corresponding pressing part 1226. The guiding surface 12261 against the surface of the driving part 1213 is moved along the surface of the driving part 1213 along with the rotation of the driver 122. Thus the one side of the fastener 121 with the driving part 1213 is descended along with the guiding surface 12261 while one side of the fastener 121 with the fixing parts 1212 is ascended. Thus the fixing parts 1212 are locked with the fastening parts 102 of the cover 10 and the container 1 is with good air-tightness. A ramp 12111 is disposed on one side of the driving part 1213 of each fastener 121 that is against the pressing part 1226. The pressing part 1226 is moved along the ramp 12111 of the fastening body 1211 to the surface of the driving part 1213 and then moved along the surface of the driving part 1213, as shown in FIG. 5.

Two rolling parts 1227 are mounted on the driving body 1221 of the driver 122, under the pressing part 1226. When the driver 122 is rotated, the rolling parts 1227 allow the driver not in direct contact with the seal plate 112. Thus friction between the driver 122 and the seal plate 112 is reduced. Moreover, the two rolling parts 1227 are rolled along with rotation of the driver 122 so that the driver 122 is rotated stably. Thus contaminants produced by the friction between the driver 122 and the seal plate 112 are reduced so as to protect the semiconductor device from contamination. The rolling part 1227 of this embodiment is a bearing and is able to be other component.

Although the two rolling parts 1227 enable the driver 122 rotating stably, there is still friction occurred between the rolling parts 1227 and the seal plate 112. Thus there may be some contaminants produced to contaminate the semiconductor devices. A wear-resistant part 1122 is attached to the seal plate 112 and located between the seal plate 112 and the two rolling parts 1227 so as to reduce friction between the rolling parts 1227 and the seal plate 112 and minimize abrasion of the seal plate 112 caused by the rolling parts 1227. The amount of contaminants produced is further minimized so as to prevent contamination of the semiconductor devices in the container 1.

Back to FIG. 6, the receiving body 111 further includes two connecting parts 1119 respectively located on one side of the corresponding fastener 121. The fastening body 1211 of each fastener 121 is also disposed with a connecting member 1215. Each connecting part 1119 is connected to the corresponding connecting member 1215 of the fastener 121 by an elastic part 13. Each first stopping part 1115 of the receiving body 111 includes a slot 11151 that is inserted by the corresponding elastic part 13. The length of the elastic part 13 is shorter than the thickness of the receiving body 111 so that the receiving body 111 is completely closed by the seal plate 12 of the container 112. The position of each fastener 121 being locked with the fastening parts 102 of the cover 10 is defined as the original position of the fastener 121. When the two fasteners 121 are moved toward the center of the receiving body 111, the elastic part 13 is also moved toward the center of the receiving body 111 along with the fastener 121 and then to be stopped by one side of the slit 11151. A restoring force is produced by the elastic part 13 due to material elasticity when the elastic part 13 is in contact with and stopped by the side of the slit 11151. The restoring force enables the fastener 121 turning back to the original position. When the driver 122 is not working normally, the elastic parts 13 still make the fasteners 121 turn back to their original position. The fasteners 121 are fastened to the fastening parts 102 of the cover 10 to prevent the receiving 111 and the cover 10 from separating from each other.

With reference to FIG. 7, the elastic part 13 includes a first part 131 and a second part 132 connected to the first part 131. The second part 132 is inclined downward with respect to the first part 131 to press against the fastening body 1211 of the fastener 121. One end of the first part 131 is disposed on the connecting part 1119 of the receiving body 111 and one end of the second part 132 is set on the connecting member 1215 of the fastener 121.

When the driving part 1213 of the fastener 121 is pressed by the pressing parts 1226, the fixing part of the fastener 1212 is lifted and fastened to the fastening parts 102. The second part 132 of the elastic part 13 inclined downward with respect to the first part 131 of the elastic part 13 is pressing against the fastening body 1211 so as to make the fixing part 1212 of the fastener 12 stay in the ascended state and lock with the fastening part 102 of the cover 10. Thus the container 1 has a high level of air-tightness.

Refer to FIG. 8 and FIG. 9, another embodiment of the present invention is disclosed. As shown in figure, friction occurs between the pressing parts 1226 of the driver 122 and the driving parts 1213, when the driver 122 is rotated and is in contact with a part of the surface of each driving part 1213. In order to minimize the friction between the driver 122 and the driving part 1213, a rolling element 12110 is arranged at the driving part 1213 of the fastener 121 where the friction occurs. Thus the rolling surface 12261 of the pressing part 1226 of the driver 122 is in contact with the rolling element 12110 on the driving part 1213 of the fastener 121 and the contact area between the driving part 1213 and the pressing part 1226 is reduced. Therefore friction between the driving parts 1213 and the pressing parts 1226 is further reduced to minimize production of contaminants and protect the semiconductor devices in the container.

While the driver 122 being rotated, the driver 122 drives the rolling element 12110 to roll because that the guiding surface 12261 of the pressing part 1226 of the driver 122 is in contact with the rolling element 12110 on the driving part 1213 of the fastener 121. Then the rolling element 12110 is rolled and moved along the guiding surface 12261. The positioning slot 12262 is arranged at a rear end of the guiding surface 12261. When the rolling element 12110 is rolled along the guiding surface 12261 and moved to the positioning slot 12262, the rolling element 12110 is stopped and positioned by the positioning slot 12262. Thus the fixing part 1212 of the fastener 121 is fixed on the fastening part 102 of the cover 10. In this embodiment, the friction between the rolling element 12110 and the guiding surface 12261 is reduced by the rolling element 12110 rolling along the guiding surface 12261. Thus the driver 122 smoothly drives the fastener 121 to move in the receiving body 111 and enables the fastening member working well. Therefore the container 1 is opened and closed smoothly. The rolling element 12110 of this embodiment can be a bearing or other component. The rolling element 12110 can also be applied to other structure where the driver 122 is fastened to the receiving body 111.

In summary, the present invention provides a container for storing semiconductor devices in which a cover is fixed on a receiving body by a fastening member in the receiving body so as to seal the container and protect the container from contamination. The fastening member consists of at least one fastener and at least one driver. The fastener and the driver are disposed on the receiving body. The driver is fixed in the receiving body by a seal plate against the driver instead of being fastened by screws. Thus the driver is rotated stably. The driver is arranged with two rolling parts that reduce contact area between the driver and the seal plate to prevent contaminants produced by friction between the driver and the seal plate and protect semiconductor devices stored in the container from contamination. Moreover, a wear-resistant part is attached to the seal plate where the seal plate is in contact with the two rolling parts so as to reduce the amount of contaminants produced by the friction between the rolling parts and the seal plate and protect the semiconductor devices in the container.

Furthermore, each fastener of the fastening member is set with a rolling element in contact with the driver. The rolling element is used for reducing contact area between the driver and the fastener to minimize contaminants produced by friction between the driver and the fastener. Thus the semiconductor devices stored in the container will not be polluted. The rolling element is rolled along with rotation of the driver to reduce the friction therebetween and ensure smooth operation of the driver that drivers the fastener to move in the receiving body. Thus the fastening member runs smoothly and the container is opened and closed smoothly.

Additional advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details, and representative devices shown and described herein. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalent.

Claims

1. A container for storing semiconductor devices comprising: a receiving body with at least one insertion hole on a side wall thereof and having at least one fastener disposed in the receiving body while the fastener having a fastening body, at least one fixing part, a driving part and a rolling element; the fixing part is corresponding to the insertion hole of the receiving body and arranged at one side of the fastening body while the driving part is set on the other side of the fastening body and the rolling element is mounted on the driving part;a driver pivotally connected to the receiving body, against the driving part and in contact with the rolling element of the fastener; anda cover arranged at an outer side of the receiving body and having at least one fastening part on a side wall thereof while the fastening part is corresponding to the insertion hole;

2. The device as claimed in claim 1, wherein the container for storing semiconductor devices further includes a seal arranged between the cover and the receiving body.

3. The device as claimed in claim 1, wherein the receiving body further includes at least one supporting part disposed therein and located under the fastener to support the fastener.

4. The device as claimed in claim 1, wherein the receiving body further includes two first stopping parts disposed in the receiving body; the first stopping parts are arranged at two sides of the fastener respectively and are parallel to movement direction of the fastener.

5. The device as claimed in claim 1, wherein the receiving body further includes two second stopping parts disposed in the receiving body and two stopping members arranged at the driver; the second stopping parts are respectively set between the two stopping members of the driver; the stopping members of the driver are respectively moveable between the two second stopping parts.

6. The device as claimed in claim 1, wherein the receiving body further includes at least one third stopping part disposed in the receiving body and mounted into a positioning hole of the fastening body.

7. The device as claimed in claim 1, wherein the container for storing semiconductor devices further includes an elastic part; one end of the elastic part is connected to a connecting part of the receiving body and the other end thereof is connected to a connecting member of the fastener.

8. The device as claimed in claim 7, wherein the elastic part includes a first part and a second part; one end of the first part is connected to the connecting part of the receiving body while one end of the second part is connected to the connecting member of the fastener; the second part is inclined with respect to the first part.

9. The device as claimed in claim 1, wherein the driver includes a driving body having a first surface and a second surface corresponding to the first surface; the first surface is in contact with the fastener; and a rotating shaft that is disposed on the first surface of the driving body and is arranged at a pivot part of the receiving body.

10. The device as claimed in claim 9, wherein the receiving body further includes a bearing disposed on the pivot part and the rotating shaft is arranged at the bearing.

11. The device as claimed in claim 9, wherein the driver further includes at least one guiding member projecting from the first surface of the driving body, extending from the rotating shaft to a periphery of the driving body and against the driving part of the fastening body.

12. The device as claimed in claim 9, wherein the container for storing semiconductor devices further includes a seal plate that is fixed under the receiving body and covering the fastener and the driver.

13. The device as claimed in claim 12, wherein the seal plate includes at least one insert hole that is corresponding to at least one driving hole of the driver and is allowing at least one pin to insert through; the pin is inserted through the insert hole, inserted into the driving hole and is moveable within the insert hole so as to rotate the driver.

14. The device as claimed in claim 9, wherein the driver further includes at least one pressing part that projects from the first surface of the driving body and contacts with the rolling element.

15. The device as claimed in claim 14, wherein a surface of the pressing part corresponding to the driving part is a guiding surface; one side of the fastener close to the driving part is ascended and descended along with the guiding surface; the rolling element is against the guiding surface of the pressing part.

16. The device as claimed in claim 15, wherein a positioning slot is disposed on a rear end of the guiding surface and the rolling element is mounted in the positioning slot.

17. The device as claimed in claim 1, wherein the rolling element is a bearing.

18. The device as claimed in claim 1, wherein the driver is fastened in the receiving body.

19. The device as claimed in claim 1, wherein the driver is pivotally disposed on the receiving body.

20. The device as claimed in claim 12, wherein the driver is pivotally disposed on the receiving body while the seal plate is fastened under the receiving body and is pressing the driver against the receiving body.

21. The device as claimed in claim 12, wherein the container for storing semiconductor devices further includes a wear-resistant part disposed on the seal plate and corresponding to the driver.

22. The device as claimed in claim 12, wherein the driver further includes at least one rolling part mounted on the driving body and in contact with the seal plate.

23. The device as claimed in claim 22, wherein the rolling part is a bearing.