This application claims priority based on 35 USC 119 from prior Japanese Patent Application No. P2008-250192 filed on Sep. 29, 2008, the entire contents of which are incorporated herein by reference.
1. Field of the Invention
The present invention relates to a conveyance device for holding and reciprocating a conveyance object on a predetermined conveyance path. The present invention also relates to a control method of the conveyance device and an observation device provided with the conveyance device.
2. Description of Related Art
Generally, a conveyance device for reciprocating a conveyance object along a predetermined conveyance path includes a reciprocating body for holding and reciprocating the conveyance object on the predetermined conveyance path and a drive mechanism for driving the reciprocating body along the conveyance path. In such a conveyance device, in order to return the reciprocating body to an origin position on the conveyance path, an origin sensor is provided which is switched from an OFF state to an ON state by the reciprocating body when the reciprocating body has reached the origin position.
A gear mechanism and a pulley mechanism for example are adopted as the drive mechanism, which converts the rotation of a motor as a power source to reciprocating motion and transmits it to the reciprocating body. The amount of motor operation can be measured by counting the number of drive pulses using for example an internal counter of a motor controller. In addition, an inductive proximity sensor can be used as the origin sensor, wherein a detection coil generating a magnetic field detects changes in impedance caused by an object moving in the magnetic field object.
In a drive mechanism in which a gear mechanism is used, a backlash can exist between gears, and therefore, when a conveyance object is moved in one direction along the conveyance path and thereafter moved backward in the opposite direction, a period occurs during which the motor runs idle due to the backlash and during which the conveyance object remains stopped even if the motor is rotating.
Thus, Japanese Patent Laid-Open No. 2005-092152 describes technology wherein lost motion caused by the backlash is prevented by unifying the drive direction in one direction when the drive mechanism is stopped.
Japanese Patent Laid-Open No. 2004-283977 describes technology wherein in a slitter device for slitting while conveying a sheet-like material printed in a number of colors, printing deviations of two reference marks printed on the sheet-like material are inspected by detecting a distance between the two reference marks.
However, in the conventional technology that unifies the drive direction in one direction when the drive mechanism is stopped, while the lost motion caused by the backlash does not occur when the drive mechanism is driven in one direction, if the drive mechanism is driven in the opposite direction, lost motion caused by the backlash occurs and positioning control conducted by the drive mechanism contains error because a measurement of such backlashes cannot be detected quantitatively.
On the other hand, in the conventional technology wherein two reference marks are printed on a sheet-like material, as a conveyance object is moved and the distance between the two reference marks is detected, and while it is possible to inspect the printing deviations of the reference marks and to correct the position of the sheet-like material according to the amount of deviations, the conventional technology cannot address, for example, a position detection error in a current usage environment wherein the origin sensor determines a reference position of the motor operation and change over time with an amount of the backlash contained in the drive mechanism.
In operation of the origin sensor, a position detection error can exist due to a difference in responsiveness between switching from the ON state to the OFF state upon the approaching of a detection object and switching from the OFF state to the ON state with the leaving of the detection object. Therefore, a gap exists between a position at which switching from the ON state to the OFF state is detected and a position at which switching from the OFF state to the ON state is detected.
While the backlash changes over time, the position detection error of the origin sensor changes with an influence by a current usage environment, e.g. the temperature. Therefore, a correction of the drive amount taking into consideration the feed amount error (backlash) specific to the drive mechanism and a correction of the drive amount taking into consideration the position detection error specific to the origin sensor need to be performed individually. However, in the conventional technology, the measurement of the feed amount error specific to the drive mechanism and the measurement of the position detection error specific to the origin sensor cannot be known individually.
Therefore, an object of the invention is to provide a conveyance control device, a control method of the conveyance device, and an observation device, which can individually acquire the feed amount error of the drive mechanism and the position detection error of the origin sensor, and can perform a control operation by individually taking into consideration the feed amount error and the position detection error in a positioning control of the reciprocating body.
One aspect of the present invention relates to a conveyance control device, which includes a reciprocating body that holds a conveyance object and reciprocates it on a predetermined conveyance path; a drive mechanism that drives the reciprocating body along the conveyance path; an origin sensor that is switched from a first output state to a second output state by the reciprocating body's reaching a predetermined position on the conveyance path; a control circuit for controlling an operation of the drive mechanism; a drive amount detection unit for detecting a drive amount of a power source of the drive mechanism; and a movement detection unit for optically detecting a point of time that the reciprocating body shifts from a resting state to a moving state.
The control circuit includes a movement control unit that moves the reciprocating body in one direction until the origin sensor is switched from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) and then moves the reciprocating body in an opposite direction of the one direction until the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state) in performing a positioning control of the reciprocating body; a drive amount acquisition unit that acquires, in the course of moving the reciprocating body by a control of the movement control unit, a first drive amount detected by the drive amount detection unit from a point of time that the origin sensor turns to the second output state (e.g. the ON state) and the reciprocating body starts moving in the opposite direction until a point of time that shifting of the reciprocating body from the resting state to the moving state is detected by the movement detection unit, and a second drive amount detected by the drive amount detection unit from the point of time that the shifting of the reciprocating body from the resting state to the moving state is detected by the movement detection unit until a point of time that the origin sensor turns to the first output state (e.g. the OFF state), in which a control operation is performed taking into consideration the acquired first and second drive amounts in the positioning control of the reciprocating body.
Here, the first drive amount represents an amount of a feed amount error of the drive mechanism and the second drive amount represents an amount of a position detection error of the origin sensor.
In some embodiments, the origin sensor is provided on the conveyance path, and it changes from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) with approaching of a shield plate placed on the reciprocating body, and changes from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state) with leaving of the shield plate.
In further embodiments, the movement detection unit is composed of a test target provided on the reciprocating body and an image pickup device for capturing an image of the test target, in which in the course of moving the reciprocating body in the opposite direction from the second output state of the origin sensor to the first output state of the origin sensor, the image pickup device continuously captures images of the test pattern, and in which the movement detection unit determines that the reciprocating body has shifted from the resting state to the moving state when change occurs in the captured image.
Another aspect of the present invention is a control method of a conveyance device, in which the conveyance device includes: a reciprocating body that holds a conveyance object and reciprocates it on a predetermined conveyance path; a drive mechanism that drives the reciprocating body along the conveyance path; an origin sensor that is switched from a first output state (e.g. the OFF state) to a second output state (e.g. the ON state) by the reciprocating body's reaching a predetermined position on the conveyance path; a drive amount detection unit for detecting a drive amount of a power source of the drive mechanism; and a movement detection unit for optically detecting a point of time that the reciprocating body shifts from a resting state to a moving state, in which the control method includes a first process of moving the reciprocating body in one direction until the origin sensor is switched from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) and resetting the drive amount detection unit at a point of time that the origin sensor becomes the second output state (e.g. the ON state); thereafter, in the course of moving the reciprocating body in an opposite direction of the one direction until the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state), a second process of monitoring an output signal of the movement detection unit and acquiring a first detection amount (a first count value α) from the drive amount detection unit at a point of time that the reciprocating body shifts from the resting state to the moving state; thereafter, a third process of acquiring a second detection amount (a second count value γ) from the drive amount detection unit at a point of time that the origin sensor turns to the first output state (e.g. the OFF state); and a fourth process of deriving, from the first and second detection amounts (α and γ), a feed amount error of the drive mechanism due to change of the movement direction of the reciprocating body, and a position detection error due to a response difference of the origin sensor between switching from the first output state to the second output state and switching from the second output state to the first output state, and in which a positioning control of the reciprocating body is performed by taking into consideration the derived feed amount error and the derived position detection error.
Still another aspect of the present invention is a control program of a conveyance device, in which the conveyance device includes: a reciprocating body that holds a conveyance object and reciprocates it on a predetermined conveyance path; a drive mechanism that drives the reciprocating body along the conveyance path; an origin sensor that is switched from a first output state (e.g. the OFF state) to a second output state (e.g. the ON state) by the reciprocating body's reaching a predetermined position on the conveyance path; a drive amount detection unit for detecting a drive amount of a power source of the drive mechanism; and a movement detection unit for optically detecting a point of time that the reciprocating body shifts from a resting state to a moving state, in which the control program causes a computer to execute a first process of moving the reciprocating body in one direction until the origin sensor is switched from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) and resetting the drive amount detection unit at a point of time that the origin sensor turns to the second output state (e.g. the ON state); thereafter in the course of moving the reciprocating body in an opposite direction of the one direction until the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state), a second process of monitoring an output signal of the movement detection unit and acquiring a first detection amount (a first count value α) from the drive amount detection unit at a point of time that the reciprocating body shifts from the resting state to the moving state; thereafter, a third process of acquiring a second detection amount (a second count value γ) from the drive amount detection unit at a point of time that the origin sensor turns to the first output state (e.g. the OFF state); and a fourth process of deriving, from the first and second detection amounts (α and γ), a feed amount error of the drive mechanism due to change of the movement direction of the reciprocating body, and a position detection error due to a response difference of the origin sensor between switching from the first output state to the second output state and switching from the second output state to the first output state, and in which a positioning control of the reciprocating body is performed by taking into consideration the derived feed amount error and the derived position detection error.
Still another aspect of the present invention is an observation device, which includes a reciprocating body that holds a conveyance object and reciprocates it on a predetermined conveyance path; a drive mechanism that drives the reciprocating body along the conveyance path; an image pickup device for capturing an image of an observation object held on the reciprocating body when the reciprocating body has reached a predetermined observation position on the conveyance path; an origin sensor that is switched from a first output state (e.g. the OFF state) to a second output state (e.g. the ON state) by the reciprocating body's reaching a predetermined position on the conveyance path; a drive amount detection unit for detecting a drive amount of a power source of the drive mechanism; a movement detection unit for optically detecting a point of time that the reciprocating body shifts from a resting state to a moving state; and a control circuit for controlling an operation of the drive mechanism, in which a test target whose image is captured by the observation device is provided on the reciprocating body, in which the movement detection unit determines that the reciprocating body has shifted from the resting state to the moving state at a point of time that change occurs in the image of the test target captured by the image pickup device, and in which the control circuit includes a movement control unit that moves the reciprocating body in one direction until the origin sensor is switched from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) and then moves the reciprocating body in an opposite direction of the one direction until the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state) in performing a positioning control of the reciprocating body; and a drive amount acquisition unit that acquires a first drive amount detected by the drive amount detection unit from a point of time that the origin sensor turns to the second output state (e.g. the ON state) and the reciprocating body moves in the opposite direction until a point of time that the shifting of the reciprocating body from the resting state to the moving state is detected by the movement detection unit, and a second drive amount detected by the drive amount detection unit from the point of time that the shifting of the reciprocating body from the resting state to the moving state is detected by the movement detection unit until a point of time that the origin sensor turns to the first output state (e.g. the OFF state), in the course of moving the reciprocating body controlled by the movement control unit, and in which a control operation is performed taking into consideration the acquired first drive amount and the acquired second drive amount in the positioning control of the reciprocating body.
In the conveyance control device, the control method of the conveyance device, and the observation device according to the invention, when performing a positioning control of the reciprocating body, in the course of moving the reciprocating body in one direction until the origin sensor is switched from the first output state (e.g. the OFF state) to the second output state (e.g. the ON state) and then resetting the drive amount detection unit (e.g. an internal counter) at a point of time that the origin sensor turns to the second output state (e.g. the ON state), and thereafter moving the reciprocating body in an opposite direction of the one direction until the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state), a detection value (e.g. a count value α of the internal counter) is acquired by the drive amount detection unit at a point of time that the reciprocating body shifts from the resting state to the moving state. The acquired first detection value α represents a feed amount error of the drive mechanism caused by the change of the movement direction of the reciprocating body that is an amount of the backlash.
Thereafter, in the course of moving the reciprocating body in the opposite direction, a detection value (e.g. a count value γ of the internal counter) is acquired by the drive amount detection unit at a point of time that the origin sensor is switched from the second output state (e.g. the ON state) to the first output state (e.g. the OFF state). The acquired second detection value γ represents the sum of the feed amount error of the drive mechanism and the position detection error of the origin sensor, and thus, the difference β obtained by subtraction of the first detection value α from the second detection value γ represents an amount of the position detection error of the origin sensor.
After the feed amount error of the drive mechanism and the position detection error of the origin sensor are derived as such, a control operation is performed by taking into consideration the derived feed amount error and the derived position detection error in the positioning control of the reciprocating body.
Specific embodiments in which the present invention is performed in an observation device will be described hereinafter by referring to the drawings.
The observation device according to an embodiment of the invention is for observing an object such as a cell stained with fluorescent reagent. As shown in
Within the housing 1, an illuminating device 13 having an LED 11 and a mirror 12 is provided for illuminating the flask 10, and an image pickup device 16 having a CCD 15 and a mirror 14 also is provided for capturing an image of the flask 10.
As shown in
Also, the Y-axis drive mechanism 3 has a Y-axis motor 31 as a power source. Rotation of the Y-axis motor 31 is converted to reciprocating motion of a Y-axis sliding body 35 connected to a timing belt 34 through a pulley mechanism composed of pulleys 32, 33 and the timing belt 34. The holder 4 is driven in the Y-axis direction by the reciprocating motion of the Y-axis sliding body 35.
As shown in
As shown in
As shown in
An inductive proximity sensor is used as the X-axis sensor 5 and the Y-axis sensor 6, which causes a detection coil to generate a magnetic field and detects change in impedance by approaching of a detection object.
As shown in
In addition, the X-axis motor 21 and the Y-axis motor 31 respectively are stepping motors, and a drive amount of each motor can be accurately measured by counting the number of drive pulses supplied from the controller 7 using an internal counter.
Also, the illuminating device 13 is controlled at a lighting control circuit 72, and necessary electric power is supplied to the lighting control circuit 72 from the power circuit 73.
Moreover, command signals sent by an operation of a user on a personal computer 71 are supplied to the image pickup device 16, the lighting control circuit 72, and the controller 7, by which a control is performed on capturing an image of the observation object by the image pickup device 16, illuminating the observation object by the illuminating device 13, and driving the X-axis motor 21 and the Y-axis motor 31. Power can be supplied to the image pickup device 16 from the personal computer 71 or from the power circuit 73.
As shown in
As shown in
When the holder 4 moves a predetermined distance in the CW direction from the origin position as shown in
As shown in
In the observation device according to the present invention, after the power is activated, as shown in
At this point, the holder 4 is moved in the Y-axis direction and an image of the test target 8 is captured as shown in
Next, as shown in
After the X-axis shield plate 51 starts moving, the captured image 8b of the test target 8 is shifted from the captured image 8a of the test target 8 before the X-axis shield plate 51 started moving, and thus, as shown in
Thus, the image of the test target 8 is captured continuously starting immediately after the X-axis motor 21 is reversed and the difference between the captured image 8a before the start of moving and the captured image 8b thereafter is computed. At a point that the difference image 8c having the dimension greater than or equal to a certain value is obtained, it is determined that the backlash has been eliminated and a count value α is taken in, which is obtained by subtracting 1 from the count value of the internal counter at that time. Therefore, the count value α represents the amount of the backlash of the X-axis drive mechanism 2.
Thereafter, as shown in
Therefore, by subtracting the count value α from the count value γ, the difference β of the count values represents the amount of the position detection error of the X-axis sensor 5.
With respect to the Y-axis drive mechanism 3, the count value α corresponding to the backlash of the Y-axis drive mechanism 3 and the count value difference β corresponding to the position detection error of the Y-axis sensor 6 also can be derived through a similar process.
After the system is activated, first, at step S1, a return to origin operation is performed with respect to the X-axis drive mechanism. At step S2, a return to origin operation is performed with respect to the Y-axis drive mechanism.
At each of the return to origin operations, as shown in
If the sensor is in the ON state, the process advances to step S22, and after the drive mechanism is driven in the CW direction, at step S23, the output state of the sensor is checked and driving in the CW direction is maintained until the sensor is turned off.
When the sensor thus is turned off, at step S24, the drive mechanism is stopped, and then, at step S25, the drive mechanism is driven in the CCW direction.
Thereafter, at step S26, the output state of the sensor is checked, and at a point that the sensor is turned on, the process advances to step S27 and the drive mechanism is stopped.
As a result, the X-axis drive mechanism and the Y-axis drive mechanism respectively return to the origin position (see
After the return to origin operations of the X-axis drive mechanism and the Y-axis drive mechanism are completed, at step S3 of
Thereafter, at step S4 of
Subsequently, at step S5, with respect to the X-axis drive mechanism and the Y-axis drive mechanism, the internal counters are reset to zero, which count the number of drive pulses of the respective motors.
The process of steps S1 to S5 may be performed in succession with respect to the X-axis and the Y-axis or it maybe performed in parallel. Next, at step S6, an image of the test target is captured as a reference image and the result is stored in a memory at step S7.
Thereafter, at step S8, the feed amount error caused by a backlash of the X-axis drive mechanism is computed. In computing the feed amount error, as shown in
At step S35, a differential processing is performed with respect to the reference image stored in the memory and the image captured at step S34, and it is determined whether or not change exists between the two images. If it is determined that no change exists, it is considered that the driving of the 1 pulse immediately before was lost motion (the backlash is occurring), and the process returns to step S32 to repeat the process from S32 to S35.
On the other hand, if it is determined that change exists at step S35, it is considered that the backlash has been cleared up, and at step S36, the count value α is stored in the memory as the feed amount error, which is a value that 1 is subtracted from the count value at that time.
Thereafter, at step S9 of
If the sensor is turned off at step S43, it is considered that the position detection error of the sensor is resolved, and at step S44, feed amount error information (the count value α) is read out from the memory, and at step S45, the number of pulses representing the position detection error amount (position detection error information) β is computed by subtracting the count value α representing the feed amount error from the count value γ, which is a value that 1 is subtracted from the current count value of the internal counter, and at step S46, the result is stored in the memory.
Thereafter, at step S10 of
Thereafter, at step S13, a feed amount error caused by a backlash of the Y-axis drive mechanism is computed (see
The return to origin operation also can be performed by the process as shown in
Thereafter, at step S53, the output state of the sensor is checked and the driving at high speed in the CCW direction is maintained until the sensor is turned to the ON state.
When the sensor thus is turned on, at step S54, the drive mechanism is stopped, and then at step S55, the drive mechanism is driven at low speed in the CW direction.
Moreover, at step S56, the output state of the sensor is checked and the driving at low speed in the CW direction is maintained until the sensor is turned off.
When the sensor thus is turned off, at step S57, the drive mechanism is stopped, and then at step S58, the drive mechanism is driven at low speed in the CCW direction.
On the other hand, when the sensor is in the ON state at step S51, the process advances to step S61 at which the drive mechanism is driven at high speed in the CW direction, and then at step S62, the output state of the sensor is checked and the driving at high speed in the CW direction is maintained until the sensor is turned off.
When the sensor thus is turned off, at step S63, the drive mechanism is stopped, and then at step S58, the drive mechanism is driven at low speed in the CCW direction.
Thereafter, at step S59, the output state of the sensor is checked, and at a point that it is turned to the ON state, the process advances to step S60 and the drive mechanism is stopped.
Thus, the X-axis drive mechanism and the Y-axis drive mechanism rapidly return to the origin position respectively. At this time, even if each shield plate overshoots the ON position because of increased inertia force due to the high-speed driving of the X-axis drive mechanism and the Y-axis drive mechanism, thereafter each shield plate returns to the ON position of the sensor by the low-speed driving.
At the return to origin operation of
Thereafter, at step S73, the output state of the sensor is checked and the driving at high speed in the CCW direction is maintained until the sensor is turned to the ON state. When the sensor thus is turned on, at step S74, the drive mechanism is stopped, and then at step S75, the drive mechanism is driven at low speed in the CW direction.
Moreover, at step S76, the output state of the sensor is checked, and the driving at low speed in the CW direction is maintained until the sensor is turned off. When the sensor thus is turned off, at step S77, the drive mechanism is stopped, and then at step S78, the drive mechanism is driven at low speed in the CCW direction.
On the other hand, if the sensor is in the ON state at step S71, the process advances to step S91, and the drive mechanism is driven at high speed in the CW direction, and then at step S92, the output state of the sensor is checked and the driving at high speed in the CW direction is maintained until the sensor is turned off.
When the sensor thus is turned off, at step S93, the drive mechanism is stopped, and then at step S78, the drive mechanism is driven at low speed in the CCW direction. Thereafter, at step S79, the output state of the sensor is checked, and when it is turned to the ON state, the process advances to step S80 at which the drive mechanism is stopped. Thereafter, at step S81, the drive mechanism is driven at low speed in the CW direction, and then at step S82, the output state of the sensor is checked, and at a point when the sensor is turned off, the process advances to step S83 and the drive mechanism is stopped. As such, with the position that the sensor is turned off being the origin, a return to origin operation for returning to that origin is achieved.
Next, since the Y-axis sensor 6 is in the ON state as shown in
At this time, since the last rotation direction of the X-axis motor 21 of the X-axis drive mechanism 2 is CCW, lost motion is generated by driving the X-axis motor 21 in the CW direction. And in the course of operating the X-axis drive mechanism 2 until the X-axis sensor 5 is turned off from the ON state, the difference between the reference image and the captured image is monitored, and when a difference image having a dimension greater than or equal to a certain value is obtained, the count value α of the internal counter is taken in. Thereafter, as shown in
Next, as shown in
From the state that the feed amount error computation is completed with respect to the Y-axis as shown in
Lastly, as shown in
In addition, the X-axis drive mechanism 2 also may be returned to the origin at this time.
As such, after computing the feed amount errors (the numbers of drive pulses α) with respect to the X-axis drive mechanism and the Y-axis drive mechanism, and the position detection errors (the numbers of drive pulses β) with respect to the X-axis sensor and the Y-axis sensor, a proper positioning control of the observation device is performed by utilizing the computation results.
The feed amount errors with respect to the X-axis drive mechanism and the Y-axis drive mechanism are reflected in the positioning control as follows.
For example, as shown in
Thereafter, when moving the observation position from point B(bx, by) to point C (cx, cy), the drive amount (the number of drive pulses) of the X-axis motor is (bx−cx+αx) by taking into consideration the feed amount error αx of the X-axis drive mechanism, and the drive amount (the number of drive pulses) of the Y-axis motor is (cy−by+αy) by taking into consideration the feed amount error αy of the Y-axis drive mechanism.
In addition, the X-axis sensor and the Y-axis sensor are associated with a gap (response difference) in the order of 10% of the detected distance between a switching position from the OFF state to the ON state upon approaching of the shield plate (a detected distance at the time of turning to the ON state) and a switching position from the ON state to the OFF state (a detected distance at the time of turning to the OFF state). The size of such gap varies depending on the temperature and the distance between the sensors and the shield plate. Because of this response difference, the position detection error is created.
In the observation device, when performing a cell observation with respect to a specific position of the cell cultured within an incubator, such a specific position is registered as coordinate information, and when manipulating on the cell, a moving operation is performed which moves the observation position to the registered coordinate position. However, while the incubation temperature within the incubator is maintained in 37° C., the cell manipulation for example is performed at room temperature, and thus, errors may occur in the return to origin operations using the X-axis sensor and the Y-axis sensor due to such temperature difference. As a result, the observation position may not be moved to the same position that is registered at the time of coordinate registration.
Thus, the position detection errors of the X-axis sensor 5 and the Y-axis sensor 6 are reflected in the positioning control as follows.
In the observation device according to the invention, a relationship between the temperature and the detected distance as shown in
The difference between the detected distance under the present usage environment and the detected distance at the time of coordinate registration is set as dp, and by operating the coordinate difference dp to the registration coordinate value (i.e. adding in the illustrated example), the origin position that is the same as the origin position at the time of coordinate registration can be duplicated. Thus, it becomes possible to move the observation position at the time of cell manipulation to the same position as that at the time of coordinate registration.
As described above, according to the observation device of the present invention, it is possible to acquire each feed amount error of the X-axis drive mechanism and of the Y-axis drive mechanism, and each position detection error of the X-axis origin sensor and of the Y-axis origin sensor individually. As a result, in a positioning control with respect to the X-axis drive mechanism and the Y-axis drive mechanism, a control operation can be performed by taking into consideration the feed amount errors of both drive mechanisms 2 and 3 and the position detection errors of the both sensors 2 and 3. Thus, it becomes possible to prevent deterioration of positioning accuracy due to the change over time and change in environmental conditions.
In addition, highly accurate positioning can be achieved with an inexpensive mechanism system for the X-axis drive mechanism 2 and the Y-axis drive mechanism 3, without adopting an expensive ball screw mechanism that does not generate backlashes.
The present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the present invention being indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims therefore are intended to be embraced therein.
For example, instead of the image pickup device 16 for capturing an image of the test target 8, various other optical detection means can be adopted which can accurately detect a point of time that the reciprocating body shifts from the resting state to the moving state without causing hysteresis, such as a displacement meter that captures a speckle pattern with a CCD camera by irradiating laser beam to the surface of the reciprocating body.
Also, the test target 8 may be formed by deposition or paint application on a glass plate if the optical system of the observation device is a transmission type. However, if the optical system of the observation device is an incident-light type, it can be formed in pattern printing such as in black and white that at least causes a different in contrast.
According to the conveyance control device, a control method of the conveyance device, and an observation device of the present invention, it is possible to acquire the feed amount error of the drive mechanism and the position detection error of the origin sensor individually, and as a result, in a positioning control of the reciprocating body, a control operation can be performed by individually taking into consideration the feed amount error and the position detection error.
Number | Date | Country | Kind |
---|---|---|---|
2008250192 | Sep 2008 | JP | national |