Cover of seal cap for reaction chamber of semiconductor

Information

  • Patent Grant
  • D813181
  • Patent Number
    D813,181
  • Date Filed
    Wednesday, January 25, 2017
    7 years ago
  • Date Issued
    Tuesday, March 20, 2018
    6 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 184
    • D13 162
    • D10 49
    • D10 50
    • CPC
    • C23C16/455
    • C23C16/45502
    • C23C16/45517
    • C23C16/4582
    • C23C16/4583
    • C23C16/4584
    • C23C16/4585
    • C23C16/4401
    • C23C16/4402
    • C23C16/4409
    • H01L21/50
    • H01L21/4817
    • H01L21/4871
    • H01L23/02
    • H01L23/04
    • H01L23/12
    • H01L23/13
    • H01L23/14
    • H05K3/30
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top and right side perspective view of a cover of seal cap for reaction chamber of semiconductor showing my new design;



FIG. 2 is a top plan view thereof;



FIG. 3 is a bottom plan view thereof;



FIG. 4 is a front elevational view thereof;



FIG. 5 is a rear elevational view thereof;



FIG. 6 is a right side elevational view thereof;



FIG. 7 is a left side elevational view; and,



FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 4.


Claims
  • The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
Priority Claims (1)
Number Date Country Kind
015868/2016 Jul 2016 JP national
US Referenced Citations (14)
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D748594 Takagi Feb 2016 S
D796458 Jang Sep 2017 S
D797067 Zhang Sep 2017 S
20110018160 Ziberna Jan 2011 A1
20160157359 Arvelo Jun 2016 A1
20170170030 Iruvanti Jun 2017 A1
20170221790 Tomie Aug 2017 A1
20170229360 Kothandapani Aug 2017 A1