Number | Name | Date | Kind |
---|---|---|---|
2737784 | Becker et al. | Mar 1956 | |
3192730 | Webb | Jul 1965 | |
3237418 | Meisler | Mar 1966 | |
3442091 | Klipping et al. | May 1969 | |
3595788 | Knippenberg et al. | Jul 1971 | |
3683589 | Seitz et al. | Aug 1972 | |
3815376 | Lofredo et al. | Jun 1974 | |
4051886 | Ross | Oct 1977 | |
4065278 | Newton et al. | Dec 1977 | |
4152130 | Theobald | May 1979 | |
4237699 | Longsworth et al. | Dec 1980 | |
4620962 | Brodbeck | Nov 1986 | |
4715187 | Stearns | Dec 1987 | |
4717406 | Giacobbe | Jan 1988 | |
4759848 | Segura et al. | Jul 1988 | |
4878354 | Stearns | Nov 1989 | |
5122175 | Koyama et al. | Jun 1992 | |
5228269 | Sanfilippo et al. | Jul 1993 | |
5271232 | Ogawa | Dec 1993 | |
5272881 | Lee | Dec 1993 |
Number | Date | Country |
---|---|---|
3533016A1 | Mar 1987 | DEX |
1070395A | Jan 1984 | SUX |
2169998 | Jul 1986 | GBX |
Entry |
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Abrikosova et al., "Purity of Liquid Helium", 1970 Consultants Bureau. |
Belov et al., Chem. Abstracts, vol. 94, No. 14, Apr. 6, 1981. |
Cheung et al., "Efficiently Produced Ultra-high-purity Nitrogen On-site", Chemical Engineering Progress, Oct. 1991. |
Lee, "Liquid Nitrogen and Wafer Fabrication Problems", pp. 94-97, Solid State Technology, Dec. 1981. |