The invention relates to electronic image sensors operating on the basis of active pixels using MOS technology. More precisely, the invention relates to a method for controlling the various transistors which make up the active pixel.
Active pixels most often comprise a photodiode that converts received photons to electric charge, and multiple MOS transistors allowing the readout of this charge and its conversion to electrical voltage to be controlled. In a matrix-array sensor, the rows of pixels are addressed individually and the voltages output by the pixels are applied to column conductors common to the pixels of a given column. Readout circuits at the foot of the column allow the voltages present on the columns to be sampled for each addressed row of pixels. The samples are stored in capacitors of the readout circuit. The samples are then converted to digital form by an analogue-to-digital converter (for example one converter for each column of pixels).
Active pixels using a photodiode generally comprise at least four transistors: a transfer transistor that serves to transfer the charge from the photodiode to what is referred to as a readout node, which is a capacitive charge storage node; a readout transistor, which is connected in a voltage follower configuration and the gate of which is connected to the readout node in order to bring its source to a voltage representing the voltage of this node; a row-selection transistor controlled by a row conductor for selecting an entire row of pixels, this selection transistor allowing the output of the follower transistor of the pixel to be connected to the corresponding column conductor and thereby to the readout circuit at the foot of the column; and a reset transistor allowing the potential of the readout node to be reset to a reference value.
These active pixel structures allow images to be captured using what is referred to as the global shutter technique: all of the pixels integrate charge generated by light during an integration period common to all of the pixels. The pixels are then read out sequentially, row by row. This capture technique is advantageous in comparison with the integration technique referred to as the rolling shutter technique, in particular because it makes it possible to avoid distortion effects when images of moving objects are captured.
The pixel control sequence in the common integration phase is the following:
After each integration period, the phase of reading out the pixels may start. The pixels are read out sequentially, row by row. For each of the pixels of a row, the selection transistor of the pixel is turned on for the time of a selection control pulse, and during this time:
The readout circuit delivers as output, for each pixel, a measurement of the difference between the signal level and the reference level of the pixel. However, this level is not a precise measurement of the amount of charge generated in the photodiode because the random noise, referred to as kTC noise, is not removed. Indeed, this noise is generated by the reset of the readout node by the reset transistor and means that the potential applied to the readout node is not absolutely certain. In order to be able to remove this uncertainty, making it possible to precisely measure the amount of charge generated in the photodiode of the pixel for the integration period in question, it is necessary first to be able to initialize the readout node in order to sample the reference potential level, and only after having established the (transfer) signal level in order to sample it. This is referred to as correlated double sampling (CDS) readout. With the four- or five-transistor structure such as described, CDS readout is not known to be possible when a common integration sequence is performed on all of the pixels at the same time.
Thus, in the prior art, structures comprising a memory node between the photodiode and the readout node have been proposed. The memory node makes it possible to store the charge generated by the photodiode after each of the integration periods common to all the pixels, for the time it takes, in each row of pixels, to initialize the readout node of each of the pixels, and to sample the corresponding reference level in the readout circuit of each of the pixels of the row, then to transfer the charge from the memory node to the readout node and to sample the signal level in the readout circuit. The corresponding active pixel structure then comprises two transfer transistors (or gates), a first between the photodiode and the memory node and a second between the memory node and the readout node. The first transfer transistor between the photodiode and the memory node is then the transistor that controls the end of each integration period for all of the pixels at the same time, this end coinciding with the end of the transfer control pulse in the memory node. The second transfer transistor is employed in the sequential pixel row readout phase.
These active pixel structures which have been proposed, for example, in the publications FR2961631 and JP20063115150 to allow both an image to be captured by all the pixels simultaneously in the same integration period and a CDS readout of the pixels, row by row, thus provide a dynamic range that is optimized at the low end, since they are low readout noise structures (CDS readout).
However, an improvement in the high-end dynamic range of the pixels for high levels of ambient light without increasing the size of the pixels, which is mainly determined by the area occupied by the photodiode, is also sought.
One proposed solution consists of successively capturing multiple images with different integration times and, for each pixel, determining the best adapted signal from among the signals obtained. However, this increases the overall acquisition and processing time. Another solution consists of determining the time taken for a pixel to be saturated in order to deduce information on the light level therefrom in the case of saturating illumination. This assumes the presence of pixels of more complex structure and associated processing. Another solution uses the initialization transistor of the photodiodes during the integration period in order to allow excess charge to be removed from the photodiode by biasing the gate of this transistor to a set voltage below the threshold voltage of the transistor, in order to adjust the potential of the barrier of the semiconductor region under the gate. The response of the pixel then becomes logarithmic beyond a certain luminosity threshold. However, this solution is sensitive to technological dispersions (threshold voltages of the transistors, open circuit potential of the photodiodes).
The invention proposes another method which allows the dynamic range of the sensor to be extended without modifying the structure or the size of the pixels. More specifically, it is envisaged to carry out, in the integration period common to the pixels, at least one transfer of charge from the photodiode to the memory node via the first transfer transistor, with an operation of clipping the amount of charge contained in the memory node in comparison with a threshold set by the second transfer transistor, allowing a change in the slope of the response curve beyond an intensity of luminous flux corresponding to this charge clipping threshold.
The invention relates to a method for controlling an active pixel in an image sensor, the active pixel structure comprising a photosensitive element, a readout node and a memory node between the photosensitive element and the readout node, a first charge transfer transistor between the photosensitive element and the memory node and a second charge transfer transistor between the memory node and the readout node, a follower transistor, the gate of which is connected to the readout node, and at least one initialization transistor of the readout node.
In each new integration period, the control method comprises the following steps, applied to all of the pixels simultaneously:
Preferably, the method comprises the application of N first and second pulses per integration period, N being an integer at least equal to 1, and the N first voltage pulses applied during an integration period divide said integration period into N+1 successive integration durations of increasingly shorter length, and the N second associated voltage pulses define N clipping thresholds in the memory node which keep increasing over the integration period.
N is advantageously chosen to be equal to 2. Otherwise, N is set according to a measurement of the ambient light, preferably at a value chosen from between 1 and 2.
In one variant, the time of application of each first pulse and/or the clipping threshold associated with each second pulse are determined according to a measurement of the ambient light.
In the phase of reading out each of the pixels of one row, the method advantageously applies a correlated double sampling for each pixel, with a first sampling of a reference level, corresponding to an initialization of the readout node, then a second sampling of a signal level corresponding to the charge which is contained in the memory node at the end of the integration period and which has been transferred to said readout node for readout.
The invention also relates to an image sensor comprising at least one row of active pixels, with a pixel structure comprising a memory node between a photosensitive element and a readout node of the pixel, with a first charge transfer transistor placed between the photosensitive element and the memory node and a second charge transfer transistor placed between the memory node and the readout node, and a sequencing circuit for sequencing the signals required for image capture comprising an integration period common to all of the pixels, and a phase of successively reading out the pixels of each row, and the sequencing circuit is configured to implement such a control method.
Other features and advantages of the invention are presented in the following description, given with reference to the appended drawings in which:
The invention pertains to an image capture method by an active pixel image sensor, with a pixel structure that comprises a memory node between the photodiode and the readout node. It is also necessary to provide a detailed description of such a structure, in order to facilitate the subsequent description of the method of the invention.
Structure of the Pixels
Active pixels are produced using CMOS technology in a doped (for example p-doped) active semiconductor layer and in addition comprise photodiodes, which are in principle what are referred to as pinned photodiodes, capacitive storage nodes and transistors. Embodiments thereof employ various CMOS technologies well known to those skilled in the art. The context is that of a substrate with a p-doped active semiconductor layer, which substrate is biased to a zero reference potential and the circuits of which are supplied with a positive supply voltage denoted by Vdd. The various transistors of the pixels are NMOS transistors, with source and drain regions that are n-type diffusions on either side of a p-type channel under the gate. Those skilled in the art will be capable of carrying out the necessary adaptations in the context of a substrate with an n-doped active semiconductor layer.
The pixel also comprises, in a conventional manner, a reset transistor RST for resetting the readout node SN, the source of which is electrically connected to the readout node and the drain of which is connected to the positive supply voltage Vdd; a follower transistor SF, the gate of which is electrically connected to the readout node SN, and the drain of which is biased to the supply voltage Vdd. In the example, the pixel comprises a selection transistor SEL, the gate of which is connected to a row conductor CL allowing the row of the pixel to be selected, the drain of which is electrically connected to the source of the follower transistor and the source of which is connected to a column conductor CC of the matrix array (the pixels being arranged in the form of a matrix, in n rows of rank j equal to 1 to n, and m columns of rank k equal to 1 to m), each column conductor CC being connected, at the foot of the column, to a readout circuit CR common to all of the pixels of the column.
In the example, a sixth transistor AB is also provided, which allows the photodiode to be initialized, by removing charge via its drain. When it is not provided, the photodiodes are initialized by activating (i.e. turning on), together in each pixel, the transistors TR1, TR2 and RST.
In practice, these transistors are not all necessarily constructed in a conventional manner, independently of the other elements of the pixel, with a source region, a drain region, a channel region separating the source from the drain and an insulated gate above the channel, as shown in
Lastly, at least some of these transistors may be common to multiple pixels. In particular, the selection transistor SEL, the follower transistor SF and/or the initialization transistor AB of the photodiodes may be common to a plurality or all of the pixels. Additionally, the initialization transistor AB may be omitted, as stated above. Lastly, the selection transistor may also not be present, the selection function then being provided by the reset transistor, via a drain bias voltage command capable of turning the follower transistor off outside of readout phases. In this case, the source of the follower transistor is directly connected to the column conductor. All of these structural variants of active pixels are known to those skilled in the art. The invention that will be described in relation to the structure of
The photodiode Dp of the pixels is typically a pinned photodiode pinned to a voltage denoted by Vpin defined by the technology, i.e. it comprises, on the n-type diffusion region, a superficial p-type diffusion region and the superficial region is brought to the reference potential (zero) of the substrate. For a given technology, the storage capacity of the photodiode is defined by its area.
The readout node SN is generally composed of a floating n-doped semiconductor region. The charge storage capacity of this readout node is determined by its dopant concentration and its geometry.
The memory node must be produced in a manner different from the floating diffusion of the readout node, since it must be possible to set its potential so as to allow it to be used as an intermediate storage node for storing the charge of the photodiode at the end of the integration period, for the time to allow the prior sampling in each pixel, in the readout phase, of the reference potential level of the readout node. However, its storage capacity must be equivalent to that of the readout node. Those skilled in the art have access to various readout node technologies for this purpose. In one example, the readout node is produced by a semiconductor region surmounted by a gate, and this gate is biased to a potential which allows the semiconductor region of the memory node to be set up under the gate at a determined potential level that is intermediate between the Vpin level of the photodiode and Vdd: it is thus possible to transfer the charge from the photodiode to the memory node at the end of the integration period; and, subsequently, to transfer the charge contained in the memory node to the readout node, in the readout phase. The applied potential may vary according to the phase in question, but, in order to simplify the following description, the potential of the memory node MN will hereinafter be considered to be a determined fixed value VMN. The charge storage capacity of the memory node depends, in this example, on the gate capacity (hence on its geometry), on the dopant concentration, etc.
Other memory node structures could be used, such as those described, for example, in the patent publications WO2006130443, U.S. Pat. No. 598,629, or FR2961631.
Control Method
A pixel structure such as that which has been described is specially adapted to an image capture method in which an image capture cycle comprises one integration period common to all of the pixels, followed by a row-by-row readout of the pixels, i.e. a correlated double sampling readout (CDS readout). It is specified that the pixels are usually arranged in a matrix of rows and columns of pixels.
Integration
According to the invention, it is proposed to carry out, in the common integration period of duration Ti, at least one transfer of charge from the photodiode to the memory node, at an intermediate voltage between the start and the end of the integration period, and to clip, subsequent to each of these intermediate transfers, the amount of charge contained in the memory node, in relation to a determined threshold. The photodiode starts to accumulate charge again following the first transfer. At the end of the integration period, this new charge is transferred to the memory node, and it is added to that already contained in the memory node following the one or more transfers and clipping operations carried out in the integration period. The transfer of charge to the memory node at an intermediate voltage is controlled through the application of a first voltage pulse to the first transfer gate. The clipping of the charge contained in the memory node is achieved through the application, after this first pulse, of a second voltage pulse to the second transfer gate, and the voltage of this pulse is at a determined level which sets the clipping threshold, i.e. the maximum amount of charge that can be held in the memory node, by setting the height of the potential barrier of the semiconductor region under the gate of the second transfer transistors in relation to the potential of the memory node.
This will now be described in detail, using the timing diagram of
In these
An initial state (not shown) is started from, in which the transfer transistors are in the off state. During the integration period, the initialization transistor of the readout node will generally be on (gate at Vdd), connecting the readout node SN to the supply voltage Vdd.
The integration cycle starts with a phase {circle around (1)} of initializing all of the photodiodes. In the example, a voltage pulse Pi is applied to the initialization gate AB-g of the photodiodes (
According to the invention, in the period of integrating charge by the photodiode, at least one sequence of a phase {circle around (2)} of transferring the charge from the photodiode to the memory node MN, at an intermediate voltage, is envisaged, followed by a phase {circle around (3)} of clipping the charge contained in the memory node MN, before a final phase {circle around (4)} of transferring the charge to the memory node.
This sequence proceeds as follows:
After this sequence of transfer and clipping phases in the integration period, there follows the final transfer phase {circle around (4)}, marking the end of the integration period (
The transfer phase {circle around (2)} at time t1 in the integration period results in the integration period Ti being divided into two successive integration durations Tia and Tib; and the following clipping phase {circle around (3)}, carried out at the end of the first integration duration Tia, then allows the dynamic range of the pixel to be extended, i.e. the capacity of the pixel to avoid saturation in the event of high levels of illumination without changing its sensitivity to low levels of illumination.
This is shown by the corresponding response curve of
Specifically, there are two possibilities:
In the first case, the amount of charge Qa transferred to the memory node in phase {circle around (2)} remains in the memory node at the end of the clipping phase {circle around (3)}, since it is trapped by the potential barrier set up under the second gate TR2-g; this amount Qa is proportional to F and Tia. The accumulation of charge, which is resumed at the end of the first transfer and continues for the duration Tib, generates a charge Qb proportional to F and Tib. In the final transfer phase {circle around (4)}, charge accumulated in the photodiode in the second integration duration Tib is transferred to the memory node MN and it is added to the previous charge: at the end of the duration Tib, the memory node contains the amount of charge Qa+Qb, which is proportional to the intensity F of the luminous flux and to the total integration duration Ti=Tia+Tib; and it is this amount of charge Qa+Qb that will be read out in the following pixel readout sequence.
Thus, when the luminous flux is below the threshold F0, the amount of charge stored in the pixel, which forms the output signal of the pixel, is proportional to the intensity F and to the total integration duration Ti=Tia+Tib. The response curve of the total charge Q=Qa+Qb as a function of F, shown in
In the second case, the amount of charge Qa photogenerated by the photodiode in the first integration duration Tia is above the threshold Q0: then the surplus charge is emptied in the clipping phase {circle around (3)}; only the threshold value Q0 remains in the memory node at the end of this phase. In the second integration duration Tib, the photodiode accumulates an amount Qb of new photogenerated charge which is proportional to the intensity of the flux F and duration Tib. The result of this, at the end of the second integration duration Tib and as the outcome of the final transfer phase {circle around (4)}, is that the memory node MN comprises an amount of charge which is the sum of Q0+Qb. Stated otherwise, the final amount of charge is proportional to F0·Tia+F·Tib, which may also be written as F0·(Tia+Tib)+(F−F0)·Tib, in which F is the received luminous flux that is above F0, and F0 is the luminous flux up to the charge threshold Q0.
The response curve beyond F0 is therefore a straight line, the slope of which is gentler, in terms of the ratio Tib/(Tia+Tib), than the slope of the straight line below F0.
Overall, the curve of the total amount of charge as a function of the illumination is a broken straight line with two successive slopes, the first slope being steeper, allowing the sensor to retain good sensitivity to low levels of luminous flux, and the second, gentler slope allowing the dynamic range of the sensor to be extended to high levels of flux: if it is assumed that the photodiode is saturated for an amount of charge Qs, it may be seen that this quantity of charge is reached for a level of luminous flux Fs1 that is higher than it would have been if the curve comprised only the first slope (in which case it is saturated for the flux Fs0 referenced in
The response curve at extended dynamic range may thus be regulated by the values Va and Tib, for an integration period of determined duration Ti (this value Ti determining the slope of the first straight line): the choice of the potential Va applied to the second transfer gate TR2-g in phase {circle around (3)} determines the point at which the slope changes at a chosen value for Q0; and the second integration duration Tib, preferably shorter than the first duration Tia, determines the slope of the second straight line. It is typically possible to choose a second integration duration Tib that is equal to 5 to 10% of Tia.
It is possible to generalize to N intermediate transfer/clipping operation(s). For example,
Beyond the level of illumination F′0, and below a value Fs′1 that would saturate the pixel, the total amount of charge present in the memory node MN after the second clipping operation is proportional to F0·(Tia+Tib+Tic)+(F′0−F0)·(Tib+Tic)+(F−F′0)·Tic. The first slope is defined by the total integration duration Ti; the second slope is defined by the duration Tib+Tic; the third slope is defined by the duration Tic. It may be seen from the curve of
In theory, it is possible to generalize the control method to N transfer/clipping operations before the final transfer. However, in practice, the choice of N=2 transfer/clipping operations is advantageous, with optimized sensitivity over the entire range. Beyond N=2, there are substantial technological constraints on the clipping thresholds that may be set.
Provision may also be made for the value of N to be set according to a measurement of the ambient light, preferably between the values 1 and 2. For example, it is possible to make provision for N to be chosen to be equal to 1 in a context of average ambient light and to be equal to 2 if more extreme levels of ambient light may be measured.
Readout
Once the integration period has ended, the phase of reading out the pixels may start. The readout is performed sequentially, row by row, in the usual manner of the prior art. Preferably, the readout is of correlated double sampling type. It is performed in the following manner, as illustrated by
This readout sequence is applied simultaneously to all of the pixels of the selected row, then repeated for each of the rows of pixels of the sensor, successively, until the last row.
A new integration period of a new integration cycle and subsequent readout may start with a new photodiode reset phase {circle around (1)}. In practice, the new cycle may start as soon as the last final transfer defined by phase {circle around (4)} has ended.
The various control signals of the various sequences are delivered, in the conventional manner, by a sequencing circuit SQ for sequencing the pixels of the matrix (
The invention that has been described is particularly advantageous for miniaturized sensors if it is additionally envisaged to implement it with memory node technologies offering a capacity per unit area that is intrinsically higher than that permitted by pinned photodiode technologies.
Number | Date | Country | Kind |
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16 50415 | Jan 2016 | FR | national |
Filing Document | Filing Date | Country | Kind |
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PCT/EP2017/050633 | 1/13/2017 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
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WO2017/125316 | 7/27/2017 | WO | A |
Number | Name | Date | Kind |
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8717452 | Yamashita | May 2014 | B2 |
9674468 | Kobayashi | Jun 2017 | B2 |
10263032 | Wan | Apr 2019 | B2 |
20040018078 | Lee | Jan 2004 | A1 |
20060219868 | Morimoto | Oct 2006 | A1 |
20090101796 | Ladd et al. | Apr 2009 | A1 |
20110019045 | Lin | Jan 2011 | A1 |
20140015012 | Oike | Jan 2014 | A1 |
20180367748 | Mayer | Dec 2018 | A1 |
Number | Date | Country |
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2961631 | Dec 2011 | FR |
20063115150 | Nov 2006 | JP |
Entry |
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International Search Report and Written Opinion for PCT/EP2017/050633, dated Apr. 7, 2017. |