Cover of seal cap for reaction chamber of semiconductor

Information

  • Patent Grant
  • D855027
  • Patent Number
    D855,027
  • Date Filed
    Wednesday, May 30, 2018
    6 years ago
  • Date Issued
    Tuesday, July 30, 2019
    5 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 184
    • D13 162
    • D10 49
    • D10 50
    • CPC
    • C23C16/455
    • C23C16/45502
    • C23C16/45517
    • C23C16/4582
    • C23C16/4583
    • C23C16/4584
    • C23C16/4585
    • C23C16/4401
    • C23C16/4402
    • C23C16/4409
    • H01L21/50
    • H01L21/4817
    • H01L21/4871
    • H01L23/02
    • H01L23/04
    • H01L23/12
    • H01L23/13
    • H01L23/14
    • H05K3/30
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top, left side perspective view of a cover of seal cap for reaction chamber of semiconductor showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a left side elevational view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof; and,



FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 6.


Claims
  • The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
Priority Claims (1)
Number Date Country Kind
2018-001070 Jan 2018 JP national
US Referenced Citations (11)
Number Name Date Kind
5789810 Gross Aug 1998 A
D642547 Untersee Aug 2011 S
D720309 Kaneko Dec 2014 S
D742339 Takagi Nov 2015 S
D748594 Takagi Feb 2016 S
D796458 Jang Sep 2017 S
D797067 Zhang Sep 2017 S
D813181 Okajima et al. Mar 2018 S
D840981 Forster Feb 2019 S
20170221790 Tomie Aug 2017 A1
20170229360 Kothandapani Aug 2017 A1
Foreign Referenced Citations (1)
Number Date Country
1598442 Feb 2018 JP