Cover of seal cap for reaction chamber for semiconductor manufacturing

Information

  • Patent Grant
  • D872037
  • Patent Number
    D872,037
  • Date Filed
    Tuesday, January 30, 2018
    6 years ago
  • Date Issued
    Tuesday, January 7, 2020
    4 years ago
  • US Classifications
    Field of Search
    • US
    • D13 101
    • D13 118
    • D13 122
    • D13 133
    • D13 156
    • D13 162
    • D13 182
    • D13 184
    • D13 199
    • CPC
    • H01L23/02
    • H01L23/04
    • H01L23/06
    • H01L23/10
    • H01L23/12
    • H01L23/13
    • H01L23/14
    • H01L23/42
    • H01L21/50
    • H01L21/563
    • H01L21/4817
    • H01R13/20
    • H01R13/56
    • H01R35/00
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, bottom and right side perspective view of a cover of seal cap for reaction chamber for semiconductor manufacturing showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a left side elevational view thereof;



FIG. 6 is a top plan view thereof; and



FIG. 7 is a bottom plan view thereof.



FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 6; and,



FIG. 9 is a cross-sectional view take along line 9-9 in FIG. 7.


Claims
  • We claim the ornamental design for a cover of seal cap for reaction chamber for semiconductor manufacturing, as shown (and described).
Priority Claims (1)
Number Date Country Kind
2017-017193 Aug 2017 JP national
US Referenced Citations (7)
Number Name Date Kind
D404370 Kimura Jan 1999 S
D560284 Nagakubo Jan 2008 S
D616390 Sato May 2010 S
D717746 Lau Nov 2014 S
D732480 Makinen Jun 2015 S
D813181 Okajima Mar 2018 S
20140302700 Makinen Oct 2014 A1
Foreign Referenced Citations (1)
Number Date Country
1579504 Jun 2017 JP
Non-Patent Literature Citations (1)
Entry
U.S. Appl. No. 29/591,907, filed Jan. 25, 2017 by Applicant Hitachi Kokusai Electric Inc., Inventors: Yusaku Okajima, Shuhei Saido and Mika Urushihara.